Ulvac AxTRAN ISX2 User manual

No.SK00-7200-EI-003-08
AxTRAN
MODEL ISX2
EXTREME-HIGH VACUUM GAUGE
INSTRUCTION MANUAL
This manual is for ultra-high vacuum
gauges of serial
numbers 00100 and higher.
Read this manual carefully before using this gauge and keep
it at hand for immediate reference.
When used by Torr, the following conversion equations shall be used.
1[Torr]=1.3332×102[Pa]
1[Pa]=7.5006×10-3[Torr]
Components Division,
ULVAC, Inc.
2500 Hagisono, Chigasaki City, Kanagawa Prefecture, Japan 253-8543
http://www.ulvac.co.jp/

I

II
Before Use of This Gauge
Thank you for purchasing this ULVAC product.
Upon receipt of the product, verify that is the correct model ordered and that it has not been damaged during
transport.
Read this instruction manual before installing, operating, inspecting, or
maintaining the product and fully understand the safety precautions,
specifications and operating procedures regarding the product.
The copyright of this instruction manual is held by ULVAC, Inc.
You are prohibited from copying any portion of this instruction manual without
the consent of ULVAC Inc.
You are also prohibited from disclosing or transferring this instruction manual to
third parties without the express written consent of ULVAC Inc.
The contents described in this instruction manual are subject to change without
prior notice because of changes in specifications or because of product
improvements.
Safety Denotations
Safety symbols are used throughout this instruction manual to call the
operator's attention to safety. The terminology used in safety symbols is
classified below.
Indicate status of urgency of danger when failure to comply with DANGER
results in serious personal injury or death
The work ignoring this warning will lead to serious damage to human life or
factory facility (including this equipment) at a high probability.
Indicate status of danger when failure to comply with WARNING results in
serious worker’s injury or death.
The work ignoring this warning will cause possibility leading to serious
damage to human life or factory facility (including this equipment)
Indicate status of danger when failure to comply with WARNING results in
minor injury or moderate damage.
The work ignoring this warning will cause possibility leading to minor damage
to worker or breakage to equipment or necessary to adjust.
Direct hazard is not existed, describe the necessity to know
from the viewpoint of worker’s safety or correct and safe operation of
equipment
✔Note

III
Safety Precautions
For safe use of this gauge, be sure to read this manual and the following safety precautions.
Turn off power.
If the gauge is damaged, immediately turn off the power. Otherwise, fire or
electric shock can result. For safety reasons, contact your local ULVAC
representative or ULVAC, Inc.
Turn off power.
Ifthe gauge gets unusually hot or gives offsmoke or unusual smell, immediately
turn off the power. Otherwise, fire can result. For safety reasons, contact
your local ULVAC representative or ULVAC, Inc.
Turn off power.
Whenever you touch or may touch the sensor connector on the front panel, turn
off the power to the gauge. A grid voltage of 100 VDC is applied to the sensor
connector. If you touch it when the filament is turned on, you will get electric
shock.
Beware of high temperature.
Do not touch the sensor head surface, which is very hot during and immediately
after operation. If you touch it, you may get burned.
Don′t disassemble.
Do not disassemble the vacuum gauge.
Don′t modify.
Do not modify the vacuum gauge. If it is modified, its action is not warranted.
Also fire or electric shock can result.
Be cautious with operating environment.
Do not connect the sensor head to an environment where pressure exceeds
atmospheric pressure. If the pressure in the sensor head exceeds atmospheric
pressure, the sensor head will be damaged and the sensor head will pop out from
the connectio
n, causing damage/injury to human body and others. In that
event, provide an isolation valve or other so that the pressure in the sensor head
does not exceed atmospheric pressure.
Check line voltage
Before turning on the power, make sure the operating voltage and supply voltage
polarities are in agreement. If the gauge is connected to an incorrect power
source, this gauge and equipment connected to it may be damaged or fire can
result.
Ensure ventilation.
Do not plug the port for the fan and air vents. If it is plugged, heat will be
contained inside, resulting in damage. The vacuum gauge will not indicate a
normal value either.
Be cautious with operating environment.
Do not use the gauge where it may splashed with water. If it is wetted, trouble,
earth leakage or fire can result.
Keep out foreign matter.
If metal fragments or combustible material are admitted into the gauge through
an opening in the gauge, remove them. Also keep clear the connection
terminals on the front and top of the gauge. Otherwise, the vacuum gauge may
be damaged.
Beware of impact.
Do give an impact to the sensor head.

IV
Check connection
See to it that the cable does not come into contact with other conductive part.
Disposal
When discarding the vacuum gauge, comply with your local regulations.
Customer shall be responsible for the cost relating to disinstallation.
Be cautious with operating conditions
Use this gauge within the specified environment range.
Caution in repacking
When shipping the gauge, rep
ack it in the same way as on delivery. It is
shipped bare, it may be damaged.
Maintenance
Aluminum electrolytic capacitor and cooling fan are used for the electric circuit
in the sensor unit. Generally, the life expectancy of the aluminum electrolytic
capacity is limited and the higher the surrounding temperature, the shorter the
life. It is recommended to replace the aluminum electrolytic capacitor , cooling
fan
once every three years or at the time or repair or overhaul to prevent
components from being damaged.

V
Revision History
Date
No.
Reason
Jun.6,2007
01
Correction of errors
Jan.20,2008
02
Optional board details added
Nov.16,2009
03
Pressure unit conversion appendix
Pressure expression appendix
Supplementary explanation of current unit
delete
Nov.13,2013
04
・
Sensor material
・
Standard Accessories
・
WARRANTY
・EC DECLARATION OF CONFORTMITY
・
CERTIFICATE OF DECONTAMINATION
added
Oct.28,2016
05
Baking temperature added
Initial setting、Degassing Time、Recorder Selection、Offset
Adjustment、Interval Setting is change
Communication system Correction of errors
Communication cable PIN No Correction of errors
Reads action status
’
RS
’
added
Dec.2,2019
06
Grid voltage Correction of errors

Contents
Page
Before Use of This Gauge....................................................................................................................II
Safety Denotations ...............................................................................................................................II
Safety Precautions.............................................................................................................................. III
1. FEATURES OF ISX2.................................................................................................................. 1
2. SPECIFICATIONS AND COMPONENTS ................................................................................ 2
2.1. Standard Specifications ..................................................................................................... 2
2.2. Performance....................................................................................................................... 3
2.3. Utilities.............................................................................................................................. 3
2.4. Standard Accessories......................................................................................................... 3
2.5. Options .............................................................................................................................. 3
3. NOMENCLATURE AND FUNCTIONS OF COMPONENTS.................................................. 4
3.1. Operation Switch............................................................................................................... 4
3.2. Front Panel Lamps............................................................................................................. 5
3.3. Front Panel Measurement Value Display/Set Value Indicator.......................................... 6
3.4. Rear Panel.......................................................................................................................... 7
3.5. Accessory Connector......................................................................................................... 8
3.6. View when the Top Panel in Controller is opened............................................................ 9
3.7. View when the Bottom Panel in Controller is opened..................................................... 10
4. INSTALLATION....................................................................................................................... 11
4.1. Preliminary Operation ..................................................................................................... 11
4.2. Installation....................................................................................................................... 11
4.2.1. Installing the controller ................................................................................... 11
4.2.2. Installing the sensor head ................................................................................ 11
4.2.3. Connecting the controller and sensor head...................................................... 11
5. FLOW OF PROGRAM RUN .................................................................................................... 13
6. STARTING UP GAUGE (SUPPLY OF POWER).................................................................... 14
7. FRONT PANEL OPERATION ................................................................................................. 15
7.1. Filament ON/OFF............................................................................................................ 15
7.1.1. When pressure protection is activated............................................................. 16
7.2. Initialization..................................................................................................................... 17
7.3. Offset............................................................................................................................... 17
7.4. Degassing ON/OFF ......................................................................................................... 18
8. INITIAL SETTING.................................................................................................................... 19
8.1. Setting of Set Point 1 →See page 30.............................................................................. 20
8.2. Setting of Set point 2 →See page 30.............................................................................. 21
8.3. Sensitivity Factor Setting ................................................................................................ 22
8.4. Specific Sensitivity Factor Function Setting ................................................................... 23
8.5. Degassing Time Setting................................................................................................... 24
8.6. Filament No. Selection.................................................................................................... 25
8.7. Recorder Selection........................................................................................................... 25
8.8. Filter Setting.................................................................................................................... 26
8.9. Offset Adjustment Interval Setting.................................................................................. 27
8.10. Setting of Baud Rate........................................................................................................ 28
9. FUNCTIONS ............................................................................................................................. 29
9.1. Setting of Sensitivity Factor ............................................................................................ 29
9.1.1. Sensitivity factor.............................................................................................. 29
9.1.2. Setting of sensitivity factor.............................................................................. 29
9.1.3. Details of specific sensitivity........................................................................... 29
9.2. Set Point .......................................................................................................................... 30
9.2.1. What is the set point? ...................................................................................... 30
9.2.2. Setting of set point........................................................................................... 30
9.2.3. Internal processing .......................................................................................... 30
9.2.4. Set point activating conditions ........................................................................ 30
9.3. Degassing ........................................................................................................................ 31

9.3.1. What is degassing?.......................................................................................... 31
9.3.2. Setting the degassing time............................................................................... 31
9.3.3. Degassing operation ........................................................................................ 31
9.4. Filament Change.............................................................................................................. 32
9.4.1. Cautions in operation....................................................................................... 32
9.5. Changing over Recorder Output...................................................................................... 33
9.5.1. Setting of recorder mode ................................................................................. 33
9.5.2. Measurement value output in each status........................................................ 33
9.5.3. LIN output....................................................................................................... 33
9.5.4. LOG output ..................................................................................................... 35
9.5.5. Resolution and output period........................................................................... 36
10. EXTERNAL INPUTS/OUTPUTS.................................................................................. 37
10.1. Set Point Output .............................................................................................................. 37
10.2. Option Board ................................................................................................................... 38
10.3. EXT-I/O Connector......................................................................................................... 39
10.4. External Digital Output ................................................................................................... 40
10.5. External Control Input..................................................................................................... 43
10.6. Method of External Control............................................................................................. 45
11. HOW TO USE COMMUNICATION (RS-232C) .......................................................... 46
11.1. Communication Specifications........................................................................................ 46
11.1.1. Key specifications ........................................................................................... 46
11.1.2. Baud rate setting.............................................................................................. 46
11.1.3. Communication cable/connector..................................................................... 46
11.2. List of Commands ........................................................................................................... 47
11.3. Explanation of Command Action.................................................................................... 48
11.3.1. Changing over remote/local control ................................................................ 48
11.3.2. Reading the emission valid signal................................................................... 48
11.3.3. Control of filament.......................................................................................... 48
11.3.4. Control of degassing........................................................................................ 48
11.3.5. Reading the gauge status ................................................................................. 49
Setting sensitivity factor.................................................................................. 49
11.3.7. Setting specific sensitivity factor..................................................................... 49
11.3.8. Setting and reading the setpoint ...................................................................... 49
11.3.9. Reading the measured pressure value.............................................................. 50
11.3.10. Reading the external protection status............................................................. 50
11.3.11. Setting of filter................................................................................................. 50
11.3.12. Control of offset .............................................................................................. 50
11.3.13. Reading the controller status ........................................................................... 50
11.3.14. Error resetting.................................................................................................. 51
11.3.15. Setting the recorder output .............................................................................. 51
11.4. Cautions in Operation...................................................................................................... 51
12. TROUBLESHOOTING .................................................................................................. 52
12.1. Cause and measures where emission current doesn’t flow.............................................. 59
12.2. About the malfunction indication.................................................................................... 59
13. APPENDIX ..................................................................................................................... 60
13.1. Principles of Operation.................................................................................................... 60
13.1.1. Basic structure of ion gauge ............................................................................ 60
13.1.2. Problems of ion gauge..................................................................................... 61
13.1.3. Axial symmetric transmission (AT) gauge...................................................... 62
13.1.4. Micro current measurement............................................................................. 63
13.2. Types of Measurable Gas and Specific Sensitivity ......................................................... 64
14. APPENDIX: TEST MODE............................................................................................. 66
15. WARRANTY.................................................................................................................. 67
16. EC DECLARATION OF CONFORTMITY................................................................... 68
17. China RoHS Declaration ................................................................................................. 69
18. CERTIFICATE OF DECONTAMINATION ................................................................. 70
19. RELATED DRAWINGS ................................................................................................ 71

Attached Illustrations
Fig. 3-1 Operation switch panel ...........................................................................................................4
Fig. 3-2 Front panel lamps ...................................................................................................................5
Fig. 3-3 Front panel measurement value display/set value indicator ...................................................6
Fig. 3-4 Rear panel...............................................................................................................................7
Fig. 3-5 Set point, recorder output connector pin assignment..............................................................8
Fig. 3-6 View when top panel in controller is opened..........................................................................9
Fig. 3-7 View when the bottom panel in the controller is opened......................................................10
Fig. 4-1 Connection of controller (ISX2) and sensor head (X-11).....................................................12
Table 8-1 Factory Set Values .............................................................................................................19
Table 9-1 Measurement Value Output Status.....................................................................................33
Fig. 9-1 Recorder output graph (linear)..............................................................................................34
Table 9-2 Measured Pressure Value Table.........................................................................................35
Table 9-3 Measured Value Outputs....................................................................................................36
Fig. 10-1 Set point internal circuit......................................................................................................37
Input/output connector pin assignment .................................................................................................39
Fig. 10-2 Digital output internal circuit..............................................................................................40
Fig. 10-3 Data valid signal (strobe signal) actuating chart.................................................................41
Fig. 10-4 Data rewriting time chart....................................................................................................41
Fig. 10-5 Data rewriting detailed time chart-2...................................................................................41
Fig. 10-6 Output transistor switching time.........................................................................................42
Fig. 10-7 External control using internal power supply .....................................................................43
Fig. 10-8 External control using external power supply ....................................................................44
Fig. 10-9 Method of external control .................................................................................................45
Table 13-1 Specific Sensitivity of Ion Gauge for Each Gas with Respect to Nitrogen and Relative
Ionization Cross-Sectional Area....................................................................................................65
Fig. 18-1 ISX2-compatible sensor heads............................................................................................71
Fig. 18-2 Sensor head electrode location ...........................................................................................72
Fig. 18-3 Dimensional drawing..........................................................................................................73
Fig. 18-4 Vacuum gauge mounting panel-cut dimensional drawing..................................................74
Fig. 18-5 Sensor head cable connection diagram...............................................................................75

- 1 -
1. FEATURES OF ISX2
•This gauge is a hot cathode type ionization vacuum gauge with a Bessel box type energy filter
arranged between the ion source and the ion collector. It provides a measurement resolution of 0.5
×10-10 Pa by reducing the residual current due to soft X-rays and electron stimulated desorption
(ESD) ions.
•The unit consists of a sensor head, cable and measuring unit.
•The sensor head can be used effectively in baking.
•The measurable pressure range is 9.99 ×10-3 to 0.5 ×10-10 Pa.
•The communication function is optional.
•The gauge has two independent pressure contacts.