Edwards SCU-1600 User manual

MT-76E-101-A
Description Voltage
SCU-1600 Control Unit 200 - 240 Va.c.
SCU-1600 Control Unit
Instruction Manual (C)
STP pump consists of the three-volumed Instruction Manuals.
Instruction Manual (A): STP pump generic Instruction Manual
Instruction Manual (B): STP pump specific information
Instruction Manual (C):
(This Instruction Manual)
STP control unit Instruction Manual
Supplied with STP control unit
Copyright 2010 Edwards Japan Limited. All rights reserved. Printed in Japan.

The description of this product consists of the three-volumed Instruction Manuals. Read through each
Instruction Manual before operation.
The separate volume contents of each description are as follows:
Instruction Manual (A)
STP pump generic Instruction Manual:
•Introduction
•Installation of the STP pump
•Installation of the STP control unit
•Operation
•Safety functions
•Maintenance and inspection
•Storage and disposal
•Service, Spares and accessories
Instruction Manual (B)
STP pump specific information:
•Technical data
•How to Secure the STP pump
•Temperature Management System （TMS）
Instruction Manual (C)
STP control unit Instruction Manual:
•Introduction
•Technical data
•Installation
•Operation
•Serial communication protocol
•STP-Link (except for SCU-750)
•Maintenance
•Storage, transportation and disposal
•Service, spares, and accessories
Keep the manuals in an easily accessible location.

Declaration of Conformity
We,
Manufacture: Edwards Japan Limited
1078-1, Yoshihashi, Yachiyo-shi, Chiba, 276-8523, Japan
EU Representative: Edwards Limited
Manor Royal, Crawley, West Sussex, RH10 9LW, UK
declare under our sole responsibility, as manufacturer and person within the EU authorised
to assemble the technical file, that the product(s)
Product Name: Control unit for turbomolecular pump
Model Number: SCU-1600
Accessories Covered: TMS Unit, Lon Communication Unit
to which this declaration relates is in conformity with the following standard(s) or other
normative document(s)
EN61010-1:2001 Safety requirements for electrical equipment for measurement,
control and laboratory Use. General requirements
EN61326-1:2006 Electrical equipment for measurement, control & laboratory Use.
EMC requirements. General requirements
(Immunity: Industrial locations, Emission: Class A)
EN61000-6-2:2005 Electromagnetic compatibility (EMC). Generic standards.
Immunity for industrial environments
EN55011:2007, A2:2007 Industrial, scientific and medical (ISM) radio-frequency equipment.
Electromagnetic disturbance characteristics (Group1, Class A)
and fulfils all the relevant provisions of
2006/95/EC Low Voltage Directive
2004/108/EC Electromagnetic Compatibility (EMC) Directive
2002/95/EC* Restriction of Certain Hazardous Substances (RoHS) Directive
* i.e. The product(s) contain less than - 0.1wt% for hexavalent chromium, lead, mercury, PBB and PBDE; 0.01wt% for
cadmium - in homogeneous materials (subject to the exemptions allowed by the Directive). This information relates
only to products sold on or after the date of this certificate. Edwards has taken all reasonable steps to confirm this
statement, which is based mainly on information from our suppliers. Whilst the RoHS Directive does not legally apply
to this vacuum equipment, we recognize that component compliance is relevant to many of our customers.
VI-DOC-76-001
EU representative:
Barrie D Brewster, Technical Manager, Edwards Limited
This product has been manufactured under a quality system registered to ISO9001
Manufacture:
Yuji Kato, TMP Technical Senior Manager, Edwards Japan Limited
1st Mar. 2010, Yachiyo
Date and Place
5t
h
Mar. 2010, Burgess Hill
Date and Place

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SCU-1600 Control Unit for Turbomolecular Pump
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i
CONTENTS
Section Title Page
1 INTRODUCTION 1
1.1 Scope and definitions 1
1.2 Applied standards 2
1.3 Limited warranty 2
1.3.1 Warranty period 2
1.3.2 Item warranted 2
1.3.3 Disclaimer 2
1.3.4 Spare parts 3
1.4 Labels 3
1.5 Label affixing positions 5
1.6 General description 6
1.6.1 Cable sets 7
2 TECHNICAL DATA 9
2.1 SCU-1600 specifications 9
3 INSTALLATION 13
3.1 Unpacking 13
3.2 Front panel 13
3.3 Rear panel 16
3.4 Precautions before installation 17
3.4.1 Operating environment 17
3.4.2 Insulation test 17
3.4.3 Installation area 18
3.5 Attaching the SCU-1600 to a rack 19
3.6 Cable connection 20
3.6.1 STP connection cable 21
3.6.2 TMS connection cable 22
3.6.3 Power cable 24
3.7 Connecting to semiconductor equipment 27
3.7.1 Connecting to power 27
3.7.2 Emergency off circuit (EMO circuit) 27
3.8 Remote communication 28
3.8.1 Parallel communication 28
3.8.2 Serial communication 28
3.9 Adjustment methods 29
3.9.1 Tuning 29
3.9.2 Tuning method 29
3.9.3 Change of data after tuning 32
3.10 Confirmation mode 33
3.10.1 Confirmation method 33
3.11 Parameter set mode 35
3.11.1 Remote operation setting 35
3.11.2 Rotational speed setting 35
3.11.3 TMS setting 35
3.11.4 Rotational inhibit signal setting 35

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ii CONTENTS (CONTINUED)
Section Title Page
3.11.5 Second speed option setting 35
3.11.6 Second speed setting 35
3.11.7 Optional output signal setting (Emergency vent valve setting) 36
3.11.8 Second Damage Limit setting 36
3.11.9 Warning function setting 37
3.11.10 Serial port COM1 setting 38
3.11.11 Serial port COM2 setting 38
3.11.12 Date/Time setting 38
3.11.13 Factory setting 38
3.11.14 Parameter setting procedure 39
3.12 Manual operation mode 45
4 OPERATION 47
4.1 Before starting the STP pump 47
4.1.1 Confirmation before starting 47
4.1.2 Confirmation of vacuum system 47
4.2 Powering ON 48
4.2.1 Self test 48
4.2.2 "CAUTION" message in the self test state 48
4.3 How to start/stop the STP pump 49
4.4 Manual start/stop the STP pump 49
4.4.1 Starting the STP pump 49
4.4.2 Stopping the STP pump 49
4.4.3 Starting the STP pump after stopping 49
4.5 Remote operation 51
4.5.1 Input signal pins 51
4.5.2 Output signal pins 55
4.5.3 Remote setting 59
4.5.4 Starting/Stopping the STP pump 59
4.5.5 Rotation INHIBIT signal 60
4.5.6 Second speed option 61
4.5.7 Starting the STP pump after stopping 63
4.5.8 Starting the STP pump after a safety function operates 63
4.6 Powering OFF 63
4.7 Operating the TMS unit (for use with the TMS unit) 64
4.7.1 Before starting 64
4.7.2 Starting/Stopping 64
4.7.3 Setting the TMS unit function 64
4.7.4 Temperature control 64

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iii
CONTENTS (CONTINUED)
Section Title Page
5 SERIAL COMMUNICATION PROTOCOL 65
5.1 Introduction 65
5.2 Connection and setting up 65
5.2.1 Signal connection 65
5.2.2 Connecting the RS485 68
5.2.3 Communication parameter setting 69
5.3 Protocol specifications 69
5.3.1 General description 69
5.3.2 Standard transmission frame
(in the RS232/RS485 single point connection) 70
5.3.3 Control command
(in the RS232/RS485 single point connection) 71
5.3.4 Query command
(in the RS232/RS485 single point connection) 72
5.3.5 Transmission data format 73
5.3.6 Frame control (checksum) 74
5.3.7 Error control 74
5.3.8 Transmission frame in the RS485 multi-point connection 74
5.3.9 Control command in the RS485 multi-point connection 76
5.3.10 Query command in the RS485 multi-point connection 77
5.3.11 Broadcasting command in the RS485 multi-point connection 78
5.4 Command specifications 79
5.4.1 Command list 79
5.4.2 ReadMeas 80
5.4.3 Command 80
5.4.4 ReadFailMess 81
5.4.5 ReadModFonct 84
5.4.6 ReadVersion 86
5.4.7 ReadCounters 87
5.4.8 ReadSetPoint 88
5.4.9 ReadMotorTemp 88
5.4.10 ReadStatus 89
5.4.11 ReadEvents 90
5.4.12 SetSpeedSetPoint 91
5.4.13 ReadSpeedSetPoint 92
5.4.14 ReadModFonctWithWarning 93
5.4.15 ReadMeasValue 96
5.4.16 SetOptions 98
5.4.16.1 Second speed option setting 98
5.4.16.2 Second speed selection 99
5.4.17 ReadOptions 100
5.4.17.1 Second speed function setting 100
5.4.17.2 Second speed select 101

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iv CONTENTS (CONTINUED)
Section Title Page
6 STP-LINK 103
7 MAINTENANCE 105
7.1 Safety functions 105
7.1.1 Power failure 105
7.1.2 Operation after a power recovery 106
7.1.3 Abnormal state of magnetic bearing 107
7.1.4 Excessive vibration 107
7.1.5 Motor driver overload 107
7.1.6 Overheating inside the STP pump 107
7.1.7 Overheating inside the SCU-1600 107
7.1.8 Overspeed 108
7.1.9 Abnormality/Error in the TMS unit (for use with the TMS unit) 108
7.2 "WARNING" message function 109
7.2.1 "WARNING" message display function 109
7.3 "WARNING" message description 110
7.3.1 Damage point function 110
7.3.2 First damage limit 110
7.3.3 Second damage limit 110
7.3.4 Imbalance X_H, X_B, Z 111
7.3.5 Pump run time over 111
7.3.6 Pump overload 111
7.3.7 Low RTC battery 112
7.4 "WARNING" function setting 113
7.5 Error at self test state 114
7.5.1 Error after self test 115
7.5.2 Error messages 115
7.5.3 Troubleshooting immediately after power failure occurs 115
7.5.4 Troubleshooting immediately
after other abnormality/errors occur 116
7.6 When error message is not displayed on LCD 124
7.6.1 Abnormalities when powering ON 124
7.6.2 Abnormalities when performing rotational operation 124
7.6.3 Other abnormalities 125
7.7 "Error Record" message display function 125
7.8 Maintenance and inspection 126
7.8.1 Cleaning 126
7.8.2 Overhaul 126
8 STORAGE, TRANSPORTATION AND DISPOSAL 127
8.1 Storage of the SCU-1600 127
8.2 Transporting for repair or overhaul 127
8.3 Disposal 128

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v
CONTENTS (CONTINUED)
Section Title Page
9 SERVICE, SPARES AND ACCESSORIES 129
9.1 Introduction 129
9.2 Service 129
9.3 Spares 129
9.4 Accessories 130

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vi ILLUSTRATIONS
Figure Title Page
1 High voltage device caution label 3
2 Safety instruction label 4
3 Caution label 4
4 Connector caution label 4
5 Voltage rating label 4
6 Label affixing positions 5
7 SCU-1600 control unit 6
8 Configuration of the STP pump with the TMS 7
9 SCU-1600 dimensions (mm) 11
10 SCU-1600 front panel 13
11 SCU-1600 rear panel 16
12 Installing the SCU-1600 18
13 Example of securing the SCU-1600 19
14 STP pump connection cable 21
15 TMS connection cable (with distribution box) 22
16 TMS connection cable (without sensor cable) 23
17 TMS connection cable (with sensor cable) 23
18 Power cable (without plug) 24
19 Power cable (with plug) 25
20 Connecting method of the power cable without plug 26
21 REMOTE X7 connector 28
22 Connector X3A, X3B (D-sub 9) 28
23 Tuning procedures 31
25 Parameter setting method 40
26 Parameter setting method (continued) 41
27 Parameter setting method (continued) 42
28 Parameter setting method (continued) 44
29 Manual operation method 45
30 Operational procedures 50
31 REMOTE X7 input signal pins 54
32 REMOTE X7 output signal pins 58
33 Serial communication 65
34 Connector X3A/X3B (D-sub 9) 66
35 Connector X7 (D-sub 37) 66
36 RS485 connections 68
37 PC to SIM communication 69

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vii
TABLES
Table Title Page
1 Turbomolecular pumps 6
2 SCU-1600 front panel functions 14
3 SCU-1600 front panel functions (continued) 15
4 SCU-1600 rear panel connection 16
5 Power cable 25
6 User setting data list 32
7 Causes of "CAUTION" at the self test state 48
8 REMOTE X7 input signal pins 52
9 REMOTE X7 input signal pins (continued) 53
10 REMOTE X7 output signal pins 56
11 REMOTE X7 output signal pins (continued) 57
12 Rated contacts for relays CR1 to CR9 59
13 Starting/Stopping the STP pump
during remote operation (REMOTE X7) 59
14 Rotation INHIBIT signal input 60
15 Second speed function 62
16 Reset operation during remote operation (REMOTE X7) 63
17 X3A/X3B pin position 65
18 X7 pin position 66
19 Communication parameters 69
20 Transmission control characters 70
21 Pump operation commands 78
22 Command list 79
23 Pump operation commands 81
24 Error message values 83
25 Error message values (continued) 84
26 Pump operation mode 85
27 Remote mode 90
28 Warning value bit assign 94
29 Option function number and parameter list 98
30 Option function number and parameter list 100
31 Functions of STP-Link 103
32 Backup rotational speed 105
33 States of LCD, LEDs and REMOTE output signals
at a power failure 106
34 Accumulated damage point and warning message 110
35 Default setting of "WARNING" function 113
36 Factory setting and variable range 113
37 Error messages at self test state 114
38 Error messages after self test 117
39 Error messages after self test (continued) 118
40 Error messages after self test (continued) 119
41 Error messages after self test (continued) 120
42 Error messages after self test (continued) 121
43 Error messages after self test (continued) 122
44 Error messages after self test (continued) 123
45 Troubleshooting when powering ON 124
46 Troubleshooting when performing the STP pump
start operation 124
47 Troubleshooting while the STP pump is rotating 125

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SCU-1600 Control Unit for Turbomolecular Pump
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INTRODUCTION
1 INTRODUCTION
1.1 Scope and definitions
This manual provides installation, operation and maintenance instructions for the Edwards SCU-1600
control unit (abbreviated to "SCU-1600" throughout this manual) for the Turbomolecular pump (STP).
You must use the SCU-1600 as specified in this manual.
The procedures in this manual must be followed before you install, operate and maintain the SCU-1600.
Important safety information is highlighted as WARNING and CAUTION instructions; these instructions
are mandatory. The use of WARNINGS and CAUTIONS is defined below.
WARNING
Warnings are given where failure to observe the instruction could result in serious injury
or death to people.
CAUTION
Cautions are given where failure to observe the instruction could result minor personal injury in
damage to the equipment, associated equipment and/or process.
Note: Items you must follow during operation and maintenance.
Throughout this manual, page, figure and table numbers are sequential.
The units used throughout this manual conform to the SI international system of units of measurement;
US equivalent units of measurement are also given.
The following IEC warning labels/symbols appear on the SCU-1600:
Warning - refer to accompanying documentation.
Warning - risk of electric shock.
Protective earth (ground).
Note: An alarm function is incorporated into this STP series. Alarm and cautionary messages are
displayed on the LCD of the SCU-1600. Note that the words "WARNING" and "CAUTION"
displayed on the LCD indicate the need for overhaul of the pump or precautions during the
operation. They do not have the same meaning as the much more serious symbols for
"WARNING" and "CAUTION" used in the instruction manual.

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INTRODUCTION
1.2 Applied standards
The SCU-1600 conforms to the following directives and standards:
1. Applied Directives
•EC Low Voltage Directive
•EC Electromagnetic Compatibility Directive
2. Applied Standards
•EN61010-1 / IEC61010-1
•EN61326 (class A)
•UL61010-1 (Electrical Equipment for Measurement, Control, and Laboratory Use)
1.3 Limited warranty
This WARRANTY applies to the customer to whom Edwards has delivered this product.
1.3.1 Warranty period
Edwards warrants this product against defects for a period of two (2) years from the date of delivery or
during the period specified in the agreement made by and between the customer and Edwards.
1.3.2 Item warranted
1. This warranty applies only to the product delivered from Edwards to the customer.
2. If any defect is found during this period, Edwards will, at its option, repair or recondition the product
free of charge. The costs for repair or replacement of the product after the warranty period has
passed will be at your own charge.
1.3.3 Disclaimer
Edwards makes no warranty with respect to any damage occurred due to any of the following during
the warranty period:
1. Handling, operation or maintenance other than that specified herein.
2. Failure to follow any of the warnings or cautions enumerated in this manual.
3. Installation, operation or maintenance using parts which are not specified by Edwards.
4. Maintenance personnel other than those authorized by Edwards or Service office have
disassembled, reconditioned, or tampered the product.

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INTRODUCTION
5. Defect resulting from the not-specified use of the product.
6. When the product is used under special conditions without obtaining the written consent of
Edwards (strong magnetic field and the radiation are added to the product).
7. Defect resulting from the installation of the product (exclude the installation by authorized
personnel).
8. Deterioration in the external because of use (discoloration, scratches and so forth).
9. Product damage occurred during transport or other factors not attributable to Edwards.
10. Product breakage or damage due to natural disasters, fire or other external factors.
11. Deterioration in the basic performance due to the use of the product beyond limits of the use.
12. Any direct, incidental or consequential damage resulting from the use of the product.
13. When continuously operated without overhaul after the WARNING indication ("WARNING"
message) on the LCD.
14. Overhaul and replacement of maintenance parts.
1.3.4 Spare parts
•Air-cooling fan for SCU-1600. (When exchanging, contact Service Office).
1.4 Labels
The following labels are affixed or printed to the SCU-1600. Read the contents of the labels before
operation.
1. High voltage device caution label
The SCU-1600 is equipped with a high voltage device. This label warns operators to pay
attention to the high voltage device at the maintenance and inspection.
Figure 1 - High voltage device caution label

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INTRODUCTION
2. Safety instruction label
This label describes instructions before operating the SCU-1600.
Figure 2 - Safety instruction label
3. Caution label
This label describes precautions for operating the SCU-1600. Follow these precautions.
Figure 3 - Caution label
4. Connector caution label
This label describes lock of the connector.
The label instructs operators to prevent the connectors from being disconnected while the STP
pump is in operation.
Figure 4 - Connector caution label
5. Voltage rating label
This label describes the rated voltage of the SCU-1600. Use voltage specified in this label.
Figure 5 - Voltage rating label

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INTRODUCTION
1.5 Label affixing positions
Refer to Section 1.4 for the details of the labels 1 to 5.
Figure 6 - Label affixing positions
1 High voltage device caution label
2 Safety instruction label
3 Caution label
4 Connector caution label
5 Voltage rating label
6 Name plate
7 Parts number
1
2
3
4
6
5
7

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INTRODUCTION
1.6 General description
The SCU-1600 is the control unit required to drive the STP series of turbomolecular pumps. The
SCU-1600 converts the single-phase line supply voltage into a 3-phase d.c. voltage to drive the pump
motor. It also evaluates measured signals and performs the following functions:
•It provides logic to control the pump functions.
•It operates the magnetic bearing system.
•It operates the optional Temperature Management System (TMS).
Figure 7 - SCU-1600 control unit
The following series of turbomolecular pumps can be used in conjunction with the SCU-1600.
Model Name Specification
STP-A2203 series Advanced high-throughput type
STP-A2503/A3003 series Advanced high-throughput type
STP-A2803/A3503 series Advanced high-throughput type
STP-F2203 series High flow type
STP-XH2603/XH3203 series Extreme hydrogen performance type
STP-XA2703/XA3203 series Extreme advanced throughput type
STP-XA4503 series Extreme advanced throughput type
STP-XW3503 series High back pressures type
Table 1 - Turbomolecular pumps
X8 STP-LINK

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INTRODUCTION
1.6.1 Cable sets
The following cable sets (optional accessories) are used with the SCU-1600 and STP pump:
•STP connection cable - STP pump to SCU-1600.
•TMS cable - STP pump to built-in TMS unit in the SCU-1600.
•Power cable - SCU-1600 to power supply.
Note: Figure 8 shows a typical TMS system installation. System connections and cables differ
according to the type of pump connected to the SCU-1600. Refer to the STP pump Instruction
Manual (A) and (B) for full details of connection cables and system connections.
1 SCU-1600 control unit 5 TMS valve cable
2 STP connection cable 6 TMS connection cable
3 TMS sensor cable 7 Power cable
4 TMS heater cable
Figure 8 - Configuration of the STP pump with the TMS
1
2
3
4
5
6
7

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