MKS Automated SENTRY 1000-300 User manual

Instruction Manual #122209 1
Automated SENTRY™
1000-300
Installation and Operation Manual
Instruction Manual part number 122209
Revision E – February 2020
© 2020 MKS Instruments, Inc. All rights reserved.
Granville-Phillips® is a registered trademark of MKS Instruments, Inc.
SENTRYTM is a trademark of MKS Instruments, Inc. All other trademarks
and registered trademarks are the properties of their respective owners.

Instruction Manual #122209 2
Notice
This product is intended for use by industrial customers and should be
serviced only by MKS trained representatives. The service manuals and
related materials are provided in English at no charge and are intended for
use by experienced technicians. It is the responsibility of the user to obtain
and assure the accuracy of any needed translations of manuals. If you
require assistance, contact the MKS Customer Service group. Contact
information can be found on page 3 of this instruction manual and at
www.mksinst.com. The MKS Technical Support Group notifies users of
record if safety-related upgrades or new hazards associated with the product
are identified.
Record the Serial Numbers and Model Numbers
The model number, serial number and revision reference of each component may
be found on the SENTRY Controller and SENTRY Supervisor serial tags. The
model number and revision reference of the cables may be found as a label on
each cable. For your convenience, record the numbers below and retain this
manual and information for future reference.
1) SENTRY Controller
Model Number:
Serial Number:
2) SENTRY Supervisor
Model Number:
Serial Number:
4) Tool/Host to SENTRY Supervisor
Interface Cable
Model Number:
-OR-
Stand-Alone Power Supply Cable
Model Number:
3) SENTRY Supervisor to SENTRY
Controller Cable
Model Number:
5) Serial Communication Cable
Model Number:
Other/Special:
SentryTM, Sentry 1510TM, Aerodynamic Resistor ValveTM, and Vacuum Regulation ValveTM
are trademarks of MKS Instruments, Inc.

Instruction Manual #122209 3
Damage Requiring Service
Disconnect the product from all power sources and refer servicing to Qualified Service Personnel under the
following conditions:
a. When any cable or plug is damaged.
b. If any liquid has been spilled onto, or objects have fallen into the product.
c. If the product has been exposed to rain or water.
d. If the product does not operate normally even if you follow the operating instructions. Adjust only those
controls that are covered by the operation instructions. Improper adjustment of other controls may result
in damage and will often require extensive work by a qualified technician to restore the product to its
normal operation.
e. If the product has been dropped or the enclosure has been damaged.
f. When the product exhibits a distinct change in performance. This indicates a need for service.
Service and Warranty
Service and Warranty Guidelines
Some minor problems are readily corrected on site. If the product requires service, contact the MKS Technical
Support Department at [phone]. If the product must be returned to the factory for service, request a
Return Material Authorization (RMA) from MKS. Do not return products without first obtaining an RMA. In some
cases, a hazardous materials disclosure form may be required. The MKS Customer Service Representative will
advise you if the hazardous materials document is required.
When returning products to MKS, be sure to package the products to prevent shipping damage. Shipping
damage on returned products as a result of inadequate packaging is the Buyer's responsibility.
For Customer Service / Technical Support:
MKS Global Headquarters
2 Tech Drive, Suite 201
Andover MA, 01810 USA
Phone: [phone]
Email: [e-mail]
Visit our website at: www.mksinst.com
Warranty Information
MKS Instruments, Inc. provides an eighteen (18) month warranty from the date of shipment for new MKS
products. The MKS Instruments, Inc. general terms and conditions of sale provide the complete and exclusive
warranty for MKS products. This document is located on our web site at www.mksinst.com, or may be obtained
by a contacting an MKS customer service representative.
Proprietary Information
This document contains confidential proprietary information belonging to MKS Instruments, Inc. This information
is not for publication and has been provided to MKS on the condition that it not be copied, reproduced or
disclosed, either wholly or in part, to third parties without the expressed written consent of MKS Instruments, Inc.
The information contained in this document is subject to change without notice.
The SENTRY Supervisor and related SENTRY technology is covered by one or more of the following patents: U.
S. Pat Nos. 5,000,221; 5,220,940; 5,251,654; 5,255,709; 5,255,710; 5,320,124; 5,450,873; 5,456,280;
5,582,203; 5,597,011; 5,634,490; 5,655,562; and 5,664,600 and European Pat. No. 0 491 684. Other patents are
pending.

Instruction Manual #122209 4
Table of Contents
1Quick Start Guide ................................................................................................................ 11
SENTRY 1000-300 Installation Checklist ....................................................................................................... 11
2General Description............................................................................................................. 12
Contents ........................................................................................................................................................ 12
Part Names and Descriptions ........................................................................................................................ 13
SENTRY 1000-300 ........................................................................................................................................ 13
Piston-Cylinder .............................................................................................................................................. 14
SENTRY TIM-100/120 UFSP ........................................................................................................................ 14
Tool Interfaced Operation of the Sentry 1000-300 .................................................................... 14
3Guidelines ............................................................................................................................ 15
Installation Guidelines .................................................................................................................................... 15
Installation Layout .......................................................................................................................................... 16
5 Operation ............................................................................................................................... 29
Introduction .................................................................................................................................................... 29
Operational Theory ........................................................................................................................................ 29
5Operation .............................................................................................................................. 30
Automated Set Point Modulation ................................................................................................................... 30
6Maintenance & Troubleshooting ........................................................................................ 31
Scheduled Maintenance ................................................................................................................................ 31
Preventative Maintenance (PM) ..................................................................................................................... 31
Inspection & Cleaning Schedules .................................................................................................................. 31
Preventative Maintenance (PM) Cleaning Procedure .................................................................................... 31
6Maintenance & Troubleshooting ........................................................................................ 32
Troubleshooting Guide................................................................................................................................... 32
7. Appendix A: Specifications and Facility Requirements ...................................................... 33
7. Appendix B: Dimensional Schematic .................................................................................... 34
8. Appendix B: Dimensional Schematic ................................................................................ 35
7. Appendix C: System Grounding ............................................................................................ 36
7. Appendix D SENTRY TIM Parameters ................................................................................. 37
7 Appendices .......................................................................................................................... 34
Appendix A: Specifications and Facility Requirements
Appendix B: Dimensional Schematic
Appendix C: System Grounding
Appendix D: TIM 100 UFSP Command Menu Settings

Instruction Manual #122209 5
Safety Information
Be sure to read these important safety instructions and notes collected here for your
convenience and repeated with additional information at appropriate points throughout
this instruction manual.
These safety alert symbols in this manual or on the Product mean caution - personal safety,
property damage or danger from electric shock. Read these instructions carefully.
This product was designed and tested to offer reasonably safe service provided it is installed,
operated, and serviced in strict accordance with these safety instructions. These safety
precautions must be observed during all phases of operation, installation, and service of this
product. Failure to comply with these precautions or with specific warnings elsewhere in this
manual violates safety standards of design, manufacture, and intended use of the instrument.
MKS Instruments, Inc. disclaims all liability for the customer's failure to comply with these
requirements.
• Read Instructions – Read all safety and operating instructions before operating the product.
• Retain Instructions – Retain the Safety and Operating Instructions for future reference.
• Heed Warnings – Adhere to all warnings on the product and in the operating instructions.
• Follow Instructions – Follow all operating and maintenance instructions.
• Accessories – Do not use accessories not recommended in this manual as they may be
hazardous.

Instruction Manual #122209 6
General Hazards
Failure to review the Safety chapter and follow the safety
warnings can result in serious injury or death.
Do not attempt to perform installation, operation, or
maintenance procedures on the product until you have read and
understand the information in the Safety Chapter.
Read and understand each procedure before performing the
procedure.
Personal Responsibility
It is the responsibility of each person working on this product to
know the applicable regulatory safety codes as well as the
safety procedures, safety equipment, and contact information.
General Safety Considerations
Inappropriate Use
Use of this product in a manner or for purposes other than for
what it is intended may cause equipment damage or personal
injury.
Only use the product for its intended application.
Do not modify this product beyond its original design.
Always operate this product with the covers in place.
Damaged Components
The use of this product when components or cables appear to
be damaged may cause equipment malfunction or personal
injury.
Do not use this product if components or cables appear to be
damaged.
Place the product in a location where it will not get damaged.
Route cables and tubing so that they do not become damaged
and do not present a personal safety hazard.

Instruction Manual #122209 7
This equipment contains no user serviceable part. Refer all
repairs to MKS.
Do not operate this equipment without proper exhaust
connections.
Safety Alert Labels
Safety labels and identification labels are placed on the robot and controller to provide
operators with information. This section describes each label and identifies its location. For
safety labels, instructions are provided on how to avoid the hazard.
Warning Label – Hazardous Voltage
Location: On Power Supply Brick
Possible Injuries: Electric Shock or Burn
How to avoid hazard: Unplug and lockout before service.
Warning Label – Refer to manual
Location: TIM/Valve
Possible Injuries: Various
How to avoid hazard: Read and understand manual
before installation or use of equipment.
Disconnect Devices and Interlocks
Safety Interlocks
This product does not have an Emergency Off (EMO) circuit.
Using this product without an EMO may cause personal injury
or death.
The user must provide a disconnect device for the product
power that complies with local electrical codes.
Personnel servicing this product are responsible for disconnect
as specified by the facility Lockout/Tagout procedures.

Instruction Manual #122209 8
Grounding
The power source to which this product is connected must be properly grounded in
accordance with all electrical codes pertaining to high voltage electrical equipment in an
industrial environment.
See Grounding in the following documentation for more detailed requirements regarding
gauge and system grounding.
Electrical Shock
Improper electrical connection or connection to an improper
electrical supply can result in electrical shock, burns, fire, and
damage to the equipment and death or serious injury.
Always use proper power and proper electrical compliant
connections in accordance with local electrical code.
Fire and Explosion Hazards
The Product provides no direct fire or explosion hazard.
Explosive Environment
Do not use the product in an environment of explosive or
combustible gases or gas mixtures. Operation of any electrical
instrument in such an environment constitutes a definite safety
hazard. Do not use the product to measure the pressure of
explosive gases or gas mixtures.
Damaged Components
This equipment has not been evaluated for use in exhaust lines
containing flammable gases at concentrations at, or in excess
of their Lower Explosive Limit (LEL), or for hazardous locations
and environments.
Responsibility
It is the responsibility of the Customer to comply with all local, state, and federal ordinances,
regulations, and laws applicable to the installation, operation and service of this equipment.
It is the responsibility of the end user to provide sufficient lighting at work to meet local
regulations.

Instruction Manual #122209 9
Operation and Service of this equipment in strict accordance with the methods and
procedures supplied by MKS is the responsibility of the Customer.
MKS Instruments, Inc. assumes no liability, whatsoever, for any personal injuries or damages
resulting from the operation or service of this equipment in any manner inconsistent or
contrary to the methods supplied in MKS literature including, but not limited to, manuals,
instructions, bulletins, communications, and recommendations.
For emergencies and for product safety related matters, contact MKS.
Notice
Do not substitute parts or modify the instrument. Because of the danger of
introducing additional hazards, do not install substitute parts or perform any
unauthorized modification to the product.
Return the product to a service facility designated by MKS for service and
repair to ensure that safety features are maintained. Do not use this product
if it has unauthorized modifications.
Notice
Safety Check - Upon completion of any service or repairs to this product, ask
the Qualified Service Person to perform safety checks to determine that the
product is in safe operating order.
Notice
Finite Lifetime - After ten years of normal use or even non-use, the electrical
insulation in this product may become less effective at preventing electrical
shock. Under certain environmental conditions which are beyond the
manufacturer’s control, some insulation material may deteriorate sooner.
Therefore, periodically inspect all electrical insulation for cracks, crazing, or
other signs of deterioration. Do not use if the electrical insulation has
become unsafe.

Instruction Manual #122209 10
Preface
The SENTRY 1000-300 Automated exhaust control system has several improved features though is otherwise
very similar to the SENTRY 1000 model.
The SENTRY™ 1000-300 flow controller is manufactured to provide mass flow control in an operating range of
10 - 100 CFM. The total SENTRY 1000-300 flow control system is comprised of the Tool Interface Module (TIM-
100 controller), the SENTRY 1000-300 flow controller, and associated interface cables. The SENTRY 1000-300
flow controller is depicted in Figure 1. The SENTRY 1000-300 flow controller produces a highly regulated flow
rate through a unique two stage process.
Fig. 1, illustrates the airflow through your process and through the SENTRY 1000-300
The SENTRY 1000-300 system is configured, and fully tested at MKS to operate over the full operating range of
10 – 100 CFM. For a majority of applications and installations where the minimum facilities exhaust spec. is
available (-2.5 in.H2O) the SENTRY 1000-300 flow controller will operate as configured at the factory without the
need for any special adjustments. The SENTRY 1000-300 flow controller can be installed right out of the box and
operated. However, if you find that the SENTRY 1000-300 system does not reach your maximum operating flow
set point, there are two different scenarios that could be the source of the problem:
Problem: The Maximum user set point cannot be reached.
Cause:
A. The available facility exhaust pressure is below specification
B. The process exhaust line to the SENTRY 1000-300 has a high resistance to flow.
Solution:
A. See the section below on Low House Exhaust. If it is determined that there is insufficient facility exhaust
pressure, the SENTRY 1000-300 controller is available with a Booster Fan option to increase the available
exhaust pressure inside the controller.
B See the section below on High Resistance Tools. If it is determined that the process exhaust line is
optimized for decreasing flow resistance and the maximum user set point cannot be reached then it will be
necessary to increase the internal vacuum. Increasing the internal vacuum requires increasing the piston’s
weight
High Resistance Tools:
To reduce the resistance of the tool, first look for all locations in the air flow path that might be restricting the
airflow. The tool manufacturer may have built- in dampers or gate valves that have been preset to control the
airflow. All dampers and gate valves should be opened to reduce the resistance and allow the maximum flow of
air.
The SENTRY 1000-300 should be the only controller in the airflow path.
Low House Exhaust:
Next, examine the facility exhaust line for partially closed dampers that may also have been used to control the
airflow through the process tool. The regulation portion of the SENTRY 1000-300 is powered by the house
exhaust system. To determine if there is adequate house exhaust to power the SENTRY 1000-300, verify if the
piston is floating. This is done by blocking the reference port at the bottom of the SENTRY 1000-300 for 10
seconds while looking through the window to see if the piston is slowly moving down. Then unblock the reference
port and look for a quick upward motion of the piston. If the piston quickly moves up there is sufficient house
exhaust to operate the SENTRY 1000-300 as it was configured at MKS.
If the piston does not respond to the opening and closing of the reference port, the house exhaust is insufficient.
Contact MKS for information regarding the installation of a booster fan.
Clean room
Process
Sentry Controller
Exhaust
Air Flow Through The Process And Control System

Instruction Manual #122209 11
1 Quick Start Guide
If you are familiar with the SENTRY 1000-300 Automated system and have previously installed the same model, you may
wish to simply photocopy this checklist onto clean room paper or printout and refer to it during the installation. Review the
notes and cautions located throughout this instruction manual prior to installation.
Notice
If you have not previously installed a SENTRY 1000-300 Automated system or
may have installed a different model, we recommend that you read through the
installation manual in its entirety first.
SENTRY 1000-300 Installation Checklist
1. Unpack and Review Part Names
2. Copy Installation Checklist
3. Remove all shipping materials from Sentry 1000-300 Controller including tape and/or shipping screw from
all input, output, and reference ports on the base of the cylinder.
4. Review Installation and Layout Guidelines
• SENTRY 1000-300 should only be mounted with the support base at the bottom and the automated throttle at the
top.
• SENTRY 1000-300’s input can be rotated relative to the output to better align with the tool or facility plumbing.
• If a reference tube is required: Max. length 8’ (ft) (2.4M)
• To maintain CE certification, the TIM 100/120 UFSP must be installed at a height above the floor (>24” / 0.6M).
• The minimum static exhaust required at the SENTRY 1000-300 output (without a booster fan) is –2.5” H2O) (-
64mm H2O) at rated flow capacity.
• For optimal performance, ensure that the support structure allows the SENTRY 1000-300 to be mounted within
0.5º level.
5. Installation & Power-Up
6. SENTRY 1000-300
Align the SENTRY 1000-300 output port (4” stainless steel bottom port) facing towards the
facility exhaust connection.
Mount the SENTRY 1000-300 to the support structure using the 4 (5/16”) bolt holes
located on the support base.
Align the SENTRY 1000-300 input port (top plastic port), which can be rotated,
facing towards the process tool exhaust connection.
Connect the SENTRY 1000-300 Input and Output connections.
Install a drain and drain isolation for coat and develop applications.
Connect a chassis ground to the SENTRY 1000-300 canister.
Optional Configuration: Booster Fan Power Supply Attachment
• Domestic (USA) Fan: Connect the power cord to an appropriately rated power supply.
• International Fan: Connect the power cord leads to the fan power box then connect
to an appropriately rated power supply.
Process pressure Sense Tube Installation
• Connect the sense port of the transducer on the SENTRY 1000-300 to the process exhaust to be
controlled.
• Do not pinch or pressurize the sense line because damage to the transducer can occur.
If a reference tube is required, connect the tube to the elbow provided on the base of the cylinder.
7. TIM-100/120 UFSP Installation
Mount the TIM-100/120 UFSP to the Tool.
Connect a chassis ground to the TIM-100/120 UFSP bracket.
8. SENTRY Cable Installation
Connect the TIM-100/120 UFSP to SENTRY 1000-300 Cable.
Connect the TIM-100/120 UFSP Power/Tool Interface Cable.
9. SENTRY System Startup
Power ON the TIM-100/120 UFSP
Verify Communication Operating Mode
Verify Piston Operation
Determine if additional weight installation is required
Weight Kit Table

Instruction Manual #122209 12
2 General Description
Contents
Unpacking the SENTRY 1000-300 system, make sure the contents shown below are not missing or damaged.
Report missing or damaged components from the supplier from which the system was purchased.
3) SENTRY TIM-100/120 UFSP to
SENTRY 1000-300 Cable
4) Serial Communication
RS422/485 Cable (Optional)
5a) Tool/Host to SENTRY
TIM-100/120UFSP Interface Cable
- OR -
5b) Stand-Alone Power
Supply Cable
6) Weight Kit
7) Manual(s) / CD-ROM
(Installation & Operation Instructions)
2) SENTRY Tool Interface
Module (TIM-100120 UFSP Shown)
1) SENTRY 1000-300 Controller
(Model Shown without Booster Fan-
optional)

Instruction Manual #122209 13
2 General Description
Part Names and Descriptions
The SENTRY 1000-300 consists of a mass flow controller, a tool interface module (TIM), and associated
cabling.
SENTRY 1000-300
The automated SENTRY 1000-300 is an innovative mass flow controller. It is designed to respond
almost instantaneously to changes in static exhaust pressure while maintaining a constant exhaust flow
from the process tool.
1. Automated SENTRY 1000-300 The Automated SENTRY 1000-300 is an innovative process exhaust controller. It is a
pressure regulator designed to respond almost instantaneously to changes in static exhaust pressure. This maintains a
constant exhaust condition at the process tool.
2. Booster Fan (Optional) The booster fan is an integrated point-of-use fan that provides increased static exhaust to the
SENTRY 1000-300. This option is typically chosen for installations with low facility static exhaust pressure.
3. Viewing Window The viewing window allows the user to determine if the piston is operating or if
cleaning is required.
4. SENTRY 1000-300 Input The input provides a means for connecting to the process exhaust output.
5. Throttle The throttle is commanded by the TIM-100/120 UFSP when a set point change is made. The throttle
modulates the pressure regulation of the piston. It typically is not used for active pressure regulation.
6. Pressure Transducer The pressure transducer (mounted under the cover) measures the process exhaust differential
pressure and reports the value to the TIM-100/120 UFSP.
7. Pressure Transducer Sense Port The Sense Port provides the means for connecting the process pressure sense tube
8. Canister The canister is the enclosure inside which the piston operates.
9. SENTRY 1000-300 Output The output provides a means for connecting to the facility exhaust hook up.
10. Piston Reference Port The piston reference port senses the ambient static pressure of the process tool environment
controlled by the SENTRY 1000. It also provides a piston air to the air-bearing which is critical to the proper operation
of the SENTRY 1000-300.
11. Support Base (Support Legs) The support base is used to mount the SENTRY 1000-300.
2
4
8
9
10
6
7
11
3
1
(8)
2
5

Instruction Manual #122209 14
2 General Description
Piston-Cylinder
The SENTRY 1000-300 is based on the “floating piston” concept, with one moving part reacting within 50
milliseconds to changes in exhaust pressure.
 Piston The piston is the single controlling component. It provides a
continuous mechanical pressure regulation. The piston mechanically
responds to changes in facility exhaust to maintain a stable exhaust.
 Cylinder The cylinder supports the piston during operation. The
piston moves vertically up and down on the cylinder. The design of the
product allows the space between the cylinder and the piston to be
frictionless through the use of an air-bearing.
SENTRY TIM-100/120 UFSP
Tool Interfaced Operation of the Sentry 1000-300
The TIM supplied for use with the S1000-300 contains version G2.3 software. This version software is backwards
compatible with previous version TIMs supporting the typical modes of operation: manual entry of set point using
keypad, serial communication, and analog interface. Version G2.3 software also offers a new mode called Universal
Fast Set Point (UFSP). UFSP provides high speed change between set points to minimize the time necessary to
change set points. When the TIM is in UFSP mode, the TIM’s memory map for serial communication commands is
the same as previous version software. Host communications programs written for previous versions of TIM
software will work with the UFSP TIM.
For additional information, refer to:
“Serial Communication Programmer’s Guide for the UFSP TIM 100/120”.


1. SENTRY TIM-100/120 UFSP is a microprocessor-based
interface used in conjunction with the SENTRY 1000-300.
The TIM-100/120 UFSP provides the user with the ability to
interface with the SENTRY 1000-300 controller through
direct keypad input or through electronic communication
from the process equipment.
2. Mounting Brackets are used to mount the TIM-100/120
UFSP to the process equipment.
3. Display provides a real time read-back of flow control. It
also allows the user to view and change the menu
parameters.
4. Keypad contains the four keys used to navigate and
change the menu tree and parameters.
5. Contrast Knob allows the user to adjust the display
contrast.
6. Power/Interface Port accepts the power cable (power
supply) or power and interface cable.
7. RS 422/485 Port accepts the optional serial
communication cable.
8. On/Off Switch is an on/off rocker connected to a fuse. The
fuse acts as a safety cut-off device by detecting over-
current situations and cutting power to the TIM-100/120
UFSP.
9. SENTRY Port accepts the TIM-100 to SENTRY 1000-300
controller cable.
10. Address Switches are used to set the base address of the
TIM-100/120 UFSP when using the RS 422/485
communication port.

Instruction Manual #122209 15
3 Guidelines
Installation Guidelines
Before beginning to design an installation layout, one should consider the following general installation features,
guidelines and limitations.
1. The SENTRY 1000-300 can only be mounted with the support base () at the bottom and the automated throttle () at the
top.
2. For ease of installation, the SENTRY 1000-300 input port assembly can be rotated to better align with the tool. The input port
assembly is a friction fit and can be rotated to any angle. There is no requirement to loosen hardware in this model to rotate
the input port assembly.
3. Only the process exhaust to be controlled should be plumbed to the SENTRY 1000-300. Other sources of exhausted airflow
or manifolds should not be connected prior to the SENTRY 1000-300 input.
4. If a drain is used for fluid separation, an isolation device must be used to isolate the process exhaust path from the drain
path. A p-trap is an example of one such isolation device.
5. To maintain CE certification, if applicable, the TIM-100/120 UFSP must be installed at a height greater than 24” (0.6 meter)
above the floor.
6. A recommended grounding scheme for the SENTRY 1000-300 and TIM-100/120 UFSP is depicted in the Appendix.
7. The minimum static exhaust required at the SENTRY 1000-300 output (without integrated booster fan) is -2.5” H2O (-64 mm
H2O) at rated capacity. Only -0.75” H2O (-19 mm H2O) is required when installed with the booster fan.



Instruction Manual #122209 16
Installation Layout
Design an installation layout and mounting strategy for the SENTRY 1000-300, TIM-100/120 UFSP, cables and
grounding connections.
Choose a location for mounting the SENTRY 1000-300 controller. This should be in a level, secure and
accessible location. To allow for easier maintenance access, ensure clearance space is available below the
SENTRY 1000-300.
Allow clearance to the side of the SENTRY 1000-300 models. This must be to the side of the canister which is
not obstructed by the support legs.
Notice
• Allow 10” (250 mm) of clearance for the 130 CFM SENTRY 1000 model.
• Ensure minimum of 10” (250 mm) of clearance on both sides of the Sentry
1000-300 valve opposite the support legs.
Ensure that the support structure allows for the SENTRY 1000-300 to be mounted within 0.5 of level.
0.5

Instruction Manual #122209 17
4 Installation & Power-Up
1. Align the SENTRY 1000-300 Output
The bottom port of the SENTRY 1000-300 is the output and must be plumbed to the facility exhaust. Align the
SENTRY 1000-300 output port facing towards the facility exhaust connection.
2. Mount the SENTRY 1000-300
Having selected a location for the SENTRY 1000-300, mount the SENTRY 1000-300 to the support structure
using the bolt holes located on the support base.
The bolt holes are located towards the inside and underneath the canister on the 100 CFM
3. Align the SENTRY 1000-300 Input
The top port of the SENTRY 1000-300 is the input and must be plumbed to the process tool exhaust port.
Align the SENTRY 1000-300 input port (top port), which can be rotated for easier installation.
Rotate the top of the SENTRY 1000-300 until the input is facing towards the process tool exhaust connection.
Notice
The input port assembly is a friction fit and can be rotated a full 360.
Bolt
Holes

Instruction Manual #122209 18
4. Connect the SENTRY 1000-300 Input and Output
The input and the output of the SENTRY 1000-300 have been aligned with the process tool exhaust line and the
facility exhaust line respectively. Wherever possible, use either fixed plumbing or flexible hose of a diameter that
is equal to or greater than the diameter of the SENTRY 1000-300 input and output. A reducer adapter may be
required to mate the SENTRY 1000-300 input and output ports to the appropriate mating connections at the tool
and at the facility connection. Where appropriate, use clamps to secure the connections.
 Connect and clamp the SENTRY 1000-300 input to the process tool exhaust using flexible hose or fixed
plumbing.
 If it is present, temporarily close the exhaust manual damper or shut-off associated with this SENTRY
1000-300 installation.
 Connect and clamp the SENTRY 1000-300 output to the facility exhaust connection.
Notice
Use a minimum 4” (100 mm) diameter flexible hose or fixed plumbing to
connect the SENTRY 1000-300 output to the facility exhaust connection.
 If it is present, open the line exhaust manual damper or shut-off to the full open position.
Notice
The SENTRY 1000-300 requires a minimum of -2.5” H2O (-64 mm H2O) of
facility exhaust at the rated flow capacity to achieve its full operating range.
It is recommended that all upstream and downstream dampers be open.
An optional booster fan is available from MKS for facilities that do not meet
the minimum exhaust requirements.
Tool




HE

Instruction Manual #122209 19
5. Power Supply
Notice
MKS systems are sold with and without a power supply. If the system being
installed includes the MKS Universal Power Supply, the following applies:
• The line voltage requirement of the unit is listed on the power supply label.
Plug the power supply into an outlet with the proper voltage and ground.
• To prevent fire or shock hazard, do not expose this product to any type of
moisture.
• When operating this power supply, the outlet should be near the product
and should be easily accessible.
• Refer servicing of this product to MKS Technical Support.
There are two cord set options that can be used on the power supply sold with the equipment. The standard option is
the North American Approved cord for use in US and Canada at 125VAC. For installation outside of the US and
Canada, or for use with other power supplies, a flying lead (3-lead) cable option can be purchased. The wiring
diagram is shown below.
Other suitable cords may be used with the power supply, but it is up to the user to select an appropriate, approved
cord according to their local electrical code specifications. MKS does not assume responsibility for damage to the
equipment caused by cords other than the ones that are available for purchase through MKS.
If a power supply other than the one supplied is used, it must be approved, provide double or reinforced insulation
(or equivalent) be between any main supply and the DC outputs to the Controller, and be derived from a limited
voltage, limited energy source.

Instruction Manual #122209 20
6. Connect the Process Pressure Sense Tube
The 130 CFM SENTRY 1000-300 model you’ve purchased has been upgraded to include a new series
pressure transducer. This Section describes additional detail necessary to install and operate the valve.
The process pressure sense tube connects the onboard differential pressure transducer to the process
exhaust to be controlled.
Notice
Do not pinch or pressurize the sense line because damage to the transducer
may occur.
 Locate the pressure transducer sense port on the SENTRY 1000-300 valve.
 Using a ¼” (6mm) OD flexible or rigid tube, connect the sense port of the pressure transducer to the
process exhaust as close to the tool as possible. This is the process exhaust that will be controlled by
the SENTRY system.
7. Connecting the TIM 100/120 UFSP and SENTRY 1000-300 Valve
The SENTRY system is manufactured to be CE compliant and uses a DB style connector.
Electrical Shock
Prior to installing or removing SENTRY 1000-300 system
cabling, turn the SENTRY Supervisor power switch to the OFF
(0) state.
 With the SENTRY 1000 Cable, connect the 25-pin male DB connector labeled “P3” to the right hand
connector on the TIM-100/120 labeled “TO SENTRY CONTROLLER”.
 Locate the 15-pin male DB connector on the SENTRY 1000-300 valve.
 With the SENTRY 1000-300 Cable, connect the 15-pin female DB connector labeled “P4” to the 15-pin
male connector on the SENTRY 1000-300 valve.
Pressure transducer
sense port
15-pin male DB
connector