Siargo MF5600 Series User manual

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Gas Mass Flow Meter VC.3
Model MF5600
Sold in North America by:
Servoflo Corporation
75 Allen Street
Lexington, MA 02472
www.servoflo.com/info@servoflo.com
781-862-9572

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www.Siargo.com
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MF5600UserManual
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
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Gas Mass Flow Meter
withMEMScalorimetricsensingtechnology
MF5600Series
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User Manual
DocumentNo. 04‐2022‐M2EN
Issuedate:  2022.04
Revision:  VC.3
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SiargoLtd.
3100DeLaCruzBoulevard,Suite210
SantaClara,CA95054
USA
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Tel:+1(408)969.0368
Email:[email protected]
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©Copyright2022bySiargoLtd.
SiargoLtd.anditssubsidiariesreservetherighttochangethespecificationsand/ordescriptions
withoutpriornotice.Forfurtherinformationandupdates,pleasevisit:www.Siargo.com
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www.Siargo.com
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MF5600UserManual
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
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Attention!
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Pleasecarefullyreadthismanualpriortooperatingthisproduct.
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Donotopenormodifyanyhardwarewhichmayleadtoirrecoverable
damage.
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Donotusethisproductifyoususpectanymalfunctionsordefection.
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Donotusethisproductforcorrosivemediaorinastrongvibration
environment.
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Usethisproductaccordingtothespecifiedparameters.
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Onlythetrainedorqualifiedpersonnelshallbeallowedtoperform
productservices.
Becautiousfortheelectricalsafety,evenitoperatesatalowvoltage,
anyelectricalshockmightleadtosomeunexpecteddamages.
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Thegastobemeasuredshouldbecleanandfreeofparticles.Donotapply
thismeterforliquidmedium.
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Donotapplyforanyunknownornon‐specifiedgasesthatmay
damagetheproduct.
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Forremotedata,pleasebesurethemeterisproperlyconfigured.

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www.Siargo.com

MF5600UserManual
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
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TableofContents
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1.Overview..................................................................................................5
2.Receipt/unpackoftheproducts................................................................6
3.Knowingtheproducts...............................................................................7
3.1Productdescription...............................................................................................7
3.2LCDdescription.....................................................................................................7
3.3Poweranddatacabledescription...........................................................................8
3.4Mechanicaldimensions..........................................................................................9
4.Installation..............................................................................................10
5.OperationandMENUdescription..............................................................13
5.1Checktheproductspecifications...........................................................................13
5.2Checktheleakage...............................................................................................13
5.3Powerthemeteranddigitaldataconnection.........................................................13
5.4MeterMENUdescriptions....................................................................................14
5.4.1Startingthemeasurement............................................................................................14
5.4.2MENUentrywithaverifiedpassword............................................................................15
5.4.3SettheRS485Modbusaddress......................................................................................15
5.4.4SettheRS485communicationbaudrate........................................................................16
5.4.5Resetorcalibratetheoffset..........................................................................................16
5.4.6Gasconversionfactor(GCF)fordifferentgasmeasurement.............................................17
5.4.7Setthe2nd‐correctionfactor..........................................................................................18
5.4.8SettheResponsetime..................................................................................................18
5.4.9Settheunitfortheaccumulatedortotalizedflowrate....................................................19
5.4.10Settheunitfortheinstantflowrate..............................................................................19
5.4.11Setthepulse................................................................................................................20
5.4.12Changethedefaultpassword........................................................................................20
5.4.13Resettheaccumulatedortotalizedflowrate..................................................................21
5.4.14Resetthe2nd‐correctionfactor.......................................................................................21
5.4.15ExittheMENU..............................................................................................................21
5.4.16MENUkeysequenceforthesettings..............................................................................22

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www.Siargo.com
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MF5600UserManual
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5.5RS485Modbuscommunicationprotocol...............................................................23
5.5.1Hardwareconnection....................................................................................................23
5.5.2Communicationparameters..........................................................................................23
5.5.3Frame..........................................................................................................................24
5.5.4Functioncodes.............................................................................................................24
5.5.5Registers......................................................................................................................24
5.6Analogoutput.....................................................................................................29
5.6.14~20mAoutput..........................................................................................................29
5.6.2Pulseoutput.................................................................................................................29
6.Productselectionandorderinformation....................................................30
6.1Productselection................................................................................................30
6.2Ordercontactandcustomersupport.....................................................................30
7.Technicalspecifications............................................................................31
7.1Specifications.....................................................................................................31
7.2Pressureloss.......................................................................................................32
8.Technicalnotesfortheproductperformance.............................................33
8.1Measurementprinciple........................................................................................33
8.2Precautionsforthebestperformanceoftheproduct..............................................33
8.2.1Comparisonwithathirdpartyreferencemeter...............................................................33
8.2.2Particlecontaminationandfluidiccleanness..................................................................34
8.2.3Applytoadifferentgasmedium....................................................................................34
9.Troubleshooting......................................................................................35
10.WarrantyandLiability..............................................................................36
11.Servicecontact........................................................................................38
AppendixI:Productevaluationkit..................................................................39
AppendixII:Documenthistory.......................................................................40
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www.Siargo.com
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MF5600UserManual
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
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1. Overview
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Allcontactinformationcanbefoundattheendofthismanual.
ThismanualprovidesessentialinformationfortheoperationoftheMF5600seriesofgasmassflow
metersforgeneral‐purposegasmetrologyapplications.Theproductperformance,maintenance,
andtrouble‐shootingaswellastheinformationforproductorder,technicalsupport,andrepairare
alsoincluded.
MF5600massflowmetersaredesignedforgeneralpurposepreciseindustrialgasmeasurement,
monitor,orcontrol.Thedesignoptsforapplicationswherethedisplaymustbeseparatelyplaced
fromthemeterbodyorflowchannel.
ThemetersareoperatedwithSiargo’sproprietaryMEMScalorimetricmassflowsensorstogether
withthesmartcontrolelectronics.Thesensorsurfaceispassivatedwithsiliconnitrideceramic
materialstogetherwithawater/oilproofnano‐coatingforperformanceandreliability.Thecurrent
modelsarereadytoconnectto12mm(1/2”)or19mm(3/4”)lineswhileotherpipediameterscanbe
offeredascustomizedmodels.Themeterbodyismadeofstainlesssteelthatisavailablefor
applicationsofmostgases.
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www.Siargo.com

MF5600UserManual
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
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2. Receipt/unpackoftheproducts
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Uponreceiptoftheproducts,pleasecheckthepackingboxbeforethedismantlementofthepacking
materials.Ensurenodamagesduringshipping.Ifanyabnormalityisobserved,pleasecontactand
notifythecarrierwhoshippedtheproductandinformthedistributorsorsalesrepresentativesifthe
orderisnotplaceddirectlywiththemanufacturer,otherwise,themanufacturershouldbeinformed
aswell.Foranyfurtheractions,pleaserefertothereturnandrepairsectioninthismanual.
Ifthepackingboxisintact,proceedtoopenthepackingbox,andyoushallfindtheproduct(either
themeterorthemeterwiththevalvepertheactualorder).Thepoweradapterand/ordatacableas
shownbelowmayalsobefoundaccordingtoyouractualorder.
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





FlowmeterPower&datacableDisplaycable
IC7‐150,Length:1.5mIC7‐30‐IC7,Length:30cm
orIC7‐200‐IC7,Length:2m.
Figure2.1:MF5600flowmeterandaccessories


Pleasecheckimmediatelyfortheintegrityoftheproductaswellasthepoweranddatacable,ifany
abnormalisidentified,pleasenotifythedistributor/salesrepresentativeormanufacturerassoonas
youcan.Ifanydefectsareconfirmed,anexchangeshallbearrangedimmediatelyviatheoriginal
saleschannel.(Note:theLCDscreenshallnotbelighteduntilthepowercableispluggedin).This
usermanualshallalsoeitherbeincludedinthepackingboxorviaanonlinerequestforanelectronic
version.Inmostcases,thismanualshallbemadeavailabletothecustomerbeforetheactualorder.
ThetwocablesaretheAccessoryCable1forpower&datainputs/outputs(Partnumber:IC7‐150,
Length:1.5m)andtheAccessoryCable2forthedetachableLCD(Displaycable,Partnumber:IC7‐
30‐IC7,Length:30cm;orPartnumber:IC7‐200‐IC7,Length:2m).

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

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MF5600UserManual
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3. Knowingtheproducts
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3.1 Productdescription
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Figure3.1:MF5600partsdescription
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3.2 LCDdescription


Figure3.2:LCDsymbolillustration.

TheLCDprovidesallinformationthattheproductmeasures.Somesymbolsarereservedfor
futureupgrades,andwillnotbelightedduringtheoperation.Thefollowingtabledetailsthe
meaningofeachofthesymbols.

Display
connection
Meterbody

DetachableLCDdisplay
MENUkeys
NPTorother
connectors

Flowdirection
Electricalinterface


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MF5600UserManual

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Table3.1:Symbolsdescription 
USERThetoprowisonlydisplayedwhencommunicationorotheruser‐
definedfunctionisinprocess.
Total
ThemiddlerowdisplaysthetotalizeroraccumulatedflowrateinSL
(standardliters)orNm
3
(Normalizedcubicmeters).Herethe
standard(normalized)conditionsreferto20°C,101.325kPa.
FlowrateThebottomrowdisplaystheinstantflowrateinSLPM(Standard
Litersperminute)
E1Error1–Sensorerror
E2Error2–ADCerror
E3Error3–RTCerror
E4Error4–EEPROMerror
E4Error5–Oscillator(crystal)error
Temperature,formodelswithtemperatureoption
PPressure,formodelswithpressureoption
*Note:Boththepressureandtemperaturesensorscanbeintegratedwiththecurrentproduct
butnotwiththedefaultmodels.Pleasecontactthemanufacturerforfurther
information.

3.3 Poweranddatacabledescription

 Table3.2:MF5600wireassignments.

 

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Figure3.3:MF5600powercable
PartnumberIC7‐150
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Thecableconnectorhastwopinsforpositioningwhenpluggingintothemeter.Donotforcethe
plug.Aftertheplugisproperlyengaged,usetheplugscrewtotightentheengagement.


Wire Color Definition
1Red

Powersupply

(12

~

24Vdc)
2BlackGND,ground
3GreenRS485A
4BrownRS485B
5Violet4~20mA,flowrateoutput
6Transparent

4~20mA/pulseground
7YellowPulseoutput


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MF5600UserManual
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3.4 Mechanicaldimensions
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Figure3.4:MF5600dimensions
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
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MF5600UserManual
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4. Installation
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Donotopenoralteranypartoftheproductwhichwouldleadtomalfunctionandirrecoverable
damage.Itwillalsoforfeitthetermsofthewarrantyandcauseliability.
Theproductatthetimeofshipmentisfullyinspectedforitsqualityandmeetsallsafetyrequirements.
Additionalsafetymeasuresduringtheinstallationshouldbeapplied.Thisincludes,butisnotlimited
totheleakageverificationprocedures,standardEDS(electrostaticdischarge)precautions,andDC
voltageprecautions.Othertaskssuchascalibration,partreplacement,repair,andmaintenance
mustonlybeperformedbytrainedpersonnel.Uponrequest,themanufacturerwillprovide
necessarytechnicalsupportand/ortrainingforthepersonnel.
Theproductispreferabletobeinstalledhorizontally.Flowdirectionshouldbealignedwiththearrow
markonthemeterbody.Iftheflowingfluidmayhaveparticlesordebris,afilterisstrongly
recommendedtobeinstalledupstreamofthemeter.
Pleasefollowthefollowingstepstocompletetheinstallation:






Figure4.1:MF5600installation
a)Uponopeningthepackage,theproduct'sphysicalintegrityshouldbeinspectedtoensureno
visualdamage.
b)Beforeinstallationoftheproduct,pleaseensurethatthepipedebrisorparticlesoranyother
foreignmaterialsarecompletedremoved.
c)Cautionsduringinstallation:

i)Itispreferabletofirstinstall/connectthemeterinletandthentheoutletendofthemeter;
Toensurethemeasurementaccuracy,anupstreamstraightpipeoflengthnolessthan
10DNandadownstreamstraightpipeoflengthnolessthan5DNshouldbeinplace.Please
refertothefollowingrecommendedinstallationconfiguration.





www.Siargo.com

MF5600UserManual


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(a)90‐degreeelboworT‐piece(b)2x90‐degreeelbow
Figure4.2:MF5600installation

(ii)Iftheupstreamordownstreampipesizeisdifferentfromthatoftheproduct,thesizeof
theinstallationlinepipediameter(s)shouldbelargerthantheflowchannel(pipe)sizeof
themeterstobeinstalled.Forsometypicalsituations,pleasefollowtheinstallation
recommendationdetailedinthefollowingsketches.


(c)2x90‐degreeelbow,3D(d)Pipesize‐reduction




(e)Pipesizeexpansion(f)Controlvalveatupstreamordownstream
Figure4.3:MF5600installation

(iii)Duringinstallation,pleasemakesurenoforeignmaterials(suchaswater,oil,dirt,particles,
etc.)entertheinstallationpipeline.

d)ConnectelectricalwiresperthewiredefinitioninTable3.2.Pleasebesureofthepowersupply
range(i.e.,12~24Vdc)andpowersupplypolarization.Ifanadapterisotherthantheone
suppliedbythemanufacturer,makesuretheadaptermeetsindustrialstandardsandhasall
safetycertifications.

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MF5600UserManual
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
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e)Forthedatacommunicationwireconnection,pleasefollowthedescriptioninTable3.2and
makesurethatthewiresarecorrectlyconnectedtotheproperportsonyourdata
device/equipment.Pleasemakesurethedatacablemeetsindustrialstandardswithproper
shielding.
f)Oncetheexternalpowerissuccessfullyconnected,theLCDshouldbelightedupwiththeproper
informationdisplayedtoworkcorrectly.
g)Slowlyopenthevalve(s)ifany,upstreamordownstreamorbothofthepipeline,andthemeter
shouldthenstarttomeasuretheflowinthepipeline.Note:becausethemeterhasalarge
dynamicalmeasurementrange,itcouldbenormalifyouseethesmallinstantflowratebefore
youopenthevalveastherecouldbesomeleakage.However,makesurethemeterreadsnull
whenthereisnoflowpresentinthepipeline.
h)Thiswillconcludetheinstallation.


Cautions
a)Don'talteranypartsoftheproduct.
b)Ensuretheelectricalconnectionisproperlydonepertheinstructions.
c)Makesurenomechanicalstressesintheconnections.
d)Thestrongelectromagneticinterferencesourcesclosebyoranymechanicalshocksatthe
pipelinemayalsocreatemalfunctioningoftheproduct.
e)Slowlyopen/closevalvestopreventabruptpulseflowimpact.


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
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MF5600UserManual
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
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5. OperationandMENUdescription

5.1 Checktheproductspecifications

Beforestartingtousethisproduct,checktheproductspecificationsthatcanbefoundinthismanual
orthebasicinformationlocatedonthebackpaneloftheproduct.
ThedetailedproducttechnicalspecificationscanbefoundinSection7.Foraspecificapplication,
thepressureratingmustnotbehigherthanthesystempressuretobemeasured,andtheflowrange
shouldalsobewithinthespecifiedones.Inmostcases,theuseofahighfull‐scalerangedmeterfor
theverylowflowratemeasurementoftenresultsinerroneousdata.Thegastobemeasuredmust
alsobeconsistentwiththatspecifiedbytheproduct.Beparticularlycautiousaboutthesupplied
voltageindicatedinthespecification.Ahighervoltagemayleadtoirrecoverabledamage,anda
lowervoltagewillnotpowertheproductforanydesiredfunctions.
Forthebestperformanceoftheproduct,itisadvisedthatthegastobemeasuredmustbecleanand
freeofparticlesorotherforeignmaterials.

5.2 Checktheleakage

Checkgasleakagebeforeanymeasurement.Ifitisneeded,thepressurizednitrogenoraircanbe
usedfortheleakagecheck.

5.3 Powerthemeteranddigitaldataconnection

AlthoughthisproductcomplieswiththeCE‐requiredEMCregulations,italsorequirestheproductto
beusedaccordingtothestandardelectricaldevicepractice.Beforeconnectingthemeterwith
externalDCpoweroranAC‐DCadapter,makesurethesupplyvoltageiswithintherangeofthe
specifiedonesinSection7.BecautiousthatthestandardelectricaldeviceprecautionssuchasEDS
(electrostaticdischarge)andDCvoltageareobserved.Excessiveelectrostaticdischargemay
damagetheproduct.
Themanufacturer‐suppliedpoweranddatacablehavealockingfixture.Lockthecableandmake
sureitisproperlyengagingandwillnotbeaccidentallygotunplugged.
Half‐duplexRS485Modbusisusedfordigitaldatacommunication.Makesurethewiresareproperly
connectedtothereceiverside.



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
MF5600UserManual
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
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5.4 MeterMENUdescriptions

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
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

Figure5.1:MF5600keysdescription
Themeterhasafront3‐keyboardfortheusertosetthedesiredfunctions,accessdata,andcheck
thestatus.TheMenukey(M)isatthecentralpositionthatallowstheusertoselectafunctionand
confirmationorotherrelatedactionsthatwillbedetailedbelow.Twokeys(“Up”and“Down”)to
selectthemenuandsub‐menu.

5.4.1 Startingthemeasurement

Oncethepowerissuppliedandnoabnormalissuesareobserved,themeterisreadytoperformthe
measurements.Thedefaultdisplayisforthemassflowmeasurementhavingtwonumericallineson
theLCD.Themiddlelineistheaccumulatedortotalizedflowrate,andthelowerlineistheinstant
flowrate.Theupperlinewilllightupwhenthepressureortemperatureoptionisselected.

ThedisplaycharactersarelimitedbytheLCDcapability,thefollowingtableistheillustration.



 
MENU


Up

Down



www.Siargo.com
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MF5600UserManual


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5.4.2 MENUentrywithaverifiedpassword
Attheflowmeasurement(main)display,pressthecentral“M”MENU
key,itwillenterintothepasswordsettingandverificationMENU.The
defaultpasswordis“11111”.Ifthepasswordisincorrect,thedisplaywill
returntothemaindisplay.
Toenteranewpassword,pressthe“Up”or“Down”keytochangethe
digitthatflashes,andpressthe“M”keytoconfirm.Repeatthisprocess
forall5digitsandthemeterwillenterintothemenusetting
interfaces/screen.
Subsequently,theMENUallowstheuserto:
 SetModbusaddressF2‐Addr
 Changecommunicationbaudrate    F3‐bPS
 ResetorcalibratetheoffsetF11‐oFFST
 Enterthegasconversionfactor(GCF)    F12‐GCF
 Setthe2
nd
‐correctionfactor    F14‐Corr
 Changetheresponsetime    F16‐rESPS
 Settheunitfortheaccumulatedortotalizedflowrate F31‐UnT‐A
 Settheunitfortheinstantflowrate   F32‐UnT‐F
 SetthepulseF41‐PULSE
 ChangethedefaultpasswordF91‐PASS
 Clearorresettheaccumulatedortotalizedflowrate  F92‐CLr‐A
 Resetthe2
nd
‐correctionfactor    F94‐rS2nd
 ExitfromtheMENUF99‐qUIT
Note:Duringthisprocess,themeterwillcontinuetomeasuretheflowwithoutbeinginterrupted.

5.4.3 SettheRS485Modbusaddress
AfterthepasswordisverifiedandenteredintotheMENUsettings,pressthe“Up”or“Down”key
untilthescreenshowstheF2‐Addrasindicatedtotheleft.
TheModbusaddresshas3digits,whichcanbeanynumber
between001to255.Pressthe“M”keytoenterintothechange
addressscreen.Pressthe“Up”or“Down”keytochangethe
flashingdigits,andthenpressthe“M”keytoconfirm.Afterthe
addressisset,thedisplaywillreturntoF2‐Addr,whichindicates
thetaskiscompleted.Pressthe“Up”or“Down”keytoselectF99
‐qUITandthe“M”keytoexittheMENUandreturntotheMain
Displayscreen.

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Note:Thedefaultaddressis255.
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5.4.4 SettheRS485communicationbaudrate
Followingtheabove‐mentionedsteps,attheMENUsettingscreen,usethe“Up”or“Down”keyto
selectF3‐bPSandthenpressthe“M”keytosettheRS485communicationbaudrate.
Thereare6baudratesselectable,dependingonyoursystem
requirements:4800,9600,19200,38400,and57600.Thedefault
baudrateis9600.Usethe“Up”or“Down”keytoselectthedesired
oneandpressthe“M”keytoconfirm.Thedisplaywillthenreturn
totheF3‐bPSscreen,whichindicatesthetaskiscompleted.Use
the“Up”or“Down”keytoselectF99‐qUITandthe“M”keytoexit
theMENUandreturntotheMainDisplayscreen.


5.4.5 Resetorcalibratetheoffset
Afteracertaintimeofusage,themeter’soffset(zeroflowrate)mightormightnothaveasmallshift.
Orwhenyouapplythemeterfordifferentgases,theoffsetmightbeshifted.Toensure
measurementaccuracy,itisnecessarytoresetorcalibratetheoffset.Followingtheabove‐
mentionedsteps,attheMENUsettingscreen,usethe“Up”or
“Down”keytoselectF11‐oFFST.Beforeperformingthetask,
makesurethereisabsolutelynoflowintheflowchannel,otherwise,
itwillcreateevenbiggererroneousmeasurementresults.
Pressthe“M”keytoconfirmthetask,anditwillopenthesub‐
MENUaskingyoutoconfirm.Usethe“Up”or“Down”keytoselect
thedesiredoneandpressthe“M”keytoconfirm.Thedisplaywill
thenreturntotheF11‐oFFSTscreen,whichindicatesthetaskis

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completed.Usethe“Up”or“Down”keytoselectF99‐qUITandthe“M”keytoexittheMENUand
returntotheMainDisplayscreen.

5.4.6 Gasconversionfactor(GCF)fordifferentgasmeasurement
Forthegeneralpurposeoftheapplication,agasconversionfactor(GCF)canbeappliedtometerthe
gasdifferentfromthedefaultoneortheoneusedforcalibration.TheGCFisdeterminedbythe
thermalcalorimetricsensingprincipleaswellasthemeterfluidicdynamicdesignandthecontrol
circuitry.Contactthemanufacturertoobtainthevaluescorrespondingtothecorrectmodels.
TheGCFforairis1000.
Note:Ifthemeterduringpurchaseisorderedforaspecialrealgascalibration,contactthe
manufacturerbeforefurtherproceeding.
Followingtheabove‐mentionedsteps,attheMENUsettingscreen,
usethe“Up”or“Down”keytoselectF12‐GCF.Pressthe“M”key
toconfirm,anditwillopenthesub‐MENUshowingthecurrentgas
conversionvalue.Usethe“Up”or“Down”andthe“M”confirming
keytoinputthedesiredvalue,andpressthe“M”keyagainto
completethetask.ThedisplaywillthenreturntotheF12‐GCF
screen,whichindicatesthetaskiscompleted.Usethe“Up”or
“Down”keytoselectF99‐qUITandthe“M”keytoexittheMENU
andreturntotheMainDisplayscreen.



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5.4.7 Setthe2
nd
‐correctionfactor
Followingtheabove‐mentionedsteps,attheMENUsetting
screen,usethe“Up”or“Down”keytoselectF14‐Corrandthen
pressthe“M”keytosetthe2
nd
‐correctionfactor.





5.4.8 SettheResponsetime
Followingtheabove‐mentionedsteps,attheMENUsettingscreen,usethe“Up”or“Down”keyto
selectF16‐rESPSandthenpressthe“M”keytosettheresponsetime.
Thereare6responsetimeselectable:125,250,500,1000,2000,
and5000,unitismsec.Thedefaultresponsetimeis125msec.
Usethe“Up”or“Down”keytoselectthedesiredoneandpress
the“M”keytoconfirm.ThedisplaywillthenreturntotheF16‐
rESPSscreen,whichindicatesthetaskiscompleted.Usethe“Up”
or“Down”keytoselectF99‐qUITandthe“M”keytoexitthe
MENUandreturntotheMainDisplayscreen.

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5.4.9 Settheunitfortheaccumulatedortotalizedflowrate
Thisfunctionistosettheunitofaccumulatedflow.Ifonelikestoswitchbetweenm3andSL,
followingtheabove‐mentionedsteps,attheMENUsettingscreen,
usethe“Up”or“Down”keytoselectF31‐UnT‐A.Pressthe“M”
keytoconfirm,anditwillopenthesub‐MENUshowingthecurrent
unitofaccumulatedflow.Usethe“Up”or“Down”andthe“M”
confirmingkeytoselectthedesiredone,andpressthe“M”key
againtocompletethetask.ThedisplaywillthenreturntotheF31
–UnT‐Ascreen,whichindicatesthetaskiscompleted.Usethe“Up”
or“Down”keytoselectF99‐qUITandthe“M”keytoexitthe
MENUandreturntotheMainDisplayscreen.


5.4.10 Settheunitfortheinstantflowrate
Thisfunctionistosettheunitforaninstantflowrate.IfonelikestoswitchbetweenSLPMandm3/h,
followingtheabove‐mentionedsteps,attheMENUsettingscreen,
usethe“Up”or“Down”keytoselectF32‐UnT‐F.Pressthe“M”
keytoconfirm,anditwillopenthesub‐MENUshowingthecurrent
unitofaccumulatedflow.Usethe“Up”or“Down”andthe“M”
confirmingkeytoselectthedesiredone,andpressthe“M”key
againtocompletethetask.ThedisplaywillthenreturntotheF32
‐UnT‐Fscreen,whichindicatesthetaskiscompleted.Usethe“Up”
or“Down”keytoselectF99‐qUITandthe“M”keytoexitthe
MENUandreturntotheMainDisplayscreen.
