Siargo MF5700 Series User manual

Mass Flow Meter
MEMS
MF5700 Series
SIARGO LTD.
User Manual
Please read this manual for ensuring correct use of
this product. Make the manual available for easy access.
(V A.4)

1
RESTRICTION ON USE
This meter is manufactured for general purpose industrial applications for flow
measurements. Do not alter any hardware and software of the product. Any
modifications might cause damage and unexpected events.
All practices for electronic device safety should apply.
Do not use this product in any environments where human safety may be at risk.
Only a qualified person from Siargo or a person who is accredited by Siargo can
perform troubleshooting services to the product, Siargo is otherwise not liable for any
consequences thereafter.
1.
2.
4.
SAFETY PRECAUSION
The product can be utilized to measure and/or monitor in-line mass flow rate of
any clean, dry and preferably gases with constant concentration in industrial
applications. For other special gases or variable concentration gases, the
product may not function properly or even can be damaged. Please contact
Siargo for further information.
The operational environments of the product are illustrated in the section of
product specifications. If the product is used for other circumstances, the
product may not function properly or even can be damaged.
Operation, installation, storage, and maintenance of the product must strictly
follow the instructions illustrated in this user manual. Otherwise, unpredicted
damage and even injuries or other severe situations could be induced. All the
installation, storage, and maintenance of the product must be performed by
skilled workers. This user manual should be placed near the product for easy
access.
Before using the product, the user should read this user manual completely and
in details so that the user is well understand all the important instructions.
It is recommended that the product should be re-calibrated and serviced in every
two years or at a time of desire.
1.
2.
3.
3.
4.
User manual (VA.4)
MF5700 Series

MF5700 Series
2
User manual (VA.4)

Highly accurate thermal mass flow sensing
Automatic temperature and pressure compensation
High sensitivity for trace flow measurement
Excellent turndown of 50:1 or over
Support multiple gas measurements and customizable online calibration
Instant flow rate and accumulated flow rate with temperature sensing
Remote communication with RS485 Modbus
Meter configuration and data access with front keyboard
Customer configurable alarm for over range or limit
Portability design with options of battery operation or external power
Rotatable meter head with standard NPT or customizable connectors
Features
Applications
Pharmacetics
Food
Chemistry
Research
Mechanics Tobacco
Agriculture
Beverage Glass
Instrumentation
MF5700 Series
3
User manual (VA.4)

MF5700 Series
MF5700 series flow meters measure flow using Siargo’s proprietary MEMS
calorimetric mass flow sensor that is installed in the flow channel forming a
plate that serves as an additional flow conditioner from the boundary layer
configuration resulting in a laminar flow. The mass flow measurement is
established as the fluid carries heat away from the heater causing the
redistribution of the temperature field. Accurate flow rate is obtained by
calibration with the standard fluid at the preset conditions.
Working Principle
00
A/ D
u1x1
VCC
MEMS
flow sensor
Buffer
Power
supply
3V
Signal conditioning
3V
MCU
RS 485
Alarm module
(Optional)
RS485A RS485B
GND
EEPROM
5~12 VDC
Display &
LCD
Keyboard
RTC
Battery
Flow direction
Control Schematics
keyboard
driver
4
User manual (VA.4)

MF5700 Series
Specifications
MF5712
Flow range 0~10, 25 0~200 SLPM
Accuracy ±(2.0+0.5FS) %
Repeatability %
Response time sec
Power supply
Output
Display
Display information
Diaplay
resolution
0.01 0.1 SLPM
Keyboard
User function
Max. pressure MPa
Working temperature °C
Pressure loss Pa
Continuous working time
Calibration gas
User interface
DN 12.0 mm
Mechanical connection NPT 1/2”
Weight g350
≤ 2
≤0.8
-10 ~ 55
4 AA batteries（LR6） / 5 ~ 10 Vdc ( with 220 Vac adaptor)
> 60 days (with batteries)
RS485 (Optional)Modbus
Instant flow: SLPM; Accumulated flow: NCM; Battery status
MF5706
NPT 1/4”
6.0
3 keys
Password; alarm limit; accumulated flow; zero reset
N @ 20 °C,101.325 kPa
2
miniUSB
0.5
LCD
≤600 ≤2000
*Meter head can be rotated 180 degree for convenience at installation.
5
User manual (VA.4)
Turn-down ratio 30:1 %
NCM
0.001
Storage temperature °C
-20 ~ 65
Humidity < 95%RH (No icing or condensation)
Instant flow rate
Flow accumlation

MF5700 Series
Note：
1) Please note the flow direction should be the same as that indicated by the arrow on the meter
body, otherwise the reading will be null.
2) The optional miniUSB cable will provide connections to external power supply as well as the RS485
communication. For connection definitions, see 8.1.
Dimensions
Product Selection
MF
- - - -
Gas (A - air; C- CO ; N - N ; O - O ; R - Ar,
2 2 2
for other gases, please contact Siargo)
Output (B - RS485；N - None)
Maximum flow rate* (Selectable: for MF5706, 10 or 25 SLPM;
for MF5712, 200SLPM,See below table for other Units.)
Connection (N - NPT)
DN (Pipe inner diameter, 5706 - DN6mm; 5712 - DN12mm)
Red
Black
Green
Blue
Brown
MF5706
L(mm)
98
67
W(mm)
50
40 NPT 1 4”/
NPT 1/2”
D
MF5712
w
6
User manual (VA.4)
Typical flow range:
MF5706 6mm 1/4"
MF5712 12mm 1/2"
10 0.35 0.6
25 (20) 0.88 (0.7) 1.5 (1.2)
200 (150) 7 (5) 12 (9)
Model DN
Flow Range
SLPM SCFM NCMH
Connection
* There is flow rate number only for unit SLPM. If other unit is selected, there must be flow rate number with unit together.
For CO , selectable: 10 or 20 SLPM (without 25 SLPM) for MF5706; 150 SLPM (without 200 SLPM) for MF5712.
2

MF5700 Series
If the display is normal, pressure the function key , it will enter into the password interface.
Refer to 7.2.2 for password verification function. Once the password is correctly input, other
interfaces will display.
7.1 Interface illustration
Up Function Down
Interface includes instant flow, accumulated flow; temperature and
battery status; menu and other process data during setup. See the
graph at the left for details.
Three function keys on the front of the meter head:
7.2 Operation
The following contents describe the details for each steps. Please read carefully before process.
7.2.1 Display at normal operation
Upon power on, after self-check, the meter will come to the following display:
a. Temperature: current temperature;
b. Meter address: current protocol and address. The displayed
address indicates remote communication is on. Otherwise, only
local display is functional;
c. Battery status: when this display turns into , the battery
should be changed immediately or switch to external power;
d. Total or accumulated flow: NCM or SL
e. Instant flow: SLPM or NCMH
Menu Operation
Fun
Fun
7
User manual (VA.4)

MF5700 Series
Press or to select the corresponding menu of desire. The selected
menu will be flashing, press to confirm the selection.
To enter the password, press or key to change the digit when it
flashes, and press to confirm the enter. Repeat this process for all 5
digits and the meter will enter into the menu interface.
Note: at the time of password input, the flow measurement will not be
interrupted.
At the normal operation display, press key, one can enter into password verification interface. Input
the correct password, the Setup Menu will display. If the password is incorrect, the display will not change.
For the first time use, the factory password is 11111.
7.2.2 Password verification
7.2.3 Meter menu
When the meter passed “password verification”, the following menu can be accessed:
7.2.4 Change the default password
For data safety, it is advised that the default or factory set password should be changed at the first use of
the product. (The factory preset password is 11111. )
Press or to change the digit when it is flashing, and press to
confirm your enter.
It is advised that your password should be kept at a safe
location and shall be recovered when it is needed. In case of
password lost, please contact manufacture to obtain the
special password for access of the meter.
Fun
Fun
Fun
Fun
8
User manual (VA.4)

MF5700 Series
To set the 8 digit alarm value (maximum accumulated flow), please press
either or to enter the desired value and press to confirm the
enter.
When the value is confirmed, the meter will start to save the value, and the
process takes about 3 seconds, and the screen will show “Setting...”. Please
do not interrupt until “Done” is displayed. The screen will then automatically
return to the menu selection screen.
7.2.6 Reset the accumulation value
7.2.5 Alarm setting
The alarm function allows the user to set the maximum accumulated flow or totalization of the flow. When
the set value is reached and the flow is still accumulating, the alarm function will be triggered. The alarm is a
sharp sound pulse at every 2 seconds with the whole screen flashing.
If the flow is ceased, the alarm will be switched off automatically. If any flow starts, the alarm will come back
on. User can also disable the alarm by reset the value or switch off the flow.
After the 5 digits are input completely, the
interface will display “Setting...”. Please do not
interrupt until “Done” appears on the screen.
The process usually takes 3 seconds, and then it
will automatically return to the menu selection
screen.
The function allows user to nullify the
accumulated flow value. By selecting this menu
(Clear), the accumulated flow will become zero.
After press , the screen will show “Setting...”.
Please do not interrupt until “Done” is displayed.
The screen will then automatically return to the
menu selection screen.
Fun
Fun
9
User manual (VA.4)

MF5700 Series
The meter address contains 3 digits, and can be any one from 001 to 255.
Press or to change the digit when it flashes, and press to
confirm the change. After the last digit, the meter will start to save the
changes that you have made. The process will take about 3 seconds and please
do not interrupt the process until it shows “Done”. The screen will
automatically return to menu selection screen.
If your selection is b, after press you will enter into the address selection menu as indicated below:
7.2.8 Exit
7.2.7 Communication menu
This function allows user to select single meter communication or
communication network via RS485 (Modbus). After selecting this menu, the
communication status is shown by the flashing letter at the center of the
screen. A indicates single meter operation while b represents the Modbus
networking status. Press or can change the current status to
another. Then press to confirm,
Fun
Fun
Fun
When all parameters are set as desired, select the “Exit” menu to exit and
return to normal operation interface.
10
User manual (VA.4)

MF5700 Series
8.2 Communication port settings
Baud rate: 9600 bps
Data bits: 8 bits
Stop bits: 1 bit
Parity: None
Flow control: None
8.3 Communication protocol
The meter supports two protocols. Protocol A can be used for single meter communications only while
Protocol B is the standard Modbus.
8.3.1 Protocol A
Protocol A can only used for single meter communication and it can be used to access the meter via the
communication port.
Digital communication mode: user can then access the digital data via the port:
a) send 0x9d via RS485 and receive the same returned 9x9d;
b) send 0x54 via RS485 and receive the same returned 9x54.
The meter will be at Digital communication mode at which the data from the meter will be sent via
RS485 in an intervalof 4 seconds. The data are in the following format:
S=ssssss F=ffffff A=aaaaa.aaa T=tttt;\r\n
S=ssssss Voltage code,variable length;
F=ffffff Mass flow rate,variable length (Equal to ffff.ff SLPM);
A=aaaaa.aaa Accumulated flow (Equal to aaaaa.aaa NCM), 3 decimal digits, variable integer digits.
T=tttt Gas temperature, variable length (Equal to ttt.t )
Local display mode: use this mode when only LCD display is needed.
a) send 0x9d via RS485 and receive the same returned 9x9d;
b) send 0x00 via RS485 and receive the same returned 0x00.
8.3.2 Protocol B
Protocol B is based on the standard Modbus communication protocol. It supports either single meter
communication or multi-meter networking. For detailed information, please contact the manufacturer.
°C
Attention: there is a space before F, A and T.
Cable Name Definition
Red VCC Power supply (5~12 VDC+)
Green RS485A
Brown RS485B
Blue NC Not connected
Black GND Power supply (-)
RS485A
RS485B
11
User manual (VA.4)
This product support RS485 Modbus protocol.
8.1 Cable definition
Communication

l by trickle
MF5700 Series
10. 1 Safety Precautions
The product is designed for use with general purpose gases such as air and nitrogen. It is advised that the
products are best used for non-explosive clean gases. The sensors cannot be used for gas metrology of
fluoride or fluoride containing gases. For updates of the product certification information, please contact
manufacturer or visit www.Siargo.com. Use for other gases such as extreme corrosive and toxic may cause
the product malfunctioning or even severe damages. The product sealing is ensured to work under working
pressure of 0.8MPa and is leakage proof before the shipment. But cautions and further leakage test are
important at installation as well since any leakage could cause severe safety issue. The power supply for this
product is 5~12 VDC, all precautions and measures for electrical voltage handling must apply.
Attention: any alternation and/or improper use of the product without the permission of the
manufacturer can cause unpredicted damages and even injuries or other severe situations. Siargo or any
of its employees, subsidiaries shall not be hold and indemnified against such consequences due to such
circumstances via improper use of the product.
10.2 Cautions for change of batteries
When the battery life indicator on LCD shows low, batteries should be changed immediately or switch to AC
power. Do not allow battery leakage inside the meter.
10.3 Maintenance
Attention: without prior permission of the manufacturer, please do not attempt to alter any parts of the
product as it may cause unrecoverable damages. If there are questions or doubts, please contact
manufacturer immediately before further actions. Please ensure the DC power is off before disassembling
the sensor.
All maintenance of the sensor should be done by trained and certified personne
Safety and Maintenance
12
User manual (VA.4)
MF5700 mass flow meter 1
QC certificate 1 Connection cable (optional) 1
AC adapter 1
User manual 1
Parts in Package