Ulvac HELIOT 301 User manual

No.SK00-7910-BI-011-00
HELIOT 301
HELIUM LEAK DETECTOR
INSTRUCTION MANUAL
Compatible with Ver. 2000 Software
This manual is for instruments serial Nos. 3000 and higher.
Read this manual before use and
keep it in your file for future reference.
Components Division
ULVAC , Inc.
2500, Hagisono, Chigasaki-shi,
Kanagawa-ken, 253-8543 Japan
Phone No.: 0467-83-1151
http://www.ulvac.co.jp/

Prior to Use
Upon receipt of this detector, make sure that it is the correct model you ordered and that it is not
damaged in transit.
!
WARNING Read this manual before installation, operation, inspection or maintenance
and fully understand safety cautions, specifications and operating
procedure of this instrument.
!
CAUTION No part of this manual may be reproduced for use by a thirty part without
written consent by ULVAC.
Denotations for Safety
!
WARNING The following denotations are used throughout this manual and labeled on
the instrument to call operator's attention to safety. The denotations are
classified as follows.
!
DANGER Failure to comply with DANGER involves possibility of impending loss o
f
life or serious personal injury.
!
WARNING Failure to comply with WARNING involves the possibility of loss of life
or serious personal injury.
!
CAUTION Failure of comply with CAUTION can lead to a medium degree o
f
personal injury or serious damage to the equipment.

Safety Cautions
!
CAUTION
Turn OFF power
Before removing the external panel for inspection or part replacement, shut
off the primary power on the switchboard and disconnect the power cable
from HELIOT.
High voltage is present in HELIOT and can cause danger to human body
by electric shock and damage the equipment.
!
CAUTION
Complete stop
The compound molecular pump rotates at a high speed for about five
minutes after it is stopped.
Before inspection or part replacement, wait for more than five minutes
after the pump has stopped.
Otherwise, you may be injured or the equipment may be damaged.
!
CAUTION
Analyzer tube at high temperature
The area around the analyzer tube and ion source is very hot immediately
after it is deactivated. Before inspection or part replacement, wait for
more than five minutes after deactivating it and carry out work carefully.
Otherwise, you may get burned or the equipment may be damaged.
!
CAUTION
Solenoid valve at high temperature
The coil section of the solenoid valve is very hot immediately after it is
deactivated.
Before inspection or part replacement, wait for more than five minutes
after deactivating it and carry out work carefully.
Otherwise, you may get burned or the equipment may be damaged.
!
CAUTION
Rotary pump at high temperature
The rotary pump is very hot immediately after it is stopped.
Before inspection or part replacement, wait for more than five minutes
after deactivating it and carry out work carefully.
Otherwise, you may get burned or the equipment may be damaged.
!
CAUTION Turn OFF power
Before installing the instrument, turn off the main power switch and
disconnect the power plug.
!
CAUTION Turn OFF power
Ground the instrument to prevent earth leakage.
!
CAUTION
Inspection and repair
Before inspection or repair, wait for more than five minutes after stopping
the instrument.
Otherwise, you may be injured or the equipment may be damaged.
!
CAUTION
Hold horizontal
Do not tilt the instrument more than 30 degrees when unpacking or when
moving the instrument, and hold it in a horizontal position when installing
it. Otherwise, oil leak or damage to the equipment may result.
!
CAUTION
Overhaul
The instrument contains parts that are subject to aging, including
consumables (O-rings and drive parts).
Be sure to conduct overhaul to maintain performance once a year.

!
CAUTION Weight on piping
When connecting piping, test object, etc. to the test port, keep the test port
free from weight.
!
CAUTION
Air vent
A blast fan is provided in the rear panel to cool the instrument interior, and
air vents are provided in the right and left side panels.
Provide a space more than 200 mm from the wall to all panels. Plugging
the air vents will increase the inside temperature and may damage the
equipment.
!
CAUTION Ambient temperature
Operate the instrument at an ambient temperature of 10°C to 40°C.
!
CAUTION
Dust contamination
Before installing the blank flange, make sure that the flange seat surface
and O-ring are free form scars and dust.
Leak may lead to malfunction.
!
CAUTION
Use of blank flange
Use a blank flange when starting up the instrument.
If the instrument is started with the piping and test object connected, it may
not operate properly.
!
CAUTION Line voltage
The line voltage is to be 100 VAC ± 10% and the maximum rated current is 10
A. Check it before installation.
!
CAUTION No vibration
Keep the instrument free from vibration or impact from surrounding
equipment. The instrument may be damaged.
!
CAUTION Electrical connection
Make electrical wiring after completing installation.
!
CAUTION
Setting timing
Before changing the setting of the DIP switch, turn off the main power. I
f
the instrument is operated with the main power turned on, malfunction and
damage to the equipment can result.
!
CAUTION
DIP switch
DIP switch No. 2, No. 3, No. 4 and No. 6 are used for system setting. Do
not change them.
Malfunction and damage to the equipment can result.
!
CAUTION
Setting timing
Before changing the setting of the SEN. switch, turn OFF the main power
(compound molecular pump at stop). If the setting is changed
immediately after end of stop mode (compound molecular pump is still
rotating) and the instrument is restarted, malfunction may result.
!
CAUTION
Input switch
To press the membrane switches on the controller,
use your finger pad. Pressing it with nail or a sharp object can damage
the equipment.
!
CAUTION
Sensitivity calibration
Before making sensitivity calibration, attach a blank flange to the test port.
If sensitivity calibration is made with piping of high capacity connected to
the test port, sensitivity error can result.

!
CAUTION
Quick start
Quick start starts the instrument by utilizing the sensitivity data used the
last time, as it is, independently of the current state of HELIOT.
Therefore, the measurement error can be great in some cases.
To ensure test data reliability, it is recommended to start up the instrument
by normal start.
It is to be understood that the reliability of leak test when the instrument is
started by quick start (direct reading of leak rate, etc.) is not warranted.
!
CAUTION
Test port
Check that a blank flange or a test object is securely connected to the test
port.
If test is made without connecting a blank flange or a test object securely,
not only measurement will be adversely affected, but also the life of parts
will be extremely shortened, causing damage to the equipment.
!
CAUTION Shutdown
To shut down the instrument, set up the stop mode in the test mode standby
status for automatic shutdown.
!
CAUTION
During test
When test is going on, do not remove the blank flange or test object from
the test port or vent the test port to atmospheric pressure by other method
than operation of the controller. The equipment can be damaged.
!
CAUTION
Venting the test port
Before venting, do not remove the blank flange or test object from the test
port nor vent the test port to atmospheric pressure by other method than
operation of the controller. The equipment can be damaged.
!
CAUTION
Main power OFF
When stop operation is being performed, the message "Please wait" is
displayed on the LCD. At this time, do not turn OFF the main power.
Then the display changes to "Push START". Turn OFF the main power
after verifying this message is displayed.
!
CAUTION
After shutdown
Do not give vibration or impact to the instrument for about five minutes
after completion of shutdown operation.
The equipment can be damaged.
!
CAUTION Main power OFF
Be sure to turn OFF the main power after completion of shutdown
operation.
!
CAUTION
Error
If error occurs, reset the error mode after verifying the symptom by the
message.
Conduct inspection and repair referring to "Troubleshooting".
!
CAUTION
Check before startup
Check again that all preliminary operations above, including installation,
DIP switch setting, SEN. switch setting and controller setting, etc., have
been properly completed.
If there is any fault or problem, not only the instrument may malfunction,
but also it may be damaged.

!
CAUTION
Don't use grease
HELIOT does not use grease for the piping connections and valves.
Do not use grease when disassembling or reassembling them.
Malfunction of the equipment or failure of parts can result.
!
CAUTION
Remove dust
O-rings are used for piping connections.
Before disassembly and reassembly, remove dust from O-rings. Also
remove sweat and oil with alcohol.
Otherwise, malfunction of equipment or failure of parts can result.
!
CAUTION Reset error mode
If any error occurs, reset the mode after checking the symptom by the
message.
!
CAUTION
Load
Be sure to provide a load between pin 2 through pin 6 used for signal
output and the power source. Verify that the output signal is turned
ON/OFF by the action of the load.
If the load is not provided, the equipment may be damaged.
!
CAUTION
Contact
Be sure to provide a contact or an open collector between pin 10 through
pin 14 used for signal input and ground. Input a signal by the action o
f
the contact.
If the contact is not provided, the equipment can be damaged.
!
CAUTION
Maximum voltage
Voltage applied to the pin of output signal is +5 V to + 55 VDC
(recommended value +24 VDC).
If a voltage out of this range is applied, the equipment can be damaged.
!
CAUTION
Maximum voltage
Voltage applied to the pin 9 of input signal is +5 V to + 55 VDC
(recommended value +24 VDC).
If a voltage out of this range is applied, the equipment can be damaged.
!
CAUTION
No contact of parts in vacuum
Parts in vacuum and parts on the vacuum side have been degreased and are
clean.
Do not touch them by naked hand during disassembly and reassembly.
Equipment performance my be deteriorated.
!
CAUTION One-shot input
One-shot input should be 1 second or so.
If the input time is short, malfunction can result.
!
CAUTION Maximum current
Current applied to the load of output signal is maximum 500 mA. If a
load in excess of 500 mA is connected, the equipment can be damaged.
!
CAUTION
Do not short pin
A voltage of +24 VDC is applied to the output pin.
Never short the pin to the ground level or short pin and pin. The
equipment may be damaged.
!
CAUTION Printer
If a printer of different specifications is connected, it may not print
properly or malfunction can result.

!
CAUTION Do not short terminals
Do not short the red REC. OUT terminal with black REC. OUT terminals.
If shorted, equipment may be damaged.
!
CAUTION
Gas to be fed
Use dry nitrogen gas (N2). If a different type of gas is fed, the life o
f
parts including consumables will be shortened and the equipment may be
damaged.
!
CAUTION Gas feeding pressure
Feed gas at a pressure below 0.02 MPaG. If a pressure in excess of this is
applied, malfunction or damage to equipment can result.
!
CAUTION Mounting filter
Use an air filter and oil filter for the gas. If dust or oil mist is admitted
into HELIOT, malfunction or damage to the equipment can result.
!
CAUTION
Maximum current
The current applied to the load of output signal is maximum 50 mA. In
excess of 50 mA, the equipment can be damaged.

Location of WARNING Labels
Meaning of WARNING labels
CAUTION : Read the instruction manual before conducting maintenance.
High voltage is present in HELIOT. If inspection/maintenance is conducted by removing
the panel with the power turned ON, danger to human body like electric shock and damage to
the equipment can result. Be sure to turn OFF the power before inspection/maintenance and
carry out work with the power cable disconnected from the instrument.
High temperature components that can cause danger to human body are also present in
HELIOT. Read this manual before starting inspection/maintenance and fully understand
safety cautions, operating procedure and others before starting work.

Contents Page
1. GENERAL DESCRIPTION & SPECIFICATIONS....................................................1
1-1 Specifications ........................................................................................................1
1-2 Operating Modes...................................................................................................2
1-3 Select Free Flow....................................................................................................3
(1) Overview................................................................................................................3
(2) Features of select free flow system ......................................................................4
2. CONFIGURATION OF HELIOT ................................................................................5
2-1 Overall Configuration...........................................................................................5
(1) Basic unit ..............................................................................................................5
(2) Controller ..............................................................................................................5
(3) Dimensional drawing............................................................................................5
2-2 Pumping System Diagram....................................................................................6
2-3 Names and Functions of Components..................................................................7
2-3-1 Overall configuration ........................................................................................7
2-3-2 Pumping system................................................................................................8
2-3-3 Electrical system ...............................................................................................9
2-3-4 Controller.........................................................................................................10
2-3-5 Connector panel...............................................................................................11
3. INSTALLATION........................................................................................................12
3-1 Preliminary Operation........................................................................................12
3-2 Installation..........................................................................................................12
3-3 Connecting the Test Port....................................................................................13
3-4 Electrical Connection..........................................................................................13
4. OPERATING PROCEDURE AND MODES .............................................................14
4-1 Description of Modes...........................................................................................14
4-2 Reading the LCD Screen ....................................................................................15
4-3 Initial Mode and Settings...................................................................................16
4-3-1 Setting the DIP switch....................................................................................16
(1) Operation for DIP switch setting .......................................................................16
(2) Remote operation................................................................................................17
(3) Double vent .........................................................................................................18
(4) Signal output setting ..........................................................................................18
(5) Clearing RAM .....................................................................................................19
4-3-2 Setting the SEN. switch..................................................................................20
4-3-3 Setting the value of built-in calibration leak.................................................21
4-4 Setting the Controller.........................................................................................22
4-4-1 Setting up the setting mode............................................................................22
(1) To set up the mode before startup......................................................................22
(2) To set up the setting mode when on standby in the test mode.........................22
(3) To set up the calibration leak value input mode...............................................22
4-4-2 List of set items...............................................................................................23
4-4-3 Initial value of each setting and list of input items.......................................24
4-4-4 Inhibition of input of setting...........................................................................25
4-4-5 Methods of entering settings ..........................................................................26
(2) Entering the setting of the flow selection mode ................................................27
(3) Entering the setting of the unit selection mode ................................................27
(4) Entering the setting of setpoint H input mode..................................................28
(5) Entering the setting of setpoint L input mode ..................................................28
(6) Entering the setting of the range selection mode..............................................29
(7) Entering the setting of the bar graph display selection mode..........................29
(8) Entering the setting of the printer print selection mode..................................29
(9) Entering the setting of the filament change mode............................................30
(10) Entering the setting of the calibration leak value input mode.........................31
(11) Entering the setting of the calibration concentration value input mode .........32
(12) Entering the setting of the character display change mode .............................32
(13) Entering the setting of the startup change mode..............................................33
4-5 Startup Mode ......................................................................................................34
4-5-1 Normal start....................................................................................................34

4-5-2 Quick start.......................................................................................................35
4-6 Test Mode............................................................................................................36
4-6-1 Standby............................................................................................................37
4-6-2 Auto flow..........................................................................................................37
4-6-3 Gross leak flow ................................................................................................38
4-6-4 Middle leak flow ..............................................................................................39
4-6-5 Fine leak flow ..................................................................................................40
4-6-6 Zero tracking function.....................................................................................41
4-6-7 How to use the internal calibration leak........................................................42
4-6-8 Test end ...........................................................................................................43
4-7 Stop Mode............................................................................................................44
4-7-1 How to shut down............................................................................................44
4-7-2 After shutdown................................................................................................44
4-8 Error Mode..........................................................................................................45
4-8-1 Error mode.......................................................................................................45
(1) “Caution” .............................................................................................................45
(2) “Notice”................................................................................................................46
4-8-2 List of error messages.....................................................................................48
5. EXAMPLES OF APPLICATION...............................................................................49
Case 1 (Test object with small capacity)....................................................................49
Case 2 (Test object with large capacity).....................................................................50
Case 3 High sensitivity test........................................................................................51
Case 4 (Test object with large capacity, with fore pumping system)........................52
Case 5 (Leak test of other equipment).......................................................................55
6. MAINTENANCE........................................................................................................56
6-1 List of Maintenance Items..................................................................................57
6-2 Maintenance Procedure......................................................................................58
6-2-1 Removing the external panel..........................................................................58
(1) Front panel..........................................................................................................58
(2) Top panel.............................................................................................................58
(3) Left side panel.....................................................................................................59
(4) Right side panel ..................................................................................................59
(5) Rear panel...........................................................................................................60
6-2-2 Maintenance of rotary pump ..........................................................................60
6-2-3 Maintenance of compound molecular pump...................................................61
6-2-4 Maintenance of Pirani gauge sensor head .....................................................62
6-2-5 Maintenance of ion source...............................................................................63
7. TROUBLESHOOTING..............................................................................................64
7-1 Caution................................................................................................................65
7-2 Notice...................................................................................................................67
7-3 Other....................................................................................................................71
8. INPUT/OUTPUT........................................................................................................72
8-1 ACCESSORY Input/Output ...............................................................................72
(1) List of input/output signals................................................................................73
(2) Description of signals..........................................................................................73
(3) Output signal ......................................................................................................74
(4) Input signal.........................................................................................................75
(5) Operable input format........................................................................................76
(6) List of system errors...........................................................................................77
(7) Input/output timing chart ..................................................................................79
8-2 REC. OUT Output...............................................................................................80
8-3 EXT. V Output ....................................................................................................81
8-4 PRINTER Output ...............................................................................................82
8-5 RS232C Input/Output.........................................................................................83
9. MISCELLANEOUS ...................................................................................................85
9-1 Method of Test Port Purge..................................................................................85
10. WARRANTY...........................................................................................................86

- 1 -
1. GENERAL DESCRIPTION & SPECIFICATIONS
HELIOT is a helium leak detector based on the principle of magnetic field deflection type
mass spectrometry to detect helium gas.
It features completely automatic operation, maneuverability and design compatible with the
next generation, including provision of a dedicated pumping system employing a unique
select free flow system.
HELIOT 301 consists of the basic unit and controller.
1-1 Specifications
Name Helium leak detector
Model HELIOT 301
Sensitivity range E-12 to E-4 Pa⋅m3/sec
Measurement error ±10%
Analyzer tube Magnetic field deflection type mass spectrometer tube
Max. connecting pressure 1000 Pa
Vacuum gauge Pirani gauge sensor head (WP-01)
GP-1000H
Pumping system mode Select free flow
Main pump Compound molecular pump Model TMH063-003-002
Fore pump Oil rotary pump Model GHD-030
Roughing pump Fore pump is used.
Start time Normal start : Approx. 10 min
Quick start : Approx. 3 min
Stop time Approx. 5 min
Sensitivity calibration Automatic (with calibration leak temperature compensation)
Leak rate display Direct reading display
Digital display LCD
Analog display LED (LED bar graph)
Zero adjustment Automatic adjustment/arbitrary adjustment (automatic zero
adjustment with switch)
Self-diagnosis Message display (LCD)
Dealt with by stop and standby actions.
Alarm Audio alarm
External input/output
(accessory) Start/stop, test start/end, component alarm signal, etc.
Printer output Centronics
RS-232C input/output Provided
Recorder output Linear output : 0 to 10 VDC
Log. output : 0 to 8 VDC
Dimensions 300 ×484 ×520 mm
Weight 39 kg
Operating temperature range 10°C to 40°C
Power requirements 100 VAC, 10 A
Option-compatible voltage : 115 V, 120 V, 200 V, 220 V, 230 V,
240 V AC
Accessories Ion source Model B-A 1 pc.
Ion source packing 1 pc.
Pirani gauge sensor head WP-01 1 pc.
Single-ended elbow GZL8-6 1 pc.
Synflex tube 8mm-dia. ×1000 mm
long 1 pc.
Philips screwdriver 1 pc.
Allen wrench 4 mm 1 pc.
Tool box 1 pc.
Instruction manual 1 copy
Power cable 4 m long
Applicable standard CE

- 2 -
1-2 Operating Modes
HELIOT runs according to the program installed in the basic unit. Its operating modes can
roughly divided into the initial state, startup mode, test mode, stop mode and error mode.
Representative series of actions are given below.
Initial state Main power ON The main power is turned ON.
↓Press START/STOP.
Pumping system starting The molecular compound pump is in static rotation.
↓
Zero adjustment Measures the zero point (background).
↓
He peak adjustment Searches for the most efficient voltage for helium
detection.
↓
Fine leak flow sensitivity calibration Performs fine leak flow sensitivity calibration.
↓
Startup mode Middle leak flow sensitivity
calibration Performs middle leak flow sensitivity calibration.
↓
Gross leak flow sensitivity calibration Performs gross leak flow sensitivity calibration.
↓
Zero adjustment Performs zero point measurement.
↓
Test mode standby Ready for execution of test.
↓Press TEST
Test port roughing Pumps the test port from atm. pressure.
↓
Test mode Gross leak flow Executes test of gross leak flow.
↓
Middle leak flow Executes test of middle leak flow.
↓
Fine leak flow Executes test of fine leak flow.
↓Press VENT
Test mode standby Ready for execution of test.
↓Press START/STOP.
Stop mode Pumping system OFF Terminates the action of pumping system.
↓
Electrical system OFF Turns OFF the electrical system.
↓
Main power OFF
Message display Displays error message
↓
Error mode On standby Waits by displaying message.
↓Press
Returns to test mode standby In case of "Notice" display, returns to standby.
↓
Stop mode execution In case of "Caution" display, executes the stop mode.

- 3 -
1-3 Select Free Flow
(1) Overview
In the development of HELIOT, ULVAC designed a compound molecular pump
dedicated to HELIOT by combining a drag molecular pump and a turbomolecular
pump and developed a unique 3-port inlet type select free flow using the pump.
(patented in Japan, USA and Germany)
Gas that enters the test port is introduced to the analyzer tube through the inlet ports of
the compound molecular pump. Each of the three inlet ports has a valve and the gas
inlet route is changed by changing over the valve. Valves are named TV1, TV2 and
TV3 in increasing distance from the analyzer tube, and the flow is called "fine leak
flow", "middle leak flow" and "gross leak flow" respectively. Each flow has its own
features because of the difference of the inlet route.
Pump compression
ratio is low.
Inlet position is close to
the analyzer tube.
Helium can easily
reach the analyzer tube.
Helium detecting
efficiency is high.
Sensitivity is high.
Testing pressure is low.
Pump compression
ratio is medium.
Inlet position is
in the middle.
Reaching percentage
is medium.
Detecting efficiency
is medium.
Sensitivity is lower than
fine leak flow, but higher
than gross leak flow.
Testing pressure is
medium.
Pump compression
ratio is high.
Inlet position is away
from the analyzer tube.
Difficulty for helium to
reach analyzer tube.
Helium detecting efficienc
y
is low.
Sensitivity is low.
Testing pressure is high.
Fine leak flow Middle leak flow Gross leak flow
In addition to the above three types of flow, auto flow is also available, which
automatically changes over fine/middle/gross leak flow by monitoring the test port
pressure and leak rate. This feature allows test to be made under the optimum
conditions (with highest sensitivity) at any time according to the condition of the test
object.
The feature of the select free flow system is that it provides both "high sensitivity and
high response" of the conventional direct flow system and "leak test at a high pressure"
of the counterflow system. The select free flow system has combined high sensitivity
and high response test of the direct flow system and the high testing pressure of the
counter flow system, which has been said impossible to realize because they are in
conflict with each other.
Flow SEN. L SEN. H
Connecting
pressure Sensitivity range Connecting pressure Sensitivity range
Gross leak flow 1000 E-9 to E-4 500 E-10 to E-5
Middle leak flow 70 E-10 to E-5 18 E-11 to E-6
Fine leak flow 10 E-11 to E-6 3 E-12 to E-7
Auto flow 1000 E-11 to E-4 500 E-12 to E-5
(Unitofpressure:Pa) (Unitofsensitivity:Pam
3/sec)

- 4 -
(2) Features of select free flow system
1) Auto flow (executes test under the optimum conditions)
The measurement leak rate range and the testing pressure range of fine leak flow,
middle leak flow and gross leak flow vary, which has been realized by
combination of the compound molecular pump and select free flow. Either gross
leak flow or fine leak flow can be used to make leak test, for example, on order of
E-8 at a pressure of 10 Pa. However, the helium detecting resolution varies with
flow because of its difference in sensitivity. In other words, test can be made
with lower resolution of helium and higher reliability by making test as close to
fine leak flow as possible.
To facilitate operation, two modes are provided: fixed flow mode that permits use
of three flows at will and auto flow mode that monitors the test port pressure and
leak rate and automatically changes over the flow.
The use of this auto flow mode allows HELIOT to select the optimum conditions
(flow) simply by setting a test object to the test port and pressing the test switch to
execute test, thus permitting leak test with higher sensitivity.
2) Middle leak flow (reduction of roughing time)
When making leak test at a pressure of 10 Pa, for example the conventional
counterflow mode takes a longer time before starting test because the test port is
pumped by a rotary pump and the pumping speed lowers as the pressure lowers.
In the select free flow mode, however, in which the rotary pump is changed over
to a drag molecular pump after pumping to a pressure of 70 Pa, the pumping
speed increases before it decreases. Thus the roughing time is shorter than that
of the conventional flow.
3) Middle leak flow (suppression of increase of oil vapor)
In the conventional counter flow mode, in which the test object is pumped by a
rotary pump, the oil vapor of the rotary pump oil rises to the test port as pressure
lowers from near 50 Pa. In the select free flow mode, in which the rotary pump
is changed over to a drag pump at a pressure of 70 Pa, oil vapor does not rise.
4) Gross leak flow (test can be made from 1000 Pa)
Leak test cannot be made at a high pressure while holding the pressure in the
analyzer tube at a high vacuum unless a pump with high compression ratio is used.
With a pump with high compression ratio which provides a high back pressure,
however, it is not ease for helium to reach the analyzer tube, disabling leak test of
high sensitivity.
However, the compound molecular pump used for HELIOT holds the pressure
difference between the test port and analyzer tube with high compression ratio and
maintains the analyzer tube pressure at a high vacuum all the time, allowing leak
test at a pressure higher than that of the conventional counter flow system.
5) Fine leak flow (high sensitivity)
Since the analyzer tube can maintain high vacuum for the reason in 4) above, the
background can be lowered, where helium is introduced with high efficiency,
resulting in high resolution. This provides a high sensitivity equivalent to that of
the conventional direct flow system.

- 5 -
2. CONFIGURATION OF HELIOT
2-1 Overall Configuration
(1) Basic unit
The basic unit consists of a chassis section that includes the frame panel and pumping
system like pumps, valves, piping, etc. and an electrical system that includes boards,
switches, etc.
• Chassis section
The main chassis is made of aluminum die cast and the external panel is made of
aluminum or is injection-moulded. Casters are made of polyurethane and can be
used in a clean room.
• Pumping system
The pumping system uses components exclusively designed for HELIOT, such as
the analyzer tube, compound molecular pump, valve block, etc. This has made it
possible to provide a pumping mode like the unique select free flow and has
realized the maximum connecting pressure of 1000 Pa and a sensitivity range of
E-12 to E-4 Pa⋅m3/sec.
The compound molecular pump is provided with a wider measurement range by
changing over the revolution to 90000 rpm or 67000 rpm with the sensitivity
selector switch to change compression ratio.
• Electrical system
Line voltage can be applied within the range of 90 volts to 110 volts. The
electrical system is compatible with 50 and 60 Hz and requires no changeover of
the switch.
Maximum voltages of 100 VAC and ± 300 VDC are present in the circuit.
(2) Controller
The controller can be divided into the indicating circuit and display circuit.
• Indicating circuit
Houses CPU, communicates with the CPU of the basic unit and gives commands to
the basic unit.
• Display circuit
Receives a signal processed by the basic unit and displays the current state and
measurement value on LCD, LED and by audio alarm.
(3) Dimensional drawing
Dimensional drawing for HELIOT 301

- 6 -
2-2 Pumping System Diagram
No. Symbol Function
1 TP Test port. Connect a test object.
2 CL Calibration leak. Provides reference helium.
3 CLV Calibration leak open/close valve.
4 VV Vent valve. Vents the test port to atmospheric pressure.
5 PiG Pirani gauge sensor head. Measures the pressure at the test port.
6 TV1 Test valve. Valve for fine leak flow.
7 TV2 Test valve. Valve for middle leak flow.
8 TV3 Test valve. Valve for gross leak flow.
9 ANA Analyzer tube. Ionizes and detects helium.
10 CMP Compound molecular pump.
11 CVV Vent valve of compound molecular pump.
12 FV Fore line valve.
13 FVV Fore line vent valve.
14 FP Fore pump.

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2-3 Names and Functions of Components
2-3-1 Overall configuration
No. Name Function
1 Controller For operation of HELIOT.
2 Front panel Houses the Pirani gauge sensor head and control board 1.
3 Top panel Houses the ion source and compound molecular pump.
4 Right side panel Houses the rotary pump and control board 2.
5 Left side panel Houses the analyzer tube, pumping system components and controller.
6 Rear panel Used for the maintenance of the compound molecular pump and rotary pump.
7 Connector panel Input/output of power and accessories.
8 Casters Used for movement over a short distance.
9 Test port NW16 flange port for connecting test object.
10 Pump exhaust port Rotary pump exhaust port
11 Purge port Gas inlet port to be used when the test object is not vented to atmospheric
pressure.
* The "Function" column for the panels indicates the name of the component housed in the panel.
* The purge port 11 is not internally connected before shipment from the factory because it can
suck dust. Refer to "9-1 Method of Test Port Purging" for test port purging.

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2-3-2 Pumping system
No. Name Function
1 Compound molecular pump
(CPM)
Main pump (TMH063-003-002 30 l/sec)
2 Rotary pump (RP) Roughing and fore pump (Model GHD-030, 30 l/min)
3 Analyzer tube ion source Ionizes helium molecules.
4 Analyzer tube preamplifier Detects helium ions by microammeter.
5 Pirani gauge sensor head Measures the pressure at the test port.
6 Test valve 1 (TV1) Test valve for fine leak flow.
7 Test valve 2 (TV2) Test valve for middle leak flow.
8 Test valve 3 (TV3) Test valve for gross leak flow.
9 Calibration vent valve (CLV) Valve that opens/closes the calibration leak.
10 Vent valve (VV) Valve that vents the test port.
11 Fore line vent valve (FVV) Valve that vents the fore line.
12 Fore line valve (FV) Valve that isolates the compound molecular pump (CPM)
and rotary pump (RP).
13 TMP vent valve (CVV) Valve that vents CPM to atm. pressure.
14 Test port NW16 test object connecting port.
15 Calibration leak Outputs helium leak as reference.
16 Vent port Equipped with a sinter metal filter as standard.
17 Blank flange Used to seal the test port.

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2-3-3 Electrical system
No. Name Function
1 Control board 1 (YU-256) CPU board.
2 Control board 2 (YU-254) I/O and analog circuit boards.
3 Power supply 1 (AD240-24) Power supply for valves, etc.
4 Power supply 2 (P30E-5) Power supply for filament.
5 Power supply 3 (PMC30-2) Power supply for CPU.
6 Compound molecular pump drive power
supply (TCP-035)
Compound molecular pump control and drive
power supply.

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2-3-4 Controller
No. Name Function
1 TEST switch Starts warming up the basic unit.
Starts test.
2 VENT switch Terminates test.
3 Auto zero switch Clears the leak rate to zero during test.
4 Mode switch Changes over an item set on the controller.
Opens the calibration leak valve during test.
5 Input change switch
Changes the value set by the controller.
Changes the selected contents set by the controller.
Changes the multiplier of the fixed range during test.
6 Return switch Determines and inputs the value set by the controller.
Prints out leak rate during test.
Resets the error message displayed.
7 Information display (LCD) Displays the current status, leak rate, error message, etc. by characters.
8 Leak rate bar graph Displays leak rate in analog form (log./linear display).
Blinks if leak rate deflects off-scale the range.
9 Pirani bar graph Displays the pressure at the test port.
10 Log scale lamp Lit when the leak rate display is set to "Log".
11 Linear scale lamp Lit when the leak rate display is set to "Linear".
12 Minus zero lamp Lit when the leak rate meter deflects to minus.
13 Leak rate multiplier display Displays the multiplier of the leak rate bar graph.
14 Setpoint lamp 1 Lit when the leak rate is above zero and below setpoint L.
15 Setpoint lamp 2 Lit when the leak rate is above setpoint L and below setpoint H.
16 Setpoint lamp 3 Lit when the leak rate is above setpoint H.
17 Audio alarm Changes from intermittent sound to continuous sound according to the
leak rate.
18 Audio alarm volume
adjustment trimmer Adjusts the volume of audio alarm.
19 LCD brightness/darkness
adjustment trimmer Adjusts the density of characters on LCD.
20 Earphone jack Outputs audio alarm sound.
21 CPU board Controls the display system and communicates with the basic unit.
22 Display board Controls the display system.