*1: The value converted to volumetric ow rate at standard condition (20 °C 1 barometric pressure (101 kPa) relative humidity 65%). Full scale stands for max.
scale ow rate in the ow rate range.
*2: Use dry gas which does not contain corrosive elements such as chlorine, sulfur or acids, and which is clean and does not contain dust or oil mist.
When using compressed air, use clean air compliant with JIS B8392-1: 2012 (ISO 8573-1: 2010) [1: 1: 1 to 1: 6: 2]. Compressed air from the compressor
contains drainage-water, oil oxide, foreign substances, etc. To maintain the function of this product, install a lter, air dryer (min. pressure dew point 10˚C or
less), and oil mist lter (max. oil concentration 0.1 mg/m3) on the primary side (upstream side) of this product.
[Recommended circuit]
[Recommended device]
Air lter: F Series
Oil mist lter: M Series
*3: The value for city gas 13A is a value for methane (CH4) 88% gas generated from LNG.
*4: Standard differential pressure is the differential pressure when this product is calibrated. (Secondary side released to atmosphere)
*5: Working pressure differential is the differential pressure required for normal operation of this product. Note that the values depend on the ow rate range and
applicable product(s) uids.
The min. value of the working pressure differential is the differential pressure required for the full scale ow rate to ow when secondary
side is released to atmosphere.
The max. working pressure (max. value of working pressure differential) is the max. value of primary side pressure. If more
pressure is applied, control may become unstable, or the max. ow rate may not be controllable.
*6: Ensure that the current supply capacity per IO-Link master port is sufcient.
*7: This product's protection circuit is effective only for specic misconnections. It does not provide protection for all misconnections.
*8: The low pressure line (1 to 2.5kPa) of city gas is outside the working pressure differential range.
*9: The accumulated ow is a reference value. It is reset when the power is turned OFF
*10: The valve inside this product cannot be used as a stop valve requiring zero leakage. Slight leakage is allowed for in the specications.
FCM Series
Specications
Display, integrating functions
(Low differential pressure model)
(Standard model)
Standard differential pressure, working pressure differential *4, 5
Pressure
Flow rate range *1
9500 0001 0002 0005 0010 0020 0050 0100
Applicable uids *2
AI
Standard differential pressure (kPa)
50 100 100 100 100 150 200 300
Working pressure differential (kPa)
20 to 150 50 to 200 50 to 250 50 to 250 50 to 250 100 to 300 150 to 300 250 to 350
Max. working pressure (kPa)
150 200 250 250 250 300 300 350
AR
Standard differential pressure (kPa)
50 100 100 100 100 150 200
Working pressure differential (kPa)
20 to 150 50 to 200 50 to 250 50 to 250 50 to 250 100 to 300 150 to 300
Max. working pressure (kPa)
150 200 250 250 250 300 300
O2
Standard differential pressure (kPa)
50 100 100 100 100
Working pressure differential (kPa)
20 to 150 50 to 200 50 to 250 50 to 250 50 to 250
Max. working pressure (kPa)
150 200 250 250 250
LN/C1
Standard differential pressure (kPa)
50 50 50 50 50
Working pressure differential (kPa)
20 to 150 20 to 150 20 to 150 20 to 150 30 to 150
Max. working pressure (kPa)
150 150 150 150 150
C3
Standard differential pressure (kPa)
50 50 50 50 50
Working pressure differential (kPa)
20 to 150 20 to 150 20 to 150 20 to 150 30 to 150
Max. working pressure (kPa)
150 150 150 150 150
Flow rate range *1
L9500 L0001 L0002 L0005 L0010
Applicable uids *2
AI/O2
LN/C1
C3 *8
Standard differential pressure (kPa)
20 20 20 20 20
Working pressure differential (kPa)
5 to 50 5 to 50 5 to 50 5 to 50 10 to 50
Max. working pressure (kPa)
50 50 50 50 50
Flow rate range *1
9500
L9500
0001
L0001
0002
L0002
0005
L0005
0010
L0010 0020 0050 0100
Flow rate
display
Display range
0 to 500 mL/min
0.00 to 1.00 L/min 0.00 to 2.00 L/min 0.00 to 5.00 L/min
0.0 to 10.0 L/min 0.0 to 20.0 L/min 0.0 to 50.0 L/min
0 to 100 L/min
Display resolution 1 mL/min 0.01 L/min 0.01 L/min 0.01 L/min 0.1 L/min 0.1 L/min 0.1 L/min 1 L/min
Integrating
functions *9
Display range 999999 mL 9999.99 L 9999.99 L 9999.99 L 99999.9 L 99999.9 L 99999.9 L 999999 L
Display resolution 1 mL 0.01 L 0.01 L 0.01 L 0.1 L 0.1 L 0.1 L 1 L
Pulse output rate 5 mL 0.01 L 0.02 L 0.05 L 0.1 L 0.2 L 0.5 L 1 L
Oil mist lter
(Micro alescer)
RegulatorAir dryer
Filter
FCM SeriesPneumatic
source
2
