manuals.online logo
Brands
  1. Home
  2. •
  3. Brands
  4. •
  5. MKS
  6. •
  7. Control Unit
  8. •
  9. MKS Series 275 MiniConvectron User manual

MKS Series 275 MiniConvectron User manual

Mini-Convectron®Vacuum Gauge Module
with Nonlinear Analog Outputs and Process
Control Relays
Instruction manual part number 275513
Revision C - November 2019
Series 275
Instruction Manual
This Instruction Manual is for use with all MKS Series 275
Mini-Convectron Vacuum Gauge Modules with Nonlinear Analog
Outputs and Process Control Relays. A list of applicable catalog
numbers is provided on the following page.
Series 275
© 2019 MKS Instruments, Inc. All rights reserved.
Granville-Phillips®and Convectron®are registered trademarks, and mksinstTM is a trademark
of MKS Instruments, Inc. All other trademarks and registered trademarks are the properties
of their respective owners.
Mini-Convectron®Vacuum Gauge Module
with Nonlinear Analog Outputs
and Process Control Relays
Instruction Manual
Customer Service / Technical Support:
MKS Global Headquarters
2 Tech Drive, Suite 201
Andover MA, 01810 USA
Phone: +1-833-986-1686
Email: insidesales@mksinst.com
Visit our website at www.mksinst.com
This manual is for use only with the following catalog numbers:
Mini-Convectron Module with one (1) setpoint relay. . . . . . . 275400 - 1 - X X - X
Mini-Convectron Module with two (2) setpoint relays . . . . . . 275400 - 2 - X X - X
Mini-Convectron Module with zero (0) setpoint relays
and 3-digit digital display . . . . . . . . . . . . . . . . . . . . . . . . . . . . 275600 - 0 - X X - X
Mini-Convectron Module with two (2) setpoint relays
and 3-digit digital display . . . . . . . . . . . . . . . . . . . . . . . . . . . . 275600 - 2 - X X - X
Sensor Type
Gold-Plated Tungsten. . . . . . . . . . . . . . . . . . . . . . . . . . . . .G
Platinum . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . P
Flange/Fitting
NW16KF flange . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .D
NW25KF flange . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . E
1.33 inch (NW16CF) Conflat-type flange . . . . . . . . . . . . . . F
1.33 inch (NW35CF) Conflat-type flange . . . . . . . . . . . . . .G
1/8 inch NPT / 1/2 inch tubulation . . . . . . . . . . . . . . . . . . . P
1/4 inch VCR-type female . . . . . . . . . . . . . . . . . . . . . . . . .Q
1/2 inch VCR-type male . . . . . . . . . . . . . . . . . . . . . . . . . . . R
Measurement Units
Torr . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . T
pascal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . P
NOTE:
Customer specific products may have a five-digit number following
the catalog numbers shown above.
Example: 275410-2-GD-T-XXXXX, where -XXXXX represents a
configuration outside of the standard catalog number.
Mini-Convectron®Vacuum Gauge Module with Nonlinear Analog Outputs
and Process Control Relays
Catalog numbers for Series 275 Mini-Convectron Modules
ConFlat®is a registered trademark of Varian Associates.
VCR®is a registered trademark of Swagelok Marketing Co.
Mini-Convectron Module Instruction Manual - 275513 5
Table of Contents
Chapter 1 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
Chapter 2 Chapter 2 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
2.1 Module Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
2.2 Installing Pressure Relief Devices . . . . . . . . . . . . . . . . . . . . 16
2.3 Installation Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
Locate and orient the module . . . . . . . . . . . . . . . . . . . . . . . 16
Attach the module to the vacuum chamber . . . . . . . . . . . . . 18
Assemble and connect the wiring . . . . . . . . . . . . . . . . . . . . 19
Grounding . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
Configure the setpoint relays for the application . . . . . . . . . 22
Calibrate the Convectron gauge . . . . . . . . . . . . . . . . . . . . . 22
Chapter 3 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
3.1 Preparing to Operate the Module . . . . . . . . . . . . . . . . . . . . 23
3.2 Nonlinear Analog Output . . . . . . . . . . . . . . . . . . . . . . . . . . 28
Commonly used Gases Other than N2or Air . . . . . . . . . . . . 28
Other Gases . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
3.3 Setpoint Relays . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39
Preparing to Adjust Setpoint Relays . . . . . . . . . . . . . . . . . . . 40
Adjusting Setpoint Relays . . . . . . . . . . . . . . . . . . . . . . . . . . 40
3.4 Reading Relay Status . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44
If the module without a display has one setpoint relay: . . . . 44
If the module has a digital display: . . . . . . . . . . . . . . . . . . . 44
3.5 Calibrate the Convectron Gauge at Atmospheric Pressure . . 44
If the module does not have a digital display: . . . . . . . . . . . 44
If the module has a digital display: . . . . . . . . . . . . . . . . . . . 44
3.6 Calibrate the Convectron Gauge at Vacuum Chamber Pressure
45
If the module does not have a digital display: . . . . . . . . . . . 45
If the module has a digital display: . . . . . . . . . . . . . . . . . . . 45
3.7 Modules Operating at Low Pressure . . . . . . . . . . . . . . . . . . 46
3.8 Factory Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46
Chapter 4 Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47
4.1 Customer Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47
Damage Requiring Service . . . . . . . . . . . . . . . . . . . . . . . . . 47
4.2 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 48
Precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 48
Symptoms, Causes, and Solutions . . . . . . . . . . . . . . . . . . . . 49
4.3 Convectron Gauge Test . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50
4.4 Convectron Gauge Removal and Replacement . . . . . . . . . . 51
Removing the Convectron Gauge . . . . . . . . . . . . . . . . . . . . 51
Replacing the Convectron Gauge . . . . . . . . . . . . . . . . . . . . 51
Appendix A Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53
Appendix B Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 57
Index . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 59
Table of Contents
6Mini-Convectron Module Instruction Manual - 275513
Mini-Convectron Module Instruction Manual - 275513 7
Chapter 1 Safety
1.1 Safety Introduction
START BY READING THESE IMPORTANT SAFETY INSTRUCTIONS AND NOTES collected here
for your convenience and repeated with additional information at appropriate points throughout
this instruction manual.
These safety alert symbols in this manual or on the Product mean caution - personal safety, property
damage or danger from electric shock. Read these instructions carefully.
This product was designed and tested to offer reasonably safe service provided it is installed,
operated, and serviced in strict accordance with these safety instructions.
Danger indicates a hazardous situation which, if not
avoided, will result in death or serious injury.
Warning indicates a hazardous situation which, if not
avoided, could result in death or serious injury.
Caution indicates a hazardous situation or unsafe
practice which, if not avoided, may result in minor or
moderate personal injury.
Indicates a situation or unsafe practice which, if not
avoided, may result in equipment damage.
Notice
These instructions do not and cannot provide for every contingency that
may arise in connection with the installation, operation, or maintenance of
this product. If you require further assistance, contact MKS at the address
on the title page of this instruction manual.
Safety Precautions
Failure to comply with these instructions may result in serious
personal injury, including death, or property damage.
Always observe and follow all safety notices that are
provided throughout this instruction manual and on the
product.
Chapter 1
8Mini-Convectron Module Instruction Manual - 275513
These safety precautions must be observed during all phases of operation, installation, and service
of this product. Failure to comply with these precautions or with specific warnings elsewhere in this
manual violates safety standards of design, manufacture, and intended use of the instrument. MKS
Instruments, Inc. disclaims all liability for the customer's failure to comply with these requirements.
•Read Instructions – Read all safety and operating instructions before operating the product.
•Retain Instructions – Retain the Safety and Operating Instructions for future reference.
•Heed Warnings – Adhere to all warnings on the product and in the operating instructions.
•Follow Instructions – Follow all operating and maintenance instructions.
•Accessories – Do not use accessories not recommended in this manual as they may be
hazardous.
Electrical Shock or Personal Injury
The service and repair information in this manual is for the use
of Qualified Service Personnel. To avoid possible electrical
shock or personal injury, do not perform any procedures in
this manual or perform any servicing on this product unless
you are qualified to do so.
Electrical Shock or Fire
To reduce the risk of fire or electric shock, do not expose this
product to rain or moisture.
Objects and Liquid Entry - Never push objects of any kind into
this product through openings as they may touch dangerous
voltage points or short out parts that could result in a fire or
electric shock. Be careful not to spill liquid of any kind onto the
products.
Safety
Mini-Convectron Module Instruction Manual - 275513 9
1.2 Grounding Requirements
See Grounding, Section 2.3.4 in the Installation chapter for more detailed requirements regarding
gauge and system grounding.
1.3 High Voltage
The Mini-Convectron Module does not have higher voltages than the source voltage required for
operation of the module.
However, hazardous voltages may be present in the vacuum system.
Proper Grounding
All components of a vacuum system used with this or any
similar high voltage product must be maintained at Earth
ground for safe operation.
Be aware that grounding this product does not guarantee that
other components of the vacuum system are maintained at
Earth ground.
Verify that the vacuum port to which the Series 275 Module is
mounted is electrically grounded. It is essential for personnel
safety as well as proper operation that the envelope of the
gauge be connected to a facility ground. See Section 2.3.4 for
detailed grounding instructions.
Connect power cords only to properly grounded outlets or
sources.
High Voltage
Be aware that when high voltage is present in any vacuum
system, a life threatening electrical shock hazard may exist
unless all exposed conductors are maintained at Earth ground.
All conductors in, on, or around the vacuum system that are
exposed to potential high voltage electrical discharges must
either be shielded at all times to protect personnel or must be
connected to Earth ground at all times.
This hazard is not unique to this product.
High Voltage
Be aware that an electrical discharge through a gas may
couple dangerous high voltage directly to an ungrounded
conductor almost as effectively as would a copper wire
connection. A person may be seriously injured or even killed
by merely touching an exposed ungrounded conductor at high
potential.
This hazard is not unique to this product.
Chapter 1
10 Mini-Convectron Module Instruction Manual - 275513
1.4 Over-Pressure Conditions
Install suitable devices that will limit the pressure from external gas sources to the level that the
vacuum system can safely withstand. In addition, install suitable pressure relief valves or rupture
disks that will release pressure at a level considerably below that pressure which the system can
safely withstand. Suppliers of pressure relief valves and pressure relief disks can be located via an
on-line search.
Confirm that these safety devices are properly installed before installing the product.
Ensure the following precautions are complied with at all times:
(1) the proper gas cylinders are installed
(2) the gas cylinder valve positions are correct on manual systems
(3) the automation is correct on automated gas delivery systems
Vacuum gauges with compression fittings may be forcefully ejected if the vacuum system is
pressurized.
Over-Pressure Conditions
Install suitable devices that will limit the pressure to the level the
vacuum system can safely withstand. In addition, install
suitable pressure relief valves or rupture disks that will release
pressure at a level considerably below the pressure that the
system can safely withstand.
Potential Automatic Operation
It is the installer's responsibility to ensure that the automatic
signals provided by the product are always used in a safe
manner. Carefully check the system programming before
switching to automatic operation.
Safety
Mini-Convectron Module Instruction Manual - 275513 11
1.5 System and Environment
1.6 Responsibility
It is the responsibility of the Customer to comply with all local, state, and federal ordinances,
regulations, and laws applicable to the installation, operation and service of this equipment.
It is the responsibility of the end user to provide sufficient lighting at work to meet local regulations.
Operation and Service of this equipment in strict accordance with the methods and procedures
supplied by MKS is the responsibility of the Customer.
MKS Instruments, Inc. assumes no liability, whatsoever, for any personal injuries or damages
resulting from the operation or service of this equipment in any manner inconsistent or contrary to
the methods supplied in MKS literature including, but not limited to, manuals, instructions,
bulletins, communications, and recommendations.
For product safety related matters, contact the MKS Customer Service Department. See Section 1.8
for detailed information regarding how to contact MKS Customer Service Representatives.
Explosive Environment
Do not use the Series 275 Module in an environment of
explosive or combustible gases or gas mixtures. Operation of
any electrical instrument in such an environment constitutes a
definite safety hazard. Do not use the product to measure the
pressure of explosive gases or gas mixtures.
Potential Automatic Operation
It is the installer's responsibility to ensure that the automatic
signals provided by the product are always used in a safe
manner. Carefully check the system programming before
switching to automatic operation.
Vacuum Chamber High Pressures
Where an equipment malfunction could cause a hazardous
situation, always provide for fail-safe operation. As an
example, in an automatic backfill operation where a
malfunction might cause high internal pressures, provide an
appropriate pressure relief device.
Chapter 1
12 Mini-Convectron Module Instruction Manual - 275513
1.7 Damage Requiring Service
Disconnect the product from all power sources and refer servicing to Qualified Service Personnel
under the following conditions:
a. When any cable or plug is damaged.
b. If any liquid has been spilled onto, or objects have fallen into the product.
c. If the product has been exposed to rain or water.
d. If the product does not operate normally even if you follow the operating instructions.
Adjust only those controls that are covered by the operation instructions. Improper
adjustment of other controls may result in damage and will often require extensive work
by a qualified technician to restore the product to its normal operation.
e. If the product has been dropped or the enclosure has been damaged.
f. When the product exhibits a distinct change in performance. This indicates a need for
service.
Notice
Do not substitute parts or modify the instrument.
Because of the danger of introducing additional hazards, do not install
substitute parts or perform any unauthorized modification to the product.
Return the product to a service facility designated by MKS for service and
repair to ensure that safety features are maintained. Do not use this
product if it has unauthorized modifications.
Notice
Safety Check - Upon completion of any service or repairs to this product,
ask the Qualified Service Person to perform safety checks to determine that
the product is in safe operating order.
Safety
Mini-Convectron Module Instruction Manual - 275513 13
1.8 Service Guidelines
Some minor problems are readily corrected on site. If the product requires service, contact the MKS
Technical Support Department at +1-833-986-1686. If the product must be returned to the factory
for service, request a Return Material Authorization (RMA) from MKS. Do not return products without
first obtaining an RMA. In some cases a hazardous materials disclosure form may be required. The
MKS Customer Service Representative will advise you if the hazardous materials document is
required.
When returning products to MKS, be sure to package the products to prevent shipping damage.
Shipping damage on returned products as a result of inadequate packaging is the Buyer's
responsibility.
For Customer Service / Technical Support:
MKS Global Headquarters
2 Tech Drive, Suite 201
Andover MA, 01810 USA
Phone: +1-833-986-1686
Email: [email protected]
Visit our website at www.mksinst.com
1.9 Warranty Information
MKS Instruments, Inc. provides an eighteen (18) month warranty from the date of shipment for new
products. The MKS Instruments, Inc. General Terms and Conditions of Sale provides the complete and
exclusive warranty for MKS products. This document may be located on the MKS web site at
www.mksinst.com, or may be obtained by contacting a MKS Customer Service Representative.
Chapter 1
14 Mini-Convectron Module Instruction Manual - 275513
1.10 FCC Verification
This equipment was tested and found to comply with the limits for a Class A digital device, pursuant to
Part 15 of the FCC Rules. These limits are designed to provide reasonable protection against harmful
interference when the equipment is operated in a commercial environment. This equipment generates,
uses, and can radiate radio frequency energy and, if not installed and used in accordance with this
instruction manual, may cause harmful interference to radio communications. However, there is no
guarantee that interference will not occur in a particular installation. Operation of this equipment in a
residential area may cause harmful interference in which case the user will be required to correct the
interference at his own expense. If this equipment does cause harmful interference to radio or television
reception, which can be determined by turning the equipment off and on, the user is encouraged to try
to correct the interference by one or more of the following measures:
• Reorient or relocate the receiving antenna.
• Increase the separation between the equipment and the receiver.
• Connect the equipment into an outlet on a circuit different from that to which the receiver is
connected.
• Consult the dealer or an experienced radio or television technician for help.
Mini-Convectron Module Instruction Manual - 275513 15
Chapter 2 Chapter 2 Installation
2.1 Module Components
The Mini-Convectron module contains a Convectron convection-enhanced Pirani heat-loss gauge.
Figure 2-1 illustrates the module without the digital display. The module without the display has
either one or two setpoint relays.
Figure 2-2 illustrates the module with the 3-digit digital display. The module with the display has
either zero or two setpoint relays.
Figure 2-1 Mini-Convectron Modules without Digital Display
Figure 2-2 Mini-Convectron Module with 3-Digit Display
Explosive Environment
Using the module to measure the pressure of flammable or
explosive gases can cause a fire or explosion resulting in
severe property damage or personal injury.
Do not use the module to measure the pressure of flammable
or explosive gases.
Mini-Convectron module with
one setpoint relay, no display
Mini-Convectron module with
two setpoint relays, no display
Mini-Convectron module with
two setpoint relays, 3-digit display
Mini-Convectron module with
no setpoint relays, 3-digit display
Chapter 2
16 Mini-Convectron Module Instruction Manual - 275513
2.2 Installing Pressure Relief Devices
Before you install the module, install appropriate pressure relief devices in the vacuum system.
MKS does not supply pressure relief valves or rupture disks. Suppliers of pressure relief valves and
pressure relief disks can be located via an on-line search.
Confirm that these safety devices are properly installed before installing the product.
2.3 Installation Procedure
The module installation procedure includes the following steps:
1. Locate and orient the module.
2. Attach the module vacuum chamber fitting to its mate on the vacuum chamber.
3. Assemble and connect module wiring.
4. Configure the setpoint relays to the desired voltage levels.
5. Calibrate the Convectron gauge at atmospheric and vacuum pressures.
2.3.1 Locate and orient the module
To locate and orient the module, refer to Figure 2-3, Figure 2-4, and Table 2-1, and follow the
instructions below.
2.3.1.1 Locate the Module
• For greatest accuracy and repeatability, locate the module in a stable, room-temperature
environment. Ambient temperature should never exceed 40 °C (104 °F) operating,
non-condensing, or 85 °C (185 °F) non-operating.
• Locate the module away from internal and external heat sources and in an area where ambient
temperature remains reasonably constant.
• Do not locate the module where it requires long lengths of tubing or has constricted tubing.
Over-Pressure Conditions
Operating the module above 1000 Torr (1333 mbar, 133 kPa)
true pressure could cause pressure measurement error or
product failure.
To avoid measurement error or product failure due to
over-pressurization, install pressure relief valves or rupture
disks in the system if pressure exceeds 1000 Torr (1333 mbar,
133 kPa).
Over-Pressure Conditions
Failure to use accurate pressure conversion data for N2or air to
other gases can cause an explosion due to over-pressurization.
If the module will measure any gas other than N2or air, before
putting the module into operation, adjust setpoint relays for the
process gas that will be used.
Chapter 2 Installation
Mini-Convectron Module Instruction Manual - 275513 17
Length of tubing depends on the application. Longer tubing will affect vacuum pressure limit and
response time.
• Do not locate the module near the pump, where gauge pressure might be lower than normal
vacuum chamber pressure.
• Do not locate the module near a gas inlet or other source of contamination, where inflow of gas
or particulates causes atmospheric pressure to be higher than system atmosphere.
• Do not locate the module where it will be exposed to corrosive gases such as mercury vapor or
fluorine.
• Do not locate the module where it will vibrate. Vibration causes convection cooling, resulting in
inaccurate high pressure readings.
Figure 2-3 Mini-Convectron Module Dimensions
2.3.1.2 Orient the Module
For proper operation of the module above 1 Torr, orient the module so the axis is horizontal (see
Figure 2-4). Although the Convectron gauge will read correctly below 1 Torr with the module
mounted in any position, inaccurate readings will result at pressures above 1 Torr if the module axis
is not horizontal.
Table 2-1 Mini-Convectron Vacuum Connections
Vacuum Connections Dim. H
cm in.
1/8 NPT pipe thread, ½-inch inside diameter 2.2 0.9
1/4-inch 4 VCR®type fitting, female 3.0 1.2
1/2-inch 8 VCR type fitting, female 3.9 1.5
NW16KF flange 3.1 1.2
NW25KF flange 3.1 1.2
1.33-inch (NW16CF) ConFlat®flange 3.8 1.5
2.75-inch (NW35CF) ConFlat flange 3.8 1.5
Chapter 2
18 Mini-Convectron Module Instruction Manual - 275513
Figure 2-4 Module Orientation
2.3.2 Attach the module to the vacuum chamber
Attach the module vacuum chamber fitting to its mate on the vacuum chamber.
1/8 NPT pipe thread
The 1/8 NPT pipe thread accommodates a standard 1/8 NPT female fitting.
a. Wrap the threads of the port to the vacuum chamber with thread seal tape.
b. Without using a wrench or other tool, tighten the module just enough to achieve a seal.
Over-Pressure Conditions
Twisting the module to tighten the fitting to the vacuum chamber
can damage the module’s internal connections.
• Do not twist the module to tighten the fitting.
• Use appropriate tools to tighten the fitting.
Mount the Module Axis Horizontally to Ensure
Accurate Measurement Above 1 Torr
Vacuum chamber
Vacuum chamber
Vacuum chamberVacuum chamber
Vacuumchamber
Vacuum
Vacuum
Recommended Not recommended
Chapter 2 Installation
Mini-Convectron Module Instruction Manual - 275513 19
VCR type fitting
a. Remove the plastic or metal bead protector cap from the fitting.
b. If a gasket is used, place the gasket into the female nut.
c. Assemble the components and tighten them to finger-tight.
d. While holding a back-up wrench stationary, tighten the female nut 1/8 turn past finger-tight on
316 stainless steel or nickel gaskets, or 1/4 turn past finger-tight on copper or aluminum gaskets.
KF flange
The KF mounting system requires O-rings and centering rings between mating flanges.
a. Tighten the clamp to compress the mating flanges together.
b. Seal the O-ring.
ConFlat flange
To minimize the possibility of leaks with ConFlat flanges, use high strength stainless steel bolts and
a new, clean OFHC copper gasket. Avoid scratching the seal surfaces. To avoid contamination,
install metal gaskets.
a. Finger tighten all bolts.
b. Use a wrench to continue tightening 1/8 turn at a time in crisscross order (1, 4, 2, 5, 3, 6) until
flange faces make contact.
c. Further tighten each bolt about 1/16 turn.
2.3.3 Assemble and connect the wiring
2.3.3.1 Connecting Cable
The cable is user-supplied. MKS does not supply the cable. Install externally shielded cable
and connect the shield at both ends. At the module end of the cable, connect the shield to
the outer shell of the subminiature D connector.
On both versions of the module, connect the 11.5 to 26.5 Vdc power supply to terminals 3 and 4.
• Terminal 4 (ground) is negative (–).
• Terminal 3 (input) is positive (+).
See Section 2.3.4 for grounding instructions.
Do not connect or disconnect any electrical connectors while power
is applied to the equipment (hot swapping). Doing so may cause
damage to the equipment or severe electrical shock to personnel.
Chapter 2
20 Mini-Convectron Module Instruction Manual - 275513
2.3.3.2 Wiring Terminals
Figure 2-5 #275400-1 Module with 9-Pin Connector, one Setpoint Relay, no Digital Display
Figure 2-6 #275400-2 Module with15-Pin Connector, two Setpoint Relays, no Digital Display
Figure 2-7 #275600-0 Module with15-Pin Connector, no Setpoint Relay, 3-Digit Display
Figure 2-8 #275600-2 Module with 15-Pin Connector, two Setpoint Relays, 3-Digit Display

Other manuals for Series 275 MiniConvectron

1

Other MKS Control Unit manuals

MKS Series 275 MiniConvectron User manual

MKS

MKS Series 275 MiniConvectron User manual

MKS 253B-2-2-2 User manual

MKS

MKS 253B-2-2-2 User manual

MKS 356 Micro-Ion Plus Series User manual

MKS

MKS 356 Micro-Ion Plus Series User manual

MKS T3B Series Owner's manual

MKS

MKS T3B Series Owner's manual

MKS HPS User manual

MKS

MKS HPS User manual

MKS HPS Square Body LoPro Series User manual

MKS

MKS HPS Square Body LoPro Series User manual

MKS 248A User manual

MKS

MKS 248A User manual

MKS HPS 145 Vacuum Sentry Series User manual

MKS

MKS HPS 145 Vacuum Sentry Series User manual

MKS 390 Series User manual

MKS

MKS 390 Series User manual

MKS Granville-Phillips Series 275 User manual

MKS

MKS Granville-Phillips Series 275 User manual

MKS Automated SENTRY 1000 User manual

MKS

MKS Automated SENTRY 1000 User manual

MKS T3PIA User manual

MKS

MKS T3PIA User manual

MKS Granville-Phillips 203 Series User manual

MKS

MKS Granville-Phillips 203 Series User manual

MKS HPQ2-IP User manual

MKS

MKS HPQ2-IP User manual

MKS Automated SENTRY 1000-300 User manual

MKS

MKS Automated SENTRY 1000-300 User manual

MKS Granville-Phillips 274 Series User manual

MKS

MKS Granville-Phillips 274 Series User manual

MKS SENTRY 1510A User manual

MKS

MKS SENTRY 1510A User manual

MKS AX Series User manual

MKS

MKS AX Series User manual

Popular Control Unit manuals by other brands

Extron electronics IRCM-DVplus user manual

Extron electronics

Extron electronics IRCM-DVplus user manual

Rockwell Automation ControlLogix 1756 Series Selection guide

Rockwell Automation

Rockwell Automation ControlLogix 1756 Series Selection guide

Kessel Staufix FKA Standard Installation and operating manual

Kessel

Kessel Staufix FKA Standard Installation and operating manual

Festo CPX-F8DE-P manual

Festo

Festo CPX-F8DE-P manual

Huawei SmartAX MA5612 Maintenance Guide

Huawei

Huawei SmartAX MA5612 Maintenance Guide

Victaulic 768N FireLock NXT Series Installation, Maintenance, and Testing Manual

Victaulic

Victaulic 768N FireLock NXT Series Installation, Maintenance, and Testing Manual

SMC Networks VZ400 Series quick start guide

SMC Networks

SMC Networks VZ400 Series quick start guide

Enerpac VE32 instruction sheet

Enerpac

Enerpac VE32 instruction sheet

Chauvet Stage Designer 50 TFX-48B user manual

Chauvet

Chauvet Stage Designer 50 TFX-48B user manual

Wilo Yonos MAXO Series Installation and operating instructions

Wilo

Wilo Yonos MAXO Series Installation and operating instructions

HACH LANGE sc200 user manual

HACH LANGE

HACH LANGE sc200 user manual

Fn-Link 6223E-UUD user manual

Fn-Link

Fn-Link 6223E-UUD user manual

National Instruments SCC-TC Series user guide

National Instruments

National Instruments SCC-TC Series user guide

Trinamic IDX 7507 Hardware manual

Trinamic

Trinamic IDX 7507 Hardware manual

Marquardt Just Drive Comfort 4313 Series operating manual

Marquardt

Marquardt Just Drive Comfort 4313 Series operating manual

Ross CrossMirror CM26 Series operating instructions

Ross

Ross CrossMirror CM26 Series operating instructions

Baker Hughes Consolidated 2478 Series instruction manual

Baker Hughes

Baker Hughes Consolidated 2478 Series instruction manual

ABB FSCA-01 Quick installation and start-up guide

ABB

ABB FSCA-01 Quick installation and start-up guide

manuals.online logo
manuals.online logoBrands
  • About & Mission
  • Contact us
  • Privacy Policy
  • Terms and Conditions

Copyright 2025 Manuals.Online. All Rights Reserved.