Siargo FS6100 User manual

Gas Mass Flow Meter
@ 2022 Siargo Ltd.
www.Siargo.com
Model FS6100
VA.1

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Mass Flow Meters
With MEMS Thermal Calorimetry
FS6100 Series
User Manual
Document No. 07-2022-FSFM0121 EN
Issue date: 2022.07
Revision: VA.1
Siargo Ltd.
3100 De La Cruz Boulevard, Suite 210
Santa Clara, CA 95054
USA
Tel: [phone]
Email: [email protected]
© Copyright 2022 by Siargo Ltd.
Siargo Ltd. and its subsidiaries reserve the right to change the specifications and/or descriptions
without prior notice. For further information and updates, please visit www.Siargo.com.

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Attention !
Use with caution !
xPlease carefully read this manual before operating this product.
xDo not open or modify any hardware which may lead to irrecoverable
damage.
xDo not use this product if you suspect any malfunctions or defection.
x
Do not use this product for corrosive media or in a
strong vibration
environment.
xUse this product according to the specified parameters.
xOnly the trained or qualified personnel shall be allowed to perform
product services.
xBe cautious for electrical safety, and even it operates at a low voltage,
any electrical shock might lead to some unexpected damages.
xThe fluid to be measured should be clean and free of particles, as
debris or particles may be accumulated inside the flow channel
that may result in inaccuracy in metrology, clogging, or other
irrecoverable damage.
xDo not apply for any unknown or non-specified liquids that may
damage the product.
xBe cautious of the debris or contamination inside the fluid, visible or invisible,
that may lead to inaccuracy or erroneous outputs.

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Table of Contents
1. Overview.................................................................................................. 5
2. Receipt / unpack of the products
................................
................................ 6
3. Knowing the products ............................................................................... 7
3.1 Product description ...................................................................................................7
3.2 Power and data cable description...............................................................................7
3.3 Mechanical dimensions..............................................................................................8
4. Installation............................................................................................... 9
5. Basic operation........................................................................................12
5.1 Check the product specifications .............................................................................. 12
5.2 Check the fluidic system .......................................................................................... 12
5.3 Check the leakage ................................................................................................... 12
5.4 Connect the power supply........................................................................................
12
5.5 4~20 mA Analog interface........................................................................................ 13
5.6 Pressure loss ........................................................................................................... 14
6. Product selection.....................................................................................15
7. Technical specifications............................................................................16
8. Technical notes for the product performance.............................................
17
8.1 Measurement principle ............................................................................................ 17
8.2 Precautions for the best performance of the product ................................................. 17
8.2.1 Particle contamination ................................................................................................. 17
8.2.2 Product calibration....................................................................................................... 17
9. Troubleshooting ..................................................................................... 18
10. Warranty and Liability..............................................................................19
11. Service/order contact and other information..............................................21
Appendix I: RS485 Modbus communication protocol.......................................22

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A1.1 Hardware connection ............................................................................................. 22
A1.2 Communication parameters ...................................................................................
22
A1.3 Frame.................................................................................................................... 23
A1.4 Function codes....................................................................................................... 23
A1.5 Registers ............................................................................................................... 23
Appendix II: Document history.......................................................................26

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1. Overview
All contact information can be found at the end of this manual.
This manual provides essential information for the operation of the FS6100 series of flow meters for
compressed air and nitrogen
metering applications. The product performance, maintenance,
troubleshooting, and the information for product order, technical support, and repair are also
included.
The FS6100 flow meters are designed for high-speed flow applications such as compressed air. The
FS6100 is manufactured with Siargo’s proprietary MEMS (micro-electro-mechanical systems)
thermal calorimetric sensing technology that offers precision at large dynamic ranges while having
a low
-
pressure drop in a compact form factor.
The low-pressure loss will be beneficial as it can measure at ambient whilst some of the currently
available ones would only have the dynamic range at high pressure (typically 6 bar). The low-
pressure loss will also save the energy required for operation.

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2. Receipt / unpack of the products
Upon receipt of the products, please check the packing box before the dismantlement of the packing
materials. Ensure no damages during shipping. If any abnormality is observed, please contact and
notify the carrier who shipped the product and inform the distributors or sales representatives if the
order is not placed directly with the manufacturer; otherwise, the manufacturer should be informed.
For any further actions, please refer to the return and repair section in this manual.
If the packing box is intact, proceed to open the packing box, and you shall find the product (either
the meter or the sensor formality per the actual order), together with the power and data cable as
shown below.
Flowmeter Power and data cable
Please check immediately for the integrity of the product and the power and data cable. If any
abnormal is identified, please notify the distributor/sales representative or manufacturer as soon as
you can. If any defects are confirmed, an exchange shall be arranged immediately via the original
sales channel. This user manual shall also be included in the packing box or via an online request for
an electronic version. In most cases, this manual shall be made available to the customer before the
actual order.

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3. Knowing the products
3.1 Product description
3.2
Power and data cable description
Table 3.2: M12 connector pin assignment.
Pin
Color
Definition
1
Brown
Power, 8~24 Vdc
2
White
RS485B (-)
3
Blue
Ground (Common)
4
Black
RS485A (+)
5
Gray
4~20 mA output
Meter body
Outlet, G / BSPP
Same inlet
Flow direction
Power and data
connection

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3.3 Mechanical dimensions
Figure 3.1: FS6340 - full scale flow
5,000 SLPM. G 1
-1/2”
Figure 3.2: FS6350 - full scale flow
10,000 SLPM. G 2”

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4. Installation
Do not open or alter any part of the product, which would lead to malfunction and irrecoverable
damage that will forfeit the terms of the warranty.
The product at the time of shipment is fully inspected for product quality and meets all safety
requirements. Additional safety measures during the installation should be applied. This includes but
is not limited to leakage verification procedures, standard EDS (electrostatic discharge) precautions,
DC voltage precautions, and heavy-duty precautions. Other tasks, such as calibration, part
replacement, repair, and maintenance, must only be performed by trained personnel. Upon request,
the manufacturer will provide the necessary technical support and/or training for the personnel.
Any action to alter the physical integrity will forfeit the terms of the warranty and cause the liability
for any damages thereafter.
The product is preferable
to be installed horizontally. Flow direction should be aligned with the arrow
mark on the meter body. If the flowing fluid may have particles or debris, a filter is strongly
recommended to be installed upstream of the meter.
Please follow the following steps to complete the installation:
a) Upon opening the package, the product's physical integrity should be inspected to ensure no visual
damage.
b) Before installing the product, please ensure that the pipe debris or particles or any other foreign
materials are completed removed.
c) Cautions during installation:
(i) It is preferably first to install the inlet end of the meter and then the outlet end of the meter; To
ensure the measurement accuracy, an upstream straight pipe of length no less than 10DN and a
downstream straight pipe of length no less than 5DN should be in place.

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(a) 90-degree elbow or T-piece (b) 2x90 degree elbows
(ii) If there is a requirement for
different pipe sizes either upstream or downstream, the size of the
pipe diameters should be larger than that of the selected meters. Please see the details below:
(c) 3x90 degree elbows, 3 dimensions (d) Pipe diameter reduction
(e) Pipe diameter expansion (f) with upstream control valve

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(iii) During installation, please make sure no foreign materials (such as water, oil, dirt, particles,
etc.) fall into the pipe.
d) Connect electrical wires, and then electrical wires for inputs/outputs. Please pay special attention
to the power supply range (i.e., 5 ~ 24 VDC) and power supply polarization (see the description on
Electrical Interfaces in this manual).
e) When connecting the communication wires, please make sure that the wires are correctly
connected to the proper ports on your data device/equipment.
f) Turn on the power supply, and make sure that the meter works correctly.
g) Slowly open the valves at both ends of the pipeline, and the meter should then start to measure
the flow in the pipeline
h) Completion of the installation.
Cautions
a) Don't try to alternate any build-in part of the product.
b) Ensure electrical wires for the inputs/outputs are reliably connected.
c) Release all the installation stresses so that no stresses will be exerted on the product.
d) The product should avoid strong electromagnetic interference sources nearby or periodic
mechanical shocks to its body or pipeline.
e) Slowly open/close valves to prevent abrupt pulse flow impact, damaging the product.

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5. Basic operation
5.1 Check the product specifications
Before starting to use this product, check the product specifications found in this manual or the basic
information located on the product's back panel.
The product information from this manual may be model specified. In particular, the pressure rating
must not be higher than the system pressure of the fluid to be measured, and the flow range should
also be within the specified ones. In most cases, a high full-scale ranged meter for the low flow rate
measurement often results in erroneous data. The fluid to be measured must also be consistent with
that specified by the product. Be particularly cautious about the supplied voltage indicated in the
specification. A higher voltage may lead to irrecoverable damage, and a lower voltage will not power
the product for any desired functions.
5.2 Check the fluidic system
F
or the product's best performance, it is advised that the fluid to be measured must be clean and free
of particles or other foreign materials. An upstream filter with a proper pore size would be an
example of safe usage of the product from particle contamination. Please consider the actual
application requirements for the filter specification, such as pressure loss, fluidic conditions, etc.
Before releasing the fluid to pass through the product, check the tubing again to avoid any abnormal,
tighten the tubing fittings, and verify the measurement fluid flow direction.
5.3 Check the leakage
Check leakage before any measurement. If needed, pressurized nitrogen or air can be used for the
leakage check, particularly if the fluid might not be environmentally friendly.
5.4 Connect the power supply
This product complies with the CE-required EMC regulations. It also requires the product to be used
according to the standard electrical device common practice. Before connecting the product with
the external power, the user must ensure the standard electrical device precautions such as EDS
(electrostatic discharge) and DC voltage. Excessive electrostatic discharge may damage the product.

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Use only the power and data cable shipped together with the product. The cable comes with a high-
quality M12 connector at one end to be plugged into the product, and the other end is with wires for
connections with options.
Plug the manufacturer-supplied cable into the meter or sensor connector with the engagement mark
aligned, Do not force the plug, or it may create damage to the product.
The other end of the cable has 5 pre-soldered wire terminals with different colors; refer to the above
table for the connection information (the same as Table 3.2).
Take special care, connect ONLY the power to the power cord/wire (BROWN), and make sure the
power supply is within the specified 8~24Vdc before switching the power. In addition, the power
supply should be properly grounded, connecting the BLUE wire terminal to the ground on the power
supply or other safe system ground.
The product's power terminal has the incoming voltage internally filtered and regulated to powe
r the
product circuitry. The product operates at a maximum current of less than 25mA, normally available
for most power supplies.
The terminal analog output (GRAY) is for current analog data output from 4~20mA, corresponding
to the specified flow range from zero to full-scale flow rate.
5.5 4~20 mA Analog interface
The loop resistor connection is illustrated below. The current output load depends on the power
supply (the yellow area in the graph).
The maximum load resistor, R
L, with a 24Vdc supply, will be
850Ohm.
Figure 5.1: Analog output.

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Another analog interface such as voltage 0~5.0 Vdc is optional and can be requested by directly
contacting the manufacturer.
5.6 Pressure loss
The current design has a much lower pressure loss compared to the other similar products on the
market.

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6. Product selection
This product is the first release for a special project based on Camozzi’s requirements. It may be
formulated into a serial of OEM products when the product code will be specified and defined. The
current delivery has two models, FS6340 -5000 with a 40mm DN and full-scale flowrate of 5000
SLPM, and FS6350 – 10000 with a 50mm DN full-scale flowrate of 10000 SLPM.
The flow fluids /media apply for compressed air and nitrogen only.

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7. Technical specifications
All specifications listed in the following table, unless otherwise noted, apply for calibration conditions
at 20°C and 101.325 kPa absolute pressure with de-ionized water. The product is horizontally
mounted at calibration.
Value
Unit
Full-scale flow range
0~5000 (FS6140)/ 0~10000 (FS6150)
SLPM
Applicable fluids
Compressed air (ISO 8571-1); nitrogen
Turn-down ratio
100:1
Accuracy
±(2.5+0.25FS)
%
Response time
100
msec
Working temperature
-10~50
°C
Temperature effects
< 0.05
%/°C
Working pressure
ambient ~ 0.8
MPa
Maximum pressure
1.0
MPa
Pressure dependence
< 0.3
%FS/bar
Power supply
8~24
Vdc
Data/power connector
M12, 5pin
Electrical interface
4~20 mA / RS485 Modbus
Maximum load for current
850
Ohms
Mechanical connection
G (BSPP) 1-1/2” and 2”
Pressure drop @50%FS (6bar)
2.5 (FS6140) / 10 (FS6150)
mbar
House materials
Aluminum alloy
Reference conditions
20°C, 101.325 kPa, air
Storage temperature
-10 ~ 70
°C
Weight
~2.0
kg.
Protection
IP65
Fluid compatibility
Non-corrosive
CE
EN61326-1

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8. Technical notes for the product performance
8.1 Measurement principle
The products utilize the Company’s proprietary micro-machined
(MEMS) calorimetric sensing and data process technology. A thermal
signal generator with a pair of sensing elements at up and downstream
of the microheater is precisely manufactured and separated at
predefined micrometer distances on a chip surface with excellent
thermal isolation. When a fluid is flowing through the sensing chip, the
fluid carries the thermal signal downstream. The sensing elements
register the temperature differences, further correlated to the fluid
mass flow rate via the calibration process.
The calorimetric sensing approach offers a large dynamic range with a
better performance against the environmental parameter alternations.
Please refer to the company's US patents and other publications made available to the public for
additional information.
8.2 Precautions for the best performance of the product
8.2.1 Particle contamination
Per the high flow speed metering in a small channel, the meter is designed via a bypass flow channel
similar to the conventional capillary flow sensing arrangement. It is critical to have the measured
fluid free of particle contamination. Any presence of the particle may create a clog to the sensing
channel leading to large measurement errors.
8.2.2 Product calibration
The product is calibrated with a high precision reference sonic nozzle that is traceable to the primary
standard. In normal operation, the product should maintain its status as that at the shipment.
However, it is recommended that the product be re-calibrated at least once a year for heavy usage.
Figure 8.1: Measurement
approach illustration.

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9. Troubleshooting
Phenomena
Possible causes
Actions
No
signal
Power not connected
Connect the power, and check
the cable.
Cable connection incorrect
Check cable
No flow or clogging
Check flow and cavitation.
Power regulator failure
Return to factory
Sensor failure
Return to factory
Large errors or unexpected
flowrate
Clogging, fluid type
Check system, dry, and flush.
Erroneous or large noise
Unstable flow
Check system
Offset unstable
Overheat, or electrical
connection.
Check the system, and power
off.

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10.Warranty and Liability
(Effective January 2018)
Siargo warrants the products sold hereunder, properly used, and properly installed under normal
circumstances and service. As described in this user manual, it shall be free from faulty materials or
workmanship for 180 days for OEM
products and 365 days for non-OEM products from the date of
shipment. This warranty period is inclusive of any statutory warranty. Any repair or replacement
serviced product shall bear the same terms in this warranty.
Siargo makes no warranty, representation, or guarantee and shall not assume any liability regarding
the suitability of the products described in this manual for any purposes that are not specified in this
manual. The users shall be held full responsibility for validating the performance and suitability of
the products for their particular design and applications. For any misusage of the products out of the
scope described herein, the user shall indemnify and hold Siargo and its officers, employees,
subsidiaries, affiliates, and sales channels harmless against all claims, costs, damages, and expenses
or reasonable attorney fees from direct or indirect sources.
Siargo makes no other warranty, express or implied, and assumes no liability for any special or
incidental damage or charges, including but not limited to any damages or charges due to installation,
dismantling, reinstallation, etc. other consequential or indirect damages of any kind. To the extent
permitted by law, the exclusive remedy of the user or purchaser, and the limit of Siargo's liability for
any and all losses, injuries, or damages concerning the products, including claims based on contract,
negligence, tort, strict liability, or otherwise shall be the return of products to Siargo, and upon
verification of Siargo to prove to b
e defective, at its sole option, to refund, repair or replacement of
the products. Regardless of form, no action may be brought against Siargo more than 365 days after
a cause of action has accrued. The products returned under warranty to Siargo shall be at the user or
purchaser's risk of loss and will be returned, if at all, at Siargo's risk of loss. Purchasers or users are
deemed to have accepted this limitation of warranty and liability, which contains the complete and
exclusive limited warranty of Siargo. It shall not be amended, modified, or its terms waived except
by Siargo's sole action.
This manual's product information is believed to be accurate and reliable at the time of release or
made available to the users. However, Siargo shall assume no responsibility for any inaccuracies
and/or errors and reserves the right to make changes without further notice for the relevant
information herein.
This warranty is subject to the following exclusions:
(1) Products that have been altered, modified, or have been subject to unusual physical or
electrical circumstances indicated but not limited to those stated in this document or any
other actions which cannot be deemed as proper use of the products;