Azbil F4Q User manual

Thank you for purchasing this product.
This manual contains information for
ensuring the safe and correct use of
the product.
Those designing or maintaining
equipment that uses this product
should first read and understand
this manual. This manual contains
information not only for installation,
but also for maintenance,
troubleshooting, etc. Be sure to keep it
nearby for handy reference.
™
(Not for use in Japan)
Digital Mass Flow Controller
Model F4Q
User’s Manual
No. CP-SP-1461E

NOTICE
Please make sure that this manual is available to the user of the product.
Unauthorized duplication of this user’s manual in part or in whole is
forbidden. The information and specifications in this manual are subject to
change without notice.
Considerable effort has been made to ensure that this manual is complete
and accurate, but if you should find an omission or error, please contact us.
In no event is Azbil Corporation liable to anyone for any indirect, special, or
consequential damages as a result of using this product.
© 2021 Azbil Corporation. All Rights Reserved.
µF™, Micro Flow™, and Micro Flow Sensor™ are trademarks of Azbil Corporation in
Japan.
Modbus™ is a trademark and the property of Schneider Electric SE, its subsidiaries
and affiliated companies.

i
Conventions Used in This Manual
The safety precautions explained below aim to prevent injury to you and others, and to prevent property damage.
WARNING Warnings are indicated when mishandling this product may
result in death or serious injury.
CAUTION Cautions are indicated when mishandling this product may
result in minor injury or property damage only.
In describing the product, this manual uses the icons and conventions listed below.
Indicates that caution is required in handling.
The indicated action is prohibited.
Be sure to follow the indicated instructions.
Handling Precautions:
Information to be aware of when handling.
Note: Indicates information that may be useful.
: Indicates an item or page to which the user may refer.
(1) (2) (3): Steps in a sequence or parts of a figure, etc.
>> : Indicates the result of an operation, or the status after the operation.
“XXXXXXXX” Indicates a message shown on the screen of the PC, this device, etc.
[XXX] or [XX] button: Square brackets indicate a window name, button, or menu shown on the screen of the
PC, this device, etc.

ii
Safety Precautions
WARNING
Never allow gases that are within explosive limits to pass through this device. Doing so might
result in an explosion.
If you allowed a gas that contains oil to pass through this device, do not allow oxygen to enter
this device afterward. The oil on the gas-contacting parts may catch fire.
Do not use this device in explosive atmospheres or near flammable fluids or steam.
CAUTION
If an overcurrent continuously flows through an output terminal for a long time due to a load
current above the rating, a load short, or other cause, smoke or fire may occur. Install a safety
circuit such as a fuse outside the device.
Make sure that devices or equipment connected to this device have reinforced insulation or
double insulation suitable for the maximum voltages of this device’s power supply and input/
output components. Otherwise, there is a danger of electric shock.
Do not allow lint, metal shavings, water, etc., to enter the case of this device. A malfunction or
failure may result.
This device is a precision instrument. Do not drop it or subject it to impact, or it might be
damaged.
When carrying and storing the device, put it in a plastic bag, etc., to prevent foreign matter
from entering the flow path.
If damage could result from the abnormal functioning of this device, include appropriate
redundancy in the system design.
When mounting this device on a pipe, make sure that the top panel does not face downward.
If the top panel faces downward, device failure may result.
When installing, securely attach the device using the mounting holes on its base to prevent
vibration. Otherwise, a malfunction or failure may result.
Prevent foreign matter from entering the flow path of this device. If rust, water droplets, oil
mist, or dust from the pipes enters the device, a measurement or control error may occur, or
the device may be damaged.
When using this device for the air-fuel ratio control of a burner, prevent the occurrence of
flashback and also take countermeasures for the instrumentation to protect the device even if
flashback occurs. A pressure increase or fire in the pipes caused by the backfire of the burner
could damage the device.
If there is a risk of a power surge caused by lightning, use a surge absorber (surge protector).
Otherwise, there is a danger of fire or device failure.

iii
CAUTION
Observe the following when using this device for oxygen gas:
• Piping should be done by a specialist experienced in handling oxygen.
• Use degreased pipes and parts.
• Be sure to remove foreign matter, burrs, etc., from the pipes before connecting this device.
• Do not touch the gas-contacting parts with bare hands.
Check the product connections and pipe connections for leakage before use. Also, check the
connections for leakage regularly after the start of use. It is the user’s responsibility to ensure
that gas leaks can be reliably detected. This is especially important if a dangerous gas is used.
Mount this device in a location that satisfies the operating conditions given in the
specifications. Otherwise, there is a danger of fire or device failure.
If the device is installed in an environment subject to large temperature changes, introduce
a flow of sufficiently dry gas through the pipes to remove any remaining wet gas in order to
prevent water from condensing. Otherwise, there is a danger of device failure.
Use this device within the flow rate range given in the specifications. To prevent excessive
flow, use a suitable means to control the supply pressure or use a throttle valve or the like to
control the flow rate. If the flow rate exceeds the upper limit, both the flow rate display and
the output voltage/current may indicate considerably lower values than the actual flow rate.
Do not subject the product to pressure beyond the rated pressure resistance range. The
product may be damaged.
Make sure that the wiring is correct before turning the power on. Incorrect wiring may result
in damage or malfunction.
Do not apply excessive force on the cable or connector while the connector cable is connected.
Excessive force may damage the product.
Do not disassemble this device. There is a danger of device failure.
Azbil products are industrial products subject to the WEEE Directive. Do not dispose of
electrical and electronic equipment in the same way as household waste.
Old products contain valuable raw materials and must be returned to an authorized collection
point for correct disposal or recycling.
Change the operational mode to fully closed before switching the gas type with external
contact input or before switching the flow rate range in order to change the analog input/
output voltage range. Switching while control is in progress causes a large disturbance in the
control results.
Do not blow air through the device or wipe the inside of the flow path with a rag.
Doing so may cause sensor malfunction.
Do not wash the device or steam-clean the inside of the flow path. Doing so may cause sensor
malfunction.
Do not apply a negative voltage or a voltage exceeding 5 V to the flow rate setting input (+)
terminal. A malfunction or failure may result.
If the gas must be completely shut off, provide a shutoff valve outside the device.
The valve on this device cannot completely stop the flow of gas.

iv
CAUTION
Do not turn off the power when settings are being written via RS-485 communication, when
settings are being changed using the PC loader, or during zero point adjustment. There is a
danger of device failure.
Do not apply voltage to the instantaneous flow rate setting input terminal while the power is
off.
A malfunction or device failure may result.
Before mounting, removing, or wiring this device, be sure to turn off the power to this device
and connected devices. Otherwise, there is a danger of electric shock.
Wire the device properly by following established standards and using the specified supply
power and installation methods.
This device is intended for use in an industrial electromagnetic environment. When using this
device in a residential environment, appropriate measures must be taken because this device
can cause interference.
During EMC testing, the reading or output may fluctuate. Please refer to“Standards
compliance” in Chapter 8, “Specifications.”
If you wish to use this device for a nonstandard gas, be sure to consult with us in advance.
Otherwise, there is a danger of device failure.
Do not connect a connector or supply power to this device if the connector of this device is
dusty or dirty. There is a danger of smoke or device failure.
If an external shutoff valve is closed, close this device’s valve also.
Otherwise, there is a danger of device failure.
When carrying this device, hold the bottom. Otherwise, injury or device failure may result.
Do not connect equipment that causes a large amount of throttling or pressure loss near this
device. Hunting may occur and the valve may be damaged.
Only the following gases can be used with EPDM gasket specifications. If this device is used
for a gas that is not allowed, deterioration of the seal may result.
- Compatible gases: air, nitrogen, argon, carbon dioxide, ammonia, and acetylene

v
The Role of This Manual
There are four different manuals related to model F4Q. Read them as necessary for your specific requirements.
If a manual you require is not available, contact the azbil Group or one of its dealers.
Digital Mass Flow Controller Model F4Q User’s Manual
Document No. CP-SP-1461E
This manual.
This manual describes the hardware and all functions of this device. Personnel in charge
of the design, manufacture, operation, or maintenance of equipment that incorporates
this device should read this manual thoroughly.
The manual covers installation, wiring, all functions and settings, operation,
troubleshooting, and specifications.
Digital Mass Flow Controller Model F4Q User’s Manual for RS-485
Communication Functions
Document No. CP-SP-1458E
Personnel who use this device’s communications functions should read this
manual.
The manual gives an overview of communications, describes wiring,
transmission protocols, communications data, and troubleshooting, and gives
communications specifications.
User’s Manual for Loader Package Model MLP-F4Q for Digital Mass Flow
Controller Model F4Q
Document No. CP-SP-1457E
The user can specify and check parameters of this device on a PC using the
loader package.
Personnel in charge of the design or configuration of equipment that
incorporates this device should read this manual thoroughly. The manual
describes installation of the software on a PC, the method for connecting the
loader to this device, various functions of the loader, procedures for setting up
this device, and operation of the PC.
Digital Mass Flow Controller Model F4Q User’s Manual
Document No. CP-UM-5978JECK
This manual is supplied with the product.
Personnel in charge of the design or configuration of equipment that
incorporates this device and personnel in charge of installation of this device
should read this manual thoroughly.
The manual covers safety precautions, installation, wiring, and main
specifications.

vi
Conventions Used in This Manual
Safety Precautions
The Role of This Manual
Chapter 1. Overview 1-1
 Overview 1-1
 Features 1-1
 Model selection guide 1-3
 Functions 1-5
Chapter 2. Names and Functions of Parts 2-1
 Top panel 2-1
 Main unit (model F4Q9200/9500/0002/0005/0020/0050) 2-2
Chapter 3. Mounting and Wiring 3-1
 Mounting 3-2
 Piping 3-5
 Wiring 3-6
Chapter 4. Basic Operations 4-1
4 - 1 Main Screen Display 4-1
 Top section of the main screen: Display of PV and errors or alarms 4-1
 Bottom section of the main screen: Multi-information display 4-2
 Status bar 4-5
4 - 2 Flow Rate Setting 4-7
 Flow rate setup method (SP setup method selection) 4-7
 Select from SP-0 to SP-7 4-8
 Setup by analog input 4-13
 Online SP 4-13
4 - 3 Valve Operation Mode Switching 4-14
 Switching with the keys 4-14
 Valve operation mode switching with digital input 4-15
 Operational mode selection when the power is turned ON 4-15
Chapter 5. Advanced Operations 5-1
5 - 1 Function Setup 5-1
 Setup procedure 5-1
 Settings 5-3
Contents

vii
5 - 2 Function Details 5-9
 Display-related 5-9
 Analog input/output 5-14
 Digital input/output 5-16
 Flow rate control 5-20
 Measurement conditions, flow rate correction 5-26
 Flow rate totalization 5-31
 Fail-safe function 5-34
5 - 3 Displaying Device Information 5-36
 Procedure for displaying device information 5-36
 Device information display items 5-37
5 - 4 Displaying the Monitor Screen 5-38
 Procedure for displaying the monitor screen 5-38
 Items displayed on the monitor screen 5-38
5 - 5 Maintenance 5-41
 Maintenance procedure 5-41
 Maintenance items 5-41
Chapter 6. Operations Using the PC Loader 6-1
6 - 1 Connection 6-2
6 - 2 Monitoring Parameters 6-3
 Monitoring parameters 6-3
6 - 3 Functions Only Available in the Loader 6-5
 Display-related 6-5
 Analog input/output 6-6
 Flow rate control 6-6
 Measurement conditions, flow rate correction 6-7
Chapter 7. Troubleshooting 7-1
 Types of device status and corrective actions 7-1
 Abnormal statuses and corrective actions 7-2
 Other problems 7-5
Chapter 8. Specifications 8-1
 Individual specifications 8-1
 Gas type and control range 8-7
 Relationship between differential pressure and flow rate when the valve is
open fully (for air) 8-8
 Optional parts 8-9
 External dimensions 8-10
 Separate display unit 8-13
 Dimensions of optional cables 8-14
 Dimensions of optional bracket 8-15

1-1
Chapter 1. Overview
 Overview
This device is a high-performance digital mass flow controller with advanced
functions for the general industrial market. It features high accuracy, high-speed
response, and a wide control range.
AC90V
132V
LFG
NC
NC
V.ADJ
DCOUT
H
0
V
A
+
RATING
100%(50Ω)
30%(7°C)
FG
Cable with dedicated connector
(optional)
Mass flow controller
Controller
(model C25/26, etc.)
24 V DC power supply (e.g., WN790A)
RS-485 device
Configuration diagram
Display
Connector (on the back)
 Features
• High-speed controllability
Achieves a high-speed response of 300 ms (typ.)*
* When control begins from the fully closed state or when the setting is changed during
control, the controlled flow rate reaches the set value ± 2 % within 300 ms.
• Low differential pressure operation
This device can be used even at a low differential pressures.
(The minimum operating differential pressure differs depending on the model)
• Wide control range
Provides a wide control range of 1–100 % full scale (FS).
• A lineup of products suited to customers’ applications
The lineup consists of integrated-display models and separate-display models.
With a separate-display model, a special 2 m cable (included) can be used for
remote display and operation of the controller.

1-2
Chapter 1. Overview
• Ease of use
The product runs on 24 V DC from a single general-purpose power supply. In
addition, the power supply circuit and I/O circuit inside the device are isolated.
When multiple F4Qs are driven through analog input/output using a
programmable logic controller (PLC) or the like, even if the analog module
channels on the PLC side are not isolated, a common power supply can be used to
power the units.
Even without using an individual power supply for each device, there is no need
for concern regarding effects from one circuit on adjacent ones.
In addition, for easy use in a laboratory, a convenient AC adapter (optional) is
available.
• Ease of setup
This device can be set up easily by connecting it and a PC with a general-purpose
USB 2.0 cable and using the dedicated PC loader software.
There is no need for an external power supply during setup because power is
supplied from the PC through the USB cable.
(Note that USB power cannot be used for control or for powering the display.)
• Changeable display orientation
The orientation of the display unit can be changed according to the gas flow
direction to make it easy to read.
• Better design
A large indicator for better visibility and design.
The use of an LCD on the display makes it easy to check settings and numerical
values.
• A variety of functions
A variety of functions are included as standard features.
Functions (p.1-5) (for details)

1-3
Chapter 1. Overview
 Model selection guide
z Face-to-face: 90 mm (with fluoroelastomer gaskets)
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17
Basic model No. Standard flow rate range Model type Flow path material Pipe connection Gas type Communication O-ring material Option 1 Option 2 Option 3 Code
Description
F 4 Q
9 2 0 0 2 to 200 mL/min (normal)*1
9 5 0 0 5 to 500 mL/min (normal)*1
0 0 0 2 0.02 to 2 L/min (normal)*1
0 0 0 5 0.05 to 5 L/min (normal)*1
0 0 2 0 0.2 to 20 L/min (normal)*1
0 0 5 0 0.5 to 50 L/min (normal)*1
B Integrated-display model
C Separate-display model
6 SUS316
T Rc ¼
S ¼ Swagelok fittings*2
V¼ VCR fittings*2
U 9/16-18 UNF
N Air/nitrogen*3
1 RS-485 communication (CPL/Modbus
RTU, switchable)
0 Fluororubber
0 No optional function
0 No optional function
0 0: Without inspection report
D D: With inspection report
Y Y: With inspection report and traceability
0 Product version
*1 Control flow rate range for air and nitrogen. The notations“mL/min (normal)”and “L/min (normal)” indicate the volumetric
flow rate (mL/min and L/min) converted to conditions of 0 °C and 1 atm (101.3 kPa (abs)).
*2 Before connecting pipes with Swagelok or VCR fittings, check the instructions in the manual provided by the
manufacturer of the fitting.
*3 The device can be used for gases other than air and nitrogen by changing the gas type setting. The controllable flow rate
range varies depending on the gas type. Chapter 8. Specifications (for details)

1-4
Chapter 1. Overview
z Face-to-face: 90 mm (with EPDM gaskets)
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17
Basic model No. Standard flow rate range Model type Flow path material Pipe connection Gas type Communication O-ring material Option 1 Option 2 Option 3 Code
Description
F 4 Q
9 2 0 0 2 to 200 mL/min (normal)*1
9 5 0 0 5 to 500 mL/min (normal)*1
0 0 0 2 0.02 to 2 L/min (normal)*1
0 0 0 5 0.05 to 5 L/min (normal)*1
0 0 2 0 0.2 to 20 L/min (normal)*1
0 0 5 0 0.5 to 50 L/min (normal)*1
B Integrated-display model
C Separate-display model
6 SUS316
T ¼ Rc
S ¼ Swagelok fittings*2
N Air/nitrogen*3
1 RS-485 communication (CPL/Modbus RTU,
switchable)
E EPDM*4
0 No optional function
0 No optional function
0 0: Without inspection report
D D: With inspection report
Y Y: With inspection report and traceability
0 Product version
*1 Control flow rate range for air and nitrogen. The notations“mL/min (normal)”and “L/min (normal)” indicate the volumetric
flow rate (mL/min and L/min) converted to conditions of 0 °C and 1 atm (101.3 kPa (abs)).
*2 Before connecting pipes with Swagelok or VCR fittings, check the instructions in the manual provided by the
manufacturer of the fitting.
*3 The device can be used for gases other than air and nitrogen by changing the gas type setting. The controllable flow rate
range varies depending on the gas type. Chapter 8. Specifications (for details)
*4 Only the following gases can be used with a model with the EPDM gasket specification. If this device is used for a gas that
is not allowed, deterioration of the seal may result.
Compatible gases: air, nitrogen, argon, carbon dioxide, ammonia, and acetylene

1-5
Chapter 1. Overview
 Functions
The configuration of the main screen and operations often used during steady
operation, such as flow rate setting and switching of the valve operation mode, are
described in Chapter 4. Basic Operations. Other functions and screen display
switching are described in Chapter 5. Advanced Operations.
Additional functions that can be used with the loader are described in Chapter
6. Operations Using the PC Loader.
Function Overview Refer to
Display-related Display orientation
setup
The screen display and key orientation can be
changed to match the device’s orientation. Chapter 5.
Advanced Operations
Multi-information
display
Various kinds of information, including process data
such as instantaneous flow rate and device status,
can be displayed.
Chapter 4. Basic
Operations
Key lock function Key operation on the display panel of this device
can be limited to prevent operation errors and as a
security measure.
Chapter 5.
Advanced Operations
Flow rate display change
(units and digits after
the decimal point)
The unit of measurement and the number of digits
after the decimal point for instantaneous flow rate
data display can be changed.
Totalized flow rate
display change (unit)
The unit of measurement and the number of digits
after the decimal point for totalized flow rate data
display can be changed.
Automatic display-off
function
This function turns off the LCD if the keys on the
display panel are not used for a certain amount of
time.
PV display filter time
constant setting
The displayed PV (instantaneous flow rate) can be
filtered.
User tag specification Any character string can be displayed at the bottom
of the main screen on the display of this device. Chapter 6.
Operations Using the
PC Loader

1-6
Chapter 1. Overview
Function Overview Refer to
Flow rate control Flow rate setting The flow rate can be changed using the operation
keys, digital input, analog input, or communication. Chapter 4. Basic
Operations
Direct setup function When the flow rate setting is changed using the
keys, the entered value is applied immediately as
the control SP.
Valve operation mode
switching
The valve operation mode can be switched
between control mode, fully closed mode, and fully
open mode.
SP limit The lower and upper limits of the flow rate setting
range can be freely set (to prevent incorrect setting
due to operator error).
Chapter 5.
Advanced Operations
Control response setup Control can be optimized.
PID constants Any PID constant can be set. Chapter 6.
Operations Using the
PC Loader
Flow rate OK judgment This function determines whether the control flow
rate is within the set value ± the allowable range. Chapter 5.
Advanced Operations
Flow rate deviation
event
Event output can be set for upper and lower
deviation of instantaneous flow rate from the flow
rate set point.
The operating mode can be set to change
automatically if an event occurs.
SP ramp control The change rate per second (gradient) of the flow
rate set point can be kept constant when control
starts and when the flow rate setting is changed.
Measurement
conditions, flow
rate correction
Standard temperature
setting for flow rate
display
You can select the standard temperature used when
converting from the measured mass flow rate to
volumetric flow rate.
Chapter 5.
Advanced Operations
Gas type selection The gas type can be selected from the standard
compatible gases.
PV filter The output PV can be smoothed.
PV fluctuation control
function when fully
closed
The PV filter can be expanded after a delay when
the flow rate set point is set to zero or when the
valve changes to fully closed mode.
Low flow cutoff The flow rate below the specified threshold is
regarded as zero.
Flow rate zero point
adjustment
Drift in the zero point of the sensor can be adjusted.
Device orientation &
pressure compensation
Compensation can be made for sensor drift due to
the orientation of the pipe on which the device is
mounted or due to the effect of pressure.
Filter application during
response
Whether to apply the PV filter to the output PV
during control response can be selected. Chapter 6.
Operations Using the
PC Loader
Full scale flow rate
setting for the gas type
set by the user
The control range of the gas type set by the user
can be changed freely.
Multipoint flow rate
correction
Linear compensation function for up to 10 points.
The control flow rate can be fine-tuned to the
reference device.

1-7
Chapter 1. Overview
Function Overview Refer to
Analog input/
output
Analog input/output
function
The analog input/output type can be selected from
0–5 V, 1–5 V, and 4–20 mA.
In addition, PV output or SP output can be selected
as the output item.
Chapter 5.
Advanced Operations
Optional analog scaling The flow rate corresponding to 100 % analog input/
output (5 V or 20 mA) can be freely changed to any
value.
Analog input/output
adjustment
Span adjustment and offset can be applied to the
analog input and analog output. Chapter 6.
Operations Using the
PC Loader
Digital input/
output
Digital input function The device can be remotely operated by assigning
functions to the three digital inputs. Chapter 5.
Advanced Operations
Digital output function The device can be remotely monitored by allocating
the device status, event, or other item to the three
digital outputs.
Flow volume
totalization
Total flow volume count
pause
Flow volume totalization can be paused with digital
input.
Total flow volume reset The totalized flow volume can be reset to zero using
the keys, digital input, communication, or other
means.
Totalizer pulse output A pulse can be output every time the specified
volume of flow is measured.
Totalized flow volume
event
An event can be output when the totalized flow
volume reaches the specified value.
In addition, the device can be automatically
switched to fully closed mode if the event occurs.
Diagnostic
function
Self-diagnostic function Problems such as circuit failure, parameter error, or
flow rate control error are detected and output as
device status information.
Chapter 7.
Troubleshooting
Diagnostic information Information such as total operating time, full-
close count, and abnormal device status since the
product was shipped are internally recorded.
Fail-safe function The operating mode or analog output can be set to
change automatically if an error occurs. Chapter 5.
Advanced Operations
Communication
function
RS-485 Data can be exchanged with host devices
(master stations) such as a PC or a PLC via RS-485
communication.
Digital Mass Flow Controller Model F4Q User’s
Manual for RS-485 Communication Functions (CP-SP-
1458E)
–
Loader Device setup and
monitoring
A simplified engineering software tool (loader) that
runs on a PC can be used for a variety of purposes
related to settings, monitoring, etc.
Chapter 6.
Operations Using the
PC Loader

2-1
Chapter 2. Names and Functions of Parts
 Top panel
Valve control key
Arrow keys
Communication
indicator
Display
Status indicator
Part name Application
Status indicator An LED to indicate abnormalities or valve control status
Communication
indicator
An LED to indicate the communication status of the device
Display Used to monitor controlled values or to specify settings.
Valve control key Used to switch between valve operation modes.
Arrow keys Used for general purposes such as screen transitions, cursor
movement, and numerical value input.
Handling Precautions
• Do not press the keys with a screwdriver, needle, or other sharp-tipped object.
Device failure may result.
Note
• The orientation of the display and the assignments of the keys on the top panel
can be switched according to the device’s orientation.
lDisplay orientation setup (p.5-9) (for details)

2-2
Chapter 2. Names and Functions of Parts
 Main unit (model F4Q9200/9500/0002/0005/0020/0050)
l Integrated model
Connector for
external connection
Micro USB
terminal for loader
Display
Arrow keys
Top panel
Inlet pipe
connection port
Outlet pipe
connection
port
l Separate model
Connector for
external connection
Connector for
separate display unit
Micro USB
terminal for loader
Inlet pipe
connection port
Outlet pipe
connection
port
Connector for external connection : For connection of input and output signals.
Use the cable with the dedicated connector.
Micro USB terminal for loader : Connect a general-purpose USB 2.0 cable
when using the PC loader.
Connector for separate display unit : Connects the display of a separate-display
model.
Inlet pipe connection port : Gas flow inlet.
Outlet pipe connection port : Gas flow outlet.