MKS 390 Series User manual

Series 390
Instruction Manual
Granville-Phillips®Series 390 Micro-Ion®ATM,
Four-Sensor Combination Vacuum Gauge Module
with RS-485 Interface and Analog Output
Instruction manual part number 390001
Revision H - November 2016

Series 390
Instruction Manual
This Instruction Manual is for use with all Granville-Phillips Series
390 Micro-Ion ATM Modules with RS-485 Interface and Analog
Output. A list of applicable catalog numbers is provided on the
following page.
These products are RoHS compliant.
Granville-Phillips®Series 390 Micro-Ion®ATM,
Four-Sensor Combination Vacuum Gauge Module
with RS-485 Interface and Analog Output
Customer Service / Technical Support:
MKS Pressure and Vacuum Measurement Solutions
MKS Instruments, Inc., Granville-Phillips®Division
6450 Dry Creek Parkway
Longmont, Colorado 80503 USA
Tel: [phone]
Fax: [phone]
Email: [email protected]
MKS Corporate Headquarters
MKS Instruments, Inc.
2 Tech Drive, Suite 201
Andover, MA 01810 USA
Tel: [phone]
Fax: [phone]
Email: [email protected]
© 2016 MKS Instruments, Inc. All rights reserved. Granville-Phillips®, Micro-Ion®, and
Conductron®are registered trademarks, and mksinstTM is a trademark of MKS
Instruments, Inc. All other trademarks and registered trademarks are the properties of
their respective owners.

Granville-Phillips®Series 390 Micro-Ion®ATM, Four-Sensor Combination
Vacuum Gauge Module with RS-485 Interface and Analog Output
Catalog numbers for Series 390 Micro-Ion ATM Modules
Power supply and cable are not included.
Analog output only - no display: 390410 - 0 - # # - #
Analog output only - with digital display: 390411 - 0 - # # - #
RS-485 interface & analog output - no display: 390510 - # - # # - #
RS-485 interface & analog output - with digital display: 390511 - # - # # - #
Setpoints:
None 0
Two 2
Three 3
Ion Gauge Filaments:
Yttria-coated iridium Y
Tungsten T
Flange/Fitting:
NW16KF D
NW25KF E
NW40KF K
1.33 inch (NW16CF) Conflat-type F
2.75 inch (NW35CF) Conflat-type G
1/2 inch VCR-type male H
Measurement Units:
Torr T
mbar M
Pascal P

Table of Contents
Micro-Ion®ATM Module Instruction Manual - 390001 5
Table of Contents
Chapter 1 Before You Begin . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
1.1 About these instructions . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
1.2 Caution and warning statements . . . . . . . . . . . . . . . . . . . . . 9
1.3 System Grounding . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
1.4 Implosion / Explosion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
1.5 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
1.6 Reading and following instructions . . . . . . . . . . . . . . . . . . . 11
1.7 Definitions of terms . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
1.8 Customer service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
Chapter 2 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
2.1 Module components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
2.2 Pressure relief devices . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
2.3 Installation procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
Step 1 Locate the module . . . . . . . . . . . . . . . . . . . . . . . . 14
Step 2 Attach module to vacuum chamber . . . . . . . . . . . 16
VCR type fitting . . . . . . . . . . . . . . . . . . . . . . . . . . 16
KF flange . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
ConFlat flange . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
Step 3 Assemble and connect wiring . . . . . . . . . . . . . . . . 17
Connecting cable . . . . . . . . . . . . . . . . . . . . . . . . . 17
Power supply wiring . . . . . . . . . . . . . . . . . . . . . . . 17
Gauge/degas wiring . . . . . . . . . . . . . . . . . . . . . . . 17
Wiring terminals . . . . . . . . . . . . . . . . . . . . . . . . . . 17
Chassis Ground . . . . . . . . . . . . . . . . . . . . . . . . . . 19
Step 4 Calibrate module at atmospheric pressure . . . . . . 20
2.4 Eliminating radio frequency interference . . . . . . . . . . . . . . . 20
Chapter 3 Operation Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
3.1 Analog operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
3.2 RS-485 operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
3.3 Automatic filament selection . . . . . . . . . . . . . . . . . . . . . . . . 23
Chapter 4 Analog Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
4.1 Output functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
4.2 Preparing to operate the module . . . . . . . . . . . . . . . . . . . . . 25
4.3 Operational tasks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
4.4 LED status indicator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
4.5 Reading pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
Reading vacuum pressure . . . . . . . . . . . . . . . . . . . . . . . . . . 27

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6Micro-Ion®ATM Module Instruction Manual - 390001
Reading differential pressure . . . . . . . . . . . . . . . . . . . . . . . . 28
4.6 Micro-Ion gauge OFF . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
4.7 Micro-Ion gauge degas . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
4.8 Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
Atmospheric pressure calibration . . . . . . . . . . . . . . . . . . . . 32
Vacuum pressure calibration . . . . . . . . . . . . . . . . . . . . . . . . 32
Chapter 5 RS-485 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
5.1 Pressure output and relay functions . . . . . . . . . . . . . . . . . . . 33
5.2 Preparing to operate the module . . . . . . . . . . . . . . . . . . . . . 33
5.3 RS-485 physical layer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
5.4 Operational tasks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
5.5 Error responses . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
5.6 Data timing and response . . . . . . . . . . . . . . . . . . . . . . . . . . 36
5.7 RS-485 commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
Command structure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
Symbols used in this manual . . . . . . . . . . . . . . . . . . . . . . . . 38
5.8 RS-485 command set . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
TLU Toggling locked functions . . . . . . . . . . . . . . . . . . . 41
UNL Unlock interface functions . . . . . . . . . . . . . . . . . . 41
SA Set address offset . . . . . . . . . . . . . . . . . . . . . . . . . 42
SB Set baud rate . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43
yuiop Restore RS-485 communication defaults . . . . . . . . 43
SU Set pressure unit . . . . . . . . . . . . . . . . . . . . . . . . . . 43
SD Set pressure indication for optional display . . . . . . 43
RU Read pressure unit . . . . . . . . . . . . . . . . . . . . . . . . 43
RD Read vacuum pressure . . . . . . . . . . . . . . . . . . . . . 44
RDD Read differential pressure . . . . . . . . . . . . . . . . . . . 44
PC Process control relay
trip points . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
PCG Set trip point relay assignments . . . . . . . . . . . . . . . 49
PCE Set or read disable/enable state of relays . . . . . . . . 49
RPCS Read trip point relay status . . . . . . . . . . . . . . . . . . 50
IG Turn Micro-Ion gauge ON or OFF . . . . . . . . . . . . 50
IGS Read Micro-Ion gauge ON/OFF status . . . . . . . . . 50
IGM Set or read pressure indication when Micro-Ion gauge is
OFF . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51
IOD Set or read Micro-Ion gauge delay ON/OFF state . 52
IDT Set or read Micro-Ion gauge delay time . . . . . . . . 53
SF Set Micro-Ion gauge filament mode . . . . . . . . . . . 54
RF Read Micro-Ion gauge filament status . . . . . . . . . . 58
DG Degas Micro-Ion gauge . . . . . . . . . . . . . . . . . . . . 58
DGS Read Micro-Ion gauge degas status . . . . . . . . . . . . 58
DGT Set or read Micro-Ion gauge degas time . . . . . . . . 59
SER Set emission current switch point . . . . . . . . . . . . . 59

Table of Contents
Micro-Ion®ATM Module Instruction Manual - 390001 7
RE Read Micro-Ion gauge emission current . . . . . . . . 61
TS Calibrate module at atmospheric pressure . . . . . . 61
TZ Calibrate module at vacuum pressure . . . . . . . . . . 62
ATM Set or read atmospheric pressure output . . . . . . . . 63
RS Read module status RS–485 strings . . . . . . . . . . . . 63
RSX Read module status hexadecimal bits . . . . . . . . . . 65
RST Reset module to power-up state . . . . . . . . . . . . . . 68
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68
FAC Reset values to factory defaults . . . . . . . . . . . . . . . 68
VER Read firmware version . . . . . . . . . . . . . . . . . . . . . 68
Chapter 6 Optional Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 69
6.1 Display capabilities . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 69
Vacuum pressure display . . . . . . . . . . . . . . . . . . . . . . . . . . 69
Differential pressure display . . . . . . . . . . . . . . . . . . . . . . . . 69
6.2 Display resolution . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 70
6.3 Error conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 70
Chapter 7 Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73
7.1 Customer Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73
7.2 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 74
Precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 74
Symptoms, causes, and solutions . . . . . . . . . . . . . . . . . . . . 75
RS-485 error responses . . . . . . . . . . . . . . . . . . . . . . . . . . . . 76
7.3 Micro-Ion gauge continuity test . . . . . . . . . . . . . . . . . . . . . . 77
7.4 Replacing the gauge assembly . . . . . . . . . . . . . . . . . . . . . . 79
7.5 Returning a Micro-Ion module for service . . . . . . . . . . . . . . 79
Appendix A Specifications & Compliance . . . . . . . . . . . . . . . . . . . . . . . . . . 81
Appendix B Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 89
Index . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 93

Table of Contents
8Micro-Ion®ATM Module Instruction Manual - 390001

Before You Begin
Micro-Ion®ATM Module Instruction Manual - 390001 9
Before You Begin Installation Operation Overview Analog Operation Optional DisplayRS-485 Operation
Chapter 1 Before You Begin
1.1 About these instructions These instructions explain how to install, operate, and maintain the
Granville-Phillips®Micro-Ion®ATM vacuum gauge module.
The module may have an RS-485 interface and one or two analog outputs.
The module with an RS-485 interface may have no trip point relays, two trip
point relays, or three trip point relays. Installation and operating procedures
depend on the outputs.
•This chapter explains caution and warning statements, which must be
adhered to at all times; explains your responsibility for reading and
following all instructions; defines the terms that are used throughout this
instruction manual; and explains how to contact customer service.
•Chapter 2 explains how to install the module.
•Chapter 3 is an operational overview of the module.
•Chapter 4 explains analog output operation.
•Chapter 5 explains RS-485 interface and relay operation.
•Chapter 6 explains how to use the optional display.
•Chapter 7 explains troubleshooting; Micro-Ion gauge testing, removal
and replacement; and module return procedures.
•Appendix A provides specifications for the module.
•Appendix B explains how the Micro-Ion gauge, Conductron®heat-loss
sensor, atmospheric pressure diaphragm sensor, and vacuum pressure
diaphragm sensor measure pressure.
1.2 Caution and warning
statements
This manual contains caution and warning statements with which you must
comply to prevent inaccurate measurement, property damage, or personal
injury.
CAUTION
Caution statements alert you to hazards or unsafe
practices that could result in inaccurate measurement,
minor personal injury or property damage.
Each caution statement explains what you must do to prevent or
avoid the potential result of the specified hazard or unsafe
practice.

Chapter 1
10 Micro-Ion®ATM Module Instruction Manual - 390001
Caution and warning statements comply with American Institute of
Standards Z535.1–2002 through Z535.5–2002, which set forth voluntary
practices regarding the content and appearance of safety signs, symbols,
and labels.
Each caution or warning statement explains:
a. The specific hazard that you must prevent or unsafe practice that you
must avoid,
b. The potential result of your failure to prevent the specified hazard or
avoid the unsafe practice, and
c. What you must do to prevent the specified hazardous result.
1.3 System Grounding Grounding, though simple, is very important! Be certain that ground circuits
are correctly used on your ion gauge power supplies, gauges, and vacuum
chambers, regardless of their manufacturer. Safe operation of vacuum
equipment, including the Series 390 ATM Module, requires grounding of all
exposed conductors of the gauges, the controller and the vacuum system.
LETHAL VOLTAGES may be established under some operating conditions
unless correct grounding is provided.
Ion producing equipment, such as ionization gauges, mass spectrometers,
sputtering systems, etc., from many manufacturers may, under some
conditions, provide sufficient electrical conduction via a plasma to couple
a high voltage electrode potential to the vacuum chamber. If exposed
conductive parts of the gauge, controller, and chamber are not properly
grounded, they may attain a potential near that of the high voltage electrode
during this coupling. Potential fatal electrical shock could then occur
because of the high voltage between these exposed conductors and ground.
1.4 Implosion / Explosion Danger of injury to personnel and damage to equipment exists on all
vacuum systems that incorporate gas sources or involve processes capable
of pressuring the system above the limits it can safely withstand.
For example, danger of explosion in a vacuum system exists during
backfilling from pressurized gas cylinders because many vacuum devices
such as ionization gauge tubes, glass windows, glass bellfars, etc., are not
designed to be pressurized.
WARNING
Warning statements alert you to hazards or unsafe
practices that could result in severe property damage or
personal injury due to electrical shock, fire, or explosion.
Each warning statement explains what you must do to prevent
or avoid the potential result of the specified hazard or unsafe
practice.

Before You Begin
Micro-Ion®ATM Module Instruction Manual - 390001 11
Before You Begin Installation Operation Overview Analog Operation Optional DisplayRS-485 Operation
Do not attach cables to glass gauge pins while the gauge is under vacuum.
Accidental bending of the pins may cause the glass to break and implode.
Cables, once installed, should be secured to the system to provide strain
relief for the gauge tube pins.
Install suitable devices that will limit the pressure from external gas sources
to the level that the vacuum system can safely withstand. In addition, install
suitable pressure relief valves or rupture disks that will release pressure at a
level considerably below that pressure which the system can safely
withstand.
Suppliers of pressure relief valves and pressure relief disks can be located
via an on-line search, and are listed on ThomasNet.com. Confirm that
these safety devices are properly installed before installing the Series 390
Micro-Ion Module.
In addition, check that (1) the proper gas cylinders are installed, (2) gas
cylinder valve positions are correct on manual systems, and (3) the
automation is correct on automated systems.
1.5 Operation It is the installer's responsibility to ensure that the automatic signals
provided by the process control module are always used in a safe manner.
Carefully check manual operation of the system and the setpoint
programming before switching to automatic operation. Where an
equipment malfunction could cause a hazardous situation, always provide
for fail-safe operation. As an example, in an automatic backfill operation
where a malfunction might cause high internal pressures, provide an
appropriate pressure relief device.
1.6 Reading and following
instructions
You must comply with all instructions while you are installing, operating,
or maintaining the module. Failure to comply with the instructions violates
standards of design, manufacture, and intended use of the module. MKS
Instruments, Inc. / Granville-Phillips disclaim all liability for the customer's
failure to comply with the instructions.
•Read instructions – Read all instructions before installing or operating the
product.
•Follow instructions – Follow all installation, operating and maintenance
instructions.
•Retain instructions – Retain the instructions for future reference.
•Heed warnings and cautions – Adhere to all warnings and caution
statements on the product and in these instructions.
•Parts and accessories – Install only those replacement parts and
accessories that are recommended by Granville-Phillips. Substitution of
parts is hazardous.

Chapter 1
12 Micro-Ion®ATM Module Instruction Manual - 390001
1.7 Definitions of terms The terms listed in Table 1-1 are used throughout this manual in reference
to the Micro-Ion ATM vacuum gauge module.
1.8 Customer service For Customer Service / Technical Support:
MKS Pressure and Vacuum Measurement Solutions
MKS Instruments, Inc., Granville-Phillips®Division
6450 Dry Creek Parkway
Longmont, Colorado 80503 USA
Tel: [phone]
Fax: [phone]
Email: [email protected]
Table 1-1 Terms describing Micro-Ion ATM module and components
Term Description
Module The entire Micro-Ion ATM product, which includes the housing, gauge assembly,
and electronics assembly.
Gauge assembly A removable assembly that contains a hot filament Micro-Ion gauge
(Bayard-Alpert type ionization gauge), a Conductron heat-loss sensor, a vacuum
pressure diaphragm sensor, and the vacuum chamber connection.
Electronics assembly An assembly that contains the electronic circuitry, signal processing
microcircuitry, and atmospheric pressure diaphragm sensor.
Micro-Ion®gauge The Bayard-Alpert type ionization gauge, which indicates pressure by producing
a current that is proportional to gas density.
Conductron®sensor The heat-loss sensor, which measures pressure as a function of heat loss from the
gold-plated tungsten sensing wire.
Vacuum pressure diaphragm sensor A Piezo resistive diaphragm sensor that measures vacuum pressure. Vacuum
pressure is compared to atmospheric pressure to determine the differential
between atmospheric and vacuum pressures.
Atmospheric pressure diaphragm
sensor
A Piezo resistive diaphragm sensor that measures atmospheric pressure.
Atmospheric pressure is compared to vacuum pressure to determine the
differential between atmospheric and vacuum pressures.
Vacuum pressure The pressure of the process gas inside the vacuum chamber, measured by the
Micro-Ion gauge, Conductron sensor, and vacuum pressure diaphragm sensor.
Atmospheric pressure The ambient air pressure of the atmosphere outside the module, measured by the
atmospheric pressure diaphragm sensor.
Differential pressure The difference between atmospheric pressure and vacuum pressure. Differential
pressure zero is the pressure value at which vacuum pressure equals atmospheric
pressure.

Installation
Micro-Ion®ATM Module Instruction Manual - 390001 13
Before You Begin Installation Operation Overview Analog Operation Optional DisplayRS-485 Operation
Chapter 2 Installation
2.1 Module components The Micro-Ion ATM Module contains a Micro-Ion gauge (Bayard-Alpert
type ionization gauge), a Conductron heat-loss sensor, an atmospheric
pressure diaphragm sensor, and a vacuum pressure diaphragm sensor.
2.2 Pressure relief devices Before you install the module, you should install appropriate pressure relief
devices in the vacuum system.
Granville-Phillips does not supply pressure relief valves or rupture disks.
Suppliers of pressure relief valves and rupture disks are listed in the Thomas
Register under “Valves, Relief” and “Discs, Rupture.”
WARNING
Using the module to measure the pressure of flammable
or explosive gases can cause a fire or explosion resulting
in severe property damage or personal injury.
Do not use the module to measure the pressure of flammable or
explosive gases.
WARNING
Exposing the module to moisture can cause fire or
electrical shock resulting in severe property damage or
personal injury.
To avoid exposing the module to moisture, install the module in
an indoor environment. Do not install the module in any
outdoor environment.
CAUTION
Operating the module above 1000 Torr (1333 mbar, 133
kPa) true pressure could cause pressure measurement
error or product failure.
To avoid measurement error or product failure due to
overpressurization, install pressure relief valves or rupture
disks in the system if pressure substantially exceeds 1000 Torr
(1333 mbar, 133 kPa).

Chapter 2
14 Micro-Ion®ATM Module Instruction Manual - 390001
2.3 Installation procedure The module installation procedure includes the following steps:
1. Determine the location of the module on the vacuum chamber.
2. Attach the module’s flange/ fitting to its mating fitting on the vacuum
chamber.
3. Assemble and connect the module wiring.
4. Calibrate the module at atmospheric pressure.
This chapter also explains what to do if radio frequency interference (RFI)
disrupts operation of RS-485 version of the module.
Step 1 Locate the module
To locate the module, refer to Figure 2-1 and follow the guidelines below.
• For greatest accuracy and repeatability, locate the module in a stable,
room-temperature environment. Ambient temperature should never
exceed 40 °C (104 °F) operating, non-condensing, or 85 °C (185 °F)
non-operating. Bakeout temperature with the electronics removed from
the module is 105 °C (221 °F).
• Locate the module away from internal and external heat sources and in
an area where ambient temperature remains reasonably constant.
• Do not locate the module near the pump, where gauge pressure might be
lower than system vacuum pressure.
• Do not locate the module near a gas inlet or other source of
contamination, where inflow of gas or particulates causes atmospheric
pressure to be higher than system atmosphere.
• Do not locate the module where it will be exposed to corrosive gases
such as mercury vapor or fluorine.

Installation
Micro-Ion®ATM Module Instruction Manual - 390001 15
Before You Begin Installation Operation Overview Analog Operation Optional DisplayRS-485 Operation
Figure 2-1 Dimensions
Dimensions in cm
(in.)

Chapter 2
16 Micro-Ion®ATM Module Instruction Manual - 390001
Step 2 Attach module to vacuum chamber
Attach the module’s flange/fitting to its mating fitting on the vacuum
chamber.
VCR type fitting VCR type fitting:
a. Remove the bead protector cap from the fitting.
b. Place the gasket into the female nut.
c. Assemble the components and tighten them to finger-tight.
d. While holding a back-up wrench stationary, tighten the female nut 1/8
turn past finger-tight on 316 stainless steel or nickel gaskets, or 1/4 turn
past finger-tight on copper or aluminum gaskets. Do not twist the
module to tighten the fitting.
KF flange KF flange
The KF mounting system requires O-rings and centering rings between
mating flanges.
a. Tighten the clamp to compress the mating flanges together.
b. Seal the O-ring.
ConFlat flange ConFlat flange
To minimize the possibility of leaks with ConFlat®flanges, use high strength
stainless steel bolts and a new, clean OFHC copper gasket. Avoid
scratching the seal surfaces. To avoid contamination, install new metal
gaskets.
a. Finger tighten all of the bolts.
b. Use a wrench to continue tightening 1/8 turn at a time in crisscross
order (1, 4, 2, 5, 3, 6) until flange faces make contact.
c. Further tighten each bolt about 1/16 turn.
CAUTION
Twisting the module to tighten the fitting to the vacuum
chamber can damage the module’s internal connections.
• Do not twist the module to tighten the fitting.
• Use appropriate tools to tighten the fitting.

Installation
Micro-Ion®ATM Module Instruction Manual - 390001 17
Before You Begin Installation Operation Overview Analog Operation Optional DisplayRS-485 Operation
Step 3 Assemble and connect wiring
Connecting cable Cable is user-supplied. Granville-Phillips does not supply cable.
• CE Mark compliance requires metal connector housings and cable with
a braided shield.
• To prevent ground loops, connect the shield only to the outer shell of the
subminiature D connector on the module. Do not connect the shield to
the receiver or output device.
Power supply wiring Connect the power supply to terminals 5 and 8.
• Terminal 5 (ground) is negative (–).
• Terminal 8 (input) is positive (+).
The power supply requirement is 24 Vdc +10% to –15%, 1 amp, 22 W
nominal. Maximum inrush current is 2 amps, 48 W, for 0.5 seconds.
The power supply must supply at least 2 amps (48 W) of current for at least
0.5 seconds during Micro-Ion gauge start up. The Micro-Ion gauge will not
activate and an emission error will occur if insufficient power is supplied
during Micro-Ion gauge activation.
Gauge/degas wiring Install a switch between terminals 3 and 5 and between terminals 7 and 8
to enable Micro-Ion gauge degas and to switch the Micro-Ion gauge ON or
OFF. See Figures 2-2 through 3-5.
Wiring terminals Wiring terminations depend on the output type.
• If the module has two analog outputs, see Figure 2-2.
• If the module has RS-485 interface, analog output and no relays,
seeFigure2-3.
• If the module has RS-485 interface, analog output and two trip point
relays, see Figure 2-4. Relays are normally open/normally closed.
• If the module hasRS-485 interface, analog output and three trip point
relays, see Figure 2-5. Relays are normally open.

Chapter 2
18 Micro-Ion®ATM Module Instruction Manual - 390001
Figure 2-2 Wiring terminals for Micro-Ion ATM module with two analog outputs, and no trip-point relays
Figure 2-3 Wiring terminals for Micro-Ion ATM module with RS-485 interface, two analog outputs, and no trip-point relays
Figure 2-4 Wiring terminals for Micro-Ion ATM module with RS-485 interface, one analog output, and two trip-point relays
Figure 2-5 Wiring terminals for Micro-Ion ATM module with RS-485 interface, one analog output, and three trip-point relays
for Module Catalog #
390410-0-##-#
390411-0-##-#
for Module Catalog #
390510-0-##-#
390511-0-##-#
for Module Catalog #
390510-2-##-#
390511-2-##-#
for Module Catalog #
390510-3-##-#
390511-3-##-#

Installation
Micro-Ion®ATM Module Instruction Manual - 390001 19
Before You Begin Installation Operation Overview Analog Operation Optional DisplayRS-485 Operation
Chassis Ground
If the module has a VCR type fitting or ConFlat flange, the module will be
properly grounded via the vacuum chamber connection.
If the module has a KF flange, the module is shipped with a 3-foot length of
braided copper wire, which has a screw lug on each end, and a screw and
nut for connecting the copper wire to the gauge base. If a metal clamp and
metal gasket will not be installed, follow this procedure to ground the
module:
a. The gauge base has a tab that allows a connection to the copper wire.
Bend the tab outward from the gauge base (see Figure 2-6).
b. Use the supplied screw and nut to connect one screw lug on the
braided copper wire to the tab.
c. Connect the other screw lug to an appropriately grounded point on the
vacuum system.
Figure 2-6 Vacuum chamber ground connections
WARNING
Improper grounding could cause severe product failure
or personal injury.
Follow ground network requirements for the facility.
• Maintain all exposed conductors at earth ground.
• Ground the module housing to the vacuum chamber as
illustrated below.
• Make sure the vacuum port to which the module is mounted
is properly grounded.
a. Bend the tab outward from the base of the gauge.
Vacuum chamber
b. Use the supplied nut to connect the
screw lug to the tab.
c. Connect other screw lug to the
vacuum chamber.

Chapter 2
20 Micro-Ion®ATM Module Instruction Manual - 390001
Step 4 Calibrate module at atmospheric pressure
• To calibrate the module at atmospheric pressure using a momentary
switch installed between pins 15 and 5 on the 15-pin connector,
see page 31.
• To calibrate the module at atmospheric pressure using an RS-485
command, see page 61.
Atmospheric pressure calibration and differential pressure zero are
performed at the factory before the module is shipped. The module will not
operate properly unless you reset the atmospheric pressure calibration and
differential pressure zero at the ambient operating pressure.
2.4 Eliminating radio
frequency interference
The module has been tested and complies with U.S. Federal
Communications Commission (FCC) limits for a Class A digital device,
pursuant to Part 15 of the FCC rules. These limits provide reasonable
protection against harmful interference when the module operates in a
commercial environment.
The module generates and can radiate radio frequency energy. If not
installed and used in accordance with the instructions in this manual, the
module may cause harmful interference to other electrical equipment.