Siargo MF4600 Series User manual

MEMS Mass flow Meter
MF4600 series
SIARGO LTD.
Direct mass flow measurement with high accuracy
Multiple sensing elements for extended rangeability over 100:1
Easy remote accessible user interface with RS485 Modbus and/or linearized analog data
Bright LED display for instant and accunulated flowrate with on-site access via front buttons
Record flowrate patterns with over range indication
Easy for remote communication and integration
Compatible with traditional rotameter mechanical connections
Flow range and mechanical dimensions can be fully customized
(VA.9)
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Features
MF4600 series mass flow meters are made with Siargo’s proprietary MEMS sensing
technology. It applies for clean and dry gas metering and control. The meter is designed
with the structure of a rotameter but with the full capability of a digital gas mass flow
metrology and LED display. Both instant and accumulated flowrate can be read and
displayed. The front buttons let user to access and adjust the parameters as well as stored
data. The standard RS485 Modbus enables the remote access and integration.
Introduction
User manual
Please read this manual for ensuring correct use of
this product. Make the manual available for easy access.
ISO 900 1
ISO 140 01 GB/T 2 800 1

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Specifications Flow Characteristics
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Flow Rate (sccm/SLPM) Analog Output (Vdc)
Anglog Output Characteristics
00.5
0.2Qmax 1.3
0.4Qmax 2.1
0.6Qmax 2.9
0.8Qmax 3.7
Qmax 4.5
1.1Qmax 4.9
1.2Qmax 4.9
Flow Rate (sccm/SLPM) Digital Output (Vdc)
Digital Output Characteristics
0
0.2Qmax
0.4Qmax
0.6Qmax
0.8Qmax
Qmax
1.1Qmax
1.2Qmax
0
0.5
1.0
1.5
2.0
2.5
3.0
3.5
4.0
4.5
5.0
0 0.2X 0.4X 0.6X 0.8X 1.0X 1.2X
Analog output (Vdc)
Massflowrate(Qmax)
0
0.2Qmax
0.4Qmax
0.6Qmax
0.8Qmax
Qmax
1.1Qmax
1.1Qmax
0
0.2X
0.4X
0.6X
0.8X
1.0X
1.2X
0 0.2X 0.4X 0.6X 0.8X 1.0X 1.2X
Digital output (Qmax)
Massflowrate(Qmax)
Parameters MF4601 MF4603 MF4608 Units
0 ~ 100, 200, 500 sccm
0 ~ 1, 2, 5 0~10, 20, 50 SLPM
Rangeability 50:1
Accuracy ±(2.5+0.5FS) %
Repeatability ±0.8 %
Offset stability 0.1 %FS
Span stability ±0.12 %/°C
Response time 10 (default, can be changed via button) msec
Power supply 8~24Vdc, 50mA max.
Output Analog, RS232/RS485 (Modbus)
Display L ED with 2 indicators
Display units
- Instant flow: sccm SLPM SLPM
-Accumulated flow: SL Nm3 Nm3
Resolution 0.1 or 1sccm 0.001, 0.01, 0.01, 0.1
Selectable 0.1 or 1SLPM or 1SLPM
(Default) 1sccm 0.01SLPM 0.1SLPM
Pressure loss 100 Pa
Max pressure 0.5 M Pa
Temperature -10 ~ +55 °C
Storage -20 ~ +65 °C
Humidity <95%RH, no condensation
Mechanical NPT or BSPT
Key board 3 keys
Electrical 5 pins, CD R-5
Calibration Air (20°C, 101.325 kPa)
Maximum overflow 3 30 200 SLPM
Maximum flow change 0.5 4 30 SLPM/sec
Flow Range

0
10
20
30
40
50
60
010 20 30 40 50
Pressure drop (kPa)
Mass flow rate (SLPM)
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Dimensions
L1
H1
L2
N*
L3
MF4601 (100, 200, 500 sccm)
MF4608 (10, 20, 50 SLPM) 64
L1
70
L2
90
H1 N*
MF4603 (1, 2, 5 SLPM) 60 66 94 2-N1, 2-N2, 2-R1 or 2-R2
2-N2, 2-N3, 2-R2 or 2-R3
* N1 - NPT 1/8, N2 - NPT 1/4, N3 - NPT 3/8, R1 - BSPT 1/8, R2 - BSPT 1/4, R3 - BSPT 3/8.
42
L3
38
Pressure Drop
0
200
400
600
800
1000
1200
1400
1600
1800
2000
0100 200 300 400 500
Pressure drop (Pa)
Mass flow rate (sccm)
0
1
2
3
4
5
6
7
1 2 3 45
0
Pressure drop (kPa)
Mass flow rate (SLPM)
Flow Rate (sccm) Presure Drop (Pa)
FS4601
00
100 270
200 550
300 880
400 1300
500 1850
Flow Rate (SLPM) Presure Drop (kPa)
FS4608
00
10 2.0
20 7.8
30 17.5
40 35.0
50 57.5
Flow Rate (SLPM) Presure Drop (kPa)
FS4603
00
10.4
21.2
32.4
4
4.2
56.5

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User Manual
Please check the items in the package upon opening the box:
1) The package should contain the followings
a) MF4600 mass flow meter 1
b) Electrical cable 1
c) QC certificate 1
2) Make sure no mechanical damages or visual damages;
3) Connect the electrical cable according to the pin definition;
4) Connect power supply and warm up for 2 minutes before use.
Installation
Description
Electrical interface
Down key Up key
Flow direction
Function light
Mechanical connector
LED display
Function key
Manual adjustable valve
Product selection
Gas (A - air; B - N O; C- CO ; N - N ; O - O ; R - Ar;
2 2 2 2
for other gases, please contact Siargo)
2
Max. Flow Rate (MF4601 - 100, 200 or 500 sccm;
MF4603 - 1, 2 or 5 SLPM;
MF4608 - 10, 20 or 50 SLPM)
MF46
3
Output ( V - Analog, BV - Both analog and RS485,
CV - Both analog and RS232)
1, 1/8, N2 - NPT 1/4, N3 - NPT 3/8, R1 - BSPT 1/8, R2 - BSPT 1/4, R3 - BSPT 3/8;N1 - NPT
2 100, Max. flow rate number only, for example, 100 meaning full scale flow rate of sccm.
5 meaning full scale flow rate of 5 SLPM);
3, The meter shipped with standard analog output. RS232/RS485 is optional.
DN (Pipe inner diameter: 01, 03 or 08, unit is mm)
1
Connection (MF4601/MF4603 - N1, N2, R1 or R2;
MF4608 - N2, N3, R2 or R3)
1 Blue RS485B / RS232 Transmit (TX)
2 Green Analog output
3 Red VCC, Power + (8 ~ 24Vdc)
4 Black GND, ground - (power/signal)
5 Yellow RS485A / RS232 Receive (RX)
Pin definition
Pin Color Definition

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Display
Sampling
4.001 4.002 4.005 4.010 4.020 4.050 4.100
10ms 20ms 50ms 100ms 200ms 500ms 1000ms
Display
Update
5.025
250ms
5.050
500ms
5.100
1000ms
5.200
2000ms
The Menu Settings will allow the user to execute keyboard lock/unlock, reset accumulated
flowrate, reset offset, set time, response time, instant flow decimal point etc.
Keyboard lock
This function shall prevent unintended changes of the parameters by press the keyboard.
When keyboard is locked, the menu function is disabled.
Accumulated flowrate reset
This function shall reset the accumulated flowrate, and the meter will re-start from null.
Offset reset
This function shall reset the offset which may be due to drift after a certain period of
performance. It shall help for improving accuracy. Note: When performing offset reset,
make sure there is no flow in the meter otherwise it will have impact to the accuracy.
Sampling time
This function allows user to set the sampling time between analog output and digital
output via the serial port. Once the setting is done, it will be immediately effective but the
settings will only be saved into the EEPROM after switch to another function.
Display update time
This function allows the user to set the display update time of the meter. Once the setting
is done, it will be immediately effective but the settings will only be saved into the EEPROM
after switch to another function.
Peak-valley values reset
This function allows user to reset the peak value to null.
Reset to factory default value
This function allows user to reset all parameters to factory default values.
Menu settings
The meter shall display instant, accumulated and
peak-valley flowerate. The indication light shall be
lighted accordingly. Please see the detailed
description below.
Operation
Instant flowrate display
1. Instant flowrate is a default display mode, both LED (I and II) will be off.
2. Instant flowrate is displayed by 4 LED digit with a decimal, the unit is SLPM
3. When the instant flowrate is over the allowed range, I-LED (over max) or II-LED (below
min) will be flashing.
4. If I-LED and II-LED flash at the same time, it indicates that the actual flowrate is over the
calibrated range or the display value is incorrect.
Accumulated flowrate display
1. The accumulated flowrate is displayed by 8 digits that is separated with two 4 digit
display where I-LED indicates the first 4 digits and II-LED indicates the last 4 digits. The
units is SL.
2. The accumulated flowrate can be reset via the keyboard.
NOTE: The flow accumulation will be saved every 3 minutes. For instance:
Ÿ The flow accumulation will not be saved if power off @ 2 minutes.
Ÿ The flow accumulation will be the value of 33 minutes if power off @ 34 minutes.
Peak-Valley flowrate retrieval
1. The data of the last registered peak-valley flowrate can be retrieved via the keyboard.
2. When the peak flowrate value is displayed and flashed, the I-LED will light.
3. When the valley flowrate value is displayed and flashed, the II-LED will light.
Acc. Flowrate
last 4digits
(LED on)
Instant Flow
Rate
Acc. Flowrate
1st 4digits
(LED on)
Auto switch
Peak flow rate
(LED flashing)
Valley flowrate
(LED flashing)
I-LED on II-LED on
Push and keep for
more than 2sec
Push
/
/
Push
Fn
I-LED on II-LED on
Operation Mode
Power
on
Push

RS232/RS485 communication
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Decimal setting for instant flowrate
This function allows user to set the decimal point of instant flowrate.
Note: (1) When full scale flowrate is 100, 200 or 500 sccm, 0 or 1 decimal can be set.
e.g. 123 or 123.4 sccm, default setting is 0 decimal;
(2) When full scale flowrate is 1, 2 or 5 SLPM, 0, 1, 2 or 3 decimals can be set.
e.g. 1 SLPM, 1.2 SLPM, 1.23 SLPM or 1.234 SLPM, default setting is 2 decimals;
(3) When full scale flowrate is 10, 20 or 50 SLPM, 0, 1 or 2 decimals can be set,
e.g. 12 SLPM, 12.3 SLPM or 12.34 SLPM, default setting is 1 decimals.
For purposes of computer control and networking, the RS232/RS485 is used for
communication with the following settings:
Baud rate (Bits per second): 38400
Date bits: 8; Stop bits: 1;
Parity: None; Flow control: None.
The protocol is based on the standard Modbus communication protocol. RS232
model supports single meter communication, and RS485 model supports either
single meter communication or multi-meter networking.

MENU SETTING MODE
Keyboard
Unlock
0.unL(Blink)
Instant Flow
Rate
(LED Display)
Push and keep for
more than 2 sec
Keyboard
Locked
0.Loc(Blink)
Keep the Flow
Accumulation
1.oFF (Blink)
Clear the Flow
Accumulation
1.on(Blink)
Flow
accumulation
Zeroing
Donđt perform
offset calibration
2.oFF (Blink)
Perform Offset
Calibration
2.on(Blink)
Automatic offset
calibration
Response
time=10ms
4.001(Blink)
Response
time=20ms
4.002(Blink)
Response
time=50ms
4.005(Blink)
Response
time=100ms
4.010(Blink)
Response
time=200ms
4.020(Blink)
Display refresh
time =250ms
5.025(Blink)
Display refresh
time =500ms
5.050(Blink)
Display refresh
time =1s
5.100(Blink)
Display refresh
time =2s
5.200(Blink)
Keep Max ./Min.
Flow Rate
6.oFF (Blink)
Clear Max ./Min.
Flow Rate
6.on(Blink)
Clear Max ./Min.
Flow Rate
Keep current
Setting
7.oFF (Blink)
System default
retrieval
7.on(Blink)
System default
retrieval
No decimal
digits
8. 0(Blink)
Decimal digits =1
8. 1(Blink)
Decimal digits =2
8. 2(Blink)
Decimal digits =3
8. 3(Blink)
Push
Push
Push
Push Push
Push
Push
Push
Push
Push
Push
Push
Push
Push
Push
Push
Push
PushPushPush
Push Push
PushPush
Push
Push
PushPush
Push
Push
Push Push Push
Push
Push
Push
Push
Push
Response
time=1000ms
4.100(Blink)
Push
Push
Push
Response
time=500ms
4.050(Blink)
1. Hardware connection
MF4600 protocol is based on standard Modbus RTU mode. A master (PC or PLC) can
communicate with several slaves (MF4600), setting parameter or getting data.
The hardware layer is TIA/EIA-485-A. The connection is as below:

3. Frame
The framing function is accord with The Standard Modbus RTU framing, which is
shown as below:
Start_bits: 4 periods bit time, to indicate a new frame.
Address: The address, can be set as 1 to 247, 0 is broadcast address.
Function code: Define the action that MF4600 should takes, or indicate that which
code the MF4600 is responding.
Data: Including the address of register, length of data and the data.
CRC : CRC verify code, the low byte is flowed by high byte. For example, the
16bit CRC code is divide as BYTE_H BYTE_L, in the frame, the
BYTE_L goes first, then the BYTE_H, at last, is the stop signal.
Stop_bits: 4 periods bit time，to indicate that the current framing is over.
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2. Communication parameter
The UART parameter is shown as below table:
Protocol
RTU
38400 bps
1
8
1
None
104.2 μs
1.1458 ms
20
247
Communication parameter
Baud rate(Bits per second)
Start bits
Data bits
Stop bits
Even/Odd parity
Bits period
Bytes period
Maximum data length
Maximum Node
4. Function code
MF4600 Modbus Function-code is a subclass of Standard Modbus Function-code. By using
these function-code, We can set or read the registers of MF4600.
They are shown as below table:
Start_bits Address Function
code Data CRC Stop_bits
T1-T2-T3-T4 8Bit 8Bit N 8Bit
(20≥N≥0) 16Bit T1-T2-T3-T4
Code Name Action
0x03 Read register
0x06 Set single register
0x10 Set multi registers
Read register (one or more)
Write one single 16 bit register
Write multi registers
Name Description Register Modbus
Address The address of FS4000 (W/R) 0x0001 40002
Flow Rate The current flow rate (R) 0x0002～0x0003 40003
Total The accumulative total of flow rate (W/R) 0x0004～0x0006 40005
Baud Rate The communication band rate (W/R) 0x0015 40022
GCF Gas correction factor (W/R) 0x0016 40023
Response time Response time setting (W/R) 0x0017 40024
Filter depth Filter depth (W/R) 0x0018 40025
Offset Calibration Calibrate the offset (W) 0x0027 40040
Write-protect Write-protect for some parameters setting (W) 0x0014 40021
5. Registers
MF4600 has several registers. We can get the information (such as “address”, “flow rate” and
so on) form reading these registers, or we can write into some of the registers for setting
parameters of MF4600.
The registers are shown as below table:
* R-read only, W/R-write and read.

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Description
Detail
WRITE A
READ A
GCF 0x0016
The gas correction factor.
UINT16
The value is 1000 time of the gas correction factor.
The default value is 1000.
Example: The GCF of air is 1.0, you can get “1000” from register 0x0016.
Description
Detail
WRITE A
READ A
0x0017
UINT16
Value
type
Value
type
Response time
Response time.
The default value is 10.
10, 20, 50, 100, 200, 500 or 1000 ms.
Note: Need to set write-protect.
Example: When you get “10” from register 0x0017, the response time is 10 ms.
Flow meter
Address
Description
0x0001 WRITE A
READ A
The address of MF4600 in modbus protocol
UINT16
Detail Value from 1 to 255 except 157 (0x9d).
Flow Rate
Description
0x0002 ~ 0x0003
WRITE N
READ A
The current flow rate
UINT16
Detail
Flowrate=[value(0x0002) * 65536+value(0x0003)]/1000
Example: When we get “0” from register 0x0002 and “20340” from
register 0x0003.
Flowrate = (0*65536+20340)/1000= 20.340
0 is broadcast address.
Value
type
Value
type
Description
Detail
V1 = value (0x0004) * 65536 +value (0x0005); V2 = value (0x0006)
Total = (V1 *1000 + V2)/1000;
Example: When the LCD shows 3452.245NCM, we can get “0” from
register 0x0004, “3452” from register 0x0005, “245” from
Total =(3452*1000 + 245) /1000=3452.245
register 0x0006. Then, V1 = 0*65536 + 3452; V2= 245;
Total 0x0004 ~ 0x0006 WRITE A
READ A
The accumulative total of flow
UINT32 + UINT16
Description
Detail
WRITE A
READ A
Baud Rate
0: 4800, 1: 9600, 2: 19200, 3: 38400. The default value is 3.
Example: When you get “3” from register 0x0015, the baud rate is 38400.
The communication baud rate
UINT16
0x0015
Value
type
Value
type
Filter depth.
Offset Calibration
Calibrate the offset
Set the fixed value 0XAA55 to register 0x0027.
Note: Please ensure there is NO flow in the pipeline.
Write-protect
Write-protect for GCF, response time and filter depth. Single effective.
Filter depth
Description
Detail
WRITE A
READ A
0x0018
UINT16
Value
type
0 and 4~255. The default value is 0.
Note: Need to set write-protect.
Example: When you get “8” from register 0x0018, the filter depth is 8.
Description
Detail
WRITE A
READ N
0x0027
UINT16, Fixed value 0XAA55
Value
type
Description
WRITE A
READ N
0x0014
UINT16, Fixed value 0XAA55
Value
type
Detail
Example: When you want to set response time, you need to set fixed
value 0xAA55 to register 0x0014.
Note: Need to set write-protect.

Wetted Materials and Compatibility
The meter body is made of polycarbonate and 316 stainless steel. The sensor chip
comprises of silicon, silicon nitride and silicon dioxide and the sensor chip surfaces
are passivated with silicon nitride and silicon dioxide. The electronic sealing is
provided by 201-A/B-90 epoxy. Other wetted materials may be exposed are 84-3J
wire sealant and FR-4 fiber glass.
Safety Precautions
The product is designed for use with general purpose gases such as air and
nitrogen. It is advised that the products are best used for non-explosive clean
gases. The meters cannot be used for gas metrology of fluoride or fluoride
containing gases. For updates of the product certification information, please
contact manufacturer or visit www.Siargo.com. Use for other gases such as
extreme corrosive and toxic may cause the product malfunctioning or even severe
damages. The product sealing is ensured to work under working pressure of 60 psi
and is leakage proof before the shipment. But cautions and further leakage test are
important at installation as well since any leakage could cause severe safety issue.
The power supply for this product requires a voltage supply of 8-24 Vdc, all
precautions and measures for electrical voltage handling must apply.
Attention: Any alternation and/or improper use of the product without the
permission of the manufacturer can cause unpredicted damages and even injuries
or other severe situations. Siargo Ltd. or any of its employees, subsidiaries shall
not be hold and indemnified against such consequences due to such circumstances
via improper use of the product.
All maintenance of the product should be done by trained and certified personnel
by Siargo Ltd.
For further information, please contact the manufacturer.
Safety and Warranty
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Siargo shall guarantee its product quality and ensure the quality assurance in its
entire manufacture process. For any questions or technical support, please contact
at the following address and we shall response timely.
Headquar ter s
Siargo Ltd.
3100 De La Cruz Boulevard, Suite 210,
Santa Clara, California 95054,USA
Phone: [phone]
Email: [e-mail]
Representative in US
Servoflo Corporation
75 Allen Street,
Lexington, MA 02421, USA
Phone: [phone]
Email:[email protected]om
Representative in Japan
Marubeni Information Systems Co., Ltd.
Device Solutions Department
14th Floor, Shinjuku Garden Tower,
3-8-2, Okubo, Shinjuku-ku, Tokyo 169-0072, Japan
Phone: [phone]
Fax: [phone]
Email: [e-mail]
Customer service and Contact
Siargo commits to be in compliance with the environmental regulations. This
includes all package materials. Please dispose the corresponding materials by it
categories, such as wood, paper, plastics. For the disposal of the entire product,
please follow the electronics disposal regulations and laws.
Environmental compliance
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Representative in Europe
IDENTIC GmbH
In der Siedlerruh 24
69123 Heidelberg / Germany
Phone: [phone]
Fax: [phone]
Email: [e-mail]