Siargo LF3000 Series User manual

LF3000 series
Microfluidic Flow Meters
User Manual VA.0
@ 2022 Siargo Ltd.
www.Siargo.com

www.Siargo.com LF3000 User Manual 1 |
Microfluidic Flow Meters
with thermal time-of-flight technology
LF3000 Series
User Manual
Document No. 10-2022-LF2.1 EN
Issue date: 2022.10
Revision: VA.0
Siargo Ltd.
3100 De La Cruz Boulevard, Suite 210
Santa Clara, CA 95054
USA
Tel: [phone]
Email: [email protected]om
© Copyright 2022 and Liability Disclaimer
Siargo Ltd. and its subsidiaries reserve the right to change the specifications and/or descriptions
without prior notice. Siargo and its subsidiaries shall not assume any inaccuracy or errors in this
manual. For further information and updates, please visit www.Siargo.com.

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Attention !
Use with caution !
•Please carefully read this manual prior to operating this product.
•Do not open or modify any hardware which may lead to irrecoverable
damage.
•Do not use this product if you suspect any malfunctions or defection.
•Do not use this product for corrosive media or in a strong vibration
environment.
•Use this product according to the specified parameters.
•Only the trained or qualified personnel shall be allowed to perform
product services.
•Be cautious for electrical safety, and even it operates at a low voltage,
any electrical shock might lead to some unexpected damages.
•The liquid to be measured should be clean and free of particles, as
even light particles may be accumulated inside the tiny flow channel
that may result in inaccuracy in metrology, clogging, or other
irrecoverable damage.
•Do not apply for any unknown or non-specified liquids that may
damage the product.
•Be cautious for the bubbles or cavitation inside the fluid, visible or invisible
that may lead to inaccuracy or erroneous outputs.

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Table of Contents
1. Overview.................................................................................................. 5
2. Receipt / unpack of the products ................................................................ 6
3. Knowing the products ............................................................................... 7
3.1 Product description.............................................................................................................................7
3.2 Power and data cable description......................................................................................................7
3.3 Mechanical dimensions.......................................................................................................................8
4. Installation..............................................................................................10
5. Basic operation........................................................................................12
5.1 Check the product specifications .....................................................................................................12
5.2 Check the microfluidic system .........................................................................................................12
5.3 Check the leakage .............................................................................................................................12
5.4 Connect the power supply................................................................................................................13
5.5 Analog interface/measurement .......................................................................................................14
5.6 Digital interface/measurement........................................................................................................15
5.6.1 I2C communication protocol.........................................................................................................16
5.6.1.1 I2C interface connection diagram.................................................................................................16
5.6.1.2 I2C interface read/write sequences...............................................................................................16
5.6.1.3 I2C interface command description..............................................................................................17
5.6.1.4 CRC checksum calculation............................................................................................................17
5.6.2 RS485 Modbus communication protocol....................................................................................18
5.6.2.1 Hardware connection....................................................................................................................18
5.6.2.2 Communication parameters.........................................................................................................18
5.6.2.3 Frame..............................................................................................................................................19
5.6.2.4 Function codes...............................................................................................................................19
5.6.2.5 Registers.........................................................................................................................................19
6. Product selection.....................................................................................22
7. Technical specifications............................................................................23
8. Technical notes for the product performance.............................................24
8.1 Measurement principle .....................................................................................................................24

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8.2 Precautions for the best performance of the product....................................................................24
8.2.1 Particle contamination .................................................................................................................24
8.2.2 Presence of bubbles or cavitation................................................................................................24
8.2.3 Pressurized flow delivery..............................................................................................................25
8.2.4 Continuous operation ...................................................................................................................25
8.2.5 Measurement of non-conventional fluid.....................................................................................25
8.2.6 Product calibration........................................................................................................................25
8.2.7 Verification of the product’s accuracy or reproducibility...........................................................26
9. Troubleshooting ......................................................................................27
10. Warranty and Liability............................................................................. 28
11. Service contact and information ...............................................................30
Appendix I: Product evaluation kit.................................................................31
Appendix II: Document history.......................................................................32

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1. Overview
All contact information can be found at the end of this manual.
This manual provides essential information for the LF3000 series of flow meters and sensors for
microfluidic metering applications. The product performance, maintenance, and troubleshooting, as
well as the information for product order, technical support, and repair, are also included.
The LF3000 microfluidic flow meters and sensors are manufactured with the Company’s proprietary
MEMS (micro-electro-mechanical systems) thermal time-of-flight technology that offers high
precision at large dynamic ranges starting from 20 µL/min up to 500 mL/min, water equivalent. The
technology merits its temperature performance, fluidic property measurement, and fluidic
independent metering. The flow channel is readily connected with the standard 1/4"-28 or other
standard thread. The channel's wetted materials are tailored by Polyetheretherketone (PEEK),
Polyphenylsulfone, and silicon nitride only, which allows chemical and bio-compatibility.
Thermal time-of-flight sensing is achieved by modulating a thermal transmitter and acquiring the
modulated signals from the receivers at precise distances downstream. The predefined precise
distance, together with the measured heat transfer time, allows accurate flow rate measurement for
the interested fluids.
The products are packaged with either stainless steel (meters) house or aluminum alloy (sensors) in
a miniaturized footprint for durability, liquid proof, and easy installation for instrumentation or
manifold applications.
While the current packages are best for instrumentation, equipment, OEM, and/or laboratory
applications, the manufacturer also offers alternative customized packages. For some medical or
cross-contamination-sensitive applications, disposable options are available as well. For any other
forms of packages that are not described in this manual, please contact the manufacturer.
The default data interfaces include I2C or RS485 Modbus, and voltage output. Other options include
IO-Link or wireless data transmission. This variety of communication options covers most of the
current and near-future application requirements, and each or multiple can be requested upon order
from the manufacturer.

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2. Receipt / unpack of the products
Upon receipt of the products, please check the packing box before dismantling the packing materials.
Ensure no damages during shipping. If any abnormality is observed, please contact and notify the
carrier who shipped the product and inform the distributors or sales representatives if the order is
not placed directly with the manufacturer; otherwise, the manufacturer should be informed. Please
refer to the return and repair section in this manual for any further actions.
If the packing box is intact, proceed to open the packing box, and you shall find the product (either
the meter or the sensor formality per the actual order), together with the power and data cable, as
shown below.
Figure 2.1: LF3000 flow meter Figure 2.2: LF3000 flow sensor Figure 2.3: Power and data cable
Please check immediately for the integrity of the product and the power and data cable; if any
abnormality is identified, please notify the distributor/sales representative or manufacturer as soon
as possible. If any defects are confirmed, an exchange shall be arranged immediately via the original
sales channel. (Note: the OLED screen shall not be lit until the power cable is plugged in). This user
manual shall also be included in the packing box or via an online request for an electronic version. In
most cases, this manual shall be made available to the customer before the actual order.
Important: The basic specifications of the product are written in the 2D code at the back of the
product. Use a smartphone to read the information and verify your order before further
processing. If there are any questions or doubts, please contact the manufacturer or your sales
agent.

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3. Knowing the products
3.1 Product description
Note: For a full-scale flow rate over 50 mL/min, the fluidic channel connector can be fully customized,
the default will be NPT.
3.2 Power and data cable description
Table 3.1: pin assignment
Figure 3.1: LF3000 socket and cable
Pin
Color
Definition
1
Brown
Power supply, 8 ~ 24Vdc
2
White
SCL, I2C clock / RS485B (-)
3
Blue
Ground
4
Black
SDA, I2C data / RS485A (+)
5
Gray
Analog output 0.5 ~ 4.5 Vdc
Power &
Data port
Display
Inlet
Outlet
Installation thread
M2.5x4
Flow direction
Power &
Data port
Flow direction
Inlet
Outlet
Installation thread
M2.5x4
Flow direction

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3.3 Mechanical dimensions
Figure 3.3.1: LF3000 (0.2~50sccm full scale) meter dimensions
Figure 3.3.2:LF3000 (0.2~50sccm full scale) sensor dimensions

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Figure 3.3.3: LF3000 (100~500sccm) meter dimensions.
Figure 3.3.4: LF3000 (100~500sccm) sensor dimensions.

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4. Installation
Do not open or alter any part of the product, which would lead to malfunction and irreversible
damage.
To ensure the best performance of the products, it is suggested that the products should be installed
at a base that eliminates environmental vibration as much as possible. There are two pre-threaded
M2.5 ports at the bottom of the product, as described below. A flat metal plate is suggested to be
used as the holder before being fixed onto a solid base.
The product is preferable to be installed horizontally. If the vertical installation is a must, the fluid in
the tubing must be required to be filled, in particular at the measurement position.
After the product is correctly fixed to a vibration-free base, the flow channel can be connected with
the standard UNF 1/4"-28 connectors. Before connection, the tubing should be carefully checked for
its integrity and cleanness. There must be no particles, dirt, greases, or other foreign materials inside
the tubing. The connectors should also be free of any physical damage and clean without any visible
contamination. After the connection, the tubing should not be twisted, and it is preferable to be kept
straight or with fewer turns. If any turns must be present, each of the turns should be smooth without
sharp bending.
For models with a flow rate higher than 50 mL/min, the default will be NPT threaded ports, or the
other connections with full customization can be requested at the time of order. Make sure the flow
direction on the meter/sensor is observed. A bi-directional version of the product is possible upon
request from the manufacturer.
It is essential to ensure no bubbles inside the fluid for the product's best performance. It is highly
recommended that a de-bubbler should be installed before the flow meter/sensor.
The proposed installation schematics are shown in Figure 4.1.
Figure 4.1: Suggested installation.

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Note: Recommended connectors
1. IDEX-HS, P-647: Adapter, Barbed to Threaded Male, Tefzel™(ETFE), for use with Soft-Walled
Tubing, Each 1/4-28 Flat-Bottom Male, Tefzel™(ETFE), for 1/8” ID
2. IDEX-HS, D-648: Swivel Barb Adapter, for use with Soft-Walled Tubing, Polypropylene, Each For
1/8” ID
3. IDEX-HS, XP-305: Flangeless Fitting Delrin®, Green, 1/4-28 Flat-Bottom, for1/8" OD
4. IDEX-HS, XP-201: Flangeless Fitting Delrin®, Black 1/4-28 Flat-Bottom, for1/16" OD
P647 D648 XP-305 XP-201

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5. Basic operation
5.1 Check the product specifications
Before starting to use this product, check the product
specifications found in this manual or the basic information
located on the back panel of the product.
One can find the product information from this manual according
to the model as defined in Section 6. Alternatively, use any
optical scanner, such as those with a smart mobile device, to read
the 2D code on the label's basic product specifications. In
particular, the pressure rating must not be higher than the
system pressure of the fluid to be measured, and the flow range
should also be within the specified ones. In most cases, a high full-scale ranged meter for the low
flow rate measurement often results in erroneous data. The fluid to be measured must also be
consistent with that specified by the product. Be particularly cautious about the supplied voltage
indicated in the specification. A higher voltage may lead to irrecoverable damage, and a lower
voltage will not power the product for any desired functions.
5.2 Check the microfluidic system
For the product's best performance, it is advised that the fluid to be measured must be clean and free
of particles or other foreign materials. An upstream filter of 2μm pore size would be an example of
safe product usage from particle contamination. Before releasing the fluid to pass through the
product, recheck the tubing to avoid any twist or sharp bending, tighten the tubing fittings, and verify
the measurement fluid flow direction.
5.3 Check the leakage
Check leakage before any measurement. Pressurized nitrogen or air can be used for the leakage
check, particularly if the fluid is non-conventional.

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5.4 Connect the power supply.
Although this product complies with the CE-required EMC regulations, it also requires the product
to be used according to the standard electrical device practice. Before connecting the product with
the external power, ensure the standard electrical device precautions such as EDS (electrostatic
discharge) and DC voltage shall be observed. Excessive electrostatic discharge may damage the
product. Use only the power and data cable shipped together with the product. The cable comes
with a high-quality connector at one end to be plugged into the product, and the other end is with
wires for connections with options. Other manufacturer-shipped cables may lead to malfunctions if
not correctly made.
Plug the manufacturer-supplied cable into the meter or
sensor connector with the red dot aligned, as shown in
Figure 5.1. Please do not force the plug, or it may damage
the product.
The other end of the cable has 5 pre-soldered wire terminals
with different colors; refer to the above table for the connection information (the same as Table 3.2).
Take special care, connect ONLY the power to the BROWN power cord/wire, and ensure the power
supply is within the specified 8 ~ 24Vdc before switching the power on. In addition, the power supply
should be properly grounded, connecting the BLUE wire terminal to the ground on the power supply
or other safe system ground.
The product's power terminal has the incoming voltage internally filtered and regulated to power the
product circuitry. The product operates at a maximum current of less than 35mA, which is normally
available for most of the power supply.
The terminal Vout (Gray) is for analog data output from 0.5 to 4.5 Vdc, corresponding to the specified
flow range from zero to full-scale flow rate.
SDA (Black) and SCL (White) terminals are used for the I2C serial data line and serial clock line, which
provide digital data communication and the remote control of the product.
Pin
Color
Definition
1
Brown
Power supply, 8 ~ 24Vdc
2
White
SCL, I2C clock / RS485B (-)
3
Blue
Ground
4
Black
SDA, I2C data / RS485A (+)
5
Gray
Analog output 0.5 ~ 4.5 Vdc
8~24Vdc
power supply
only
Figure 5.1: Power and data cable
connection.

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Upon switching on the power supply, the meter OLED screen will be lighted up, and for the sensor
product, the status can be checked with the analog or digital interface.
5.5 Analog interface/measurement
After switching on the power supply, the OLED display screen will show two rows of data. The upper
row is the instant flow rate in ccm (mL/min), and the lower row is the totalized or accumulated flow
volume. The data are referred to the calibration condition at 20°C and 101.325 kPa. However, the
temperature effects are not measurable within the specified working conditions, and the fluid is
typically non-compressible.
Figure 5.2: The OLED display Figure 5.3: Analog output.
Unlike most traditional thermal flow meters, the current product does not require a warm-up time.
However, for the best performance, wait for the electronics to get stable for a few seconds. The
analog data can be acquired by connecting the analog terminal 4 (Gray). Figure 5.3 shows the
correlation of the analog reading with the flow rate. For example, if one orders a model of the full-
scale flow rate of 50 mL/min, then 0.50 Vdc corresponds to a zero flow rate, and 4.50Vdc corresponds
to 50 mL/min. For any given voltage output x (Vdc), the flow rate shall be (0.25x-0.125)*50 mL/min.
Beyond this specified range, the voltage could also be read, but the accuracy is not guaranteed, as
those are obtained by extrapolation (blue dashed line, maximum calibration to 110% full scale).
Another analog interface, such as 4~20mA, is also optional and can be requested by directly
contacting the manufacturer.

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5.6 Digital interface/measurement
The default digital interface for the current product is I2C or RS485 (Modbus). Another standard
digital interface, such as IO-Link, is also available by request.
The corresponding protocol and a special cable for each of the specified
digital interfaces are required. Please contact the manufacturer for
detailed information.
For the default I2C and RS485 (Modbus) digital interface, the
manufacturer also provides Microsoft Windows-based evaluation
software for simple operation and measurement tasks. Please contact
the manufacturer for detailed information.
For the default I2C digital interface, one can connect the SCL (Yellow, clock) and SDA(Blue, data)
terminals of the provided cable to the corresponding port of an I2C bus interface on the user’s
electronics and proceed with the tasks desired.
Alternatively, one can order the special cable from the manufacturer in which an I2C to USB port
converter is integrated, and therefore it can be plugged into the computer for programming.
The detailed instruction for coding and/or commands of the I2C protocol is described and listed
below for reference.
Figure 5.4: I2C interface connection

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5.6.1 I2C communication protocol
5.6.1.1 I2C interface connection diagram
5.6.1.2 I2C interface read/write sequences

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5.6.1.3 I2C interface command description
Please note the addition of the CRC in the protocol. If you are using an older version, you may need to update
your firmware for the current products.
Command
Byte
Length
(int 16)
Command Name
Read/Write
Notes
0x00A4
1
I2C address
Read/Write
Int 16.
Bit 0 is the R/W flag bit;
bit 1 ~ bit 7 are available;
bit 8 ~ bit 15 = 0.
The default I2C address is 1.
Hex: 0x0002 (write) /0x0003 (read),
Bin: 0000 0000 0000 0010 (write)
0000 0000 0000 0011 (read).
0x0030
6
Sensor serial number
Read
ASCII
0x003A
2
Flow rate
Read
Int 32 / 1000 mL/min
0x003C
3
Totalizer or
accumulated flow
rate
Read
(Int 32 + Int 16) / 1000 L
Accumulated flow rate
= Value (0x003C) * 65536 + Value
(0x003D) + Value (0x003E)/1000
0x00F0
1
Reset the offset of
differential pressure
Write
Fixed value, 0xAA55
0x00F2
1
Reset accumulated or
totalized flow rate
Write
Fixed value, 0x0001
0x00FF
1
Write protection of
selected parameters
Write
Fixed value, 0xAA55
Note: The I2C address is set to bit7 ~ bit 1, e.g., if the I2C address is 1 (0000 001x), the write address will be
0x02 (0000 0010) and the read address will be 0x03 (0000 0011).
5.6.1.4 CRC checksum calculation
The 8-bit CRC checksum transmitted after each two data bytes (int 16) is generated by a CRC
algorithm. Its properties are listed in the table below. To calculate the checksum, only these two
previously transmitted data bytes are used.
Property
Value
Name
CRC-8
Protected data
I2C read and write
Width
8 bits
Polynomial
0x07 (x8 + x2 + x + 1)
Initialization
0x00
Reflect input
False
Reflect output
False
Final XOR
0x00
Example
CRC(0x4E20) = 0x6D

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5.6.2 RS485 Modbus communication protocol
The digital communication protocol is based on standard Modbus RTU Half-plex mode. A master
(PC or PLC) can communicate with multiple slaves (the current product) for data exchange and
communication parameter configuration.
5.6.2.1 Hardware connection
The hardware layer is TIA/EIA-485-A, as illustrated below. In this configuration, the product
(LF3000) is a slave.
5.6.2.2 Communication parameters
The PC UART communication parameters are listed in the following table.
Parameters
Protocol
RTU
Baud rate (Bits per second)
9600 bps
Start bits
1
Data bits
8
Stop bits
1
Even/Odd parity
None
Bits period
104.2 µsec
Bytes period
1.1458 msec
Maximum data length
20
Maximum nodes
247

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5.6.2.3 Frame
The frame function is based on the standard Modbus RTU framing:
Start_bits
Address
Function codes
Data
CRC
Stop_bits
T1-T2-T3-T4
8 bit
8 bit
N 8 bit (20≥n≥0)
16 bit
T1-T2-T3-T4
Start_bits: 4 periods bit time, for a new frame.
Address: The address can be set from 1 to 255 except for 157 (0x9d). 0 is the broadcast address.
Function codes: Define the product (LF3000)’s functions/actions (slaves), either execution or response.
Data: The address of the register, length of data, and the data themselves.
CRC: CRC verification code. The low byte is followed by the high byte. For example, a 16-bit
CRC is divided into BYTE_H and BYTE_L. In the framing, the BYTE_L will come first, then
followed by the BYTE_H. The last one is the STOP signal.
Stop_bits: 4 periods bit time, for ending the current frame.
5.6.2.4 Function codes
The Modbus function codes applied for the product are the sub-class of the standard Modbus
function codes. These codes are used to set or read the registers of the product:
Code
Name
Functions
0x03
Read register
Read register(s)
0x06
Set single register
Write one single 16-bit register
0x10
Set multiple registers
Write multiple registers
5.6.2.5 Registers
The product (LF3000) has multiple registers available for the assignment of various functions. With these
functions, the user can obtain the data from the products, such as product address and flow rates from the
registers, or set the product functions by writing the corresponding parameters.
The currently available registers are listed in the following table, and the registers may be customized upon
contacting the manufacturer. Where R: read; W: write-only; W/R: read and write.
Note: At the time of shipping, the write protection function is enabled except for address and baud
rate. Once the user completes the register value change, the write protection will be automatically
enabled once again to prevent incidental data loss.