Oxford Instruments PlasmalabSystem100 Installation and user guide

PlasmalabSystem100
Modular Cluster System –TEOS
Installation Data
Issue 10: February 2011

PlasmalabSystem100 Oxford Instruments Plasma Technology Installation Data
Installation Data (PECVD - TEOS)
Issue 10: February 11 Page 2 of 24 Printed: 10-Feb-11, 9:07
Contents
Page
1. Introduction............................................................................................................3
2. Installation information...........................................................................................4
2.1 Dimensions ........................................................................................................ 4
2.2 Weights .............................................................................................................. 4
2.3 Heat load ........................................................................................................... 4
3. Services connections ...............................................................................................8
4. Gas handling ........................................................................................................10
5. Services ................................................................................................................14
5.1 Electrical Supply requirement ...........................................................................14
5.2 Water Cooling requirement............................................................................... 14
5.3 Top Electrode Temperature requirement .......................................................... 14
5.4 Compressed Air requirement............................................................................ 14
5.5 Nitrogen requirement.......................................................................................15
5.6 Process gas requirement .................................................................................. 15
5.7 Extraction requirement.....................................................................................15
6. Pump set information ...........................................................................................16
7. Heater/chiller information.....................................................................................18
8. PLC interlock chain ...............................................................................................20
8.1 General description .......................................................................................... 20
8.2 Gas box interlocks ...........................................................................................22
8.2.1 Incompatible gases.................................................................................... 22
8.2.2 System Link Configuration Table................................................................ 23
8.2.3 System LED Monitoring Table..................................................................... 24
9. OIPT locations worldwide ......................................................................................24
Fig 1: PECVD system layout (3-frame Base pressure turbo configuraton) ..................... 5
Fig 2: PECVD system layout (2-frame) .........................................................................6
Fig 3: PECVD Layout (2-frame cluster upgradeable) ..................................................... 7
Fig 4: PECVD services panel.........................................................................................8
Fig 5: Electrical connections ........................................................................................9
Fig 6: 4-Line gas pod ................................................................................................10
Fig 7: 8-Line gas pod ................................................................................................11
Fig 8: 12-line gas pod...............................................................................................12
Fig 9: TEOS pod ........................................................................................................ 13
Fig 10: TEOS oven .....................................................................................................13
Fig 11: Gas box interlock chain .................................................................................22
Table 1: RF enable interlock chain details ..................................................................21
Table 2: Incompatible gases ...................................................................................... 22
Table 3: System link configuration............................................................................. 23
Table 4: System LED monitoring ................................................................................ 24

Installation Data Oxford Instruments Plasma Technology PlasmalabSystem100
Installation Data (PECVD - TEOS)
Printed: 10-Feb-11, 9:07 Page 3 of 24 Issue 10: February 11
1. Introduction
This installation specification document gives information about the PlasmalabSystem100 to
enable customers to prepare the required environment for the system.
Note that all dimensions shown in these data sheets are typical; precise dimensions
depend on the actual equipment fit. All dimensions are given in millimetres unless
otherwise stated.
NOTE:
All information, services, dimensions etc., refer only to the
PlasmalabSystem100, i.e. plasma processing at up to 200 mm wafers in
MESC compatible chambers.
Consider access when planning the system installation. Ensure that good access is
available to parts of the system that require maintenance. Ensure that all isolation points
for the system services are easily accessible.
Oxford Instruments Plasma Technology conducts a programme of continual product
development, and reserves the right to change the design and/or specification of
equipment without notice. The details contained in this document were correct at the
time of printing but should be confirmed immediately prior to delivery. Details of the
clean room interface will be advised at the time of delivery.

PlasmalabSystem100 Oxford Instruments Plasma Technology Installation Data
Installation Data (PECVD - TEOS)
Issue 10: February 11 Page 4 of 24 Printed: 10-Feb-11, 9:07
2. Installation information
2.1 Dimensions
System dimensions are given in Fig 1, Fig 2 and Fig 3. Gas handling component
dimensions are given in Fig 6, Fig 7 and Fig 8. Teos pod and TEOS oven dimensions are
given in Fig 9 and Fig 10 respectively. Pump dimensions are given in Section 6.
Heater/chiller dimensions are given in Section 7.
2.2 Weights
Typical weights of system components:
2-frame system: 290 kg
3-frame system: 360 kg
6-line Gas pod: 35 kg
TEOS pod: 35 kg
TEOS oven: 30 kg
12-line Gas pod: 65 kg
Pumps: See Section 6 (Pump set information).
Heater/chillers: See Section 7 (Heater/chiller information).
2.3 Heat load
The typical heat load for the clean room installation is:
Operating: 2 kW
Passive: 1.5 kW
Note that these specifications do not include externally sited components, e.g. pumps,
heater/chillers, transformers, etc..
Heat loads for typical chillers are given in the following table. The heat loads are quoted
for a bath temperature of 20°C and 100% cooling.
Chiller Model
Heat Load
FP51-SL
3.5 kW
FL601
1.1 kW
FC1600T
2.0 kW

Installation Data Oxford Instruments Plasma Technology PlasmalabSystem100
Installation Data (PECVD - TEOS)
Printed: 10-Feb-11, 9:07 Page 5 of 24 Issue 10: February 11
1412
1630
747
550
SERVICE ACCESS
OIPT RECOMMENDS THAT AT LEAST 600mm
SERVICE ACCESS SPACE IS ALLOWED BETWEEN
ANY OBSTACLE (E.G. WALLS, PARTITIONS, ETC.)
AND SERVICEABLE ITEMS, E.G. THE POWER
DISTRIBUTION UNIT.
Fig 1: PECVD system layout (3-frame Base pressure turbo configuraton)
NOTE: For services panel details, see Fig 4.

PlasmalabSystem100 Oxford Instruments Plasma Technology Installation Data
Installation Data (PECVD - TEOS)
Issue 10: February 11 Page 6 of 24 Printed: 10-Feb-11, 9:07
1412
1090
747
550
SERVICE ACCESS
OIPT RECOMMENDS THAT AT LEAST 600mm
SERVICE ACCESS SPACE IS ALLOWED BETWEEN
ANY OBSTACLE (E.G. WALLS, PARTITIONS, ETC.)
AND SERVICEABLE ITEMS, E.G. THE POWER
DISTRIBUTION UNIT.
Fig 2: PECVD system layout (2-frame)
NOTE: For services panel details, see Fig 4.

Installation Data Oxford Instruments Plasma Technology PlasmalabSystem100
Installation Data (PECVD - TEOS)
Printed: 10-Feb-11, 9:07 Page 7 of 24 Issue 10: February 11
1795
446
550
1412
514
244
865
SERVICE ACCESS
OIPT RECOMMENDS THAT AT LEAST 600mm
SERVICE ACCESS SPACE IS ALLOWED BETWEEN
ANY OBSTACLE (E.G. WALLS, PARTITIONS, ETC.)
AND SERVICEABLE ITEMS, E.G. THE POWER
DISTRIBUTION UNIT.
Fig 3: PECVD Layout (2-frame cluster upgradeable)
NOTE: For services panel details, see Fig 4.

PlasmalabSystem100 Oxford Instruments Plasma Technology Installation Data
Installation Data (PECVD - TEOS)
Issue 10: February 11 Page 8 of 24 Printed: 10-Feb-11, 9:07
3. Services connections
711
738.5
746
781
816
851
886
921
956
Distance
to floor
level
385 415 461.5
3/8“ SWAGELOK
3/8“ SWAGELOK
3/8“ SWAGELOK
1/4“ SWAGELOK
1/4“ SWAGELOK
1/4“ VCR
(Additional
process gas
when required)
1/4“ VCR
TOP ELECTRODE
& AMU COOLING
OUTIN
OUT
IN
OUT
IN
OUTIN
LF GENERATOR COOLING
PROCESS CHAMBER
COOLING
TURBO COOLING
N2 IN
AIR IN
PROCESS
GAS
AIR OUT
CHAMBER BACKING
4 MM PUSH-FIT
LEGRIS
PLC SERVICE
ACCESS CONNECTOR
(THIS IS AN
ALTERNATIVE PC
COMMUNICATIONS
CONNECTION)
NOT
(Only used if
a turbo pump
is fitted)
(Only used if
chamber cooling
is fitted)
Distance
to left-hand
edge of frame
(viewed from rear
of system)
For the 3-frame system Automatic
Load Lock Services Panel, this
distance is 407 to the right-hand
edge of the frame (viewed from
rear of system).
For the 2-frame system Automatic
Load Lock Services Panel, this
distance is 1009 to the left-hand
edge of the frame (viewed from
rear of system)
Fig 4: PECVD services panel
NOTE: The Automatic load lock services panel is similar to that shown above but only
the CHAMBER BACKING connector is used.

Installation Data Oxford Instruments Plasma Technology PlasmalabSystem100
Installation Data (PECVD - TEOS)
Printed: 10-Feb-11, 9:07 Page 9 of 24 Issue 10: February 11
POWER DISTRIBUTION
UNIT
(REMOVABLE COVER)
COOLING
FAN
SKT 7 SKT 10A SKT 9
SKT 17SKT 16SKT 8
PUMP
PURGE HEATER/ CHILLER
SKT 10
EARTH TERMINAL
SYSTEM POWER
CABLE GLAND
(CABLE LENGTH
= 4 METRES)
LOW VOLTAGE
FUSES
SKT 7
AUXILIARY
EMERGENCY OFF
SWITCH CONNECTOR
4-WAY BICC
PIN A EMO 1*
PIN B +24V
PIN C 0V
PIN D EMO 2*
(NOTE: EMO 1 & 2
MUST BE LINKED)
*EMO = EMERGENCY
OFF
2 AMP
FS1
+15V -15V +24V
FS2 FS3
2 AMP 2 AMP
1
2
3
456
PHASE 1
PHASE 2
PHASE 3
SPARE
SPARENEUTRAL
SUPPLY TO LOAD LOCK
ROTARY PUMP
SOCKET 10A
1
2
3
456
PHASE 1
PHASE 2
PHASE 3
SPARE
SPARENEUTRAL
SUPPLY TO ROTARY
PUMP 2
SOCKET 9
12
3 4
PHASE 1
PHASE 2
PHASE 3
SUPPLY TO ROTARY
PUMP 1
SOCKET 10
1
2 E
SUPPLY TO ROTARY
PUMP OIL FILTER
SOCKET 17
415V
Pin 1 Live
Pin 2 Neutral
Pin E Earth
208V
Pin 1 Phase 1
Pin 2 Phase 2
Pin E Phase 3
Fig 5: Electrical connections

PlasmalabSystem100 Oxford Instruments Plasma Technology Installation Data
Installation Data (PECVD - TEOS)
Issue 10: February 11 Page 10 of 24 Printed: 10-Feb-11, 9:07
4. Gas handling
IMPORTANT OIPT gas pods typically weigh >40kg. If you intend fixing your gas pod
to a wall, ensure the wall and gas pod fixings are sturdy enough to bear
at least four times the weight of the gas pod. Periodically, e.g. annually,
check the gas pod and its fixings are secure.
356
426.3
496.6
566.9
637.2
707.5
322.2
0
650
45
SECONDARY GAS OUTLET
LINE TO SYSTEM (ONLY
USED IF A SPLIT MANIFOLD
IS FITTED)
¼"
PRIMARY GAS
OUTLET LINE TO
SYSTEM
HEATER
CONTROLLERS
(IF FITTED)
GAS INLET LINES
(¼"STAINLESS
STEEL TUBE
FOR WELDING TO
THE CUSTOMER'S
SUPPLY)
GAS 1
GAS 2
GAS 3
GAS 4 160
GAS POD COVER
INTERLOCK MICROSWITCH
COMPRESSED
AIR IN (LEFT-HAND
CONNECTOR) & OUT
(4mm push fit)
25-WAY ‘D’ CONNECTOR
FOR PLC/PCB
CONTROL SIGNALS
EARTH
STUD
FIXING HOLE
(6.5 mm DIA.)
LOCATED 20 mm
FROM EDGES
OF BACKPLATE
(ONE AT EACH
CORNER)
220
1030
100
100 mm DIAMETER
EXTRACTION COLLAR
Fig 6: 4-Line gas pod

Installation Data Oxford Instruments Plasma Technology PlasmalabSystem100
Installation Data (PECVD - TEOS)
Printed: 10-Feb-11, 9:07 Page 11 of 24 Issue 10: February 11
356
426.3
496.6
566.9
637.2
707.5
777.8
848.1
918.4
988.7
41
0
650
45 SECONDARY GAS OUTLET
LINE TO SYSTEM (ONLY
USED IF A SPLIT MANIFOLD
IS FITTED)
¼"
PRIMARY GAS
OUTLET LINE TO
SYSTEM
HEATER
CONTROLLERS
(IF FITTED)
GAS INLET LINES
(¼"STAINLESS
STEEL TUBE
FOR WELDING TO
THE CUSTOMER'S
SUPPLY)
GAS 1
GAS 2
GAS 3
GAS 4
GAS 5
GAS 6
GAS 7
GAS 8 160
GAS POD COVER
INTERLOCK MICROSWITCH
COMPRESSED
AIR IN (LEFT-HAND
CONNECTOR) & OUT
(4mm push fit)
25-WAY ‘D’ CONNECTOR
FOR PLC/PCB
CONTROL SIGNALS
EARTH
STUD
FIXING HOLE
(6.5 mm DIA.)
LOCATED 20 mm
FROM EDGES
OF BACKPLATE
(ONE AT EACH
CORNER)
220
1030
100
100 mm DIAMETER
EXTRACTION COLLAR
Fig 7: 8-Line gas pod

PlasmalabSystem100 Oxford Instruments Plasma Technology Installation Data
Installation Data (PECVD - TEOS)
Issue 10: February 11 Page 12 of 24 Printed: 10-Feb-11, 9:07
356
426.3
496.6
566.9
637.2
707.5
777.8
848.1
918.4
988.7
1059
1129.3
1199.6
1269.9
0
650
SECONDARY GAS OUTLET
LINE TO SYSTEM (ONLY
USED IF A SPLIT MANIFOLD
IS FITTED)
¼"
PRIMARY GAS
OUTLET LINE TO
SYSTEM
HEATER
CONTROLLERS
(IF FITTED)
GAS INLET LINES
(¼"STAINLESS
STEEL TUBE
FOR WELDING TO
THE CUSTOMER'S
SUPPLY)
GAS 1
GAS 2
GAS 3
GAS 4
GAS 5
GAS 6
GAS 7
GAS 8
GAS 9
GAS 10
GAS 11
GAS 12 160
GAS POD COVER
INTERLOCK MICROSWITCH
COMPRESSED
AIR IN (LEFT-HAND
CONNECTOR) & OUT
(4mm push fit)
25-WAY ‘D’ CONNECTOR
FOR PLC/PCB
CONTROL SIGNALS
EARTH
STUD
FIXING HOLE
(6.5 mm DIA.)
LOCATED 20 mm
FROM EDGES
OF BACKPLATE
(ONE AT EACH
CORNER)
1311.5
42.3
45
220
100
100 mm DIAMETER
EXTRACTION COLLAR
Fig 8: 12-line gas pod

Installation Data Oxford Instruments Plasma Technology PlasmalabSystem100
Installation Data (PECVD - TEOS)
Printed: 10-Feb-11, 9:07 Page 13 of 24 Issue 10: February 11
MAINS CABLE
TO MAIN UNIT
(3 METRES LONG)
600 60
60
600
200 100
25
NOTES:
MAXIMUM DISTANCE OF TEOS
POD FROM MAIN UNIT IS
2 METRES
ALL GAS LINES ARE 1/4“
STAINLESS STEEL TUBE,
PROTRUDING 160 mm
FROM POD FOR WELDING
EXTRACTION
COLLAR
510 4545
75
9mm Diameter
for M8 screws
Location of fixing holes
To PECVD system
Argon from
process gas pod
To TEOS
pot
From TEOS pot
6mm push-fit connector
for compressed air (CDA)
This line is heated and
should be 2 metres long
(max.) Pipe heaters and
insulation are supplied.
This line is heated and
should be 1.3 metres long
(max.) Pipe heaters and
insulation are supplied.
1)
2)
Fig 9: TEOS pod
460
490
526
FRONT VIEW LEFT-HAND SIDE VIEW
Fig 10: TEOS oven

PlasmalabSystem100 Oxford Instruments Plasma Technology Installation Data
Installation Data (PECVD - TEOS)
Issue 10: February 11 Page 14 of 24 Printed: 10-Feb-11, 9:07
5. Services
The required services are listed in the following sub-sections. For full details of services
specifications including connection diagrams, electrical connection schematic etc., read in
conjunction with the Oxford Instruments Plasma Technology ‘Services Specifications for
Plasmalab and Ionfab Systems’ document.
5.1 Electrical Supply requirement
Function
Connection
Parameter
Specification
System electrical
supply (208V
system)
Cable (4 meters
long)
Voltage
208Vac ±10%
Current
32 A
Frequency
50 / 60 Hz
Phases
3 phase, N + E
System electrical
supply (415V
system)
Cable (4 meters
long)
Voltage
380Vac –10% to
415Vac +6%
Current
32 A
Frequency
50 / 60 Hz
Phases
3 phase, N + E
5.2 Water Cooling requirement
Function
Connection
Parameter
Specification
Base Pressure
Turbo (if fitted)
1/4” stainless steel
Swagelok
Flow
1 lpm (0.27 gpm (US))
Temperature
15 - 25°C (59 - 77°F)
LF Generator
(if required)
3/8” stainless steel
Swagelok
Flow
2 lpm (0.53 gpm (US))
Temperature
10 - 25°C (50 - 77°F)
AMU
3/8” stainless steel
Swagelok
Flow
1 lpm (0.27 gpm (US))
Temperature
10 - 25°C (50 - 77°F)
Load lock turbo (if
required)
1/4” stainless steel
Swagelok
Flow
1 lpm (0.27 gpm (US))
Temperature
15 - 25°C (59 - 77°F)
5.3 Top Electrode Temperature requirement
Function
Connection
Parameter
Specification
Liquid controlled
top electrode
3/8” stainless steel
Swagelok to heater
/ chiller unit
Flow
2 lpm (0.53 gpm (US))
Temperature
As required by process
5.4 Compressed Air requirement
Function
Connection
Parameter
Specification
System CDA
4mm push-fit
Legris
Flow
5 lpm (0.2 cfm)
(combined with gas
pod)
Pressure
4.0 –6.0 Bar (60 –90
psi)
Gas pod CDA
4mm push-fit
Legris
Flow
5 lpm (0.2 cfm)
(combined with
system)
Pressure
4.0 –6.0 Bar (60 –90
psi)

Installation Data Oxford Instruments Plasma Technology PlasmalabSystem100
Installation Data (PECVD - TEOS)
Printed: 10-Feb-11, 9:07 Page 15 of 24 Issue 10: February 11
5.5 Nitrogen requirement
Function
Connection
Parameter
Specification
System N2
¼” stainless steel
Swagelok
Flow
8 lpm (0.32 cfm)
Pressure
3.0 Bar (45 psi)
minimum
Rotary pump purge
¼” stainless steel
Swagelok typically
Flow
Refer to sub-section
6.1 Rotary pump
purging
Pressure
Refer to sub-section
6.1 Rotary pump
purging
5.6 Process gas requirement
Function
Connection
Parameter
Specification
Process gas in
¼” stainless steel
welded pipe at gas
pod, ¼” stainless
steel VCR at
system.
Pressure
2.0 –3.0 Bar (30 –45
psi)
5.7 Extraction requirement
Function
Connection
Parameter
Specification
Gas pod
100mm (4”) tube
Flow
6-line gas pod –1
m3/hour (0.6 cfm)
12-line gas pod –3
m3/hour (1.8 cfm)
TEOS pod
100mm (4”) tube
Flow
1 m3/hour (0.6 cfm)
Rotary pump
exhaust
Refer to Section 6
Pump set
information

PlasmalabSystem100 Oxford Instruments Plasma Technology Installation Data
Installation Data (PECVD - TEOS)
Issue 10: February 11 Page 16 of 24 Printed: 10-Feb-11, 9:07
6. Pump set information
CAUTION
Where the rotary vane or Roots pumps are powered from a mains supply separate
from the PlasmalabSystem100, a separate 'emergency off' facility must be provided by the
customer.
6.1 Process pump options
6.1.1 Rotary pump purging
The requirements for rotary pump purging depend on the process used. Customers
should consult the pump manufacturer for their recommendations.
For Alcatel 2033 and 2063 rotary pumps, the recommended minimum N2purge rate is
2 litres/minute at a pressure of 2bar to 5bar. For highly corrosive or pyrophoric gases,
4 litres/minute is recommended.
6.1.2 Dry pump water cooling
For Alcatel ADP122P and ADS602P dry pumps, the recommended minimum cooling water
flow rate is 1 litre/minute.
Available
pump
options
Length
mm
Width
mm
Height
mm
Pump inlet
connection
*Pump
outlet
connection
Weight
kg
Water
cooling
Power
consumption
kW
Minimum
N2purge
rate
Adixen
2033C2
701
213
348
DN 40
DN 40
76
n/a
1.1 (50Hz)
1.3 (60Hz)
2 lpm
Adixen
2063C2
819
264
397
DN 40
DN 40
98
n/a
2.2 (50Hz)
2.6 (60Hz)
2 lpm
Adixen
ADP122P
830
390
580
DN 50
DN 40
245
1 lpm
1.3 (50Hz)
1.5 (60Hz)
10 lpm
Adixen
ADS602P
830
390
875
DN 100
DN 40
378
1 lpm
1.8 (50Hz)
2.0 (60Hz)
10 lpm
Adixen
RSV301 +
2033C2
1120
400
1090
DN 63
DN 40
220
n/a
2.8
(50/60Hz)
**2 lpm
Adixen
RSV601 +
2063C2
1120
400
1090
DN 100
DN 40
260
n/a
4.5
(50/60Hz)
**2 lpm
* All fittings and pipework connected to the rotary pump exhaust must be made from industry standard
stainless steel. Refer to the OIPT Services Specifications document, sub-section 6.1.
** This figure applies only to the rotary vane pump; the roots blower does not require N2purging.

Installation Data Oxford Instruments Plasma Technology PlasmalabSystem100
Installation Data (PECVD - TEOS)
Printed: 10-Feb-11, 9:07 Page 17 of 24 Issue 10: February 11
6.2 Loadlock and wafer-handler pump options
Available
pump
options
Length
mm
Width
mm
Height
mm
Pump inlet
connection
*Pump
outlet
connection
Weight
kg
Water
cooling
Power
consumption
kW
**Minimum
N2purge
rate
Adixen
2015C2
462
188
240
DN 25
DN 25
27
n/a
0.45 (50Hz)
0.55 (60Hz)
2 lpm
Adixen
2033C2
701
213
348
DN 40
DN 40
76
n/a
1.1 (50Hz)
1.3 (60Hz)
2 lpm
Adixen
ACP15G
515
205
280
DN 25
DN 16
23
n/a
0.6
(50/60Hz)
5 lpm
Adixen
ACP28G
650
195
325
DN 25
DN 25
30
n/a
1.2
(50/60Hz)
1.65 lpm
Adixen
ACP40G
650
195
325
DN 40
DN 25
32
n/a
1.2
(50/60Hz)
1.65 lpm
* All fittings and pipework connected to the rotary pump exhaust must be made from industry standard
stainless steel. Refer to the OIPT Services Specifications document, sub-section 6.1.
** N2 purge recommended if corrosive gases residues are likely to be present e.g. cassette loadlocks on
chlorinated process etch systems.

PlasmalabSystem100 Oxford Instruments Plasma Technology Installation Data
Installation Data (PECVD - TEOS)
Issue 10: February 11 Page 18 of 24 Printed: 10-Feb-11, 9:07
7. Heater/chiller information
Chiller
Width
mm
Length
mm
Height
mm
Weight
kg
Usable
Temperature
Range °C
Water
Connections
Electrical
Requirements
Julabo FP51
460
550
890
90
-30 to 80
3/8”
Swagelok
400V, 50Hz,
3 Phase,
14 Amps
Julabo FP51
460
550
890
90
-30 to 80
3/8”
Swagelok
230V, 60Hz,
3 Phase,
14 Amps
Julabo FP51
460
550
890
90
-30 to 80
3/8”
Swagelok
220V, 60Hz,
1 Phase,
14 amps
Julabo FC 1600T
460
610
490
67
0 to 80
3/8”
Swagelok
230V, 50Hz,
1 Phase,
13 Amps
Julabo FC 1600T
460
610
490
67
0 to 80
3/8”
Swagelok
230V, 60Hz,
1 Phase,
13 Amps
Julabo FL 601
320
500
600
48
0 to 30
3/8”
Swagelok
230V, 50Hz,
1 Phase,
5 Amps
Julabo FL 601
320
500
600
48
0 to 30
3/8”
Swagelok
230V, 60Hz,
1 Phase,
5 Amps
Neslab
Thermoflex TF
1400
361
625
694
60
5 to 80
3/8”
Swagelok
208V, 60Hz,
1 Phase,
13 Amps
IMPORTANT: Heater/chillers should be filled/topped up with one of the fluids listed I
the following table, as appropriate. Refer the OIPT ‘Services Specifications
for Plasmalab and Ionfab systems’ document, sub-section 2.1 for the
warranty impact of not using these products.

Installation Data Oxford Instruments Plasma Technology PlasmalabSystem100
Installation Data (PECVD - TEOS)
Printed: 10-Feb-11, 9:07 Page 19 of 24 Issue 10: February 11
Part Number
Fluid
Usable Temperature
Range
Recommended
Application
94-G-WTR-SUN-909
Thermal G
-30 to 80°C
FL601.
FP51 when fitted to
systems with
electrically heated
tables and the
automatic liquid
nitrogen changeover
unit (ACU).
94-G-WTR-SUN-903
Thermal H5
-50 to 105°C
All other systems.
The following accessories are available for heater/chillers:
Part Number
Description
Application
94-G-G-WTR-SUN-921
Solenoid isolation valves
Fit these valves when the chiller
is located below the main
system.
Temperature range is -10°C to
+130°C.
94-100-12-23-1BL
LN2 Automatic Changeover Unit (ACU)
To automatically switch
between chiller fluid operation
and liquid nitrogen or
electrically heating of the table.

PlasmalabSystem100 Oxford Instruments Plasma Technology Installation Data
Installation Data (PECVD - TEOS)
Issue 10: February 11 Page 20 of 24 Printed: 10-Feb-11, 9:07
8. PLC interlock chain
8.1 General description
The interlocks form a continuous 24Vdc chain, which must be complete before the
process gases and RF power supplies are enabled. An output to disable external devices
unless the lid/ hoist is closed is also provided; this is typically used to disable a lid-
mounted endpoint detector laser.
The interlock chain is monitored by the software, but acts independently. It is also
supplemented by machine protection sensors, which operate only via the software.
To enable RF power:
The 600 mbar vacuum switch (‘Vacstat’) must be at low pressure
The process chamber lid must be shut (or its hoist down)
The primary process pump must be running
The primary process pressure gauge (normally a capacitance manometer) must be
on scale
The load lock inter-chamber valve (where fitted) must be closed
Customer-supplied external alarm devices must be in their safe state
The inert gas purge to the primary process pump must be flowing.
To enable process gases:
RF power must be enabled
The gas box lid must be shut
Specific gases can be set in the gas box hardware to be mutually exclusive, so that
they cannot be turned on together.
Machine protections fitted where appropriate:
A nitrogen pressure switch, to detect adequate purge pressure to turbomolecular
pump bearings.
OR:
A nitrogen flow meter, to detect purge gas flow to pump bearings.
Water flow switch(es).