Siargo FS5001L User manual

FS5001L User Manual
MEMS Mass flow sensors for manifold installation
©2022 Siargo Ltd.
VC.0.01

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MEMS Mass Flow Sensors
with thermal sensing technology for manifold configuration
FS5001L Series
User Manual
Document No. 07-2022-FS7 EN
Issue date: 2022.07
Revision: VC.0.01
Siargo Ltd.
3100 De La Cruz Boulevard, Suite 210
Santa Clara, California 95054
USA
Tel: [phone]
Email: [email protected]
© Copyright 2022 and Liability Disclaimer
Siargo Ltd. and its subsidiaries reserve the right to change the specifications and/or descriptions
without prior notice. Siargo and its subsidiaries shall not assume any inaccuracy or errors in this
manual. For further information and updates, please visit www.Siargo.com.

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Attention !
Use with caution !
xPlease carefully read this manual prior to operating this product.
xDo not open or modify any hardware which may lead to irrecoverable
damage.
xDo not use this product if you suspect any malfunctions or defection.
x
Do not use this product for corrosive media or in a strong vibration
environment.
xUse this product according to the specified parameters.
xOnly the trained or qualified personnel shall be allowed to perform
product services.
xBe cautious for electrical safety, and even it operates at a low voltage,
any electrical shock might lead to some unexpected damages.
xThe gas to be measured should be clean and free of particles, as
even light particles may be accumulated inside the tiny pressure port
that may result in inaccuracy in metrology, clogging, or other
irrecoverable damage.
xDo not apply for any unknown or non-specified gases that may
damage the product.

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Table of Contents
1. Overview.................................................................................................. 5
2.
Receipt / unpack of the products
................................................................ 6
3. Knowing the products ............................................................................... 7
3.1 Product description ...................................................................................................7
3.2 Power and data pinout description .............................................................................7
3.3 Mechanical dimensions..............................................................................................8
4.
Installation............................................................................................... 9
5. Basic operation........................................................................................10
5.1 I2C interface connection diagram.............................................................................. 10
5.2 I2C interface command description ........................................................................... 10
5.3 I2
C interface read/write sequences
............................................................................ 11
6. Product selection.....................................................................................12
7. Product performance ...............................................................................13
7.1 Technical specifications ........................................................................................... 13
7.2 Typical (analog) output............................................................................................ 14
7.3
Pressure loss ........................................................................................................... 14
8. Technical notes for the product performance .............................................15
8.1 Measurement principles........................................................................................... 15
8.2 Precautions for the best performance of the product ................................................. 15
8.2.1 Contamination and sterilization ...................................................................................15
8.2.2 Altitude changes.........................................................................................................15
8.2.3 Excessive humidity or condensation .............................................................................16
8.2.4 Metrology verification .................................................................................................16
9. Warranty and Liability..............................................................................17
10.
Service contact and information
...............................................................19
Appendix I: Sensor evaluation kit ...................................................................20
Appendix II: Document history.......................................................................21

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1. Overview
All contact information can be found at the end of this manual.
This manual provides essential information for the FS5001L series of
mass flow sensors for process
control and instrumentation including gas chromatography applications. The product performance,
maintenance, and troubleshooting, as well as the information for product order, technical support,
and repair, are also included.
The FS5001L sensors are manufactured with the company’s proprietary MEMS (micro-electro-
mechanical systems) sensing and package technology, providing temperature and pressure
independent mass flow sensing for a full-scale range from 200 to 15000 sccm with a maximum
pressure rating of 1
0 bar or 150 psi.
The product provides the manifold configuration for the mechanical connections. Optionally it also
opts for a stainless steel mechanical converter that offers the 4mm one-touch flexible piping.

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2. Receipt / unpack of the products
Upon receipt of the products, please check the packing box before the dismantlement of the packing
materials. Ensure no damages during shipping. If any abnormal
ity is observed, please contact and
notify the carrier who shipped the product and inform the distributors or sales representatives if the
order is not placed directly with the manufacturer; otherwise, the manufacturer should be informed.
For any further actions, please refer to the return and repair section in this manual.
If the packing box is intact, proceed to open the packing box, and you shall find the product (either
the sensor formality per the actual order), together with the power and data cable if the order is
included as shown below.
Please check immediately for the integrity of the product and the power and data cable; if any
abnormality
is identified, please notify the distributor/sales representative or manufacturer as soon
as you can. If any defects are confirmed, an exchange shall be arranged immediately via the original
sales channel. This user manual shall also be included in the packing box or via an online link for an
electronic version which should be sent by your sales agent. In most cases, this manual shall be made
available to the customer before the actual order.
For the purpose of preventing the sensor from over-force-related damage or malfunctions during
installation, the product comes with a stainless steel installation plate, 2 screws (M3x20), and
2 O-
rings (2.5x1.8).
Please note that the sensor has a pinout that is designed to be directly placed onto a printed circuitry
board. Therefore, the power and data cable is an option that will not come with the order
automatically. The product also is opted for a stainless steel accessory that allows the conversion of
the manifold connection into 4mm one-touch connections for flexible piping.
FS5001L Power and data cable (optional)
Figure 2.1: FS5001L flow sensor and accessories

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3. Knowing the products
3.1 Product description
Figure 3.1: FS5001L parts description
3.2 Power and data pinout description
Table 3.1: FS5001L pin assignment.
DO NOT connect or disconnect the sensor cable when power is on!! It will damage the
electronic chipsets inside the sensor module!
Note: 1. Power supply: The FS5001L requires a power supply of 8 ~ 24 Vdc. No particular requirements for
the external power supply, but standard industrial power cautions should be applied.
2. The analog outputs 0.5 ~ 4.5 Vdc are corresponding to the specified full-scale flow range at the
time of order. If the analog option is not selected, this pin output could be NULL.
3. SDA and SCL are the I2C serial data line and serial clock line, please refer to the information in the
subsequent section.
PIN
DEFINITION
1
SDA, I2C data
2
Analog output, 0.5 ~ 4.5 Vdc
3
VCC, power supply, 8 ~ 24 Vdc
4
GND, ground
5
SCL, I2C clock
Pin outs
Installation hole
Installation holes
Flow direction, ports
at the backside.
Note: The manifold base port size should not be smaller than those of the flow ports on the
Manifold flow ports
Figure 3.2: FS5001L pinout
2.54mm centers; 0.635mm square

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3.3 Mechanical dimensions
Figure 3.3: FS5001L: 0…6 SLPM model mechanical
dimensions
.
Figure 3.4: FS5001L: 0…15SLPM model mechanical dimensions.

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Figure 3.5: The mechanical dimensions for FS5001L with optional Φ4 mm one-touch connection block.
4. Installation
Do not open or alter any part of the product, which would lead to malfunction and irrecoverable
damage.
For the installation, make sure the leakage proof of the connections and all electrical precautions are
applied. Please make sure the electrical pins are properly engaged. It should be noted that the sensor
is designed for medium to low pressure per the applications, therefore, the system design would be
important for the flow stability and related flow noises.
In order to prevent over-forced installation, the product comes with a
stainless steel
installation plate,
2 screws (M3x20), and 2 O-rings (2.5x1.8). The mounding torque applied should be within 0.35±0.03
N·m. Please follow the following graph for the installation with the stainless steel plate.
Figure 4.1: Illustration of the installation with the supplied metal plate.

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5. Basic operation
5.1 I2C interface connection diagram
5.2 I2
C interface command description
Command
Byte
(Hex)
Length
(int 16)
Command Name
Read/Write
Notes
05H
1
I
2C address Write
Bit 0 is the R/W flag bit;
Bit 7 ~ Bit 1 are available.
0AH
1
Write the gas
conversion factor
Write
Int 16,
the default value is 1000 for air
oBH
1
Filter depth
Write
Int 8, 0 ~ 254
1CH
1
Flowrate offset
reset
Write
1 byte, ensure no
-flow conditions
9DH
4
Write protection
Write
4 bytes, 0x53, 0x49, 0x41, 0x52.
One-time effective.
82H
12
Serial number
Read
ASCII
83H
5
Flow rate
Read
Int32(/1000 SLPM)+CRC
CRC=(Byte1)xOR(Byte2)x(OR(Byte3)XOR(byte4)
85H
1
I2C address
Read
Bit 7 ~ Bit 1
8AH
1
Read the gas
conversion factor
Read
Int16,
the default value is 1000 for air
8BH
1
Filter depth
Read
Int 8, 0 ~ 254
Note: 1. Before writing to the register, please ensure the write protection is disabled.
2. The I2C address is set to Bit 7 ~ Bit 1. E.g. if the I2C address is 1 (0000 001x), the write address will
be 0x02 (0000 0010) and the read address will be 0x03 (0000 0011).
3. The write protection is a one-time effective function.

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5.3 I2C interface read/write sequences

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6. Product selection
The product part number is composed of the product model number and suffixes, indicating each
of the selectable parameters. Refer to the following for details.
FS5001L - -
Gas: A – air; C – CO2; E – He; H – H2; N – N2; O – O2; R – Ar.
For other gases, please contact the manufacturer.
Output: V – analog; EV – I2C and analog.
Full scale flow rate: 200, 500, 1000, 2000, 4000, 6000, 10000,
and 15000 sccm.

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7. Product performance
7.1 Technical specifications
All specifications listed in the following table, unless otherwise noted, apply for calibration
conditions at 20°C and 101.325 kPa absolute pressure with air.
Value
Unit
Flow range
0 ~ 200, 500, 1000, 2000, 4000, 6000, 10000, 15000
sccm
Accuracy
±(2.0+0.5FS)
%
Repeatability
0.5
%
Turn-down ratio
100:1
Response time*
10
msec
Temperature range
-10 ~ 55
°C
Temperature coefficient
±0.12
%/°C
Pressure range
-0.08 ~ 0.5
MPa
Maximum pressure
1.0 (150)
MPa (psi)
Humidity
<95, no condensation
%RH
Analog null shift
±30
mV
Power supply
8 ~ 24
Vdc
Working current
50
mA
Output
Linear, analog 0.5 ~ 4.5 Vdc / I
2
C
Analog load
Sourcing: 25 / Sinking: 15
mA
Maximum overflow
3000 (3SLPM) (200, 500, 1000 models);
18000 (18 SLPM) (2000, 4000, 6000 models)
45000(45SLPM) (10000, 15000 models)
sccm (SLPM)
Maximum flow change
500 (200, 500, 1000 models);
3000 (2000, 4000, 6000 models)
7500(10000, 15000 models)
sccm/sec
Calibration
Air @ 20°C, 101.325 kPa
Storage temperature
-20 ~ +70
°C
Compliance
RoHS; REACH
CE
IEC 61000-4-2; 4-8
Note: 1. Allow the product to warm up for 60 seconds for the best performance.
2. Response time shown is the default. It can be programmed to the fastest <2 msec.

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7.2 Typical (analog) output
Figure 7.1:
Typical analog output
7.3 Pressure loss
Figure 7.2: Upper row: from left to right, for models of full scale up to 1000 sccm; and of full scale from 2000
to 6000 sccm. Lower row: models of full scale from 10000 to 15000 sccm (10 to 15SLPM).

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8. Technical notes for the product performance
8.1 Measurement principles
The products utilize the Company’s proprietary micro
-
machined
(MEMS) calorimetric sensing and data process technology. A thermal
signal generator with a pair of sensing elements up and downstream of
the microheater is precisely manufactured and separated at predefined
micrometer distances on a chip surface with excellent thermal isolation.
When a fluid is flowing through the sensing chip, the fluid carries the
thermal signal downstream. The sensing elements register the
temperature differences, further correlated to the fluid mass flow rate
via the calibration process.
The calorimetric sensing approach offers a large dynamic range with a
better performance against the environmental parameter alternations
.
Please refer to the company's US patents and other publications made available to the public for
additional information.
8.2 Precautions for the best performance of the product
8.2.1 Contamination and sterilization
It is critical to have the measurements performed in a contamination-free environment for data
accuracy. Excessive contaminants such as vapors will lead to data deviation or even product
malfunctions in severe cases.
For medical applications, it may be desired to have the product to be sterilized from time to time.
A
standard EtO sterilization process is recommended. For the detailed procedure please consult your
local experts or contact the manufacturer.
8.2.2 Altitude changes
Unlike some other products on market, the design of the sensor has a built-in pressure balancer that
prevents membrane deformation due to altitude changes. Therefore, the sensor is intrinsically
insensitive to altitude change-induced errors. The specified altitude in Sec 7.1 has been fully tested.
Figure 8.1: Measurement
approach illustration.

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8.2.3 Excessive humidity or condensation
The humidity change will not alter the performance of the sensor. However, if excessive humidity is
present resulting in condensation, the measurement port or channel could be blocked or altered.
This would result in a very unreliable data output. Please filter or other tools to prevent thi
s situation
to occur when using this product.
8.2.4 Metrology verification
Testing the products with local metrology tools will be performed in almost all cases. It should be
noted that for this particular sensor, special care should be applied while performing such a task.
The gauge pressure tests are relatively simple, as long as the pressure is tested under a stable media
condition, the metrology data should be well reproduced.
For the mass flowrate comparison, however, in addition to the flow system setup conditions
recommended by OIML R137, a stable flow system must be ensured. This is because the current
product is designed for a small pressure loss, therefore the sensor does not have a strong flow
restrictor or conditioners to handle the flow in
stability that may exist in the system. Therefore to
compare the metrology data, the user should ensure the system is stable, otherwise, the output
could be noisy and metrology deviations would be inevitable. If such cases are present, please
contact the manufacturer for further solutions.
For temperature and humidity measurement, because of the small package space, the response of
the humidity could be slower than specified. For additional information, please contact the
manufacturer.

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9. Warranty and Liability
(Effective January 2018)
Siargo warrants the products sold hereunder, properly used, and properly installed under normal
circumstances and service. As described in this user manual, it shall be free from faulty materials or
workmanship for 180 days for OEM products and 365 days for non-OEM products from the date of
shipment. This warranty period is inclusive of any statutory warranty. Any repair or replacement
serviced product shall bear the same terms in this warranty.
Siargo makes no warranty, representation, or guarantee and shall not assume any liability regarding
the suitability of the products described in this manual for any purposes that are not specified in this
manual. The users shall be held full responsibility for validating the performance and suitability of
the products for their particular design and applications. For any misusage of the products out of the
scope described herein, the user shall indemnify and hold Siargo and its officers, employees,
subsidiaries, affiliates, and
sales channels harmless against all claims, costs, damages, and expense
s
or reasonable attorney fees from direct or indirect sources.
Siargo makes no other warranty, express or implied, and assumes no liability for any special or
incidental damage or charges, including but not limited to any damages or charges due to installation,
dismantling, reinstallation, etc. other consequential or indirect damages of any kind. To the extent
permitted by law, the exclusive remedy of the user or purchaser, and the limit of Siargo's liability for
any and all losses, injuries, or damages concerning the products, including claims based on contract,
negligence, tort, strict liability,
or otherwise shall be the return of products to Siargo, and upon
verification of Siargo to prove to be defective, at its sole option, to refund, repair or replacement of
the products. Regardless of form, no action may be brought against Siargo more than 365 days after
a cause of action has accrued. The products returned under warranty to Siargo shall be at the user or
purchaser's risk of loss and will be returned, if at all, at Siargo's risk of loss. Purchasers or users are
deemed to have accepted this limitation of warranty and liability, which contains the complete and
exclusive limited warranty of Siargo. It shall not be amended, modified, or its terms waived except
by Siargo's sole action.
This manual's product information is believed to be accurate and reliable at the time of release or
made available to the users. However, Siargo shall
assume no responsibility for any inaccuracies
and/or errors and reserves the right to make changes without further notice for the relevant
information herein.
This warranty is subject to the following exclusions:
(1) Products that have been altered, modified, or have been subject to unusual physical or
electrical circumstances indicated but not limited to those stated in this document or any
other actions which cannot be deemed as proper use of the products;

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(2) Products that have been subject to chemical attacks, including exposure to corrosive
substances or contaminants. In the case of battery usage, long-term discharge or leakage
induced damages;
(3)
Products that have been opened or dismantled for whatever reasons;
(4) Products that have been subject to working conditions beyond the technical specification as
described by this manual or related datasheet published by the manufacturer;
(5) Any damages incurred by the incorrect usage of the products;
(6) Siargo does not provide any warranty on finished goods manufactured by others. Only the
original manufacturer's warranty applies;
(7) Products that are re-sold by unauthorized dealers or any third parties.

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10.Service contact and information
Siargo Ltd. is making every effort to ensure the quality of the products. In case of questions and or
product support, please contact
your direct sales, or in case you need additional assistance, please
contact customer service at the address listed below. We will respond to your request in a timely
fashion and work with you toward your complete satisfaction.
For sales or product orders, please contact the local sales representatives or distributors that can be
found on the company’s webpage: www.Siargo.com.
For any returns, please contact your direct sales to obtain an RMA. In case you need any further
assistance, please contact [email protected] to obtain additional information or a Return Materials
Authorization (RMA) before shipping the product back to the factory for factory services such as
calibration. Please specify as clearly as possible in your email message about the product's status
that you intend to ship back to the factory, and include your shipping address. Be sure to write the
RMA on the returned package or include a letter with the RMA information.
Direct customer service request(s) should be addressed to
Siargo Ltd.
3100 De La Cruz Boulevard, Suite 210,
Santa Clara, California 95054, USA
Phone: [phone]
Email: [e-mail]
For further information and updates, please visit www.Siargo.com.
Representative in Europe:
IDENTIC GmbH
In der Siedlerruh 24
69123 Heidelberg / Germany
Phone: [phone]
Email: [email protected]

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Appendix I: Sensor evaluation kit
Siargo offers a sensor evaluation kit, including a digital data converter, USB data cable, and User
Application software, that allows the user to evaluat
e
the product performance on a Microsoft
Windows-based computer. The user can read and visualize the flow rate of the product, obtain the
totalized values, and save the data for further analysis. It can read from up to 128 sensors with the
I2C interface in serial.
For further information and purchase of the evaluation kit, please contact the manufacturer or the
sales representative.
Each converter has a fixed cable that can be
directly connected to the product. The USB
cable connected to the PC is also included.
For most of the products, the power from the
PC via the USB cable will be sufficient to power
the sensor product, no external power will be
required. However, for multiple sensor
s in serial,
the power via the USB cable may not be enough,
an external power adapter with 8 ~ 24 Vdc will
be required.
Cable to connect
to FS5001L
USB cable to
connect to PC
External power
adapter (optional)