Ulvac GP-1G User manual

No,SK00-7397-EI-003-06
PIRANI VACUUM GAUGE
MODEL GP-1G
MODEL GP-1G WITH CASE
(Pa/Torr)
INSTRUCTION MANUAL
This manual is for the following gauges.
Serial Nos. 02000G and higher
Read this manual before operation and keep it
at your hand for immediate reference.
Components Division,
ULVAC , Inc.
http://www.ulvac.co.jp/

Prior to Use
- i -
Prior to Use
Upon receipt of this detector, make sure that it is the correct model you ordered and that it is not damaged in
transit.
Read this instruction manual before installing, operating, inspecting, or
maintaining the product and fully understand the safety precautions,
specifications and operating procedures regarding the product.
The copyright of this instruction manual is held by ULVAC, Inc.
You are prohibited from copying any portion of this instruction manual without
the consent of ULVAC Inc.
You are also prohibited from disclosing or transferring this instruction manual to
third parties without the express written consent of ULVAC Inc.
The contents described in this instruction manual are subject to change without
prior notice because of changes in specifications or because of product
improvements.
Safety Denotations
Safety symbols are used throughout this instruction manual to call the operator's
attention to safety. The terminology used in safety symbols is classified below.
Indicate status of urgency of danger when failure to comply with DANGER
results in serious personal injury or death
The work ignoring this warning will lead to serious damage to human life or
factory facility (including this equipment) at a high probability.
Indicate status of danger when failure to comply with WARNING results in
serious worker’s injury or death.
The work ignoring this warning will cause possibility leading to serious damage
to human life or factory facility (including this equipment)
Indicate status of danger when failure to comply with WARNING results in
minor injury or moderate damage.
The work ignoring this warning will cause possibility leading to minor damage
to worker or breakage to equipment or necessary to adjust.
Direct hazard is not existed, describe the necessity to know
from the viewpoint of worker’s safety or correct and safe operation of
equipment
✔Note

Safety Cautions
- ii -
Safety Cautions
For safe use of this vacuum gauge, carefully read this manual and comply with the warnings and cautions
given in the manual.
Turn OFF power
If the vacuum gauge fails, immediately turn OFF the power.
Use of a failed gauge may cause fire or electric shock. For repair, contact your
local ULVAC representative or ULVAC JAPAN.
Turn OFF power
If the vacuum gauge gets unusually hot or gives off smoke or unusual smell,
immediately turn OFF the power. Otherwise, fire can result. For safety, contact
your local ULVAC representative or ULVAC JAPAN.
Turn OFF power
Turn OFF the power before replacing a fuse. Replacing a fuse with the power
turned ON can cause electric shock.
Turn OFF power
Whenever mounting the gauge, unplug the power cable.
Use rated fuse
Use a fuse of the prescribed rating. Do not use a fuse other than the prescribed
one or do not short the fuse holder. Damage or fire may result.
Check line voltage
Prior to turning ON the power, make sure that the vacuum gauge operating
voltage and the supply voltage are in agreement. Connection of incorrect
power can cause damage to the vacuum gauge and fire.
Check recorder connection
The recorder output is afloat from ground potential. Always connect the
recorder input to the recorder terminal by insulating it from ground. If it is
connected to GND potential by mistake, the meter will not indicate the correct
value. Also the vacuum gauge may be damaged.
Don't disassemble
Do not try to disassemble the vacuum gauge (controller, sensor head cable and
sensor head).
Don't modify
Do not modify the vacuum gauge (controller, sensor head cable and sensor
head). If it is modified, its functions are not warranted. Also fire or electric
shock may result.
Operating environment
Do not connect the sensor head to a test object of which pressure is in excess of
atmospheric pressure. If the pressure in the sensor head exceeds atmospheric
pressure, the sensor head will be damaged or it will pop out from the connector,
causing injury to the surrounding, including human body. If the pressure exceeds
atmospheric pressure, provide an isolation valve so that the pressure in the sensor
head does not exceed atmospheric pressure.
Operating environment
Do not use the gauge in a place where it may be splashed with water. If it is
splashed with water, failure, earth leakage or fire can result.
Ventilation
Do not plug the air vents of the vacuum gauge. If the air vents are plugged, heat
will be contained inside and the gauge may be damaged. The gauge will not
indicate a normal value either.
Beware of impact
Do not give an impact to the sensor head.

Safety Cautions
- iii -
Operating conditions
Operate the vacuum gauge under the environment set forth in the specifications.
Repacking for transfer
If the vacuum gauge is to be shipped to other site, repack it in the same way as
on delivery. If the gauge is shipped bare, it may be damaged.
Disposal
When discarding the vacuum gauge, comply with your local regulations. If
the gauge was used in an environment that can cause hazards to human body,
have it disposed of by an authorized specialist in disposal.
Customer shall be responsible for the cost relating to disinstallation.
Check line voltage
The operating voltage of this gauge is 100 to 240 VAC. Check the line voltage
before connection. If incorrect power is applied, damage or fire can result.
Ratings of the power supply cable plug
Ratings of the power supply cable plug are 125V/10A. Please process the plug
when you use it exceeding ratings of the power cable.
Meter panel
Don’t long contact with chemical cleaning cloth, don’t wipe with benzene or
thinner. The pointer may become unstable due to static electricity. In the case,
apply a commercially available antistatic agent to the cover.
Connection
The contact output capacity is 100VAC/0.5A, 24VDC/1A (resistance load).
If power higher than this is opened/closed, do not use the contact of the vacuum
gauge, but use a large capacity switch in conjunction.
Maintenance
Aluminum electrolytic capacitor and relays is used for the electric circuit in
the sensor controller. Generally, the life expectancy of the aluminum
electrolytic capacity is limited and the higher the surrounding temperature, the
shorter the life. It is recommended to replace the aluminum electrolytic
capacitor and relays once every five years or at the time or repair or overhaul
to prevent components from being damaged.
Lifetime of sensor head cable and connector
Female connector is used in the sensor head cable and detection unit. This
female connector has a lifetime. A large current load may cause a fire in the
connector connection area. Avoid the frequent insert/remove of connector to
prevent a heavy load and loosens of the connector connection.
✔Note
✔Note

Revision History
- iv-
Revision History
DATE
No.
Description
Jul. 12, 2006
00
1st version
Aug.28, 2006
01
・P1. 1.1 Change Power supply Specification
(Power requirements, Weight)
・P5. Correction of Fig. 1-1
・Section 4 Correction of Troubleshooting
Jun. 25, 2007
02
・P1,8,13 Change Power requirements
・Section 5.3: Change Indication of Pirani gauge
・Section 8：Change Dimensions of GP-H
・
Section 5.3: Change figure numbers due to increased figures
Jul. 3, 2008
03
・PⅢ. Added Safety Cautions
・Section 1.1：Added operating temperature range
・Section 2.2.4：Added a method for attaching a probe to GP-H
・Section 4：Added Troubleshooting
Nov.7, 2013
04
・Corrected explanation of safety symbol mark
・Section1.2：Added Standard accessories
(Instruction manual CD, Quick manual)
・Section 1.3：Added Measuring unit
・Section 6：Change Warranty
・
Section 7
：
Added certificate of Decontamination.
Jul. 4, 2013
05
・Section 3.2：Added about 15mV or more to the recorder output when the
filament is Failed.
Dec. 2, 2019
06
・
Added Picture of GP-1G to Cover
・Added Revision History
・Added Unit of pressure
・PⅢ. Added Safety Cautions
・Section 1.1, Added Power Cable length and Plug Specifications
・Section 1.2, Do not attach instruction manuals from Standard
Acessories
・Section 1.3, Added option
・
Section 8, Corrected Related drawings

Contents
Contents
Page
Prior to Use ........................................................................................................................................... i
Safety Denotations ................................................................................................................................ i
Safety Cautions.................................................................................................................................... ii
Revision History..................................................................................................................................
ⅳ
1. OVERVIEW.................................................................................................................................1
1.1. SPECIFICATIONS ......................................................................................................................1
1.2. STANDARD ACCESSORIES ........................................................................................................1
1.3. OPTIONS .................................................................................................................................1
1.3.1. Sensor head....................................................................................................................2
1.3.2. Measuring unit................................................................................................................2
1.3.3. Sensor head cable...........................................................................................................2
1.3.4. Others.............................................................................................................................2
1.4. DESCRIPTION OF COMPONENTS ................................................................................................3
1.4.1. GP-1G............................................................................................................................3
1.4.2. GP-1G with case.............................................................................................................5
2. INSTALLING THE PIRANI GAUGE.........................................................................................7
2.1. PRELIMINARY OPERATION .......................................................................................................7
2.2. INSTALLATION.........................................................................................................................7
2.2.1. Installing the controller...................................................................................................7
2.2.2. Installing the sensor head................................................................................................8
2.2.3. Electrical connection ......................................................................................................8
2.2.4. A sensor head installation method to GP-H...................................................................10
3. OPERATING PROCEDURE.....................................................................................................11
3.1. HANDLING ............................................................................................................................11
3.2. RECORDER OUTPUT...............................................................................................................12
4. TROUBLESHOOTING..............................................................................................................14
5. APPENDIX .................................................................................................................................16
5.1. PRINCIPLES OF OPERATION ....................................................................................................16
5.2. TYPES OF GAS MEASURED AND INDICATION...........................................................................17
5.3. ACCURACY OF PIRANI VACUUM GAUGE.................................................................................19
6. WARRANTY..............................................................................................................................22
7. RELATED DRAWINGS............................................................................................................25

OVERVIEW
- 1 -
1. OVERVIEW
The Model GP-1G is a constant temperature type Pirani vacuum gauge that utilizes heat conduction
of gas.
If the sensor head burns out, the meter pointer will deflect off-scale to the higher pressure side
(atmospheric pressure side).
1.1. Specifications
Name
Pirani vacuum gauge
Model
GP-1G
Measurable range
0.4 to 2700 Pa (0.003 to 20 Torr)
Measurement error
Within ± 3% of 100% full-scale as converted to linear scale.
(Refer to 5.3)
Power requirements
100
～
240VAC, 10VA
*Ratings of the power supply cable plug are 125V/10A.
Power Cable 3m/ outlet side: Plug Type B
Operating temperature range
10 to 40°C
Operating humidity rang
15 to 80%
（
No condensation
）
Recorder output
0 to 10 mVDC
Fuse rating
250 V, 0.5 A
Outside dimensions (mm)
GP-1G: 100W×130D×100H
GP-1G with case: 150W×134D×201H
Weight
GP-1G: 670 g
GP-1G with case: 1365 g
Measuring unit: 35 g(GP-H)
1.2. Standard Accessories
Quick manual
paper
1 pc.
1.3. Options
1.3.1. Sensor head
Sensor head
WP-01, WP-02, WP-03., WP-16
WPB-10, WPB-10-034
Connecting flange
WP-01:
φ
18 port, WP-02:
φ
15 port
WP-03:R3/8, WP-16(NW16)
WPB-10:UFC034
WPB-10-034:UFC034
Filament material
Pt
Pt
Other materials
BS/Ni-plating
Ni、Kovar、Glass、SnSbCu
SUS304
、
Cu(Gasket)
FeNiCo(Ni-plating)
、
Al2O3
Weight(g)
WP-01
：
about 26
、
WP-02
：
about 45
WP-03
：
about 63
、
WP-16
：
about 77
about 173
Internal volume(cm3)
WP-01
：
about 19
、
WP-02
：
about 17
WP-03
：
about 17
、
WP-16
：
about 22
about 18
Pressure max
※
1
< 2
×
10+5Pa(abs)
< 2
×
10+5Pa(abs)
Bakeout
※
2
80
℃
max
250
℃
max
*1:The breakdown pressure of the flange and clamp are to be considered otherwise.
*2:Bakeout temperature is a temperature of the sensor unit. Please remove the electronics(GP-H) or the
conversion cable(GP-BH).

OVERVIEW
- 2 -
1.3.2. Measuring unit
Measuring unit
GP-H
GP-BH
（
Conversion cable 2m
）
Sensor head
WP-01, WP-02, WP-03, WP-16
WPB-10, WPB-10-034
Weight 35g
GP-BH: 0.13kg
Conversion calbe: 0.2kg
*Because of its circuitry, the indication of this vacuum gauge varies with the type of sensor head.
Therefore, if the type of sensor head is changed after delivery, re-adjustment will be required. Before
operation, check the conditions at the time of shipment from the factory (type of sensor head) that are
indicated on the measuring unit.
1.3.3. Sensor head cable
Sensor head cable
2, 5, 10, 15, 20, 30, 50, 100m
Weight(kg)
0.2, 0.4, 0.7, 1.0, 1.3, 1.9, 3.9, 7.7
1.3.4. Others
Test results certificate
Calibration certificate
Calibration certificate, JCSS Calibration certificate
Because of its circuitry, the indication of this gauge varies with the type of
sensor head and sensor head cable length. Therefore, if the type of sensor
head or sensor head cable length is changed after delivery, re-adjustment will
be required.
Before operation, check the conditions at the time of shipment from the factory
(type of sensor head) that are indicated on the rear panel.

OVERVIEW
- 3 -
1.4. Description of Components
1.4.1. GP-1G
GP-1G
GP-1G
Torr
Fig. 1-1 Front view of GP-1G (Pa/Torr)
①Meter
Pressure indicator.
Indicates pressure by a needle.
②Zero adjustment
Make adjustment so that the meter needle comes to the zero position (left of the scale) when the
power is OFF.

OVERVIEW
- 4 -
Fig. 1-2 Rear view of GP-1G
③Fuse holder
The ampacity of the fuse is 250V, 0.5 A.
④Sensor head cable connector
Connect the supplied sensor head cable to this connector.
⑤Ground terminal
Ground terminal of this gauge.
⑥Recorder output terminal
Red terminal (+)
Black terminal (–)
Analog signal is outputted between the two terminals.
The recorder output is afloat from ground potential. Always connect the
recorder input to the recorder terminal by insulating it from ground. If it
is connected to GND potential by mistake, the meter will not indicate the correct
value. Also the vacuum gauge may be damaged.

OVERVIEW
- 5 -
1.4.2. GP-1G with case
Fig. 1-3 Front view of GP-1G with case
①Power switch
Main power ON/OFF switch.
The lamp lights when the switch is turned ON.
②Meter
Pressure indicator.
Indicates pressure by a needle.
③Zero adjustment
Make adjustment so that the meter needle comes to the zero position (left of the scale) when the
power is OFF.

OVERVIEW
- 6 -
Fig. 1-4 Rear view of GP-1G with case
④Fuse holder
The ampacity of the fuse is 250V, 0.5 A.
⑤Sensor head cable connector
Connect the supplied sensor head cable to this connector.
⑥Ground terminal
Ground terminal of this gauge.
⑦Recorder output terminal
Red terminal (+)
Black terminal (–)
Analog signal is outputted between the two terminals.
The recorder output is afloat from ground potential. Always connect the
recorder input to the recorder terminal by insulating it from ground. If it
is connected to GND potential by mistake, the meter will not indicate the correct
value. Also the vacuum gauge may be damaged.

INSTALLING THE PIRANI GAUGE
- 7 -
2. INSTALLING THE PIRANI GAUGE
Turn OFF power.
Whenever mounting the gauge, unplug the power cable.
2.1. Preliminary Operation
(1) Unpack the gauge and check quantities.
(2) Check components for possible damage.
2.2. Installation
2.2.1. Installing the controller
Ventilation
Do not plug the air vents of the vacuum gauge. If the air vents are plugged, heat
will be contained inside and the gauge may be damaged. Also the gauge will not
indicate the correct value.
Keep out foreign matter.
If foreign matter like metal fragments or combustibles are admitted into the
vacuum gauge through the air vents or other openings, remove them. Keep the
cable connecting terminal of the meter free fr
om contact with other objects.
Otherwise, the vacuum gauge may be damaged.
Fig. 9-1 shows the panel cut drawing.
Keep a space for connecting the cable on the rear of the meter.

INSTALLING THE PIRANI GAUGE
- 8 -
2.2.2. Installing the sensor head
Operating environment
Do not connect the sensor head to a test
object of which pressure is in excess of
atmospheric pressure. If the pressure in the sensor head exceeds atmospheric
pressure, the sensor head will be damaged or it will pop out from the connector,
causing injury to the surrounding, including human body.
If the pressure
exceeds atmospheric pressure, provide an isolation valve so that the pressure in
the sensor head does not exceed atmospheric pressure.
Beware of impact
Do not give an impact to the sensor head.
Install the sensor head to the gauge port of a vacuum system.
(1) Measuring position
• This gauge measures the static pressure in the position where the sensor head is connected.
If there is gas flow or an outgas source or an intense electron or ion generating source, the
measurement value will be affected. So select the measuring position carefully.
Note that if the sensor head is subjected to vibration, heat radiation, high intensity magnetic
field or intense radiation, correct pressure measurement may not be made.
• Because of its principles of operation, the Pirani vacuum gauge indication is affected by the
ambient temperature of the sensor head. Be careful that the ambient temperature deviates
considerably from the calibrating temperature (about 25°C).
(2) Installing the sensor head
• Install the gauge in such a manner that the sensor head mounting opening plane is parallel
with gas flow. See to it that gas does not enter the sensor head in the form of beam.
• The vacuum gauge filament is as thin as 25 microns in diameter. Avoid use in a place
where vibration is at a high level, if possible. Be careful in selecting the installation place
and handling the sensor because major cause of filament burnout is mechanical impact.
• To install the sensor head, use an O-ring that releases little outgas.
Use of a materiel that releases much outgas like rubber pipe or grease can be a cause of error.
2.2.3. Electrical connection
Check connection.
Before turning on power, make sure all cables are connected correctly. If cable
connection is incorrect, damage or fire can result.
Check line voltage.
The operating voltage ofthis gauge is100 to240 VAC. Checkthe line voltage
before connection. If incorrect power is applied, damage or fire can result.
• Make electrical connection after installing components.
• Fix the cable by taking care not to exert undue force to the connection between the sensor head and
sensor head cable and the connection between the controller and sensor head cable.
• Lay the sensor head cable away from power lines, if possible. Noise may occur.
• Securely fasten the connector fixing screw.

INSTALLING THE PIRANI GAUGE
- 9 -
GP-H GP-BH
ＷＰ-01
ＷＰＢ-
10-034
ＷＰ-04
CONVERSION
CABLE WPB-10(2m)
CONVERSION CABLE
WP-04,05(2m)
SENSOR HEAD
CABLE
Fig. 2-1 GP-1G connection diagram

INSTALLING THE PIRANI GAUGE
- 10 -
2.2.4. A sensor head installation method to GP-H
Caution: The installation methods of a screw for fixation are different by a sensor head.
①
Install a screw for fixation
that is attached to GP-H to a
sensor head. By the kind of the
sensor head, installation
methods are different
For sensor head WP-01, 02
For sensor head WP-03, 16
It is inserted a
screw for fixation
by the vent side of
the sensor head.
②
Tighten a screw for
fixation in the main body of
GP-H, and please fix it.
Insert a screw for fixation from the
connector side of the sensor head.
Please insert it diagonally like a
figure.

OPERATING PROCEDURE
- 11 -
3. OPERATING PROCEDURE
3.1. Handling
• Start measurement more than one minute after power is turned ON and the indication is stabilized.
• For precision measurement, wait for at least 10 minutes until temperature equilibrium of the sensor
head is established after power is turned ON. Do not turn OFF the power when a sequence of
measurements is being made.
• If the sensor head is exposed to a chemically active gas or highly adsorptive gas, its characteristics
may change.
In such a case, fill the chamber with nitrogen, inert gas or dry air with the sensor head energized
with power, and then evacuate it. Repeat this purging operation. The sensor head may be
restored to the condition before the characteristics changed. At this time, do not blow gas toward
the opening plane of the sensor head even if the gas is inert or dry air.
If there is no prospect of the characteristics being restored by purging operation, replace the sensor
head.
• The Pirani vacuum gauge is sensitive to all types of gas, but its sensitivity varies with the type of
gas. This gauge indicates pressure by assuming that the gas is nitrogen (N2).

OPERATING PROCEDURE
- 12 -
3.2. Recorder Output
Check recorder connection
The recorder output is afloat from ground potential. Always connect the
recorder input to the recorder terminal by insulating it from ground. If it
is connected to GND potential by mistake, the meter will not indicate the correct
value. Also the vacuum gauge may be damaged.
Pa
mV
Torr
mV
0.4
2
5
10
20
40
60
80
100
200
400
600
800
1000
2000
0.15
0.35
0.65
1.10
1.70
2.53
3.13
3.63
4.00
5.31
6.70
7.46
7.94
8.29
9.17
0.003
0.01
0.05
0.1
0.2
0.4
0.6
0.8
1
2
3
4
6
8
10
20
0.15
0.27
0.83
1.30
2.02
2.97
3.62
4.12
4.52
5.91
6.70
7.26
7.94
8.36
8.65
9.40
*: Filament Error: More than approximately 15mV

OPERATING PROCEDURE
- 13 -
Fig. 3-1 Pressure vs. recorder output curve