Siargo MF4700 Series User manual
Gas Mass Flow Meter
VB.2
Model MF4700
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Gas Mass Flow Meter
withMEMScalorimetricsensingtechnology
MF4700Series
User Manual
DocumentNo. 06‐2021‐M12EN
Issuedate: 2021.06
Revision: VB.2
SiargoLtd.
3100DeLaCruzBoulevard,Suite210
SantaClara,CA95054
USA
Tel:+1(408)969.0368
Email:[email protected]
©Copyright2021bySiargoLtd.
SiargoLtd.anditssubsidiariesreservetherighttochangethespecificationsand/ordescriptions
withoutpriornotice.Forfurtherinformationandupdates,pleasevisit:www.Siargo.com
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Attention!
Usewithcaution!
Pleasecarefullyreadthismanualpriortooperatingthisproduct.
Donotopenormodifyanyhardwarewhichmayleadtoirrecoverable
damage.
Donotusethisproductifyoususpectanymalfunctionsordefection.
Donotusethisproductforcorrosivemediaorinastrongvibration
environment.
Usethisproductaccordingtothespecifiedparameters.
Onlythetrainedorqualifiedpersonnelshallbeallowedtoperform
productservices.
Becautiousfortheelectricalsafety,evenitoperatesatalowvoltage,
anyelectricalshockmightleadtosomeunexpecteddamages.
Thegastobemeasuredshouldbecleanandfreeofparticles.Donotapply
thismeterforliquidmedium.
Donotapplyforanyunknownornon‐specifiedgasesthatmay
damagetheproduct.
Forremotedata,pleasebesurethemeterisproperlyconfigured.
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TableofContents
1.Overview..................................................................................................5
2.Receipt/unpackoftheproducts................................................................6
3.Knowingtheproducts...............................................................................7
3.1.Productdescription..............................................................................................................................7
3.2.Poweranddatacabledescription......................................................................................................7
3.3.Mechanicaldimensions.......................................................................................................................8
4.Installation..............................................................................................10
5.OperationandMENUdescription..............................................................12
5.1Checktheproductspecifications......................................................................................................12
5.2Checktheleakage..............................................................................................................................12
5.3Powerthemeteranddigitaldataconnection.................................................................................12
5.4MeterdisplayandMENUdescriptions.............................................................................................13
5.4.1.Meterdisplayandfunctionkeys..................................................................................................13
5.4.2.MENUfunctioninputsequence...................................................................................................14
5.4.3.Detaileddescriptionsofthefunctions.........................................................................................16
5.5RS485Modbuscommunicationprotocol.........................................................................................19
5.5.1.Hardwareconnection...................................................................................................................19
5.5.2.Communicationparameters........................................................................................................19
5.5.3.Frame...........................................................................................................................................20
5.5.4.Functioncodes.............................................................................................................................20
5.5.5.Registers......................................................................................................................................21
5.6Analogoutput(0.5~4.5Vdc).............................................................................................................24
6.Productselectionandorderinformation....................................................25
6.1Productselection...............................................................................................................................25
6.2Ordercontactandcustomersupport...............................................................................................25
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7.Technicalspecifications...........................................................................26
8.Technicalnotesfortheproductperformance.............................................27
8.1Measurementprinciple......................................................................................................................27
8.2Precautionsforthebestperformanceoftheproduct....................................................................27
8.2.1.Comparisonwithathirdpartyreferencemeter...........................................................................27
8.2.2.Particlecontaminationandfluidiccleanness...............................................................................28
8.2.3.Applytoadifferentgasmedium..................................................................................................28
9.Troubleshooting.....................................................................................29
10.WarrantyandLiability..............................................................................30
11.Servicecontact........................................................................................32
AppendixI:Productevaluationkit..................................................................33
AppendixII:Documenthistory.......................................................................34
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1. Overview
Allcontactinformationcanbefoundattheendofthismanual.
ThismanualprovidesessentialinformationfortheoperationoftheMF4700seriesofgasmassflow
metersforgeneral‐purposegasflowmonitorandcontrolapplications.Theproductperformance,
maintenance,andtrouble‐shootingaswellastheinformationforproductorder,technicalsupport,
andrepairarealsoincluded.
MF4700massflowmetersaredesignedforgeneralpurposepreciseindustrialgasprocessingmonitor,
orcontrol.Themeterseriescoverawidedynamicflowrangewithaworkingpressureratingofupto
1.0MPa,andatemperaturerangingfrom‐10to55°C.
ThemetersareoperatedwithSiargo’sproprietaryMEMScalorimetricmassflowsensorstogether
withthesmartcontrolelectronics.Thesensorsurfaceispassivatedwithsiliconnitrideceramic
materialstogetherwithawater/oilproofnano‐coatingforperformanceandreliability.Themeter
bodyismadeofeitheraluminumalloyorstainlesssteelthatisavailableforapplicationsofmostof
thegases.
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2. Receipt/unpackoftheproducts
Uponreceiptoftheproducts,pleasecheckthepackingboxbeforethedismantlementofthepacking
materials.Ensurenodamagesduringshipping.Ifanyabnormalityisobserved,pleasecontactand
notifythecarrierwhoshippedtheproductandinformthedistributorsorsalesrepresentativesifthe
orderisnotplaceddirectlywiththemanufacturer,otherwise,themanufacturershouldbeinformed
aswell.Foranyfurtheractions,pleaserefertothereturnandrepairsectioninthismanual.
Ifthepackingboxisintact,proceedtoopenthepackingbox,andyoushallfindtheproduct(either
themeterwithLEDdisplayorthemeterwithoutdisplayperyouractualorder).Thepoweradapter
and/ordatacableasshownbelowmayalsobefoundaccordingtoyouractualorder.
Figure2.1:MF4700flowmeterFigure2.2:FS4700flowmeterFigure2.3:datacable
Pleasecheckimmediatelyfortheintegrityoftheproductaswellasthepoweranddatacable,ifany
abnormalisidentified,pleasenotifythedistributor/salesrepresentativeormanufacturerassoonas
youcan.Ifanydefectsareconfirmed,anexchangeshallbearrangedimmediatelyviatheoriginal
saleschannel.(Note:theLEDdisplayshallnotbelighteduntilthepowercableispluggedin).This
usermanualshallalsoeitherbeincludedinthepackingboxorviaanonlinerequestforanelectronic
version.Inmostcases,thismanualshallbemadeavailabletothecustomerbeforetheactualorder.
ThestandardcablehasanAMPMODUMTE(5positions)compatibleconnectorwithalengthof0.5
meters.
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3. Knowingtheproducts
3.1. Productdescription
Figure3.1:MF4700partsdescription
3.2. Poweranddatacabledescription
Table3.1:MF4700pin/wireassignments.
ThestandardcablehasanAMPMODUMTE(5positions)
compatibleconnectorwithalengthof0.5meters.
Figure3.2:MF4700connectionandcable
Wire Color Definition
1BlueRS485B
2
Green
Analogoutput
3
Red
Powersupply,8
~
24Vdc
4
Black
Ground
5YellowRS485A
Meterbody
LEDdisplay(forsensoroption,nodisplay)
MENUkeys
Flowdirection
Statusindicators
Mechanical
connection
MENUkey
Electricalinterface
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3.3. Mechanicaldimensions
Figure3.3:FS/MF4701/03/08dimensions
Figure3.4:MF4712dimensions
ModelNH1H2H3
FS4701/03NPT1/8”,BSPT1/8”39.0 20.010.0
MF4701/03
NPT1/8”,BSPT1/8”43.024.012.0
FS4708NPT3/8”,BSPT3/8”43.024.012.0
MF4708NPT3/8”,BSPT3/8”47.024.012.0
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Figure3.5:MF4719dimensions
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4. Installation
Donotopenoralteranypartoftheproductwhichwouldleadtomalfunctionandirrecoverable
damage.Itwillalsoforfeitthetermsofthewarrantyandcauseliability.
Theproductatthetimeofshipmentisfullyinspectedforitsqualityandmeetsallsafetyrequirements.
Additionalsafetymeasuresduringtheinstallationshouldbeapplied.Thisincludes,butisnotlimited
totheleakageverificationprocedures,standardEDS(electrostaticdischarge)precautions,DC
voltageprecautions.Othertaskssuchascalibration,partreplacement,repair,andmaintenance
mustonlybeperformedbytrainedpersonnel.Uponrequests,themanufacturerwillprovide
necessarytechnicalsupportand/ortrainingofthepersonnel.
Therearenopreferreddirectionsfortheinstallation.Flowdirectionshouldbealignedwiththearrow
markonthemeterbody.Iftheflowingfluidmayhaveparticlesordebris,afilterisstrongly
recommendedtobeinstalledupstreamofthemeter.
Pleasefollowthefollowingstepstocompletetheinstallation:
a)Uponopeningthepackage,theproduct'sphysicalintegrityshouldbeinspectedtoensureno
visualdamage.
b)Beforeinstallationoftheproduct,pleaseensurethatthepipedebrisorparticlesoranyother
foreignmaterialsarecompletedremoved.
c)Closethemetervalvecompletely.
d)Duringinstallation,pleasemakesurenoforeignmaterials(suchaswater,oil,dirt,particles,etc.)
enteringintotheinstallationpipeline.
e)ConnectelectricalwiresperthewiredefinitioninTable3.2.Pleasebesureofthepowersupply
range(i.e.,8~24VDC)andpowersupplypolarization.Ifanadapterotherthantheonesupplied
bythemanufacturer,makesuretheadaptermeetsindustrialstandardsandhasallsafety
certifications.
f)Forthedatacommunicationwireconnection,pleasefollowthedescriptioninTable3.2and
makesurethatthewiresarecorrectlyconnectedtotheproperportsonyourdata
device/equipment.Pleasemakesurethedatacablemeetsindustrialstandardswithproper
shielding.
g)Oncetheexternalpowerissuccessfullyconnected,theLEDshouldbelightedupwiththeproper
informationdisplayedworkscorrectly.
h)Slowlyopenthevalve(s)ofthegassupplyifany,upstreamordownstream,orbothofthe
pipeline.Andthenslowlyopenthevalveofthemeter,themetershouldthenstarttomeasure
theflowinthepipeline.Note:becausethemeterhasalargedynamicalmeasurementrange,it
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couldbenormalifyouseethesmallinstantflowrateevenifthereisnoflowinthepipeline.If
thevalueconsistentlypresent,double‐checkthepipeleakageandthenresettheoffsetifyou
aresurethereisnoleakageorflow.
h)Thiswillconcludetheinstallation.
Cautions
a)Don'talteranypartsoftheproduct.
b)Ensuretheelectricalconnectionisproperlydonepertheinstructions.
c)Makesurenomechanicalstressesintheconnections.
d)Thestrongelectromagneticinterferencesourcesclosebyoranymechanicalshocksatthe
pipelinemayalsocreatemalfunctioningoftheproduct.
e)Slowlyopen/closevalvestopreventabruptpulseflowimpact.
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5. OperationandMENUdescription
5.1 Checktheproductspecifications
Beforestartingtousethisproduct,checktheproductspecificationsthatcanbefoundinthismanual
orthebasicinformationfromthedatasheetatthecompany’swebsitewww.Siargo.com.
ThedetailedproducttechnicalspecificationscanbefoundinSection7.Foraspecificapplication,
thepressureratingmustnotbehigherthanthesystempressuretobemeasured,andtheflowrange
shouldalsobewithinthespecifiedones.Inmostcases,theuseofahighfull‐scalerangedmeterfor
theverylowflowratemeasurementoftenresultsinerroneousdata.Thegastobemeasuredmust
alsobeconsistentwiththatspecifiedbytheproduct.Beparticularlycautiousaboutthesupplied
voltageindicatedinthespecification.Ahighervoltagemayleadtoirrecoverabledamage,anda
lowervoltagewillnotpowertheproductforanydesiredfunctions.
Forthebestperformanceoftheproduct,itisadvisedthatthegastobemeasuredmustbecleanand
freeofparticlesorotherforeignmaterials.
5.2 Checktheleakage
Checkgasleakagebeforeanymeasurement.Ifitisneeded,thepressurizednitrogenoraircanbe
usedfortheleakagecheck.
5.3 Powerthemeteranddigitaldataconnection
AlthoughthisproductcomplieswiththeCE‐requiredEMCregulations,italsorequirestheproductto
beusedaccordingtothestandardelectricaldevicepractice.Beforeconnectingthemeterwith
externalDCpoweroranAC‐DCadapter,makesurethesupplyvoltageiswithintherangeofthe
specifiedonesinSection7.BecautiousthatthestandardelectricaldeviceprecautionssuchasEDS
(electrostaticdischarge)andDCvoltageareobserved.Excessiveelectrostaticdischargemay
damagetheproduct.
Themanufacturer‐suppliedpoweranddatacablehavealockingfixture.Lockthecableandmake
sureitisproperlyengagingandwillnotbeaccidentallygotunplugged.
Half‐duplexRS485Modbusisusedfordigitaldatacommunication.Makesurethewiresareproperly
connectedatthereceiverside.
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5.4 MeterdisplayandMENUdescriptions
5.4.1.Meterdisplayandfunctionkeys
Figure5.1:MF4700displayandfunctionkeys
Themeterhasafront3‐keyboardfortheusertosetthedesiredfunctions,accessdata,andcheck
forthestatus.TheMenukey(M)isattheupperrightpositionthatallowstheusertoselectafunction
andconfirmationorotherrelatedactionsthatwillbedetaileddescribedintheMENUkeysequence
graphicpresentation.Twokeys(“Up”and“Down”)areusedtoselectthefunctions.ThetwoLED
lights(IandII)areusedfortheindicationofdisplaycontents.Forthedefaultinstantflowratedisplay,
bothofthesetwoLEDswillbeoff.Pleaserefertothedetailedinformationbelow.
ThedefaultinstantflowrateisSLPMwith4digits,oneofthedigitsisadecimal.Whentheflowrate
isabovethespecifiedflowrange,LEDIwillflashfortheflowratesabovetheupperlimit,andLEDII
willflashfortheflowratesbelowthelowerlimit.IfbothLEDsareflashing,thedisplayedvaluesare
incorrect.
Oncethepowerissuppliedandnoabnormalissuesareobserved,themeterisreadytoperformthe
measurements.WhiletheLEDdisplaystheinstantmassflowrate,theaccumulatedortotalizedflow
ratecanbeaccessedbypressthe“Up”or“Down”key.
(a)Wheninstantflowrateissccm,theaccumulatedflowrateisregisteredwith“standardcubic
centimeter”(scc),andthemaximumcanbe9,999,999.9scc,or“standardliter”(SL),andthe
maximumcanbe999,999.99SL.
(b)WheninstantflowrateisSLPM,theaccumulatedflowrateisregisteredwith“standardliter”
(SL),andthemaximumcanbe9,999,999.9SL,or“normalcubicmeters”(Nm3),andthe
maximumcanbe999,999.99Nm3.
Thefirstfourdigitsoftheaccumulatedflowrateareindicatedbythe“I”LEDlight,andthelastfour
digitsarerepresentedwhenthe“II”LEDlightison.The“I”and“II”LEDlightswillbeautomatically
switchedwhentheaccumulatedflowrateisdisplayed.Theaccumulatedflowratewillbe
automaticallysavedeverythreeminutes.Atthetimeofthepowerfailureorcut‐off,thevaluewill
berepresentingthelatestsavedones.
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5.4.2.MENUfunctioninputsequence
Attheflowmeasurement(main)display,pressthethreeMEMUkeys,itwillallowtheusertoperform
avarietyofsettingsoftheproduct.Thefollowinggraphdetailsthekeysequenceforeachfunction,
andsomedetailedexplanationsarefollowedafterthegraphicpresentation.
Figure5.2:MF4700menuflowchart
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Table5.1:On‐screencharactersandtheircorrespondingfunctions
On‐screencharacter SymbolFunctions
0.unL/LocUnlock/lockthekeyboard
1.oFF/onResettheaccumulatedflow
2.oFF/onResetorcalibratetheoffset
3.1…255
SettheModbusaddress
Available:1~255,
Defaultaddressis1.
4.1/2/5/10/
20/50/100Settheresponsetime
5.25/50/100/
200Setthedisplayrefreshrate
6.0…110
Settheupperflowratealarm
Available:0~110,meansof0%~110%
fullscale.
Defaultvalueis100,meansof100%full
scale.
7.0…110
Setthelowerflowratealarm
Available:0~110,meansof0%~110%
fullscale.
Defaultvalueis0,meansof0%fullscale.
8.0/1/2/3Setthedisplaydecimal
9.48/96/192/384
Setthecommunicationbaudrate
Available:48,96,192,384,meansofbaud
rate4800,9600,19200,38400.
Defaultvalueis384,meansofbaudrate
38400.
A.10…999
SettheGCF(gasconversionfactor)
Available:10~999,meansofGCF=100~
9990.
Defaultvalueis100,meansofGCF=1000.
b.0/1
Settheaccumulatedflowrateunit.
sccorSL(instantflowrateunitis
sccm);
SLorNm
3
(instantflowrateunitis
SLPM).
Note:Duringthisprocess,themeterwillcontinuetomeasuretheflowwithoutbeinginterrupted.
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5.4.3.Detaileddescriptionsofthefunctions
0) Keyboardsecurity
Thisfunctionallowstheusertodisablethekeyboardentryafterthemeterissetasdesired.It
willpreventanyaccidentalkeyentrythatmayalterthesettings.AttheMENU,select“lock”
tolockthekeyboard.
1) Resettheaccumulatedflowrate
(a)Wheninstantflowrateissccm,themaximumaccumulatedflowratethatcanbe
registeredbythemeteris9,999,999.9sccor999,999.99SL.(b)Wheninstantflowrateis
SLPM,themaximumaccumulatedflowratethatcanberegisteredbythemeteris
9,999,999.9SLor999,999.99Nm3.Oncethevalueisreached,theaccumulatingfunction
willstopprocessingthedata.Itisnecessarytoresettheregisterforthecontinuationofthis
function.
Usethisfunctionwithcautionasitwilldeleteallcurrentaccumulatedflowratedata.
2) Resetorcalibratetheoffset
Sometimesorafteralongtimeofuse(i.e.,over1yearofusage),thesensorsurfacecould
haveathindepositfromtheenvironmentifthegasisnotsuperclean.Dependingonthe
actualcase,thisdepositmightormightslightlychangethethermalsensitivityofthesensor
resultinginadriftoftheoffsetoratinyflowatthezeroflowinthepipeline.Usethisfunction
toresettheoffsetwillnothaveanimpactonthemeterperformanceifsuchanoffsetis
outsideofthe100:1calibratedrange.
Usethisfunctionwithcautionandmakesurethereisnoflowwhenexecutingthis
function,otherwise,itmayincursomeadditionalerrorstothemeasurement.
3) SettheModbusaddressofthemeter
UsethisfunctiontosettheRS485Modbusaddressofthemeter.Thissettingcanalsobe
doneviatheRS485communication.
4) Settheresponsetime
Usethisfunctiontochangetheresponsetimeofthemeter.Thedefaultoneis10msec.
Increasingtheresponsetimewillallowmoredataaverageandoutputastablerflowrateif
theactualflowratemayhavesomeundesiredfluctuation.
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Availableresponsetimeis10msec(4.1);20msec(4.2);50msec(4.5);100msec(4.10);200
msec(4.20);500msec(4.50),and1000msec(4.100)
5) Setthedisplayrefreshrate
Changethedisplayrefreshratewilljustalterthedisplayupdatetime,itwillhavenoimpact
onthemeter’smeasurement.Thedefaultrefreshrateis250msec.
Availablerefreshratesare:250msec(5.25);500msec(5.50);1000msec(5.100),and2000
msec(5.200).
6) Settheupperflowratealarm
Thisfunctionallowstheusertosetamaximumallowableflowrateabovewhichanalarmwill
betriggeredwithaflashingscreen.
7) Setthelowerflowratealarm
Thisfunctionallowstheusertosetaminimumflowratebelowwhichanalarmwillbe
triggeredwithaflashingscreen.
8) Setthedisplaydecimal
Theusercanusethisfunctiontoalterthedefaultonedecimaldisplay.Optionsarelisted
belowforeachflowrange:
Table5.2:decimaloptions
Flowrange
Decimaloptions
0~100,200,500sccm0,1
0~1,2,5SLPM 0,1,2,3
0~10,20,50SLPM0,1,2
0~100,200,300,500,800SLPM0,1
0~1000SLPM0
9) Setthecommunicationbaudrate
ThisfunctionallowsaMENUentryoftheRS485communicationbaudrate.
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10) SettheGCF(thegasconversionfactor)
Themeterisnormallycalibratedwithairat20°Cand101.325kPa.Whentheuserwantsto
setthestandardconditionsotherthanthespecifiedtemperatureorappliesthemeterfor
otherallowablegases(pleasecontactthemanufacturerforthelistofgases),itispossibleto
usethisgasconversionfactorfunctiontoensurethereadingsarecorrectanddesired.
ThedefaultvalueoftheGCFis1000(1.000).Forexample,ifonewantstoalterthestandard
temperatureto0°C,thefactorcanbecalculatedusingthegasequation:PV/T=constant:
GCF=1000xV(new)/V(20°C)=T(o°C)/T(20°C)=1000x273/293=932
Thenthegasconversionfactorwouldbe932.
Insomecases,theactualsystemmayhaveaconstantdeviationfromthatatthecalibration,
thisGCFcanalsobeusedtoadjust.Foradditionalinformation,pleasecontactthe
manufacturer.
11) Settheaccumulatedflowrateunit.
Wheninstantflowrateunitissccm,accumulatedflowrateunitcanbesettosccorSL;
WheninstantflowrateunitisSLPM,accumulatedflowrateunitcanbesettoSLorNm3.
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5.5 RS485Modbuscommunicationprotocol
ThedigitalcommunicationprotocolisbasedonstandardModbusRTUHalf‐plexmode
communicationprotocol.Amaster(PCorPLC)cancommunicatewithmultipleslaves(thecurrent
product)fordataexchangeandcommunicationparameterconfiguration.RefertoTable3.2for
cableconnection.
5.5.1.Hardwareconnection
TheRS485hardwarelayerisTIA/EIA‐485‐A,asillustratedbelow.Inthisconfiguration,theproduct
(MF4700)isaslave.
Figure5.3:RS485hardware
5.5.2.Communicationparameters
ThePCUARTcommunicationparametersarelistedintable5.3.
Table5.3:PCUARTcommunicationparameters
ParametersProtocol
RTU
Baudrate(Bitspersecond)
38400bps
Startbits1
Databits8
Stopbits1
Even/OddparityNone
Bitsperiod104.2µsec
Bytesperiod1.1458msec
Maximumdata
length
20
Maximumnodes247
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