MKS T3PIA User manual

MKS Type T3PIA
Pendulum Valve
With Analog/TTL Interface
Instruction Manual
Six Shattuck Road
Andover, MA 01810-2449
Main: 978.975.2350 137363-P1
www.mksinst.com Analog/TTL Interface
Rev C

WARRANTY
Type T3PIA Pendulum Valve with Analog/TTL Interface
MKS Instruments, Inc. (MKS) warrants that for one (1) year from the date of shipment the equipment
described above (the “equipment”) manufactured by MKS shall be free from defects in materials and
workmanship.
For the period commencing with the date of shipment of this equipment and ending one (1) year later, MKS
will, at its option, either repair or replace any part which is defective in materials or workmanship without
charge to the purchaser. The foregoing shall constitute the exclusive and sole remedy of the purchaser for any
breach of MKS of this warranty.
The purchaser, before returning any equipment covered by this warranty, which is asserted to be defective by
the purchaser, shall make specific written arrangements with respect to the responsibility for shipping the
equipment and handling any other incidental charges with the MKS Sales Representative or distributor from
which the equipment was purchased or, in the case of a direct purchase from MKS, with the MKS home
office in Andover, Massachusetts, USA.
This warranty does not apply to any equipment which has not been installed and used in accordance with the
specifications recommended by MKS for the proper and normal use of the equipment. MKS shall not be
liable under any circumstances for indirect, special, consequential, or incidental damages in connection with,
or arising out of, the sale, performance, or use of the equipment covered by this warranty.
MKS recommends that all MKS pressure and flow products be calibrated periodically (typically) every 6 to
12 months) to ensure accurate readings. When a product is returned to MKS for this periodic re-calibration it
is considered normal preventative maintenance not covered by any warranty.
THIS WARRANTY IS IN LIEU OF ALL OTHER RELEVANT WARRANTIES, EXPRESSED OR
IMPLIED, INCLUDING THE IMPLIED WARRANTY OF MERCHANTABILITY AND THE IMPLIED
WARRANTY OF FITNESS FOR A PARTICULAR PURPOSE, AND ANY WARRANTY AGAINST
INFRINGEMENT OF ANY PATENT.

MKS Type T3PIA
Pendulum Valve
With Analog/TTL Interface

Copyright © 2009 by MKS Instruments, Inc.
All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means,
electronic or mechanical, including photocopying and recording, or by any information storage or retrieval
system, except as may be expressly permitted in writing by MKS Instruments, Inc.
Printed in the United States of America
US Patent 6,089,537 and other Patents Pending
DeviceNet™ is a trademark of Open DeviceNet Vendor Association, Inc., Coral Springs, FL.
SEMI®is a registered trademark of Semiconductor Equipment and Materials International, Mountain View,
CA.
Swagelok®and VCR®are registered trademark of Swagelok Marketing Co., Solon, OH.
Firmware version: 01.02

v
Table of Contents
Valve Safety Information..................................................................................................................................1
Symbols Used in This Instruction Manual ....................................................................................................................1
Symbols Found on the Unit...........................................................................................................................................1
Safety Procedures and Precautions................................................................................................................................1
Sicherheitshinweise für das Ventil....................................................................................................................3
In dieser Betriebsanleitung vorkommende Symbole.....................................................................................................3
Erklärung der am Gerät angebrachten Symbole............................................................................................................3
Sicherheitsvorschriften und Vorsichtsmaßnahmen .......................................................................................................3
Informations de sécurité relatives au manomètre...........................................................................................5
Symboles utilisés dans ce manuel d’utilisation .............................................................................................................5
Symboles figurant sur l’unité ........................................................................................................................................5
Mesures de sécurité et précautions................................................................................................................................5
Medidas de seguridad del manómetro.............................................................................................................7
Símbolos usados en este manual de instrucciones.........................................................................................................7
Símbolos hallados en la unidad.....................................................................................................................................7
Procedimientos y precauciones de seguridad ................................................................................................................7
Chapter One: General Information ................................................................................................................9
Introduction...................................................................................................................................................................9
How This Manual is Organized...................................................................................................................................10
Customer Support........................................................................................................................................................10
Chapter Two: Installation..............................................................................................................................11
Unpacking the Type T3P Unit.....................................................................................................................................11
Interface Cables...........................................................................................................................................................11
Product Location and Requirements............................................................................................................................13
Setup............................................................................................................................................................................14
Setup Procedures.........................................................................................................................................................17
Electrical Information..................................................................................................................................................18
Startup .........................................................................................................................................................................23
Chapter Three: Product Overview................................................................................................................25
General Information ....................................................................................................................................................25
Control Mode ..............................................................................................................................................................25
Trip Points...................................................................................................................................................................30
Top Panel Components................................................................................................................................................32
Labels..........................................................................................................................................................................34
Chapter Four: Analog/TTL Operation.........................................................................................................35
General Information ....................................................................................................................................................35
Selecting the Digital Input Functions..........................................................................................................................35
Setting the Analog Set Point Inputs.............................................................................................................................36
Selecting the Digital Output Functions........................................................................................................................36
Using RS-232 Commands with an Analog T3P..........................................................................................................36
Chapter Five: Maintenance and Troubleshooting.......................................................................................37
General Information ....................................................................................................................................................37
Maintenance ................................................................................................................................................................37

vi
Preventive Maintenance ..............................................................................................................................................37
Troubleshooting...........................................................................................................................................................45
Appendix A: Product Specifications.............................................................................................................47
Appendix B: Model Code Explanation.........................................................................................................49
Model Code.................................................................................................................................................................49
Appendix C: Dimensions ...............................................................................................................................51
Index.................................................................................................................................................................61
List of Figures
Figure 1: Preferred Method To Connect an Overall Metal Braided Shielded Cable........................................12
Figure 2: Alternate Method To Connect an Overall Metal Braided Shielded Cable........................................13
Figure 3: Typical System Configuration..........................................................................................................14
Figure 4: Top Panel of the T3P Unit................................................................................................................ 19
Figure 5: Typical Pressure Response in LEARN Mode...................................................................................27
Figure 6. Typical Chamber Pump Speed Curve...............................................................................................27
Figure 7: Phase Set Too High...........................................................................................................................28
Figure 8: Phase Set Too Low ...........................................................................................................................28
Figure 9: Gain Set Too High............................................................................................................................29
Figure 10: Gain Set Too Low...........................................................................................................................29
Figure 11: Trip Point Direction Set Low..........................................................................................................31
Figure 12: Trip Point Direction Set High.........................................................................................................31
Figure 13: Top Panel of the T3P Unit.............................................................................................................. 32
Figure 14: Pump Label.....................................................................................................................................34
Figure 15: Serial Number Label.......................................................................................................................34
Figure 16: Four (4) Valve Cover Screws..........................................................................................................38
Figure 17: Gate Bolt.........................................................................................................................................38
Figure 18: Handle.............................................................................................................................................39
Figure 19: Seal Ring Removal .........................................................................................................................39
Figure 20: Lubricating O-Ring Groove............................................................................................................40
Figure 21: Seal Ring in Valve Body................................................................................................................. 41
Figure 22: Removing Phillips Head Screws..................................................................................................... 43
Figure 23: Removing Battery Pack from Device .............................................................................................43
Figure 24: Installing the New Battery Pack......................................................................................................44

vii
List of Tables
Table 1: Definition of Symbols Found on the Unit.............................................................................................1
Tabelle 2: Bedeutung der am Gerät angebrachten Symbole...............................................................................3
Tableau 3: Définition des symboles sur l’unité ..................................................................................................5
Tabla 4: Definición de los símbolos hallados en la unidad.................................................................................7
Table 5: Definitions ............................................................................................................................................9
Table 6: Maximum Torque Levels When Mounting With the Centering Ring and Spacer Ring.....................15
Table 7: Maximum Torque Levels When Mounting with the O-Ring in Groove ............................................15
Table 8: Admissible Forces ..............................................................................................................................15
Table 9: Mounting Screw Length .....................................................................................................................16
Table 10: Required Air Pressure Based on Valve Size.....................................................................................16
Table 11: Auxiliary Connector Pin Out............................................................................................................20
Table 12: Analog Sensor 1 (High) Connector Pin Out.....................................................................................21
Table 13: Analog Sensor 2 (Low) Connector Pin Out......................................................................................22
Table 14: Power Connector Pin Out.................................................................................................................22
Table 15: Differential Pressure.........................................................................................................................23
Table 16: Position Status LED Indicators.........................................................................................................33
Table 17: Pressure Status LED Indicators ........................................................................................................33
Table 18: Digital Input Functions.....................................................................................................................35
Table 19: Digital Output Functions ..................................................................................................................36
Table 20: Seal Ring Quantity of Grease ...........................................................................................................40
Table 21: O-Ring Quantity of Grease...............................................................................................................40
Table 22: Valve Cover Screw Torque...............................................................................................................42
Table 23: Software Command Reference.........................................................................................................42

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Valve Safety Information
1
Valve Safety Information
Symbols Used in This Instruction Manual
Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual are:
Warning The WARNING sign denotes a hazard. It calls attention to a procedure, practice,
condition, or the like, which, if not correctly performed or adhered to, could result
in injury to personnel.
Caution The CAUTION sign denotes a hazard. It calls attention to an operating procedure,
practice, or the like, which, if not correctly performed or adhered to, could result in
damage to or destruction of all or part of the product.
Note The NOTE sign denotes important information. It calls attention to a procedure, practice,
condition, or the like, which is essential to highlight.
Symbols Found on the Unit
The following table describes symbols that may be found on the unit.
Table 1: Definition of Symbols Found on the Unit
|
On (Supply)
IEC 417, No. 5007 Off (Supply) IEC 417, No. 5008 Earth (ground) IEC 417, No. 5017 Protective Earth (ground) IEC 417, No. 5019
Frame or Chassis
IEC 417, No. 5020 Equipotentiality IEC 417, No. 5021 Direct Current IEC 417, No. 5031 Alternating Current IEC 417, No. 5032
Both Direct and Alternating
Current
IEC 417, No. 5033-a
Class II Equipment
IEC 417, No. 5172-a Three Phase Alternating Current
IEC 617-2, No. 020206
Caution, Hand Crush
ISO 3864
Caution (refer to
accompanying documents)
ISO 3864, No. B.3.1
Caution, Risk of Electric
Shock
ISO 3864, No. B.3.6
Caution, Hot Surface
IEC 417, No. 5041 Caution, Spring Loaded ISO 3864
Safety Procedures and Precautions
Observe the following general safety precautions during all phases of operation of this instrument.
Failure to comply with these precautions or with specific warnings elsewhere in this manual violates
safety standards of intended use of the instrument and may impair the protection provided by the
equipment. MKS Instruments, Inc. assumes no liability for the customer’s failure to comply with these
requirements.

Valve Safety Information
2
Warning Moving parts in the valve create a risk of personal injury until the valve is securely
incorporated into a system. To avoid injury, keep all body parts away from any
valve opening.
1. Do not insert objects into openings where contact with moving parts is
possible.
2. Isolate the valve from any electrical or pneumatic power supply before
handling the valve.
DO NOT SUBSTITUTE PARTS OR MODIFY VALVE
Do not install substitute parts or perform any unauthorized modification to the valve. Return the valve to an MKS
Calibration and Service Center for service and repair to ensure that all safety features are maintained.
SERVICE BY QUALIFIED PERSONNEL ONLY
Operating personnel must not attempt component replacement and internal adjustments. Qualified service personnel
must perform any service only.
USE CAUTION WHEN OPERATING WITH HAZARDOUS MATERIALS
If hazardous materials are used, observe the proper safety precautions, completely purge the valve when necessary, and
ensure that the material used is compatible with the wetted materials in this product, including any sealing materials.
PURGE THE VALVE
After installing the unit, or before removing it from a system, purge the unit completely with a clean, dry gas to eliminate
all traces of the previously used flow material.
USE PROPER PROCEDURES WHEN PURGING
This valve must be purged under a ventilation hood and gloves must be worn for protection.
DO NOT OPERATE IN AN EXPLOSIVE ENVIRONMENT
To avoid explosion, do not operate this product in an explosive environment unless it has been specifically certified for
such operation.
USE PROPER FITTINGS AND TIGHTENING PROCEDURES
All valve fittings must be consistent with valve specifications and compatible with the intended use of the valve.
Assemble and tighten fittings according to manufacturer’s directions.
CHECK FOR LEAK-TIGHT FITTINGS
Carefully check all vacuum component connections to ensure leak-tight installation.
OPERATE AT SAFE INLET PRESSURES
Never operate the valve at pressures higher than the rated maximum pressure (refer to the product specifications for the
maximum allowable pressure).
INSTALL A SUITABLE BURST DISC
When operating from a pressurized gas source, install a suitable burst disc in the vacuum system to prevent system
explosion should the system pressure rise.
KEEP THE UNIT FREE OF CONTAMINANTS
Do not allow contaminants to enter the unit before or during use. Contamination such as dust, dirt, lint, glass chips, and
metal chips may permanently damage the unit or contaminate the process.
KEEP AWAY FROM VALVE OPENING
Keep fingers, other body parts, and other materials away from the valve opening when the valve is in operation.