MKS Series 275 MiniConvectron User manual

Mini-Convectron®Vacuum Gauge Module
with Nonlinear Analog Outputs and Process
Control Relays
Instruction manual part number 275513
Revision C - November 2019
Series 275
Instruction Manual

This Instruction Manual is for use with all MKS Series 275
Mini-Convectron Vacuum Gauge Modules with Nonlinear Analog
Outputs and Process Control Relays. A list of applicable catalog
numbers is provided on the following page.
Series 275
© 2019 MKS Instruments, Inc. All rights reserved.
Granville-Phillips®and Convectron®are registered trademarks, and mksinstTM is a trademark
of MKS Instruments, Inc. All other trademarks and registered trademarks are the properties
of their respective owners.
Mini-Convectron®Vacuum Gauge Module
with Nonlinear Analog Outputs
and Process Control Relays
Instruction Manual
Customer Service / Technical Support:
MKS Global Headquarters
2 Tech Drive, Suite 201
Andover MA, 01810 USA
Phone: [phone]
Email: [e-mail]
Visit our website at www.mksinst.com

This manual is for use only with the following catalog numbers:
Mini-Convectron Module with one (1) setpoint relay. . . . . . . 275400 - 1 - X X - X
Mini-Convectron Module with two (2) setpoint relays . . . . . . 275400 - 2 - X X - X
Mini-Convectron Module with zero (0) setpoint relays
and 3-digit digital display . . . . . . . . . . . . . . . . . . . . . . . . . . . . 275600 - 0 - X X - X
Mini-Convectron Module with two (2) setpoint relays
and 3-digit digital display . . . . . . . . . . . . . . . . . . . . . . . . . . . . 275600 - 2 - X X - X
Sensor Type
Gold-Plated Tungsten. . . . . . . . . . . . . . . . . . . . . . . . . . . . .G
Platinum . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . P
Flange/Fitting
NW16KF flange . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .D
NW25KF flange . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . E
1.33 inch (NW16CF) Conflat-type flange . . . . . . . . . . . . . . F
1.33 inch (NW35CF) Conflat-type flange . . . . . . . . . . . . . .G
1/8 inch NPT / 1/2 inch tubulation . . . . . . . . . . . . . . . . . . . P
1/4 inch VCR-type female . . . . . . . . . . . . . . . . . . . . . . . . .Q
1/2 inch VCR-type male . . . . . . . . . . . . . . . . . . . . . . . . . . . R
Measurement Units
Torr . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . T
pascal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . P
NOTE:
Customer specific products may have a five-digit number following
the catalog numbers shown above.
Example: 275410-2-GD-T-XXXXX, where -XXXXX represents a
configuration outside of the standard catalog number.
Mini-Convectron®Vacuum Gauge Module with Nonlinear Analog Outputs
and Process Control Relays
Catalog numbers for Series 275 Mini-Convectron Modules
ConFlat®is a registered trademark of Varian Associates.
VCR®is a registered trademark of Swagelok Marketing Co.

Mini-Convectron Module Instruction Manual - 275513 5
Table of Contents
Chapter 1 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
Chapter 2 Chapter 2 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
2.1 Module Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
2.2 Installing Pressure Relief Devices . . . . . . . . . . . . . . . . . . . . 16
2.3 Installation Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
Locate and orient the module . . . . . . . . . . . . . . . . . . . . . . . 16
Attach the module to the vacuum chamber . . . . . . . . . . . . . 18
Assemble and connect the wiring . . . . . . . . . . . . . . . . . . . . 19
Grounding . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
Configure the setpoint relays for the application . . . . . . . . . 22
Calibrate the Convectron gauge . . . . . . . . . . . . . . . . . . . . . 22
Chapter 3 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
3.1 Preparing to Operate the Module . . . . . . . . . . . . . . . . . . . . 23
3.2 Nonlinear Analog Output . . . . . . . . . . . . . . . . . . . . . . . . . . 28
Commonly used Gases Other than N2or Air . . . . . . . . . . . . 28
Other Gases . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
3.3 Setpoint Relays . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39
Preparing to Adjust Setpoint Relays . . . . . . . . . . . . . . . . . . . 40
Adjusting Setpoint Relays . . . . . . . . . . . . . . . . . . . . . . . . . . 40
3.4 Reading Relay Status . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44
If the module without a display has one setpoint relay: . . . . 44
If the module has a digital display: . . . . . . . . . . . . . . . . . . . 44
3.5 Calibrate the Convectron Gauge at Atmospheric Pressure . . 44
If the module does not have a digital display: . . . . . . . . . . . 44
If the module has a digital display: . . . . . . . . . . . . . . . . . . . 44
3.6 Calibrate the Convectron Gauge at Vacuum Chamber Pressure
45
If the module does not have a digital display: . . . . . . . . . . . 45
If the module has a digital display: . . . . . . . . . . . . . . . . . . . 45
3.7 Modules Operating at Low Pressure . . . . . . . . . . . . . . . . . . 46
3.8 Factory Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46
Chapter 4 Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47
4.1 Customer Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47
Damage Requiring Service . . . . . . . . . . . . . . . . . . . . . . . . . 47
4.2 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 48
Precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 48
Symptoms, Causes, and Solutions . . . . . . . . . . . . . . . . . . . . 49
4.3 Convectron Gauge Test . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50
4.4 Convectron Gauge Removal and Replacement . . . . . . . . . . 51
Removing the Convectron Gauge . . . . . . . . . . . . . . . . . . . . 51
Replacing the Convectron Gauge . . . . . . . . . . . . . . . . . . . . 51
Appendix A Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53
Appendix B Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 57
Index . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 59

Table of Contents
6Mini-Convectron Module Instruction Manual - 275513

Mini-Convectron Module Instruction Manual - 275513 7
Chapter 1 Safety
1.1 Safety Introduction
START BY READING THESE IMPORTANT SAFETY INSTRUCTIONS AND NOTES collected here
for your convenience and repeated with additional information at appropriate points throughout
this instruction manual.
These safety alert symbols in this manual or on the Product mean caution - personal safety, property
damage or danger from electric shock. Read these instructions carefully.
This product was designed and tested to offer reasonably safe service provided it is installed,
operated, and serviced in strict accordance with these safety instructions.
Danger indicates a hazardous situation which, if not
avoided, will result in death or serious injury.
Warning indicates a hazardous situation which, if not
avoided, could result in death or serious injury.
Caution indicates a hazardous situation or unsafe
practice which, if not avoided, may result in minor or
moderate personal injury.
Indicates a situation or unsafe practice which, if not
avoided, may result in equipment damage.
Notice
These instructions do not and cannot provide for every contingency that
may arise in connection with the installation, operation, or maintenance of
this product. If you require further assistance, contact MKS at the address
on the title page of this instruction manual.
Safety Precautions
Failure to comply with these instructions may result in serious
personal injury, including death, or property damage.
Always observe and follow all safety notices that are
provided throughout this instruction manual and on the
product.

Chapter 1
8Mini-Convectron Module Instruction Manual - 275513
These safety precautions must be observed during all phases of operation, installation, and service
of this product. Failure to comply with these precautions or with specific warnings elsewhere in this
manual violates safety standards of design, manufacture, and intended use of the instrument. MKS
Instruments, Inc. disclaims all liability for the customer's failure to comply with these requirements.
•Read Instructions – Read all safety and operating instructions before operating the product.
•Retain Instructions – Retain the Safety and Operating Instructions for future reference.
•Heed Warnings – Adhere to all warnings on the product and in the operating instructions.
•Follow Instructions – Follow all operating and maintenance instructions.
•Accessories – Do not use accessories not recommended in this manual as they may be
hazardous.
Electrical Shock or Personal Injury
The service and repair information in this manual is for the use
of Qualified Service Personnel. To avoid possible electrical
shock or personal injury, do not perform any procedures in
this manual or perform any servicing on this product unless
you are qualified to do so.
Electrical Shock or Fire
To reduce the risk of fire or electric shock, do not expose this
product to rain or moisture.
Objects and Liquid Entry - Never push objects of any kind into
this product through openings as they may touch dangerous
voltage points or short out parts that could result in a fire or
electric shock. Be careful not to spill liquid of any kind onto the
products.

Safety
Mini-Convectron Module Instruction Manual - 275513 9
1.2 Grounding Requirements
See Grounding, Section 2.3.4 in the Installation chapter for more detailed requirements regarding
gauge and system grounding.
1.3 High Voltage
The Mini-Convectron Module does not have higher voltages than the source voltage required for
operation of the module.
However, hazardous voltages may be present in the vacuum system.
Proper Grounding
All components of a vacuum system used with this or any
similar high voltage product must be maintained at Earth
ground for safe operation.
Be aware that grounding this product does not guarantee that
other components of the vacuum system are maintained at
Earth ground.
Verify that the vacuum port to which the Series 275 Module is
mounted is electrically grounded. It is essential for personnel
safety as well as proper operation that the envelope of the
gauge be connected to a facility ground. See Section 2.3.4 for
detailed grounding instructions.
Connect power cords only to properly grounded outlets or
sources.
High Voltage
Be aware that when high voltage is present in any vacuum
system, a life threatening electrical shock hazard may exist
unless all exposed conductors are maintained at Earth ground.
All conductors in, on, or around the vacuum system that are
exposed to potential high voltage electrical discharges must
either be shielded at all times to protect personnel or must be
connected to Earth ground at all times.
This hazard is not unique to this product.
High Voltage
Be aware that an electrical discharge through a gas may
couple dangerous high voltage directly to an ungrounded
conductor almost as effectively as would a copper wire
connection. A person may be seriously injured or even killed
by merely touching an exposed ungrounded conductor at high
potential.
This hazard is not unique to this product.

Chapter 1
10 Mini-Convectron Module Instruction Manual - 275513
1.4 Over-Pressure Conditions
Install suitable devices that will limit the pressure from external gas sources to the level that the
vacuum system can safely withstand. In addition, install suitable pressure relief valves or rupture
disks that will release pressure at a level considerably below that pressure which the system can
safely withstand. Suppliers of pressure relief valves and pressure relief disks can be located via an
on-line search.
Confirm that these safety devices are properly installed before installing the product.
Ensure the following precautions are complied with at all times:
(1) the proper gas cylinders are installed
(2) the gas cylinder valve positions are correct on manual systems
(3) the automation is correct on automated gas delivery systems
Vacuum gauges with compression fittings may be forcefully ejected if the vacuum system is
pressurized.
Over-Pressure Conditions
Install suitable devices that will limit the pressure to the level the
vacuum system can safely withstand. In addition, install
suitable pressure relief valves or rupture disks that will release
pressure at a level considerably below the pressure that the
system can safely withstand.
Potential Automatic Operation
It is the installer's responsibility to ensure that the automatic
signals provided by the product are always used in a safe
manner. Carefully check the system programming before
switching to automatic operation.