Ulvac HELIOT 301 User manual

No.SK00-7910-BI-011-00
HELIOT 301
HELIUM LEAK DETECTOR
INSTRUCTION MANUAL
Compatible with Ver. 2000 Software
This manual is for instruments serial Nos. 3000 and higher.
Read this manual before use and
keep it in your file for future reference.
Components Division
ULVAC , Inc.
2500, Hagisono, Chigasaki-shi,
Kanagawa-ken, 253-8543 Japan
Phone No.: 0467-83-1151
http://www.ulvac.co.jp/

Prior to Use
Upon receipt of this detector, make sure that it is the correct model you ordered and that it is not
damaged in transit.
!
WARNING Read this manual before installation, operation, inspection or maintenance
and fully understand safety cautions, specifications and operating
procedure of this instrument.
!
CAUTION No part of this manual may be reproduced for use by a thirty part without
written consent by ULVAC.
Denotations for Safety
!
WARNING The following denotations are used throughout this manual and labeled on
the instrument to call operator's attention to safety. The denotations are
classified as follows.
!
DANGER Failure to comply with DANGER involves possibility of impending loss o
f
life or serious personal injury.
!
WARNING Failure to comply with WARNING involves the possibility of loss of life
or serious personal injury.
!
CAUTION Failure of comply with CAUTION can lead to a medium degree o
f
personal injury or serious damage to the equipment.

Safety Cautions
!
CAUTION
Turn OFF power
Before removing the external panel for inspection or part replacement, shut
off the primary power on the switchboard and disconnect the power cable
from HELIOT.
High voltage is present in HELIOT and can cause danger to human body
by electric shock and damage the equipment.
!
CAUTION
Complete stop
The compound molecular pump rotates at a high speed for about five
minutes after it is stopped.
Before inspection or part replacement, wait for more than five minutes
after the pump has stopped.
Otherwise, you may be injured or the equipment may be damaged.
!
CAUTION
Analyzer tube at high temperature
The area around the analyzer tube and ion source is very hot immediately
after it is deactivated. Before inspection or part replacement, wait for
more than five minutes after deactivating it and carry out work carefully.
Otherwise, you may get burned or the equipment may be damaged.
!
CAUTION
Solenoid valve at high temperature
The coil section of the solenoid valve is very hot immediately after it is
deactivated.
Before inspection or part replacement, wait for more than five minutes
after deactivating it and carry out work carefully.
Otherwise, you may get burned or the equipment may be damaged.
!
CAUTION
Rotary pump at high temperature
The rotary pump is very hot immediately after it is stopped.
Before inspection or part replacement, wait for more than five minutes
after deactivating it and carry out work carefully.
Otherwise, you may get burned or the equipment may be damaged.
!
CAUTION Turn OFF power
Before installing the instrument, turn off the main power switch and
disconnect the power plug.
!
CAUTION Turn OFF power
Ground the instrument to prevent earth leakage.
!
CAUTION
Inspection and repair
Before inspection or repair, wait for more than five minutes after stopping
the instrument.
Otherwise, you may be injured or the equipment may be damaged.
!
CAUTION
Hold horizontal
Do not tilt the instrument more than 30 degrees when unpacking or when
moving the instrument, and hold it in a horizontal position when installing
it. Otherwise, oil leak or damage to the equipment may result.
!
CAUTION
Overhaul
The instrument contains parts that are subject to aging, including
consumables (O-rings and drive parts).
Be sure to conduct overhaul to maintain performance once a year.

!
CAUTION Weight on piping
When connecting piping, test object, etc. to the test port, keep the test port
free from weight.
!
CAUTION
Air vent
A blast fan is provided in the rear panel to cool the instrument interior, and
air vents are provided in the right and left side panels.
Provide a space more than 200 mm from the wall to all panels. Plugging
the air vents will increase the inside temperature and may damage the
equipment.
!
CAUTION Ambient temperature
Operate the instrument at an ambient temperature of 10°C to 40°C.
!
CAUTION
Dust contamination
Before installing the blank flange, make sure that the flange seat surface
and O-ring are free form scars and dust.
Leak may lead to malfunction.
!
CAUTION
Use of blank flange
Use a blank flange when starting up the instrument.
If the instrument is started with the piping and test object connected, it may
not operate properly.
!
CAUTION Line voltage
The line voltage is to be 100 VAC ± 10% and the maximum rated current is 10
A. Check it before installation.
!
CAUTION No vibration
Keep the instrument free from vibration or impact from surrounding
equipment. The instrument may be damaged.
!
CAUTION Electrical connection
Make electrical wiring after completing installation.
!
CAUTION
Setting timing
Before changing the setting of the DIP switch, turn off the main power. I
f
the instrument is operated with the main power turned on, malfunction and
damage to the equipment can result.
!
CAUTION
DIP switch
DIP switch No. 2, No. 3, No. 4 and No. 6 are used for system setting. Do
not change them.
Malfunction and damage to the equipment can result.
!
CAUTION
Setting timing
Before changing the setting of the SEN. switch, turn OFF the main power
(compound molecular pump at stop). If the setting is changed
immediately after end of stop mode (compound molecular pump is still
rotating) and the instrument is restarted, malfunction may result.
!
CAUTION
Input switch
To press the membrane switches on the controller,
use your finger pad. Pressing it with nail or a sharp object can damage
the equipment.
!
CAUTION
Sensitivity calibration
Before making sensitivity calibration, attach a blank flange to the test port.
If sensitivity calibration is made with piping of high capacity connected to
the test port, sensitivity error can result.

!
CAUTION
Quick start
Quick start starts the instrument by utilizing the sensitivity data used the
last time, as it is, independently of the current state of HELIOT.
Therefore, the measurement error can be great in some cases.
To ensure test data reliability, it is recommended to start up the instrument
by normal start.
It is to be understood that the reliability of leak test when the instrument is
started by quick start (direct reading of leak rate, etc.) is not warranted.
!
CAUTION
Test port
Check that a blank flange or a test object is securely connected to the test
port.
If test is made without connecting a blank flange or a test object securely,
not only measurement will be adversely affected, but also the life of parts
will be extremely shortened, causing damage to the equipment.
!
CAUTION Shutdown
To shut down the instrument, set up the stop mode in the test mode standby
status for automatic shutdown.
!
CAUTION
During test
When test is going on, do not remove the blank flange or test object from
the test port or vent the test port to atmospheric pressure by other method
than operation of the controller. The equipment can be damaged.
!
CAUTION
Venting the test port
Before venting, do not remove the blank flange or test object from the test
port nor vent the test port to atmospheric pressure by other method than
operation of the controller. The equipment can be damaged.
!
CAUTION
Main power OFF
When stop operation is being performed, the message "Please wait" is
displayed on the LCD. At this time, do not turn OFF the main power.
Then the display changes to "Push START". Turn OFF the main power
after verifying this message is displayed.
!
CAUTION
After shutdown
Do not give vibration or impact to the instrument for about five minutes
after completion of shutdown operation.
The equipment can be damaged.
!
CAUTION Main power OFF
Be sure to turn OFF the main power after completion of shutdown
operation.
!
CAUTION
Error
If error occurs, reset the error mode after verifying the symptom by the
message.
Conduct inspection and repair referring to "Troubleshooting".
!
CAUTION
Check before startup
Check again that all preliminary operations above, including installation,
DIP switch setting, SEN. switch setting and controller setting, etc., have
been properly completed.
If there is any fault or problem, not only the instrument may malfunction,
but also it may be damaged.

!
CAUTION
Don't use grease
HELIOT does not use grease for the piping connections and valves.
Do not use grease when disassembling or reassembling them.
Malfunction of the equipment or failure of parts can result.
!
CAUTION
Remove dust
O-rings are used for piping connections.
Before disassembly and reassembly, remove dust from O-rings. Also
remove sweat and oil with alcohol.
Otherwise, malfunction of equipment or failure of parts can result.
!
CAUTION Reset error mode
If any error occurs, reset the mode after checking the symptom by the
message.
!
CAUTION
Load
Be sure to provide a load between pin 2 through pin 6 used for signal
output and the power source. Verify that the output signal is turned
ON/OFF by the action of the load.
If the load is not provided, the equipment may be damaged.
!
CAUTION
Contact
Be sure to provide a contact or an open collector between pin 10 through
pin 14 used for signal input and ground. Input a signal by the action o
f
the contact.
If the contact is not provided, the equipment can be damaged.
!
CAUTION
Maximum voltage
Voltage applied to the pin of output signal is +5 V to + 55 VDC
(recommended value +24 VDC).
If a voltage out of this range is applied, the equipment can be damaged.
!
CAUTION
Maximum voltage
Voltage applied to the pin 9 of input signal is +5 V to + 55 VDC
(recommended value +24 VDC).
If a voltage out of this range is applied, the equipment can be damaged.
!
CAUTION
No contact of parts in vacuum
Parts in vacuum and parts on the vacuum side have been degreased and are
clean.
Do not touch them by naked hand during disassembly and reassembly.
Equipment performance my be deteriorated.
!
CAUTION One-shot input
One-shot input should be 1 second or so.
If the input time is short, malfunction can result.
!
CAUTION Maximum current
Current applied to the load of output signal is maximum 500 mA. If a
load in excess of 500 mA is connected, the equipment can be damaged.
!
CAUTION
Do not short pin
A voltage of +24 VDC is applied to the output pin.
Never short the pin to the ground level or short pin and pin. The
equipment may be damaged.
!
CAUTION Printer
If a printer of different specifications is connected, it may not print
properly or malfunction can result.

!
CAUTION Do not short terminals
Do not short the red REC. OUT terminal with black REC. OUT terminals.
If shorted, equipment may be damaged.
!
CAUTION
Gas to be fed
Use dry nitrogen gas (N2). If a different type of gas is fed, the life o
f
parts including consumables will be shortened and the equipment may be
damaged.
!
CAUTION Gas feeding pressure
Feed gas at a pressure below 0.02 MPaG. If a pressure in excess of this is
applied, malfunction or damage to equipment can result.
!
CAUTION Mounting filter
Use an air filter and oil filter for the gas. If dust or oil mist is admitted
into HELIOT, malfunction or damage to the equipment can result.
!
CAUTION
Maximum current
The current applied to the load of output signal is maximum 50 mA. In
excess of 50 mA, the equipment can be damaged.

Location of WARNING Labels
Meaning of WARNING labels
CAUTION : Read the instruction manual before conducting maintenance.
High voltage is present in HELIOT. If inspection/maintenance is conducted by removing
the panel with the power turned ON, danger to human body like electric shock and damage to
the equipment can result. Be sure to turn OFF the power before inspection/maintenance and
carry out work with the power cable disconnected from the instrument.
High temperature components that can cause danger to human body are also present in
HELIOT. Read this manual before starting inspection/maintenance and fully understand
safety cautions, operating procedure and others before starting work.

Contents Page
1. GENERAL DESCRIPTION & SPECIFICATIONS....................................................1
1-1 Specifications ........................................................................................................1
1-2 Operating Modes...................................................................................................2
1-3 Select Free Flow....................................................................................................3
(1) Overview................................................................................................................3
(2) Features of select free flow system ......................................................................4
2. CONFIGURATION OF HELIOT ................................................................................5
2-1 Overall Configuration...........................................................................................5
(1) Basic unit ..............................................................................................................5
(2) Controller ..............................................................................................................5
(3) Dimensional drawing............................................................................................5
2-2 Pumping System Diagram....................................................................................6
2-3 Names and Functions of Components..................................................................7
2-3-1 Overall configuration ........................................................................................7
2-3-2 Pumping system................................................................................................8
2-3-3 Electrical system ...............................................................................................9
2-3-4 Controller.........................................................................................................10
2-3-5 Connector panel...............................................................................................11
3. INSTALLATION........................................................................................................12
3-1 Preliminary Operation........................................................................................12
3-2 Installation..........................................................................................................12
3-3 Connecting the Test Port....................................................................................13
3-4 Electrical Connection..........................................................................................13
4. OPERATING PROCEDURE AND MODES .............................................................14
4-1 Description of Modes...........................................................................................14
4-2 Reading the LCD Screen ....................................................................................15
4-3 Initial Mode and Settings...................................................................................16
4-3-1 Setting the DIP switch....................................................................................16
(1) Operation for DIP switch setting .......................................................................16
(2) Remote operation................................................................................................17
(3) Double vent .........................................................................................................18
(4) Signal output setting ..........................................................................................18
(5) Clearing RAM .....................................................................................................19
4-3-2 Setting the SEN. switch..................................................................................20
4-3-3 Setting the value of built-in calibration leak.................................................21
4-4 Setting the Controller.........................................................................................22
4-4-1 Setting up the setting mode............................................................................22
(1) To set up the mode before startup......................................................................22
(2) To set up the setting mode when on standby in the test mode.........................22
(3) To set up the calibration leak value input mode...............................................22
4-4-2 List of set items...............................................................................................23
4-4-3 Initial value of each setting and list of input items.......................................24
4-4-4 Inhibition of input of setting...........................................................................25
4-4-5 Methods of entering settings ..........................................................................26
(2) Entering the setting of the flow selection mode ................................................27
(3) Entering the setting of the unit selection mode ................................................27
(4) Entering the setting of setpoint H input mode..................................................28
(5) Entering the setting of setpoint L input mode ..................................................28
(6) Entering the setting of the range selection mode..............................................29
(7) Entering the setting of the bar graph display selection mode..........................29
(8) Entering the setting of the printer print selection mode..................................29
(9) Entering the setting of the filament change mode............................................30
(10) Entering the setting of the calibration leak value input mode.........................31
(11) Entering the setting of the calibration concentration value input mode .........32
(12) Entering the setting of the character display change mode .............................32
(13) Entering the setting of the startup change mode..............................................33
4-5 Startup Mode ......................................................................................................34
4-5-1 Normal start....................................................................................................34

4-5-2 Quick start.......................................................................................................35
4-6 Test Mode............................................................................................................36
4-6-1 Standby............................................................................................................37
4-6-2 Auto flow..........................................................................................................37
4-6-3 Gross leak flow ................................................................................................38
4-6-4 Middle leak flow ..............................................................................................39
4-6-5 Fine leak flow ..................................................................................................40
4-6-6 Zero tracking function.....................................................................................41
4-6-7 How to use the internal calibration leak........................................................42
4-6-8 Test end ...........................................................................................................43
4-7 Stop Mode............................................................................................................44
4-7-1 How to shut down............................................................................................44
4-7-2 After shutdown................................................................................................44
4-8 Error Mode..........................................................................................................45
4-8-1 Error mode.......................................................................................................45
(1) “Caution” .............................................................................................................45
(2) “Notice”................................................................................................................46
4-8-2 List of error messages.....................................................................................48
5. EXAMPLES OF APPLICATION...............................................................................49
Case 1 (Test object with small capacity)....................................................................49
Case 2 (Test object with large capacity).....................................................................50
Case 3 High sensitivity test........................................................................................51
Case 4 (Test object with large capacity, with fore pumping system)........................52
Case 5 (Leak test of other equipment).......................................................................55
6. MAINTENANCE........................................................................................................56
6-1 List of Maintenance Items..................................................................................57
6-2 Maintenance Procedure......................................................................................58
6-2-1 Removing the external panel..........................................................................58
(1) Front panel..........................................................................................................58
(2) Top panel.............................................................................................................58
(3) Left side panel.....................................................................................................59
(4) Right side panel ..................................................................................................59
(5) Rear panel...........................................................................................................60
6-2-2 Maintenance of rotary pump ..........................................................................60
6-2-3 Maintenance of compound molecular pump...................................................61
6-2-4 Maintenance of Pirani gauge sensor head .....................................................62
6-2-5 Maintenance of ion source...............................................................................63
7. TROUBLESHOOTING..............................................................................................64
7-1 Caution................................................................................................................65
7-2 Notice...................................................................................................................67
7-3 Other....................................................................................................................71
8. INPUT/OUTPUT........................................................................................................72
8-1 ACCESSORY Input/Output ...............................................................................72
(1) List of input/output signals................................................................................73
(2) Description of signals..........................................................................................73
(3) Output signal ......................................................................................................74
(4) Input signal.........................................................................................................75
(5) Operable input format........................................................................................76
(6) List of system errors...........................................................................................77
(7) Input/output timing chart ..................................................................................79
8-2 REC. OUT Output...............................................................................................80
8-3 EXT. V Output ....................................................................................................81
8-4 PRINTER Output ...............................................................................................82
8-5 RS232C Input/Output.........................................................................................83
9. MISCELLANEOUS ...................................................................................................85
9-1 Method of Test Port Purge..................................................................................85
10. WARRANTY...........................................................................................................86