MKS Granville-Phillips 274 Series User manual

Granville-Phillips®Series 274 Bayard-Alpert
Type Ionization Gauges
Instruction Manual part number 274026
Revision B - August 2014
Series 274
Instruction Manual

Series 274 Tubulated and Nude Bayard-Alpert type Ionization Gauges.
See Figure 2-1 on page 13, Theory of Operation on page 15,
and Table 4-4 on page 28.

This Instruction Manual is for use with Granville-Phillips Series 274
Ionization Gauges. A list of applicable catalog numbers is provided
on the following page.
© 2014 MKS Instruments, Inc. All rights reserved.
Granville-Phillips®is a registered trademark of MKS Instruments, Inc. All other
trademarks and registered trademarks are the properties of their respective owners.
Granville-Phillips®Series 274 Bayard-Alpert
Type Ionization Gauges
Series 274
Instruction Manual
For Customer Service or Technical Support 24 hours per day,
7 days per week, every day of the year including holidays:
Phone: [phone] or [phone]
MKS, Granville-Phillips Division
6450 Dry Creek Parkway
Longmont, CO 80503 USA
Phone: [phone] or 1-800-776-6543
FAX: [phone]
Email: [email protected]
Corporate Office
MKS Instruments, Inc.
2 Tech Drive, Suite 201
Andover, MA 01810 USA
Phone: [phone]
www.mksinst.com

Catalog numbers for Granville-Phillips Tubulated (Glass)
and Nude Ionization Gauges
Detailed information regarding the catalog numbers listed below
is provided in Figure 2-1 on page 13 and Table 4-4 on page 28.

Ionization Gauge Instruction Manual - 274026 - Rev. B 5
Table of Contents
Chapter 1 Introduction/Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
1.1 Definitions of Terms . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
1.2 Caution and Warning Statements . . . . . . . . . . . . . . . . . . . . 7
1.3 Electrical Shock . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
1.4 Explosion / Implosion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
1.5 Overpressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
1.6 Temperature . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
1.7 System Grounding . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
1.8 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
1.9 Service Guidelines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
Chapter 2 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
2.1 Receiving Inspection of Products . . . . . . . . . . . . . . . . . . . . 11
2.2 Vacuum System Connections . . . . . . . . . . . . . . . . . . . . . . . 11
2.3 Electrical Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
2.4 Grounding Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . 12
Chapter 3 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
3.1 Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
3.2 Filament Emission . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
3.3 Pumping Capacity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
3.4 X-ray Limit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
3.5 Degas Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
3.6 Bakeout Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
Chapter 4 Technical Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
4.1 Operating Principle . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
4.2 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
Gas Species Effects . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
Cathodes (Filaments) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
Pressure Indication . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
Gauge Tube Sensitivity . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
Gas Type Conversions . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
Gas Sensitivity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
Gauge Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
4.3 Service Guidelines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29

6Ionization Gauge Instruction Manual - 274026 - Rev. B

Ionization Gauge Instruction Manual - 274026 - Rev. B 7
Operation Troubleshooting SpecificationsIntroduction/Safety
Chapter 1 Introduction/Safety
For personal and equipment safety, all safety notices, cautions, and
warnings must the adhered to at all times when working on or around a
vacuum system, whether or not the system is in actual use. Follow all safety
instructions provided throughout this instruction manual, and all safety
practices recommended by your company.
NOTE: These instructions do not and cannot provide for every contingency
that may arise in connection with the installation, operation, or
maintenance of this product. If you require further assistance, contact
Granville-Phillips Customer Support at the address on the title page, or page
10 of this instruction manual.
1.1 Definitions of Terms • Table 1-1 lists common terms that are used throughout this instruction
manual.
1.2 Caution and Warning
Statements
The caution or warning statement used throughout this instruction manual
explain the specific hazard that you must prevent or unsafe practice that
you must avoid, the potential result of your failure to prevent the specified
hazard or avoid the unsafe practice, and what you must do to prevent the
specified hazardous result.
Table 1-1 Terms Describing Ionization Gauges
Term Description
Ionization Gauge, Ion Gauge, or IG A hot-cathode Bayard-Alpert type ionization gauge, which indicates pressure by
producing an electrical current that is proportional to gas density.
Tubulated (Glass) Ion Gauge An ionization gauge that is within a glass tube (enclosure) and is mounted on the
outside of a vacuum chamber.
Nude Ion Gauge An ionization gauge that is not enclosed in a glass tube, and is mounted so that
the working elements of the gauge are actually inside the vacuum chamber.
Filament (Cathode), Grid (Anode),
Ion Collector
Critical components of an ionization gauge that enable the gauge to provide
information to an IG Controller where a pressure reading is indicated. See Theory
of Operation in the Operation Chapter.
Degas A procedure used to clean the electrode(s) of an ion gauge. See Degassing an Ion
Gauge in the Operation Chapter.

Chapter 1
8Ionization Gauge Instruction Manual - 274026 - Rev. B
1.3 Electrical Shock
Do NOT touch any gauge electronics while the gauge is connected to the
controller. During normal operation, 180 volts will be applied to the grid
connections. During electron bombardment degas, as much as 700 volts
may be applied to some electrode pins.
All connections to the gauge tube should be covered by insulation. All
gauge tube pins should be covered by connectors or by pin covers.
CAUTION
Caution statements alert you to hazards or unsafe
practices that could result in minor personal injury or
property damage.
Each caution statement explains what you must do to prevent or
avoid the potential result of the specified hazard or unsafe
practice.
WARNING
Warning statements alert you to hazards or unsafe
practices that could result in severe property damage or
personal injury due to electrical shock, fire, or explosion.
Each warning statement explains what you must do to prevent
or avoid the potential result of the specified hazard or unsafe
practice.
WARNING
Ionization gauges are safe for use ONLY if all exposed
conductors on the gauge, on the controller, and on the
vacuum system are insulated and grounded.

Introduction/Safety
Ionization Gauge Instruction Manual - 274026 - Rev. B 9
Operation Troubleshooting SpecificationsIntroduction/Safety
1.4 Explosion / Implosion
Do not attach cables to glass gauge pins while the gauge is under vacuum.
Accidental bending of the pins may cause the glass to break and implode.
Cables, once installed, should be secured to the system to provide strain
relief for the gauge tube pins.
Danger of injury to personnel and damage to equipment exists on all
vacuum systems that incorporate gas sources or involve processes capable
of pressuring the system above the limits it can safely withstand.
For example, danger of explosion in a vacuum system exists during
backfilling from pressurized gas cylinders because many vacuum devices
such as glass ionization gauge tubes, glass windows, glass belljars, etc., are
not designed to be pressurized.
1.5 Overpressure Install suitable devices that will limit the pressure from external gas sources
to the level that the vacuum system can safely withstand. In addition, install
suitable pressure relief valves or rupture disks that will release pressure at a
level considerably below that pressure which the system can safely
withstand.
Do NOT use quick-connects or other friction-type connections where
positive pressure (such as backfilling operations) will exist within the gauge
tube.
Suppliers of pressure relief valves and pressure relief disks are listed in
Thomas Register under "Valves, Relief", and "Discs, Rupture".
Confirm that these safety devices are properly installed before installing the
ion gauge. In addition, check that (1) the proper gas cylinders are installed,
(2) gas cylinder valve positions are correct on manual systems, and (3) the
automation systems and programs are correct on automated systems.
1.6 Temperature During a degas procedure, the envelope of a gauge tube becomes much
hotter than during normal operation. Be sure that materials that are heat
sensitive are not in contact with the gauge tube. Be sure that the gauge tube
is not located where personnel might come in contact with the gauge tube
during normal operation of the system.
WARNING
Do not operate ion gauges in an explosive atmosphere or
in the presence of flammable gases or fumes.
Danger of explosion or inadvertent venting to
atmosphere exists on all vacuum systems which
incorporate gas sources or involve processes capable of
pressurizing the system above safe limits.

Chapter 1
10 Ionization Gauge Instruction Manual - 274026 - Rev. B
1.7 System Grounding Grounding, though simple, is very important! Be certain that ground circuits
are correctly used on your ion gauge power supplies, gauges, and vacuum
chambers, regardless of their manufacturer. Safe operation of vacuum
equipment requires grounding of all exposed conductors of the gauges, the
controller and the vacuum system. Lethal Voltages may be established
under some operating conditions unless correct grounding is provided.
Ion producing equipment, such as ionization gauges, mass spectrometers,
sputtering systems, etc., from many manufacturers may, under some
conditions, provide sufficient electrical conduction via a plasma to couple
a high voltage electrode potential to the vacuum chamber. If exposed
conductive parts of the gauge, controller, and chamber are not properly
grounded, they may attain a potential near that of the high voltage electrode
during this coupling. Fatal electrical shock could then occur because of the
high voltage between these exposed conductors and ground.
1.8 Operation It is the installer's responsibility to ensure that the automatic signals
provided by the process control module are always used in a safe manner.
Carefully check manual operation of the system and the setpoint
programming before switching to automatic operation. Where an
equipment malfunction could cause a hazardous situation, always provide
for fail-safe operation. As an example, in an automatic backfill operation
where a malfunction might cause high internal pressures, provide an
appropriate pressure relief device.
1.9 Service Guidelines For customer service:
If the product requires service, contact the MKS, Granville-Phillips Division
Customer Service Department at [phone] or [phone]
for troubleshooting help over the phone.
For Customer Service or Technical Support 24 hours per day, 7 days per
week, every day of the year including holidays:
Phone: [phone] or [phone]
Email:[email protected]
MKS, Granville-Phillips Division
6450 Dry Creek Parkway
Longmont, CO 80503 USA
Phone: [phone] or 1-800-776-6543
FAX: [phone]