Siargo MF5000 Series User manual

Gas Mass Flow Meter VD.1
Model MF5000

Gas Mass Flow Meter
with MEMS calorimetric sensing technology
MF5000 Series
User Manual
Document No. 03-2021-M3 EN
Issue date: 2021.03
Revision: VD.1
Siargo Ltd.
3100 De La Cruz Boulevard, Suite 210
Santa Clara, CA 95054
USA
© Copyright 2021 by Siargo Ltd.
Siargo Ltd. and its subsidiaries reserve the right to change the specifications and/or
descriptions without prior notice.
For further information and updates, please visit: www.siargo.com
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Attention!
Use with caution!
•Please carefully read this manual prior to operating this product.
•Do not open or modify any hardware which may lead to irrecoverable
damage.
•Do not use this product if you suspect any malfunctions or defection.
•Do not use this product for corrosive media or in a strong vibration
environment.
•Use this product according to the specified parameters.
•Only the trained or qualified personnel shall be allowed to perform
product services.
•Be cautious for the electrical safety, even it operates at a low voltage,
any electrical shock might lead to some unexpected damages.
•The gas to be measured should be clean and free of particles. Do not apply
this meter for liquid medium.
•Do not apply for any unknown or non-specified gases that may
damage the product.
•For remote data, please be sure the meter is properly configured.
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Table of Contents
1. Overview ......................................................................................................................................................5
2. Receipt / unpack of the products ...............................................................................................................6
3. Knowing the products.................................................................................................................................7
3.1. Product description.............................................................................................................................7
3.2. LCD description ...................................................................................................................................7
3.3. Power and data cable description......................................................................................................8
3.4. Mechanical dimensions.......................................................................................................................9
4. Installation.....................................................................................................................................................10
5. Operation and MENU description................................................................................................................13
5.1. Check the product specifications .........................................................................................................13
5.2. Check the leakage .................................................................................................................................13
5.3. Power the meter and digital data connection ....................................................................................13
5.4. Meter MENU descriptions....................................................................................................................14
5.4.1. Starting the measurement............................................................................................................14
5.4.2. MENU entry with a verified password..........................................................................................14
5.4.3. Set the unit for accumulated flow rate ........................................................................................15
5.4.4. Set the unit for instant flow rate ..................................................................................................15
5.4.5. Set the response time....................................................................................................................16
5.4.6. Set Gas conversion factor (GCF) for different gas measurement ..............................................16
5.4.7. Set the communication protocol..................................................................................................17
5.4.8. Set the meter address ...................................................................................................................17
5.4.9. Change the default password .......................................................................................................17
5.4.10. Reset the offset............................................................................................................................18
5.4.10. Reset the totalizer or accumulated flow rate ............................................................................18
5.4.11. Exit the MENU..............................................................................................................................18
5.4.12. MENU key sequence for the settings .........................................................................................19
5.5. RS485 Modbus communication protocol (Mode P2)..........................................................................20
5.5.1. Hardware connection..........................................................................................................................20
5.5.2. Communication parameters ..............................................................................................................20
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5.5.3. Frame ...................................................................................................................................................21
5.5.4. Function codes ....................................................................................................................................21
5.5.5. Registers ..............................................................................................................................................21
5.6. Analog output ........................................................................................................................................23
5.6.1. 4~20mA output ...............................................................................................................................23
6. Product selection and order information....................................................................................................24
6.1. Product selection ...................................................................................................................................24
6.2. Order contact and customer support ..................................................................................................24
7. Technical specifications ................................................................................................................................25
8. Technical notes for the product performance ............................................................................................26
8.1. Measurement principle..........................................................................................................................26
8.2. Precautions for the best performance of the product .......................................................................26
8.2.1. Comparison with a third party reference meter...........................................................................26
8.2.2. Particle contamination and fluidic cleanness...............................................................................27
8.2.3. Apply to a different gas medium...................................................................................................27
9. Troubleshooting............................................................................................................................................28
10. Warranty and Liability ................................................................................................................................29
11. Service contact ............................................................................................................................................31
Appendix I: Product evaluation kit..................................................................................................................32
Appendix II: Document history........................................................................................................................33
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1. Overview
All contact information can be found at the end of this manual.
This manual provides essential information for the operation of the MF5000 series of gas mass flow
meters for general-purpose gas metrology applications. The product performance, maintenance,
and trouble-shooting as well as the information for product order, technical support, and repair are
also included.
MF5000 mass flow meters are designed for general purpose precise industrial gas measurement,
monitor, or control. The meter series cover a wide dynamic flow range with a working pressure rating
of up to 1.5MPa, and a temperature ranging from -20 to 60°C.
The meters are operated with Siargo’s proprietary MEMS calorimetric mass flow sensors together
with the smart control electronics. The sensor surface is passivated with silicon nitride ceramic
materials together with a water/oil proof nano-coating for performance and reliability. The meter
body is made of stainless steel that is available for applications of most of the gases.
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2. Receipt / unpack of the products
Upon receipt of the products, please check the packing box before the dismantlement of the packing
materials. Ensure no damages during shipping. If any abnormality is observed, please contact and
notify the carrier who shipped the product and inform the distributors or sales representatives if the
order is not placed directly with the manufacturer, otherwise, the manufacturer should be informed
as well. For any further actions, please refer to the return and repair section in this manual.
If the packing box is intact, proceed to open the packing box, and you shall find the product (either
the meter or the meter with valve per the actual order). The power adapter and/or data cable as
shown below may also be found according to your actual order.
Flow meter data cable
Please check immediately for the integrity of the product as well as the power and data cable, if any
abnormal is identified, please notify the distributor/sales representative or manufacturer as soon as
you can. If any defects are confirmed, an exchange shall be arranged immediately via the original
sales channel. (Note: the LCD screen shall not be lighted until the power cable is plugged in). This
user manual shall also either be included in the packing box or via an online request for an electronic
version. In most cases, this manual shall be made available to the customer before the actual order.
The cable is a standard one with a DB9 connector.
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3. Knowing the products
3.1. Product description
3.2. LCD description
The LCD provides all information that the product measures. Some symbols are reserved for
future upgrades, and will not be lighted during the operation. The following table details the
meaning of each of the symbols.
USER
The top row, only displayed when communication or other user-
defined function is in process.
Total
The middle row displays the totalizer or accumulated flow rate in SL
(standard liters) or Nm3(Normalized cubic meters). Here the
standard (normalized) conditions refer to 20°C, 101.325kPa.
Meter body
LCD display
MENU keys
NPT or other
connectors
Flow direction
Electrical interface, DB9
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Flowrate
The bottom row displays the instant flow rate in SLPM (Standard
Liters per minute)
E1
Error 1 –Sensor error
E2
Error 2 –ADC error
E3
Error 3 –RTC error
E4
Error 4 –EEPROM error
E4
Error 5 –Oscillator (crystal) error
Temperature, for models with temperature option
P
Pressure, for models with pressure option
*Note: Both the pressure and temperature sensors can be integrated with the current product
but not with the default models. Please contact the manufacturer for further
information.
3.3. Power and data cable description
Table 3.3: MF5o00 wire assignments.
Wire
Color
Definition
1
Purple
4~20 mA, output
2
Brown
RS485B
3
Transparent
4~20mA, ground
4
Yellow
Pulse, output
5
White
Pulse, ground
6
Blue
N.C.
7
Green
RS485A
8
Black
Ground, common
9
Red
Power supply, 12-24Vdc
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3.4. Mechanical dimensions
Figure 3.4.1. MF5000 meter dimensions
Model
DN (mm)
D (NPTM)
L
H
H1
W
d
C
MF5003
3.00
1/8”
118.0
144.0
28.0
38.0
Φ3.0
36.0
MF5006
6.00
1/4”
124.0
144.0
28.0
38.0
Φ6.0
36.0
MF5008
8.00
3/8”
124.0
151.0
35.0
38.0
Φ8.0
50.0
MF5012
12.00
1/2”
150.0
156.0
40.0
40.0
Φ12.0
50.0
MF5019
19.00
3/4”
182.5
156.0
40.0
40.0
Φ19.0
70.0
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4. Installation
Do not open or alter any part of the product which would lead to malfunction and irrecoverable
damage. It will also forfeit the terms of the warranty and cause liability.
The product at the time of shipment is fully inspected for its quality and meets all safety requirements.
Additional safety measures during the installation should be applied. This includes, but is not limited
to the leakage verification procedures, standard EDS (electrostatic discharge) precautions, DC
voltage precautions. Other tasks such as calibration, part replacement, repair, and maintenance
must only be performed by trained personnel. Upon requests, the manufacturer will provide
necessary technical support and/or training of the personnel.
The product is preferable to be installed horizontally. Flow direction should be aligned with the
arrow mark on the meter body. If the flowing fluid may have particles or debris, a filter is strongly
recommended to be installed upstream of the meter.
Please follow the following steps to complete the installation:
a) Upon opening the package, the product's physical integrity should be inspected to ensure no
visual damage.
b) Before installation of the product, please ensure that the pipe debris or particles or any other
foreign materials are completed removed.
c) Cautions during installation:
i) It is preferable to first install/connect the meter inlet and then the outlet end of the meter;
To ensure the measurement accuracy, an upstream straight pipe of length no less than
10DN and a downstream straight pipe of length no less than 5DN should be in place. Please
refer to the following recommended installation configuration.
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(a) 90-degree elbow or T-piece (b) 2x90-degree elbow
(ii) If the upstream or downstream pipe size is different from that of the product, the size of
the installation line pipe diameter(s) should be larger than the flow channel (pipe) size of
the meters to be installed. For some typical situations, please follow the installation
recommendation detailed in the following sketches.
(c) 2x90-degree elbow, 3 D (d) Pipe size-reduction
(e) Pipe size expansion (f) Control valve at upstream or downstream
(iii) During installation, please make sure no foreign materials (such as water, oil, dirt, particles,
etc.) entering into the installation pipeline.
d) Connect electrical wires per the wire definition in Table 3.3. Please be sure of the power supply
range (i.e., 12 ~ 24 VDC) and power supply polarization. If an adapter other than the one
supplied by the manufacturer, make sure the adapter meets industrial standards and has all
safety certifications.
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e) For the data communication wire connection, please follow the description in Table 3.3 and
make sure that the wires are correctly connected to the proper ports on your data
device/equipment. Please make sure the data cable meets industrial standards with proper
shielding.
f) Once the external power is successfully connected, the LCD should be lighted up with the proper
information displayed works correctly.
g) Slowly open the valve(s) if any, upstream or downstream or both of the pipeline, and the meter
should then start to measure the flow in the pipeline. Note: because the meter has a large
dynamical measurement range, it could be normal if you see the small instant flow rate before
you open the valve as there could be some leakage. However, make sure the meter reads null
when there is no flow present in the pipeline.
h) This will conclude the installation.
Cautions
a) Don't alter any parts of the product.
b) Ensure the electrical connection is properly done per the instructions.
c) Make sure no mechanical stresses in the connections.
d) The strong electromagnetic interference sources close by or any mechanical shocks at the
pipeline may also create malfunctioning of the product.
e) Slowly open/close valves to prevent abrupt pulse flow impact.
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5. Operation and MENU description
5.1. Check the product specifications
Before starting to use this product, check the product specifications that can be found in this manual
or the basic information located on the back panel of the product.
The detailed product technical specifications can be found in Section 7. For a specific application,
the pressure rating must not be higher than the system pressure to be measured, and the flow range
should also be within the specified ones. In most cases, the use of a high full-scale ranged meter for
the very low flow rate measurement often results in erroneous data. The gas to be measured must
also be consistent with that specified by the product. Be particularly cautious about the supplied
voltage indicated in the specification. A higher voltage may lead to irrecoverable damage, and a
lower voltage will not power the product for any desired functions.
For the best performance of the product, it is advised that the gas to be measured must be clean and
free of particles or other foreign materials.
5.2. Check the leakage
Check gas leakage before any measurement. If it is needed, the pressurized nitrogen or air can be
used for the leakage check.
5.3. Power the meter and digital data connection
Although this product complies with the CE-required EMC regulations, it also requires the product to
be used according to the standard electrical device practice. Before connecting the meter with
external DC power or an AC-DC adapter, make sure the supply voltage is within the range of the
specified ones in Section 7. Be cautious that the standard electrical device precautions such as EDS
(electrostatic discharge) and DC voltage are observed. Excessive electrostatic discharge may
damage the product.
The manufacturer-supplied power and data cable have a locking fixture. Lock the cable and make
sure it is properly engaging and will not be accidentally got unplugged.
Half-duplex RS485 Modbus is used for digital data communication. Make sure the wires are properly
connected at the receiver side.
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5.4. Meter MENU descriptions
The meter has a front 3-key board for the user to set the desired functions, access data, and check
for the status. The Menu key (M) is at the central position that allows the user to select a function
and confirmation or other related actions that will be detailed below. Two keys (“Left” and “Right”)
to select the menu and sub-menu.
5.4.1. Starting the measurement
Once the power is supplied and no abnormal issues are observed,
the meter is ready to perform the measurements. The default
display is for the mass flow measurement having two numerical
lines on the LCD. The middle line is the totalizer or accumulated
flow rate, and the lower line is the instant flow rate. The upper line
will light up when the pressure or temperature option is selected.
5.4.2. MENU entry with a verified password
At the flow measurement (main) display, press the central “M”
MENU key, it will enter into the password setting and verification
MENU. The default password is “11111”. If the password is incorrect,
the display will return to the main display.
To enter a new password, press the “Left” or “Right” key to change
the digit that flashes, and press the “M” key to confirm. Repeat this
process for all 5 digits and the meter will enter into the menu setting
interfaces/screen.
Left MENU Right
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Subsequently, the MENU allows the user to set accumulated (totalized) flow rate unit, instant flow
unit, response time, the gas conversion factor (GCF), communication protocol, device address,
password, offset and reset the accumulation register. Table 5.4 lists the on-screen character and the
corresponding functions.
Table 5.4 On-screen characters and their corresponding functions
On-screen character
Symbol
Functions
UnITACC
Accumulated (totalized) flow rate unit
UnITTyPE
Instant flow rate unit
InTErVAL
Interval: response time
SET GCF
Gas conversion factor
PrOTOCOL
Communication protocol
SET Addr
Communication address
SET PAS
Password
OFFSET
Reset offset
CLEAr ACC
Reset accumulated flow rate register
QUIT
Exit the MENU
Note: During this process, the meter will continue to measure the flow without being interrupted.
5.4.3. Set the unit for accumulated flow rate
After the password being verified and entering into the MENU settings, press the “Left” or “Right”
key until the screen shows the “UnITACC”
Currently, there are two units to select: “—n3—” or “—SL—“, corresponding to the Nm3(normalized
cubic meter) or SL (standard liter). Note: both units referred to the calibration standard conditions of
20°C and 101.325kPa. Press the “M” key to enter into the change address screen. Press the “Left” or
“Right” key to change, and then press the “M” key to confirm. After the selection, press the “M” key
to exit the MENU and return to the Main Display screen.
5.4.4. Set the unit for instant flow rate
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Following the above-mentioned steps, at the MENU setting screen, press the “Left” or “Right” key
until the screen shows the “UnITTyPE”
Currently, there are two units to select: “—n3—” or “—SL—“, corresponding to the Nm3/hr
(normalized cubic meter per hour) or SLPM (standard liter per minute). Note: both units referred to
the calibration standard conditions of 20°C and 101.325kPa. Press the “M” key to enter into the
change address screen. Press the “Left” or “Right” key to change, and then press the “M” key to
confirm. After the selection, press the “M” key to exit the MENU and return to the Main Display
screen.
5.4.5. Set the response time
Following the above-mentioned steps, at the MENU setting screen, press the “Left” or “Right” key
until the screen shows the “InTErVAL”
Currently, the default response time is 125 msec. Press the “M” key to enter into the change response
time screen. The following response time options are available: 250 msec, 500 msec, 1000 msec,
2000 msec, and 4000 msec. Press the “Left” or “Right” key to change, and then press the “M” key to
confirm. After the selection, press the “M” key to exit the MENU and return to the Main Display
screen.
5.4.6. Set Gas conversion factor (GCF) for different gas measurement
For the general purpose of the application, a gas conversion factor (GCF) can be applied to meter the
gas different from the default one or the one used for calibration. The GCF is determined by the
thermal calorimetric sensing principle as well as the meter fluidic dynamic design and the control
circuitry. Contact the manufacturer to obtain the values corresponding to the correct models.
Following the above-mentioned steps, at the MENU setting screen, press the “Left” or “Right” key
until the screen shows the “SET GCF”
The manufacturer’s GCF for air is 1000. Note: If the meter during purchase is ordered for a special
real gas calibration, contact the manufacturer before further proceeding. Press the “M” key to
enter the change option, and press the “Left” or “Right” key to change, and then press the “M” key
to confirm. After the selection, press the “M” key to exit the MENU and return to the Main Display
screen.
This GCF factor can also be used equivalent to the “K” factor to adjust the meter due to the system
deviations. Take 3 to 5 data points using your preferred reference meter, and perform the least
square fitting to identify the K factor, and input here to make the meter synchronize with your system.
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5.4.7. Set the communication protocol
Following the above-mentioned steps, at the MENU setting screen, press the “Left” or “Right” key
until the screen shows the “PrOTOCOL”
The meter communication can be operated as a single meter or multiple meters via RS485 Modbus
communication:
P0-000 –is a communication mode for a single meter.
P1-xxx or P2-xxx (xxx from 001 to 255) –is the RS485 Modbus communication for multiple meters.
Press “M” key to enter the change option, and press the “Left” or “Right” key to change, and then
press the “M” key to confirm. After the selection, press the “M” key to exit the MENU and return to
the Main Display screen.
5.4.8. Set the meter address
This function allows the user to set the meter address for multiple meter operations with RS485
Modbus. Following the above-mentioned steps, at the MENU setting screen, press the “Left” or
“Right” key until the screen shows the “SET Addr”
Currently, the default address is 255. Press the “M” key to enter into the change address screen. The
address available is from 001 to 255. Press the “Left” or “Right” key to change, and then press the
“M” key to confirm. After the selection, press the “M” key to exit the MENU and return to the Main
Display screen.
5.4.9. Change the default password
For data safety, it is recommended that the default password of 11111 should be changed when the
first use of this product.
Following the above-mentioned steps, at the MENU setting screen, use the “Left” or “Right” key to
enter the password change screen, and it will show the default password of 11111. Press “M” key to
enter the change option. Use the “Left” or “Right” and the “M” confirming key to enter the desired
one, and press the “M” key again to complete the task and exit.
Please keep the changed password in a safe yet accessible place. In case it is unrecoverable, please
contact the manufacturer to obtain a special password to access the meter MENU.
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5.4.10. Reset the offset
This function allows the user to reset the offset of the meter. Following the above-mentioned steps,
at the MENU setting screen, use the “Left” or “Right” key to enter the “OFFSET” option. Press the
“M” key to confirm and use the “Left” or “Right” to select “Yes” or “No” to change or keep the current
offset value, and then press the “M” key to confirm and then exit.
5.4.10. Reset the totalizer or accumulated flow rate
As the maximum value of the totalizer or accumulated flow rate that the internal register can have is
9999999, the register will stop accumulating once the value is reached. At this time, it is necessary
to reset this register. Following the above-mentioned steps, at the MENU setting screen, use the
“Left” or “Right” key to select “CLEAr ACC”. Press “M” key to enter the change option, and use the
“Left” or “Right” to select “Yes” or “No” to change or keep the current offset value, and then press
the “M” key to confirm and then exit.
5.4.11. Exit the MENU
At the MENU settings, use the “Left” or “Right” key to select the qUIT option and press the “M”
confirming key to exit the MENU settings and return to the Main Display screen.
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5.4.12. MENU key sequence for the settings
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