Safety Procedures and Precautions
1
Safety Procedures and Precautions
The following general safety precautions must be observed during all phases of operation of this
instrument. Failure to comply with these precautions or with specific warnings elsewhere in
this manual violates safety standards of intended use of the instrument and may impair the
protection provided by the equipment. MKS Instruments, Inc. assumes no liability for the
customer’s failure to comply with these requirements.
Warning
Before performing mass flow controller valve adjustments,
you MUST purge your process equipment and the MFC with
an inert gas, such as argon or nitrogen, and isolate the MFC
from toxic and hazardous gases. Use an inert surrogate gas
while adjusting the valve preload as a safeguard against
inadvertent exposure to any toxic or hazardous gas. A release
of hazardous or toxic gas could cause serious injury. If
necessary, remove the MFC from the process equipment to
adjust the valve.
Questions concerning the safe handling of toxic or hazardous
gases may be answered by consulting your corporate policy,
a government agency such as OSHA or NIOSH, or experts
familiar with your process gas.
MKS assumes no liability for safe handling of toxic or
hazardous gases.
DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT
Do not install substitute parts or perform any unauthorized modification to the instrument.
Return the instrument to an MKS Calibration and Service Center for service and repair to ensure
that all safety features are maintained.
SERVICE BY QUALIFIED PERSONNEL ONLY
Operating personnel must not remove instrument covers. Component replacement and internal
adjustments must be made by qualified service personnel only.
USE CAUTION WHEN OPERATING WITH HAZARDOUS MATERIALS
If hazardous materials are used, users must take responsibility to observe the proper safety
precautions, completely purge the instrument when necessary, and ensure that the material used
is compatible with sealing materials.
