Siargo MF5100 User manual

Gas Mass Flow Meter
VB.1.01
Model MF5100
@ 2022 Siargo Ltd.
www.Siargo.com

www.Siargo.com MF5100 User Manual 1 |Page
Gas Mass Flow Meter
with MEMS calorimetric sensing technology
MF5100 Series
User Manual
Document No. 07-2022-M10 EN
Issue date: 2022.07
Revision: VD.1.01
Siargo Ltd.
3100 De La Cruz Boulevard, Suite 210
Santa Clara, CA 95054
USA
Tel: [phone]
Email: [email protected]
© Copyright 2022 by Siargo Ltd.
Siargo Ltd. and its subsidiaries reserve the right to change the specifications and/or descriptions
without prior notice. For further information and updates, please visit: www.Siargo.com

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Attention!
Use with caution!
xPlease carefully read this manual prior to operating this product.
xDo not open or modify any hardware which may lead to irrecoverable
damage.
xDo not use this product if you suspect any malfunctions or defection.
x
Do not use this product for corrosive media or in a
strong vibration
environment.
xUse this product according to the specified parameters.
xOnly the trained or qualified personnel shall be allowed to perform
product services.
xBe cautious for the electrical safety, even it operates at a low voltage, or
battery, any electrical shock might lead to some unexpected damages.
xThe gas to be measured should be clean and free of particles. Do not apply
this meter for liquid medium.
x
Do not apply for any unknown or non-specified gases that may
damage the product.
xFor remote data, please be sure the meter is properly configured.

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Table of Contents
1. Overview ...................................................................................................................................................... 5
2. Receipt / unpack of the products
................................
...............................................................................6
3. Knowing the products.................................................................................................................................7
3.1. Product description............................................................................................................................. 7
3.2. LCD description ................................................................................................................................... 7
3.3. Power and data cable description...................................................................................................... 8
3.4. Mechanical dimensions....................................................................................................................... 9
4. Battery installation ................................................................................................................................... 10
5. Meter installation ...................................................................................................................................... 11
6. Operation ................................................................................................................................................... 14
6.1 Check the product specifications ................................................................
................................
.....14
6.2 Check the leakage ............................................................................................................................. 14
6.3 Power the meter and digital data connection ................................................................................14
6.4 Starting the measurement ...............................................................................................................15
6.5 RS485 Modbus communication protocol........................................................................................15
6.5.1 Hardware connection
....................................................................................................................15
6.5.2 Communication parameters......................................................................................................... 16
6.5.3 Frame.............................................................................................................................................. 16
6.5.4 Function codes...............................................................................................................................17
6.5.5 Registers.........................................................................................................................................17
6.6 Analog output.................................................................................................................................... 20
6.6.1 4~20mA output.............................................................................................................................. 20
6.6.2 Pulse output...................................................................................................................................21
6.6.3 Voltage output...............................................................................................................................21
7. Product selection................................................................
................................
.......................................22
8. Technical specifications ............................................................................................................................23
8.1 Technical specifications ....................................................................................................................23
8.2 Pressure loss ......................................................................................................................................24
9. Technical notes for the product performance ........................................................................................25
9.1 Measurement principle .....................................................................................................................25
9.2 Precautions for the best performance of the product....................................................................25

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9.2.1 Comparison with a third-party reference meter.........................................................................25
9.2.2 Particle contamination and fluidic cleanness .............................................................................26
9.2.3 Apply to a different gas medium..................................................................................................26
10. Troubleshooting ....................................................................................................................................27
11. Warranty and Liability ..........................................................................................................................28
12. Service/order contact and other information .....................................................................................30
Appendix I: Product evaluation kit ..................................................................................................................31
Appendix II: Document history........................................................................................................................ 32

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1. Overview
All contact information can be found at the end of this manual.
This manual provides essential information for the operation of the MF5100 series of gas mass
flow
meters for general-purpose gas metrology applications. The product performance, maintenance,
and trouble-shooting as well as the information for product order, technical support, and repair are
also included.
MF5100 mass flow meters are designed for general purpose precise industrial gas measurement,
monitor, or control. The meter series offer reading accuracy at a large dynamic range, and options
for battery power. Additionally, the meter is capable of build-in gas recognition for the pre-
calibrated gases, offering seamlessly switching among different gases with distinct thermal
propert
ies.
The meters are operated with Siargo’s proprietary MEMS calorimetric mass flow sensors together
with the smart control electronics. The sensor surface is passivated with silicon nitride ceramic
materials together with a water/oil proof nano-coating for performance and reliability. The meter
body is made of stainless steel that is available for applications of most gases.

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2. Receipt / unpack of the products
Upon receipt of the products, please check the packing box before the dismantlement of the packing
materials. Ensure no damages during shipping. If any abnormality is observed, please contact and
notify the carrier who shipped the product and inform the distributors or sales representatives if the
order is not placed directly with the manufacturer, otherwise, the manufacturer should be informed
as well. For any further actions, please refer to the return and repair section in this manual.
If the packing box is intact, proceed to open the packing box, and you shall find the product (either
the meter or the meter with the valve per the actual order). The power adapter and/or data cable as
shown below may also be found according to your actual order.
Flow meter data cable
Figure 2.1: MF5100 flow meter and data cable
Please check immediately for the integrity of the product as well as the power and data cable, if any
abnormal is identified, please notify the distributor/sales representative or manufacturer as soon as
you can. If any defects are confirmed, an exchange shall be arranged immediately via the original
sales channel. (Note: the LCD screen shall not be lighted until the power cable is plugged in or the
battery is installed). This user manual shall also either be included in the packing box or via an online
request for an electronic version. In most cases, this manual shall be made available to the customer
before the actual order.
The optional cable
is a standard one with a DB9 connector.
The recommended lithium-ion battery
(Tadiran TL 5930 or SAFT LS33600, both are 3.6Vdc, 19Ah) shall be purchased by the user at local
supply due to the freight restrictions.

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3. Knowing the products
3.1.Product description
Figure 3.1: MF5100 parts description
3.2.LCD description
Figure 3.2: LCD symbol illustration.
The LCD provides all information that the product measures. Some symbols are reserved for
future upgrades, and will not be lighted during the operation. The following table details the
meaning of each of the symbols.
Meter body
LCD display
NPT or other
connectors
Flow direction
Electrical interface, DB9
Power switch

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Table 3.1: Symbols description
3.3.Power and data cable description
Table 3.2: MF5100 wire assignments.
Figure 3.3: MF5000 socket and cable
The value is the Modbus address of the meter
The value next to the symbol is the totalizer or accumulated flow rate
in SL (standard liters) or NCM (Normalized cubic meters). Here the
standard (normalized) conditions refer to 20°C, 101.325kPa.
The value next to the symbol is the instant flow rate in SLPM
(Standard Liters per minute)
When the meter is switched to measure a different gas other than the
one at the time of shipping, the meter will try to identify the gas, and
if a pre-stored gas is matched, this symbol will be displayed instead of
the meter Modbus address.
Status of the battery, when the meter is operating with the battery
power.
Temperature, for models with temperature option
Wire
Color
Definition
1
Purple
4~20 mA, output
2
Brown
RS485B (-)
3
Transparent
Analog output, 0~5Vdc
4
Yellow
Pulse, output
5
White
Pulse or 4~20mA, ground
6
Blue
N.C.
7
Green
RS485A (+)
8
Black
Ground, common
9
Red
Power supply, 12-24Vdc

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3.4.Mechanical dimensions
Figure 3.4: MF5100 meter dimensions
Model
DN (mm)
D (NPTM)
L
H
1
H
2
H3
W
d
MF5006
3.00
3/8”
132.0
134.0
130.0
32.0
32.0
Φ3.0
MF5008
6.00
3/8”
132.0
134.0
130.0
32.0
32.0
Φ6.0
MF5010
8.00
3/8”
132.0
134.0
130.0
32.0
32.0
Φ8.0
MF5012
12.00
1/2”
150.0
142.0
138.0
40.0
40.0
Φ12.0
MF5019
19.00
3/4”
182.0
142.0
138.0
40.0
40.0
Φ19.0

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4. Battery installation
For the battery power options, please refer to the following graph to install a battery (recommended:
Tadiran TL 5930 or SAFT LS33600, both are 3.6Vdc, 19Ah. Or a similar one with a
safety certificate).
(a) Removal of the screws with T2 (M2.5) for cover and T2.5 (M3) hex key for meter body, then
remove the back cover of the meter head.
(b) Install the battery – for most applications, the battery life should be 3+ years. And re-assemble
the back cover of the meter head.
T2
(M2.5)
T2.5 (M3)
T2 (M2.5)

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5. Meter installation
Do not open or alter any part of the product which would lead to malfunction and irrecoverable
damage. It will also forfeit the terms of the warranty and cause liability.
The product at the time of shipment is fully inspected for
its quality and meets all safety requirements.
Additional safety measures during the installation should be applied. This includes, but is not limited
to the leakage verification procedures, standard EDS (electrostatic discharge) precautions, and DC
voltage precautions. Other tasks such as calibration, part replacement, repair, and maintenance
must only be performed by trained personnel. Upon request, the manufacturer will provide
necessary technical support and/or training for the personnel.
The product is preferable to be installed horizontally. Flow direction should be aligned with the
arrow mark on the meter body. If the flowing
fluid may have particles or debris, a filter is strongly
recommended to be installed upstream of the meter.
Please follow the following steps to complete the installation:
a) Upon opening the package, the product's physical integrity should be inspected to ensure no
visual damage.
b) Before installation of the product, please ensure that the pipe debris or particles or any other
foreign materials are completed removed.
c) Cautions during installation:
i) It is preferable to first install
/connect
the meter inlet and then the outlet end of the meter;
To ensure the measurement accuracy, an upstream straight pipe of length no less than
10DN and a downstream straight pipe of length no less than 5DN should be in place. Please
refer to the following recommended installation configuration.

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(a) 90-degree elbow or T-piece (b) 2x90-degree elbow
(ii) If the upstream or downstream pipe size is different from that of the product, the size of
the installation line pipe diameter(s) should be larger than the flow channel (pipe) size of
the meters to be installed. For some typical situations, please follow the installation
recommendation detailed in the following sketches.
(c)
2x90-degree elbow, 3 D (d) Pipe size-reduction
(e) Pipe size expansion (f) Control valve at upstream or downstream
(iii) During installation, please make sure no foreign materials (such as water, oil, dirt, particles,
etc.) enter
the installation pipeline.
d) For non-battery power operation, connect electrical wires per the wire definition in Table 3.3.
Please be sure of the power supply range (i.e., 12 ~ 24 VDC) and power supply polarization. If
an adapter is other than the one supplied by the manufacturer, make sure the adapter meets
industrial standards and has all safety certifications.

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e) For the data communication wire connection, please follow the description in Table 3.3 and
make sure that the wires are correctly connected to the proper ports on your data
device/equipment.
Please make sure the data cable meets industrial standards with proper
shielding.
f) Once the external power is successfully connected or the battery is installed, the LCD should be
lighted up with the proper information displayed to work correctly.
g) Slowly open the valve(s) if any, upstream or downstream or both of the pipeline, and the meter
should then start to measure the flow in the pipeline. Note: because the meter has a large
dynamical measurement range, it could be normal if you see the small instant flow rate before
you open the valve as there could be some leakage. However, make sure the meter reads null
when there is no flow present in the pipeline.
h) This will conclude the installation.
Cautions
a) Don't alter any parts of the product.
b) Ensure the electrical connection is properly done per the instructions.
c) Make sure no mechanical stresses in the connections.
d) The strong electromagnetic interference sources close by or any mechanical shocks at the
pipeline may also create malfunctioning of the product.
e) Slowly open/close valves to prevent abrupt pulse flow i
mpact.

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6. Operation
6.1 Check the product specifications
Before starting to use this product, check the product specifications that can be found in this manual
or the basic information located on the back panel of the product.
The detailed product technical specifications can be found in Section 8. For a specific application,
the pressure rating must not be higher than the system pressure to be measured, and the flow range
should also be within the specified ones. In most cases, the use of a high full-scale ranged meter for
the very low flow rate measurement often results in erroneous data. The gas to be measured must
also be consistent with that specified by the product. Be particularly cautious about the supplied
voltage indicated in the specification. A higher voltage may lead to irrecoverable damage, and a
lower voltage will not power the product for any desired functions.
For the best performance of the product, it is advised that the
gas to be measured must be clean and
free of particles or other foreign materials.
6.2 Check the leakage
Check gas leakage before any measurement. If it is needed, pressurized nitrogen or air can be used
for the leakage check.
6.3 Power the meter and digital data connection
Although this product complies with the CE-required EMC regulations, for the options of external DC
power supply, it also requires the product to be used according to the standard electrical device
practice. Before connecting the meter with external DC power or an AC-DC adapter, make sure the
supply voltage is within the range of the specified ones in Section 8. Be cautious that the standard
electrical device precautions such as EDS (electrostatic discharge) and DC voltage are observed.
Excessive electrostatic discharge may damage the product.
The manufacturer-supplied power and data cable have a locking fixture. Lock the cable and make
sure it is properly engaging
and will not be accidentally got unplugged.
Half-duplex RS485 Modbus is used for digital data communication. Make sure the wires are properly
connected to the receiver side.

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6.4 Starting the measurement
Once the power is supplied (either via battery or external DC power) and no abnormal issues are
observed, the meter is ready to perform the measurements. The default display is for the mass flow
measurement having two numerical lines on the LCD. The
middle
line is the totalizer or accumulated
flow rate, and the lower line is the instant flow rate. The upper line shows the temperature, meter
address, and battery status.
6.5 RS485 Modbus communication protocol
The digital communication protocol is based on standard Modbus RTU Half-plex mode. A master (PC
or PLC) can communicate with multiple slaves (the current product) for data exchange and
communication parameter configuration. Refer to Table 3.3 for cable connection.
6.5.1
Hardware connection
The hardware layer is TIA/EIA-485-A, as illustrated below. In this configuration, the product (MF5100)
is a slave.
Figure 6.1: RS485 hardware connection

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6.5.2 Communication parameters
The PC UART communication parameters are listed in the following table.
Parameters
Protocol
RTU
Baud rate (Bits per second)
9600 bps
Start bits
1
Data bits
8
Stop bits
1
Even/Odd parity
None
Bits period
104.2 μsec
Bytes period
1.1458 msec
Maximum data length
20
Maximum nodes
247
6.5.3 Frame
The frame function is based on the standard Modbus RTU framing:
Start_bits
Address
Function codes
Data
CRC
Stop_bits
T1-T2-T3-T4
8 bit
8 bit
N 8 bit (20≥n≥0)
16 bit
T1-T2-T3-T4
Start_bits
: 4 periods bit time, for a new frame.
Address: The address can be set from 0 to 247 except for 157 (0x9d). 0 is the broadcast
address.
Function codes: Define the product (MF5100)'s functions/actions (slaves), either execution or
response.
Data: The address of the register, length of data, and the data themselves.
CRC: CRC verification code. The low byte is followed by the high byte. For example, a
16-bit CRC is divided into BYTE_H and BYTE_L. In the framing, the BYTE_L will
come first, then followed by the BYTE_H. The last one is the STOP signal.
Stop_bits: 4 periods bit time, for ending the current frame.

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6.5.4 Function codes
The Modbus function codes applied for the product are the sub-class of the standard Modbus
function codes. These codes are used to set or read the registers of the product:
Code
Name
Functions
0x03
Read register
Int, char, float
Read register(s)
0x06
Set single register
Int, char, float
Write one single 16-bit register
0x08
CRC verification
Int
Verify the communication
0x10
Set multiple registers
Int, char, float
Write multiple registers
6.5.5 Registers
The product (MF5100) has multiple registers available for the assignment of the various functions.
With these functions, the user can obtain the data from the products, such as product address and
flow rates
from the registers, or set the product functions by writing the
corresponding parameters.
The currently available registers are listed in the following table, and the registers may be customized
upon contacting the manufacturer. Where R: read; W: write-only; W/R: read and write.
Note: At the time of shipping, the write protection function is enabled except for address and
baud rate. Once the user completes the register value change, the write protection will be
automatically enabled once again to prevent incidental data loss.
Functions
Description
Register
Modbus
reference
Address
Product address (R/W)
0x0081
40130 (0x0081)
Serial number
Serial number of the product
0x0030~0x0035
40049 (0x0030)
Flow rate
Current flow rate (R)
0x003A~0x003B
40059 (0x003A)
Totalizer
Totalizer or accumulated flow rate (R)
0x003C~0x003E
40061 (0x003C)
GCF
Gas correction factor (R/W)
0x008B
40140 (0x008B)
Maximum flow rate
Set maximum flowrate (R/W)
0x0085
40134 (0x0085)
Pulse rate
Set pulse rate (totalizer flowrate) (R/W)
0x93
40148 (0x0093)
GC_air
Gas identification, air (R/W)
0x91
40146 (0x0091)
GC_gas
Gas identification, gas (R/W)
0x53
40084 (0x0053)
GC_threshold
Gas identification limit (R/W)
0x92
40147 (0x0092)
Write protection
Write protection of selected parameters (W)
0x00FF
40256 (0x00FF)

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The detailed information of each register is described below: Y: enabled; N: disabled
A
ddress 0x0081
Write
Y
Read
Y
Description
Address of the product
Value type
UINT 16
Notes
Values from 1 to 247 except for 157 (0x9d). Broadcast address 0 is not enabled,
the default address is 1.
Serial number, SN
0x0030…0x0035
Write
N
Read
Y
Description
Series Number of the product, SN
Value type
UINT 8 (12bits)
Notes
SN= value(0x0030), value(0x0031),….,value (0x0035);
Receiving 12 bytes as: 2A 47 37 41 45 49 30 32 30 35 38 2A , the corresponding Serial
Number is *G7AEI02058*.
F
low rate 0x003A ~ 0x003B
Write
N
Read
Y
Description
Current flow rate
Value type
UINT 16
Notes
Flow rate = [Value (0x003A)*65536 + value (ox003B)]/1000
e.g.: for a flow rate of 123.456 SLPM, the user will read “1 (0x0002)” from
register 0x00
3A and “57920 (0xE240)” from register 0x003B, therefore
Current flow rate = (1*65536+57920)/1000 = 123.456
T
otalizer 0x003C ~ 0x003E
Write
Y
Read
Y
Description
Totalizer or accumulated flow rate
Value type
UINT 32 + UNIT 16
Notes
A1 = Value (0x003C) * 65536 + Value (0x003D)
A2 = Value (0x003E)
Totalizer or accumulated flow rate = (A1 * 1000 + A2)/1000
e.g.: for a totalizer or accumulated flow rate of 3452.245 m3, the user will read
“0 (0x0000)” from register 0x003C; “3452(0x0D7C)” from register 0x003D, and
“245(0x00F5)” from register 0x003E.
Then, the totalizer or accumulated flow rate
= ((0 + 3452)*1000 + 245)/1000=3452.245.
Maximum flow rate
0x0085 … 0x0086
Write
Y
Read
Y
Description
Set the maximum flow rate limit
Value type
UINT 16
Notes
Maximum flow rate limit =(Value(oxoo85)*65536+Vlaue(0x0086))/1000

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e.g., to set a maximum flow rate limit of 30 SLPM, write o to register 0x0085,
and write 30000 to register 0x00
86. Then the value will be
(0*65536+30000)/1000 = 30
GCF
0x008B
Write
Y
Read
Y
Description
The gas conversion factor for using a gas different from calibration gas
Value type
UINT 16
Notes
The air (default) is 1000, normally read from register 0x008B.
The product will disable this function with write protection once the
metering gas is
confirmed with the proper GCF. For a specific GCF value,
please contact the manufacturer.
GC_air
0x91
Write
Y
Read
Y
Description
This value is the gas ID for air
Value type
UINT 16
Notes
The default value is 32768±200. This value may be dependent on the actual
offset value of the meter.
GC_gas
0x53
Write
Y
Read
Y
Description
This value is assigned for a specific gas at the time of order
Value type
UINT 16
Notes
The default value for methane or natural gas is 35800±200, and for CO2 is
29200±200. For other gases, please contact the manufacturer. Once it is set,
the meter can automatically switch the calibration between air (calibrated gas)
and the set gas.
GC_threshold
0x92
Write
Y
Read
Y
Description
Set a limit for the gas switch
Value type
UINT 16
Notes
The default value is 1000, and the maximum of 10000.
For example:
If GC_gas≥GC_air+GC_threshold, or GC_gas≤ GC_air+GC_threshold, then
Flowrate_gas=flowrate_air*GCF/1000, and the “GAS” symbol will be displayed
on the LCD, replacing the meter address value.
If the GC_threshold is set to 10000, this function will be disabled.
Pulse
0x93
Write
Y
Read
Y
Description
Set the pulse rate for totalized flow rate