MKS Series 275 MiniConvectron User manual

This Quick Start Guide is for the following
Series 275 Mini-Convectron Modules:
Figure 1: 20275-636 Mini-Convectron with Non-linear
Analog Output, 2 Process Control
Setpoints with reverse operation on
Relay 1, no Digital Display, Gold-plated
Tungsten Sensor, and NW16KF fitting.
Figure 2: 20275973 Mini-Convectron with Non-linear
Analog Output, 2 Process Control
Setpoints, Digital Display, Platinum
Sensor, and 1/4-inch VCR-type female
fitting.
Figure 3: 20275990 Mini-Convectron with Non-linear
Analog Output, 2 Process Control
Setpoints, Digital Display, Platinum
Sensor, and NW16KF fitting.
General Description
The Series 275 Mini-Convectron Vacuum Gauge Module
is a high precision convection enhanced Pirani-style
gauge and electronics enclosure that measures vacuum
pressures from 1 x 10-4 Torr to 1000 Torr.
Benefits of the design include:
• Compact, convenient, cost saving vacuum
measurement.
• Each gauge is calibrated at the factory which assures
the highest performance.
• Power requirement of only 11.5 Vdc to 26.5 Vdc.
• Replaceable gauge which can easily be replaced
using only a screwdriver.
The nonlinear output signal (Vdc) can be used to as a
pressure reading and sent to other devices in the
process to control process actions.
The adjustable setpoint relays can be used to control
various devices such as safety interlock, valve, digital
input for a scanner, or programmable logic controller.
The setpoint relay trip points can be set to customized
pressure settings to turn power ON or OFF to the
appropriate device.
Intended Use
The intended use of this instrument is to measure
vacuum pressure in the range of 1 x 10-4 Torr to 1000
Torr. This device is to be used only in accordance with
the instructions in this Quick Start Guide and the
Instruction Manual, p/n 275512.
Improper Use
• Removal of any factory installed components
• Modifying any factory installed components
• Removal of any labeling or warranty seals
• Operation of this device in any condensing vapor or
liquid environment
Safety Notices
These safety precautions must be observed during all
phases of installation, operation, and service of this
product. Failure to comply with these precautions or with
specific warnings elsewhere in this instruction guide
violates safety standards of design, manufacture, and
intended use of the instrument. MKS Instruments, Inc./
Granville-Phillips disclaims all liability for the customer's
failure to comply with these requirements.
These instructions do not and cannot provide for every
contingency that may arise in connection with the
installation, operation, or maintenance of this product. If
you require further assistance, please contact MKS,
Granville-Phillips Division at the address given on this
instruction guide.
Safety Notices / Warnings
Figure 4: Safety Symbol on the Mini-Convectron
Module
System Grounding
High Voltage
Installation of the Mini-Convectron
Module on the Vacuum Chamber
Physical Dimensions of the Module
Figure 5: Dimensions of the 20275-636
Mini-Convectron Module
Figure 6: Dimensions of the 20275973
Mini-Convectron Module
Figure 7: Dimensions of the 20275990
Mini-Convectron Module
Install Pressure Relief Devices
Before installing the module, install appropriate pressure
relief devices in the vacuum system.
Granville-Phillips does not supply pressure relief valves
or rupture disks. Suppliers of pressure relief valves and
pressure relief disks can be located via an online search,
and are listed on ThomasNet.com under “Relief Valves”
and “Rupture Discs. Confirm that these safety devices
are properly installed before installing and operating
the Mini-Convectron Module.
Mounting Location
• Locate the Mini-Convectron Module where it can be
easily accessed.
• For greatest accuracy and repeatability, locate the
Mini-Convectron Module in a stable, room-
temperature environment. Ambient temperature
should never exceed 40 °C (104 °F) operating, non-
condensing, or 85 °C (185 °F) non-operating.
• Locate the Mini-Convectron Module away from
internal and external heat sources and in an area
where ambient temperature remains reasonably
constant. Do not mount the Module above other
equipment that generates excessive heat.
• Do not locate the Mini-Convectron Module directly
below the chamber which may allow sputtering
particles or other contamination to fall into the gauge.
• Do not locate the Mini-Convectron Module near the
pump, where gauge pressure might be lower than
system vacuum pressure.
• Do not locate the Mini-Convectron Module near a gas
inlet or other source of contamination.
• Do not locate the Mini-Convectron Module where it
will be exposed to corrosive gases such as mercury
vapor or fluorine.
• Do not locate the module where it will vibrate.
Vibration causes convection cooling, resulting in
inaccurate high pressure readings.
Mounting Orientation
For proper operation of the module above 1 Torr, orient
the module so the axis is horizontal. Although the
Convectron gauge will read correctly below 1 Torr with
the module mounted in any position, inaccurate readings
will result at pressures above 1 Torr if the module axis is
not horizontal.
Figure 8: Recommended Mounting Orientations
Attach the Mini-Convectron Module to the
Vacuum Chamber
Connect the Mini-Convectron Module to the vacuum
system flange using the appropriate gasket and
mounting hardware.
For a VCR-type fitting:
1. Remove the plastic or metal bead protector cap from
the fitting.
2. If a gasket is used, place the gasket into the female
nut.
3. Assemble the components and tighten them to
finger-tight.
4. While holding a back-up wrench stationary, tighten
the female nut 1/8 turn past finger-tight on 316
stainless steel or nickel gaskets, or 1/4 turn past
finger-tight on copper or aluminum gaskets.
For an NW16KF flange:
The KF mounting system requires O-rings and centering
rings between mating flanges.
1. Tighten the clamp to compress the mating flanges
together.
2. Seal the O-ring.
Electrical Connections and Power
Requirements
The cable is user-supplied. Granville-Phillips does not
supply the cable. Install externally shielded cable and
connect the shield to ground.
At the module end of the cable, connect the shield to the
outer shell of the subminiature D connector.
Connect 11.5 to 26.5 Vdc power supply to terminals 3
and 4.
• Terminal 3 (input) is positive (+).
• Terminal 4 (ground) is negative (–).
See the Grounding Requirements and Specifications in
this document.
Figure 9: 15-Pin Connector for Modules with 2
Setpoint Relays
Grounding Requirements
If the gauge has a ConFlat-type flange, the module will
be properly grounded via the vacuum chamber
connection.
If the gauge has an NW16KF flange, check continuity
between the gauge and the vacuum chamber.
If the fitting requires a rubber gasket, rubber O-ring,
Teflon tape, or other material that prevents metal-to-
metal contact between the housing base and the vacuum
chamber, attach a ground connection as illustrated in
Figure 10.
1. Attach a metal hose clamp or other metal clamp to
the gauge stem of the housing.
2. Install a 3.31 mm2(12 AWG) or larger copper wire
between the clamp and a metal ground lug, bolt, or
stud on the vacuum chamber.
Figure 10: Ground Connection
Operation
It is important to understand that the pressure indicated
by a Convectron Gauge depends on the type of gas, the
orientation of the gauge axis, and on the gas density in
the gauge. Convectron Gauges are normally factory
calibrated for N2(air has approximately the same
calibration). With proper precautions, the Convectron
Gauge may be used for pressure measurement of
certain other gases.
At pressures below a few Torr, there is no danger in
measuring pressure of gases other than N2and air,
merely inaccurate readings. A danger arises if the N2
calibration is used without correction to measure higher
pressure levels of some other gases. For example, N2at
24 Torr causes the same heat loss from the Convectron
sensor as argon will at atmospheric pressure. If the
pressure indication of the Convectron Gauge is not
properly corrected for argon, an operator attempting to fill
a vacuum system with 1/2 atmosphere of argon would
observe a pressure reading of only 12 Torr when the
actual pressure had risen to the desired 380 Torr.
Continuing to fill the system with argon to 760 Torr would
result in a 24 Torr pressure reading.
Depending on the pressure of the argon gas source, the
chamber could be dangerously pressurized while the
display continued to read about 30 Torr of N2equivalent
pressure.
This type of danger is not unique to the Convectron
Gauge and likely exists with other thermal conductivity
gauges using convection to extend the range to high
pressures.
To measure the pressure of gases other than air or N2
with a Convectron Gauge calibrated for N2, you must use
the conversion curves listed specifically for Convectron
Gauges to translate between indicated pressure and true
pressure. Do not use other data. Never use the
conversion curves designed for Convectron Gauges to
translate pressure readings for gauges made by other
manufacturers. Their geometry is very likely different and
dangerously high pressures may be produced even at
relatively low pressure indications.
Ensure that the atmosphere adjustments for the
Convectron Gauge are correctly set.
Use the following graphs to determine the indicated N2or
air pressure that corresponds to a specific true pressure
of 10 other commonly used process gases. Find the
point at which the horizontal line representing true
pressure intercepts the vertical line representing
indicated N2pressure. If the gas being used is not
included among those listed, or for a gas mixture,
generate a calibration curve using a gas-independent
transfer standard such as a capacitance manometer.
More thorough information is given in the Instruction
Manual, p/n 275512, which can be downloaded at:
www.mksinst.com.
Series 275
Quick Start Guide for the Granville-
Phillips®Series 275 Mini-
Convectron®Vacuum Gauge
Modules with Nonlinear Analog
Output and Process Control Relays
Quick Start Guide p/n 275008-Rev. C
More detailed instructions regarding
installation, operation, and service of the
Series 275 Mini-Convectron Vacuum Gauge
Modules are provided in the Instruction
Manual, p/n 275512 which can be downloaded
from the MKS website. Go to: www.mksinst.com
and search for “275512”.
NOTICE
General Safety Notices
Do not use this instrument to measure the
pressure of flammable or explosive gases. Using
the Mini-Convectron Vacuum Gauge Module to
measure the pressure of flammable or explosive
gases can cause a fire or explosion resulting in
severe property damage or personal injury.
Exposing the Mini-Convectron Module to
moisture can cause fire or electrical shock
resulting in severe property damage or personal
injury. To avoid exposing the Module to
moisture, install it in an indoor environment. Do
not install the Module in any outdoor
environment.
To avoid measurement error or product failure
due to over pressurization, install pressure relief
valves or rupture disks in the system if pressure
substantially exceeds 1000 Torr (1333 mbar, 133
kPa).
CAUTION
High Voltage and Proper Grounding
All components of a vacuum system used with
this or any similar high voltage product must be
maintained at Earth ground for safe operation.
Be aware that grounding this product does not
guarantee that other components of the vacuum
system are maintained at Earth ground.
Verify that the vacuum port to which the Mini-
Convectron Module is mounted is electrically
grounded. It is essential for personnel safety as
well as proper operation that the envelope of the
gauge be connected to a facility ground.
Connect power cords only to properly grounded
outlets or sources.
WARNING
Electrical Shock or Personal Injury
The service and repair information in this
instruction guide is for the use of Qualified
Service Personnel. To avoid possible electrical
shock or personal injury, do not perform any
procedures in this manual or perform any
servicing on this product unless you are
qualified to do so.
WARNING
Operating the module above 1000 Torr
(1333mbar, 133 kPa) true pressure could cause
pressure measurement error or product failure.
To avoid measurement error or product failure due
to over-pressurization, install pressure relief valves
or rupture disks in the system if pressure exceeds
1000 Torr (1333 mbar, 133 kPa).
CAUTION
Improper grounding could cause product
failure, property damage, or serious personal
injury.
To reduce the risk of product failure, property
damage, or serious personal injury, follow ground
network requirements for the facility.
• Maintain all exposed conductors at Earth ground.
• Ground the module housing to the vacuum
chamber as instructed below.
• Make sure the vacuum port to which the module
is mounted is properly grounded.
WARNING
Using the N2calibration to pressurize a vacuum
system above about 1 Torr with certain other
gases can cause dangerously high pressures
which may cause explosion of the system.
CAUTION

Figure 11: True Pressure vs. Indicated Pressure for
Commonly used Gases, 10-4 to 10-1 Torr
Figure 12: True Pressure vs. Indicated Pressure for
Commonly used Gases, 10-1 to 1000 Torr
Figure 13: True Pressure vs. Indicated Pressure for
Commonly used Gases, 10-1 to 1000 Torr
Configure the Setpoint Relays
To measure the pressure of a gas other than N2or air,
the relay setpoints must be adjusted for the process gas.
The true pressure of a gas other than N2or air may be
substantially different from the pressure that the output
indicates. For example, outputs might indicate a
pressure of 10 Torr (1.33 kPa, 13.3 mbar) for argon,
although the true pressure of the argon is 250 Torr (33.3
kPa, 333.3 mbar). Such a substantial difference between
indicated pressure and true pressure can cause over-
pressurization resulting in an explosion.
See the Operation Chapter in the Instruction Manual
275512 for detailed instructions to adjust the setpoints.
Table 1: Front Panel Features of Mini-Convectron
Module (See Figure 2)
Example Test Point Voltage: 0.64 V equals 40 mTorr
(5.3x10-3 kPa, 5.3x10-2 mbar) of N2or Air
Example Test Point Voltage: 4.8 V equals 40 Torr
(5.33 kPa, 53.3 mbar) of N2or Air
Table 2: Front Panel Features of Mini-Convectron
Module with Digital Display (See Figure 3)
Nonlinear Analog Output Signal
The analog output produces a nonlinear voltage that
corresponds to measured pressure. Output voltage is
measured across pins 5 and 6.
The vacuum chamber pressure indicated by the gauge
depends on the gas type, gas density (pressure), and the
module orientation. The module is factory calibrated for
N2(air has approximately the same calibration). For
gases other than N2or air, heat loss varies at any given
pressure, and an appropriate conversion factor must be
applied.
See “Nonlinear Analog Output” in the Operation Chapter
of the Instruction Manual, p/n 275512.
Figure 14: Non-linear Analog Output Curves
Calibration at Atmosphere and Vacuum
Pressures
Calibration improves the accuracy and repeatability of
the Convectron gauge.
An atmospheric calibration is performed on the
Convectron gauge, using N2, at the factory before the
module is shipped. The factory calibration sets the
atmospheric calibration point to 760 Torr (101.3 kPa, 1013
mbar) of N2.
Because performance varies depending on the process
gas, it may be necessary to reset the atmospheric
calibration point if a gas other than N2or air is being
used. Periodic resets of the atmospheric calibration point
also improve the accuracy and repeatability of the
Convectron gauge near atmospheric pressure, even if
the process gas is N2or air.
During a fast pumpdown from atmospheric pressure,
thermal effects temporarily prevent the module from
measuring pressure accurately below 1 x 10–3 Tor r
(1.3 x 10–4 kPa, 1.3 x 10–3 mbar). After approximately 15
minutes, pressure indications the 1 x 10–4 Torr
(1.3 x 10–5 kPa, 1.3 x 10–4 mbar) range will be accurate.
When pressure indication in the 1 x 10–4 Torr (1.3 x 10–5
kPa, 1.3 x 10–4 mbar) range has stabilized, a Convectron
gauge calibration at vacuum chamber pressure may be
performed.
The calibration may be performed at a higher pressure if
readings in the 1 x 10–4 Tor r (1.3 x 10–5 kPa, 1.3 x 10–4 mbar)
range are not required. In the 1 x 10–4 Torr
(1.3 x 10–5 kPa, 1.3 x 10–4 mbar) range, resolution is ±0.1
millitorr, if the Convectron gauge has been properly
calibrated at vacuum chamber pressure. If the module
frequently operates in the 1 x 10–4 Torr (1.3 x 10–5 kPa, 1.3 x
10–4 mbar) range, Convectron gauge calibration at
vacuum chamber pressure should be performed
frequently.
See “Calibrating Convectron Gauge at Atmospheric
Pressure” and “Calibrating Convectron Gauge at
Vacuum Chamber Pressure” in the Operation Chapter of
the Instruction Manual, p/n 275512.
Product Specifications
1. Measurements will change with different gases and mixtures.
Correction parameters must be used for gases other than N2
or Air.
2. Do not use Convectron Gauges with flammable or explosive
gases.
Service / Maintenance
If the product requires service, contact the MKS,
Granville-Phillips Technical Support Department at
1-303-652-4400 for troubleshooting help.
If the product must be returned to the factory for service,
request a Return Material Authorization (RMA) from
Granville-Phillips. Do not return products without first
obtaining an RMA. In some cases a hazardous materials
document may be required. The MKS/Granville-Phillips
Customer Service Representative will advise you if the
hazardous materials document is required.
When returning a product to Granville-Phillips, be sure to
package the product to prevent shipping damage. Circuit
boards and modules separated from the gauge assembly
must be handled using proper anti-static protection
methods and must be packaged in anti-static packaging.
Shipping damage on returned products as a result of
inadequate packaging is the Buyer's responsibility.
Service / Maintenance Procedures
Troubleshooting and gauge replacement instructions are
given in the Instruction Manual, p/n 275512, which can
be downloaded at: www.mksinst.com.
Customer Service / Technical Support
MKS Pressure and Vacuum Measurement Solutions
MKS Instruments, Inc., Granville-Phillips®Division
6450 Dry Creek Parkway
Longmont, Colorado 80503 USA
Tel: [phone]
Fax: [phone]
Email: [email protected]
MKS Corporate Headquarters
MKS Instruments, Inc.
2 Tech Drive, Suite 201
Andover, MA 01810 USA
Tel: [phone]
Fax: [phone]
Email: [email protected]
Feature Description
ADJUST ATMOSPHERE
potentiometer
Enables Convectron gauge
calibration at atmospheric pressure
ADJUST VACUUM
potentiometer
Enables Convectron gauge
calibration at vacuum chamber
pressure
ADJUST SET PT1 and
ADJUST SET PT2
potentiometers
Enables setting of vacuum pressure
at which setpoint relays activate
MONITOR ANALOG test
point
Enables reading of analog output
voltage representing measured
pressure
MONITOR COMMON
test point
Enable checking of values for:
• Convectron gauge calibration at
atmospheric pressure
• Convectron gauge calibration at
vacuum chamber pressure
MONITOR SET PT1 and
MONITOR SET PT2 test
points
Enables checking of setpoint relay
voltage representing measured
pressure. See the 2 examples,
below.
P>100MT LED Turns solid red when pressure is
>100 mTorr
Feature Description
ADJUST ATM
potentiometer
Enables Convectron gauge
calibration at atmospheric pressure
ADJUST VAC
potentiometer
Enables Convectron gauge
calibration at vacuum chamber
pressure
S.P. ADJUST SET switch Enables choosing of setpoint relay
1 or setpoint relay 2 for adjustment
• Press the switch once to adjust
setpoint relay 1
• Press the switch twice to adjust
setpoint relay 2
S.P. ADJUST DOWN
switch
Enables downward adjustment of
setpoint 1 or setpoint 2
S.P. ADJUST UP switch Enables upward adjustment of
setpoint 1 or setpoint 2
Pressure value display Provides 3-digit indication of
measured pressure
TORR and mTORR LEDs • TORR is solid green when 3-
digit display indicates pressure
in Torr
• mTORR is solid green when 3-
digit display indicates pressure
in mTorr
RELAY ON SP1 and
RELAY ON SP2 LEDs
• RELAY ON SP1 is solid green
when setpoint relay 1 is
activated
• RELAY ON SP1 blinks green if
S.P. ADJUST SET switch has
been pressed once
• RELAY ON SP2 is solid green
when setpoint relay 2 is
activated
• RELAY ON SP2 blinks green if
S.P. ADJUST SET switch has
been pressed twice
Parameter Specification
Measurement Range for
N2/ Air 1,2
See notes 1 and 2, below
To r r 1x10-4 to 1000 Torr
mbar 1x10-4 to 1300 mbar
pascal 1x10-2 to 130 kPa
Setpoint relays Single-pole, double-throw (SPDT)
Contact rating 1 A @ 30 Vdc resistive, 30 VAC non-inductive
Hysteresis 2% of reading for module without display;
10% of reading plus 1 significant digit for
module with optional display
Resolution 2 significant digits
Analog output signal 0.375 to 5.659 Vdc for 0 to 1000 Torr of N2,
non-linear;
0 to 1333 mbar of N2, non-linear;
0 to 1.33 x 10-1 kPa of N2, non-linear
Mini-Convectron Module
Mounting orientation Horizontal preferred
Input power
With optional display 11.5 to 26.5 Vdc, 0.15 A at 11.5 Vdc, 3.5 W
maximum
Without display 11.5 to 26.5 Vdc, 0.1 A at 11.5 Vdc, 1.6 W
maximum
I/O connectors
2 setpoint relays 15-pin male, high-density subminiature D
1 setpoint relay 9-pin male, subminiature D
Operating temperature 0 oC to +40 oC (32 0F to 104 0F) ambient,
indoor use only, ordinary protection from
moisture
Non-operating
temperature -40 oC to +70 oC (-40 0F to 158 0F)
Case material Plastic
Weight 340 g (12 oz.) with 1/8 NPT fitting
Convectron Gauge
Sensing wire filament Gold-plated tungsten (standard)
or solid platinum (optional)
Internal volume 40 cc (2.5 cu. in.)
Materials exposed to
gas
304 Stainless Steel, 17-7 stainless steel,
ceramic, Ag/Cu brazing material, Kovar,
alumina, and molybdenum
Bakeout temperature 150 oC (302 oC) maximum, non-operating,
with electronics removed
Specifications and dimensions are subject to change without notice.
© 2016 MKS Instruments, Inc. All rights reserved.
Granville-Phillips®, Convectron®, and Mini-Convectron®are
registered trademarks, and mksinstTM is a trademark of MKS
Instruments, Inc. All other trademarks and registered trademarks
are the properties of their respective owners.
Quick Start Guide p/n 275008-Rev. C
October 2016
Template p/n DR100019-Rev. F
More detailed instructions regarding
installation, operation, and service of the
Series 275 Mini-Convectron Module are
provided in the Instruction Manual, p/n
275512, available online at
www.mksinst.com.
Notice