Siargo MFFD series User manual

© 2013 Siargo Ltd.
SIARGO MEMS FLOW SENSING PRODUCTS
MFFD/MFFE/MFI series
MEMS Mass Flow Meters
User Manual
Länna,S-14250SKOGÅS Ordertel 08-771 00 04 Växel 08-771 02 20 Email [email protected]
Stockholm,Sweden Orderfax 08-771 62 00 Teknisk 08-771 35 80 Internet www.hemomatik.se
HM-1404

MEMS Mass Flow Meters
MFFD/MFFE/MFI Series
User Manual
Document No.07-2013-2 EN
Issue date: 2013.07
Revision: B.1
Siargo Ltd.
2041 Mission College Boulevard
Suite 250
Santa Clara, CA 95054
USA
Tel: [phone]
Email: [e-mail]
© Copyright 2013 by Siargo Ltd.
Siargo Ltd. and its subsidiaries reserve the rights to change the specifications and/or
descriptions without prior notice. For further information and updates, please visit:
www.Siargo.com
Länna,S-14250SKOGÅS Ordertel 08-771 00 04 Växel 08-771 02 20 Email [email protected]
Stockholm,Sweden Orderfax 08-771 62 00 Teknisk 08-771 35 80 Internet www.hemomatik.se

1www.Siargo.com
Introduction
The MF series MEMS mass flow meters are the second generation products
on Siargo's proprietary sensor technology and control circuit technology. These
meters offer a higher standards of intelligent all-electronic mass flow technology.
With the smart software well tested for various applications, the MF series MEMS
mass flow meters achieve high sensitivity, large dynamic range, and high accuracy.
The MF series MEMS mass flow meters incorporate a number of advanced
techniques such as multiple-compensation scheme, noise reduction solution,
multiple signal outputs, and network management feature.
The MF series MEMS mass flow meters can be used for general purpose gas
metering in industry or commercial applications. The user shall observe the general
guidelines in the meter applications in accordance with the safety and other
metrology requirements. It is advised that the user must read this user manual
carefully before processing to field applications. It is mandatory to follow the
instruction of the for installation and operation requirements to ensure the meter
can work properly without malfunctions or even damages.
based
Declarations
Do not alter any software and hardware of the product.
Do not use the product if any suspect for malfunction or damage.
Do not use this product in any corrosive gas environment.
Observe all requirements in accordance with the product specifications.
Only qualified personnel from Siargo or a person who is accredited by Siargo
can perform troubleshooting or service to the product.
1.
2.
4.
3.
MEMS Mass Flow Meter User Manual
5.

2
MEMS Mass Flow Meter User Manual
Introduction
1 Usage and Safety
2 Overview
2.1 Siargo's MEMS Thermal Mass Flow Sensor Technology
2.2 Siargo's MEMS Thermal Mass Flow Meter
3 Working Principle
3.1 Working Principle
3.2 Volume Flow vs. Mass Flow
4 Product Model Selections
4.1 In-line Meters
4.2 Insertion Meters
5 Product Configuration
5.1 In-line Meters
5.2 Insertion Meters
6 Product Specifications
6.1 Physical Dimensions of In-line Meters
6.2 Physical Dimensions of Insertion Meters
6.3 Flow Range of In-line Meters
6.4 Flow Range of Insertion Meters
6.5 Environmental Conditions
6.6 Medium Conditions
6.7 Electrical Specifications
6.8 Other Specifications
7 Installation
7.1 Description of Parts in Package
7.2 Installation Preparation
7.3 Installation Procedure of In-line Meters
7.4 Installation Procedure of Insertion Meters
7.5 Power Up
7.5 Caution Notes on Installation
8 Display and Functions
8.1 Display
8.2 Access Points and User Interface
8.3 Real time display of both flow rate and accumulated volume
8.4 RS485 data communication protocole
8.5 4~20mA Connection
8.6 Pulse Output
8.7 Automatic stored data
8.8 Buttons
9 Safety and Maintenance
9.1 Wetted Materials and Compatibility
9.2 Safety Precautions
10 Maintenance
10.1 Calibration
10.2 Maintenance
11 Warranty
12 Troubleshooting
13 Storage
13.1 Storage
13.2 Transportation
14 Customer Service and Order information
Contents
1
3
3
4
5
6
7
10
15
18
18
19
19
20
20
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3
1. Usage and Safety
a) The product can be utilized to measure in-line mass flow rate of any relatively clean, single-element gas
or multiple-element gas mixture with a relatively constant concentration profile during gas
measurement, monitoring, or flow control in industrial and commercial applications. If the product is
used for a special gas condition other than listed in above, the product may not function properly or even
can be damaged. Please contact Siargo for special requirements.
b) The operational ranges of the product are illustrated in the section of product specifications. If the product
is used for a special operational condition other than listed in the product specifications, the product may
not function properly or even can be damaged. Please contact Siargo for special requirements.
c) Operation, installation, storage, and maintenance of the product must closely follow the instructions of
this user manual. Otherwise, unpredicted damage and even injuries or other severe situations could be
caused. All the installation, storage, and maintenance of the product must be performed by skilled
workers. This user manual should be placed near the product for easy access.
d) Before using the product, the user should read this user manual completely and in details so that the user
can memorize all the important instructions.
e) It is recommended that the product should be re-calibrated and maintained in every two years or at a
desired time if required.
2. Overview
2.1 Siargo's MEMS Thermal Mass Flow Sensor Technology
Siargo's proprietary MEMS mass flow sensor technology provides accurate in-line flow measurement with
the availability of customer-specified packages. The sensor is manufactured using Siargo's unique MEMS
process that ensures high reliability. The sensors can measure air flow as low as 5 mm/sec and as high as
75m/sec. Depending on the applications, the sensors can be used to measure mass flow, volume flow or
media flow speed. The specially designed circuitry provides amplification as well as small signal processing
capability.
Siargo's flow sensors utilize the thermal mass flow technology using energy balance design. Unlike the other
MEMS flow sensing technologies, Siargo's flow sensors have multiple sensors integrated on a single silicon
chip. The surface of the chip is passivated with ceramic materials of high thermal conductivity to ensure the
sensor's sensitivity. Siargo's sensor package has its flexibility that significantly expands the applications of
the technology.
2.2 Siargo's MEMS Thermal Mass Flow Meter
Siargo's gas meters feature the state-of-the-art electronics that provides a much larger rangeability than
those for most of the thermal mass flow meters using the traditional sensing technology:
Integrated silicon MEMS flow sensors
Measures mass, volume flow and flow speed
Large rangeability over 200:1
Measures flow speed up to 75 m/sec
High stability at full scale
High accuracy and repeatability at full scale
Low power consumption
Low pressure loss
Fast response time
Small form factor
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MEMS Mass Flow Meter User Manual

3. Working Principle
Siargo's proprietary MEMS flow meters utilize the insertion sensing approach that can measure gas flows in
a large pipe. The MEMS flow sensor integrates a micro heater, local temperature sensors and environmental
temperature sensors onto a single package. At the no flow, a stable temperature field (distribution) around
the micro heater is maintained. When the flow media passes through the sensor chip, the temperature field
will be forced to change as the flow media will carry away the heat from the micro heater causing the
redistribution and variation of local temperature. Such a change of the local temperature will depend on the
media's mass as well as the media's flow speed. The sensors integrated on the silicon chip will then measure
such temperature redistribution, and the carefully designed signal process circuits and the algorithm
provided by the smart control software can then precisely measure the actual media mass flow. This mass
flow can then be translated into volume speed as well as accumulated volume media consumption at the
specific conditions set at the calibration.
For the MEMS thermal mass flow sensor technology, the heater on the chip has a dimension at the
micrometer scale. In the insertion configuration, the air convection due to the onset of the micro heater is
negligible, and hence the "chimney effect" concerned for most of the "hot-wire" thermal mass flow meters
will not be applicable to the MEMS thermal mass flow sensor technology with this package.
3.1 Working Principle
3.2 Volume Flow vs. Mass Flow
For the gas metrology using mechanical meters, the volume flow rate is adopted. The volume rate
nevertheless may not be a good indicator for industrial processing technology as the processing gas quality
depending vastly on the mass, not on the volume. In addition, the volume of gas will change with different
gas temperature and pressure. With the MEMS thermal mass flow meter, it is possible to measure the
"quality" (mass) of the gas directly, and at real time. The mass flow rate will not depend on temperature and
pressure, and hence it accurately measures the actual mass consumption. In addition, the conversion of the
o
volume rate to the mass rate is readily available by referencing to a standard condition such as at 20 C and
101.325 kPa.
MEMS Mass Flow Meter User Manual
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4. Product Model Selections
4.1 In-line Meters/MFFD and MFFE series
4
Output (
: B, AB, BD, ABD for external power model;
N for Li-Ion battery model.)
N- No output; A-4~20mA; B-RS485; D-pulse / 0 ~ 5 V;
Options
3 3
Maximum flow rate (Nm /hr. e.g. 450 - 450Nm /hr)
Maximum working pressure (1.5 MPa )
3 3
Minimum flow rate (Nm /hr. e.g. 2.0Nm /hr)2 -
Power supply ( )D - 3.6VDC Li-Ion battery, E - 8~24VDC external power supply
Connection (N - NPT; B - BSPT; F - Flange)
DN (pipe inner diameter, mm. : 25, 32, 40, 50, 65, 80, 100)Options
Product series name
Gas (A - air; N - N ; O - O ; R - Ar;
2 2
for other gases, please contact Siargo.)
C - CO ;
2
Gas (
for other gases, please contact Siargo.)
A - air; C - CO ; N - N ; O - O ; R - Ar;
2 2 2
Output (N- No output; A-4~20mA; B-RS485; D-pulse
: B, AB, BD, ABD for external power model;
N for Li-Ion battery model.)
/ 0 ~ 5 V;
Options
Maximum working pressure ( MPa )1.5
Probe material (SSS - 304 stainless steel)
3
Maximum flow rate (Nm /hr)
Installation (V - with ball valve, D - without ball valve)
Power supply (D - 3.6VDC Li-Ion battery, E - 8~24VDC external power supply)
DN (1 - below DN500, 2 - DN600 ~ DN1100, 3 - above DN1200)
Product series name
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MEMS Mass Flow Meter User Manual
4.2 Insertion Meters/MFI series

Fig. 5-1
5. Product Configuration
The product consists of MEMS flow sensors, smart control circuitry, display unit and output ports, flow
conditioning set, flange, and other types of connectors. The configuration is illustrated in Fig. 5-1:
User Interface
Smart Control Circuit
Sensor Probe
Sensor
Label
LCD Display
Flow Direction
Valve
User Interface
Smart Control Circuit
Flow Pipe
Connector (Flange or NPT)
Label
LCD Display
Flow Direction
MEMS Mass Flow Meter User Manual
5.1 In-line Meters/MFFD and MFFE series
5.2 Insertion Meters/MFI series
Fig. 5-2
6www.Siargo.com

Model
MFI-1
MFI-2
MFI-3
H
511
586
661
D
14
14
19
103
Fig. 6-1
6. Product Specifications
6.1 Physical Dimensions of In-line Meters/MFFD and MFFE seris
D
d
L
103
K
n-L
H
Model Connection L H D d K n-L Ref. Standards
MF25
MF32
MF40
MF50
300
300
300
360
315
326
330
344
115
140
150
165
85
100
110
125
F
F
F
F
4 -φ14
4 -φ18
4-φ18
4-φ18 GB/T-9116.1-2000
MF25
MF32
MF40
MF50
300
300
300
360
270
272
275
285
-
-
-
-
-
-
-
-
N/B
N/B
N/B
N/B
-
-
-
-
CANSIB1.20.1NPT
BSPT:ISO7/1
DN (mm)
MF65
MF80
MF100
360
400
400
362
374
396
185
200
220
145
160
180
F
F
F
8-φ18
8-φ18
8-φ18
25
32
40
50
25
32
40
50
65
80
100
25
32
40
50
65
80
100
25
32
40
50
or
Fig. 6-2
6.2 Physical Dimensions of Insertion Meters/MFI series
MEMS Mass Flow Meter User Manual
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Model
MF25
MF32
MF50
25
32
50
100
160
400
1.0
1.6
4.0
MF40 40 250 2.5
Pipe Size (mm) 3
Max. Flow Rate (Nm /h) Min. Flow Rate ( 3
Nm /h)
MF65
MF100
65
100
650
1600
6.5
16
MF80 80 1000 10
80
DN
(mm)
Insertion Depth
(mm)
Probe Length(mm)
(H= pipe wall thickness)
100
125
150
200
250
300
350
400
450
500
600
700
800
900
1000
1200
1300
1400
1500
1600
11
13
16
20
26
33
40
46
53
60
66
80
93
106
119
132
159
172
199
212
186
168+H
170+H
173+H
183+H
190+H
197+H
203+H
210+H
217+H
223+H
237+H
250+H
263+H
276+H
289+H
329+H
343+H
356+H
382+H
369+H
1000
1600
2500
3500
6500
10000
15000
20000
25000
32000
40000
55000
75000
100000
130000
160000
230000
270000
360000
400000
320000
177+H
1100 146 302+H200000
MFI-1
Model
MFI-2
MFI-3
Full Length
(mm)
Full Scale Flow
3
(Nm /hr)
250;D=14;
Ball valve=15
325;D=14;
Ball valve=15
400;D=19;
Ball valve=20
6.3 Flow Range of In-line Meters/MFFD and MFFE series
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MEMS Mass Flow Meter User Manual
6.4 Flow Range of Insertion Meters/MFI seris

6.5 Environmental Conditions
o o
(1) Temperature: -20 C~+60 C
(2) Humidity: ≤95%RH
(3) Atmospheres Pressure: 86kPa~106kPa
(4)Working Pressure: 0.1~ 1.5MPa
6.6 Medium Conditions
o o
(1) Temperature: -10 C~+55 C
(2) Gas Type: natural gas, coal gas, etc..; industrial gases except ethane.
6.7 Electrical Specifications
(1)Power supply:
12 ~ 24 VDC; 200mA.
(2) Display: Real time LCD display of both flow rate and accumulated rate
(3) Response time: 1 second to 95% of final value
(4) Communication
RS485(Modbus), with real-time data for flow rate and flow accumulation and can be directly
connected to the remote network. A user interface software is an option.
(5) 4 to 20mA output
The current is proportional to the standard mass flow rate; 4mA represents 0 flow rate, while 20mA
corresponds the maximum flow rate Q.
max
(6) Pulse output
3
The output signal consists of a sequence of voltage pulses, each pulse is 0.001Nm .
(7) Data records
a) Log of power supply status and accumulated flow rate.
b) As many as 4000 records of the flow status for power supply (the schedule of power-on and -off as
well as the corresponding data of accumulated flow rate.
c) Record the flow accumulation for every 3~720 minutes (which can be programed through the user
interface software) for data analysis and data management. The user interface software can be
obtained from the manufacturer for the desired program and retrieval of the recorded data.
External power model:
Li-Ion battery model: Li-Ion battery L3638A.
6.8 Other Specifications
(1) Accuracy: ±(1.5+0.5FS)%
(2) Repeatability: ±0.75%
(3) Turn-Down Ratio: > 100:1
(4) Working Pressure: 1.5MPa
(4) Pressure Loss: < 500 Pa (at max. flow)
o
(5) Calibration: Air (20 C, 101.325kPa)
(6) Protection: IP66
(7) Hazard Proof
In-line meters: Ex d IIC T4
Insertion meters: n/a
MEMS Mass Flow Meter User Manual
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7. Installation
7.1 Description of Parts in Package
When unpack your meter from the shipping container, three parts should be found in the package:
a) The meter
b) This user manual
c) Product certificate
Upon opening the package, the product physical integrity should be inspected to ensure no visual damage
can be observed. If any items are missing or any physical damages are observed, please contact the meter
manufacturer and/or the shipping agent to place a return/exchange or to identify the cause during the
transportation. If you are uncertain of the installation or have any questions about the shipment, please also
contact the manufacturer or the shipping agent before further process.
7.2 Installation Preparation
The product at the time of shipment has been fully inspected for product quality and meets all safety
requirements. Additional safety measures during the installation should be applied. This includes, but is not
limited to leakage verification procedure, standard ESD (electrostatic discharge) precautions, DC voltage
precautions and heavy duty precautions. Other tasks such as calibration, part replacement, repair and
maintenance must only be performed by trained personnel. Upon requests, the manufacturer will provide
necessary technical support and/or training of the personnel.
Do not open the product cover or alter any parts of the product. Any of such actions will forfeit the warranty
and cause the liability to any damages thereafter.
Before the installation, both upstream and downstream valves on the pipeline should be tightly shut down to
ensure no gas leakage from the pipeline. Once the pipeline is ready for installation of the meter, follow the
steps listed below to check the meter electronics:
(1) Check the mechanical integrity including the LCD display and make sure no mechanical faults pre-
existed before installation.
(2) Connect the cable of the meter (see Fig. 7-1).
Fig. 7-1
Red DC+, 12-24Vdc supply
Black Power ground
Green RS485A
Brown RS485B
Blue LOOP+ (4-20mA output)
Purple LOOP- (4-20mA GND)
Orange Pulse output
White Pulse GND
Red
Black
Green
Brown
Blue
Purple
Orange
White
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Battery+
-Battery
BAT+
GND
GND
Fig. 7-3
(3) In case the cable connection is problematic, user can directly connect the wire to the back
terminal
DC-
DC+
LP+
LP-
RS485B For RS485 Communication
RS485A For RS485 Communication
GND Signal GND
VP NC
PLS
ERR Error Signal Output
Power GND
12V~24VDC Power Supply
4~20mA Output
4~20mA GND
PULSE Output
Fig. 7-2
(4) When the above processes are completed, the Fig. 8-1(see page 15) should appeared on the LCD screen;
Attention: Because of the high sensitivity of the meter, the displayed real time flow rate and
accumulated volume value might be non-zero as any air flow passing through the pipe attached to
the meter will be sensed and displayed, regardless if the meter is connected to the pipeline except
that there is absolutely no air flow in the pipe attached. Use your hands or a tight cover to close
both ends of the pipe of the meter, the top line display of the real time flow rate should decrease
and become zero, and the accumulated volume should remain a constant value.
(5) Once the above steps have been performed and no errors are found, it indicates that the meter is working
properly. Then power off the meter by disconnecting the DC cable from the DC outlet, and it is ready to
be installed onto the pipeline. (For battery powered meter, this step can be skipped)
For the battery meter, there are three terminals in the back cover. (see Fig. 7-3)
MEMS Mass Flow Meter User Manual
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7.3 Installation Procedure of In-line Meters
The stainless steel pipe attached to the meter has its both ends with flanges for easy installation. The meter
should be mounted horizontally with the flow direction indicated on the meter body. To ensure the best
performance of the meter, a straight pipe with the same diameter as the pipe attached to the meter and a
length of at least 5D (5 times of the pipe diameter) should be located at the upstream, while another straight
pipe with the same diameter as the pipe attached to the meter and a length of at least 3D should be located at
the downstream, as shown in the following figure:
Fig. 7-4
Filter Meter
Flow
（3）将流量计安装到管道上，并注意如下事项：
①为了保证流量计的计量准确性，安装时要先连接流量计的上游端；
②流量计安装时密封件不得凸入管道中，密封圈内径应不小于管道内径（如图5-4a)，也不能有
任何液体物质渗入管道内；
③流量计管道内径应与管线管道内径相同（如图5-4b)；
④流量计管道应与管线管道同轴（如图5-4c)。
122
1
Correct Incorrect
Fig.7-7
Correct Incorrect
Fig.7-5 Fig.7-6
Correct Incorrect
MEMS Mass Flow Meter User Manual
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(1). In case of the online installation, make sure there is no any hazardous gases present in the flow
channel, and the proceed to completely close the valves at both upstream and downstream.
(2). Prepare the installation hole in the flow channel (14mm). After the installation hole for the probe on the
flow channel is prepared, make sure there is no any metal particles or other harmful debris present inside
the flow channel. Avoid strong vibration sources.
(3). Attach (by wielding for stainless steel pipeline) the base onto the flow channel, making the hole on the base
align perfectly to that on the flow channel.
(4). Place the O-ring or seal gasket on the base.
7.4 Installation Procedure of Insertion Meters
Fig. 7-5 Detailed guidance for installation
O-ring
Gasket
Cap
Sealer
Valve
Connector
Base

Fig. 7-9
+3°
-3°
Flow direction
Fig. 7-7
Rotated by 90°
MEMS Mass Flow Meter User Manual
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(4). Place the meter in the prepared installation probe hole, make sure the thread or flange can properly seal.
Check the meter position and make sure the probe is perpendicular with respect to the flow channel wall.
Fig. 7-8 Adjustment of the sensor
Sensor adjustment
assistance tool
Probe base
Installation
base
Fasten
screw
Calculation of the probe depth, L
L = 157 + H + D/ 8
where H is the flow channel wall thickness
D is the flow channel diameter
Fig. 7-6
A = 1/8 D
L=A+H+157
H
(6). Adjust the direction of the sensor .
flow channel as illustrated by the graph below. (The sensor surface has been aligned with respect to the
surface where the flow direction arrow rests.)
Use of the “Sensor adjustment assistance tool kit” may help for a faster sensor alignment. For further
information, please contact manufacturer.
The sensor surface should be well align with the flow direction inside the
(5). The flow measurement direction indicated on the meter
should align with the flow direction in the flow channel.
Adjust the probe depth in the flow channel according to
the measurement requirements;

Fig. 7-10
For better performance:
Upstream 20X DN
Downstream 5XDN
Incorrect installation may
create flow instability
(7). Fasten the cap.
(8). The meter should be installed avoiding valves, sharp turns and other obstacles possibly presented in the
system for flow instability.
MEMS Mass Flow Meter User Manual
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7.5 Power Up
After the meter is installed onto the pipeline, follow the steps listed below to finish the installation:
(1) Make sure no leakage at both connections.
(2) Make sure a nearby DC power supply with surge protection is available and the power supply functions
properly without safety issue, other than for a battery powered model.
(3) Connect the DC power cable with the DC power connection of the meter as shown in Fig. 7-1.
(4) Open the valves at both ends of the pipeline until the gas fill the pipeline, then close the valves.
(5) Supply the meter with a proper DC voltage, and the LCD should read as shown in Fig. 8-1 (page 15);
(6) Record the accumulated flow rate value (optional).
(7) Open the valves at both ends of the pipeline, and the meter should then operate as desired.
(8) Finish the installation.
7.6 Caution Notes on Installation
(1) It is forbidden to weld pipeline flange online.
(2) Before installing the flow meter, all the dirty and debris in the pipeline must be cleaned for preventing
possible damages of the product. It is recommended that the pipeline wall should be clean and dry.
(3) Please ensure that the seal rings do not block the passageway of the pipeline.
(4) The ground line of the flow meter must be connected to the earth reliably.
(5) Please ensure that no stress to the flow meter is introduced by the installation.
(6) Near the flow meter site, there should be neither any strong external magnetic field nor any strong
mechanical vibration.
(7) The gas medium should not have strong flow instability. The operation of the valves should be slowly. It
is prohibited to close/open valves abruptly to create extreme pressure pulses.

8. Display and Functions
8.1 Display
At the normal operation mode, the meter has the display as shown in Fig 8-1. The Flowrate shows
3
the real time mass flow rate in normal cubic meter per hour (Nm /h); the Total displays the
3
accumulated flow rate in normal cubic meter (Nm ). The conversion of the real time mass flow to
3
the volume is based on the condition that 1 Nm /h equals to the mass that is in 1 cubic meter of the
o
air at a temperature of 20 C and a pressure of 101.325 kPa. The display can only be reset by trained
personnel at the firmware level.
Fig. 8-1
Fig. 8-2 Sensor Error Fig. 8-3 Battery low
Alarm code :
E1 Sensor error
E2 Sensor covered with excessive foreign materials
E3 Hardware error
E4 Over flow range
E5 Battery low (battery power model)
E1~E5
8.2 Access Points and User Interface
Siargo's proprietary flow meter utilizes the insertion approach that can measure gas flows in large
pipes. All access points and user interface are through the cable provided.
8.3 Real time display of both flow rate and accumulated volume
3
The real time values of both flow rate in normal cubic meters per hour (Nm /h) and accumulated
3
flow rate in normal cubic meters (Nm ) can be read from the LCD display on the front side of the
meter. The meter can read up to 16 digits to a maximum flow rate record of 99999999.999 normal
3 3
cubic meters (Nm ) and the minimal real time flow rate is 0.001 Nm /h.
MEMS Mass Flow Meter User Manual
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Protocol A
Protocol A can only used for single meter communication and it can be used to access the
meter via the communication port.
Digital communication mode: user can then access the digital data via the port:
a) send 0x9d via RS485 and receive the same returned ;
b) send 0x54 via RS485 and receive the same returned 0x54.
The interval time between two bytes sent to the meter must be longer than 5ms.
The meter will be at Digital communication mode at which the data from the meter will be
sent via RS485 in an interval of 4 seconds. The data are in the following format:
“V=vvvvvv\nF=ffffffff\nA=aaaaaaaaaa\nT=t\n;\n;"
vvvvvv: Voltage code
3
ffffffff: Flow rate (Equal to fff.fff Nm /h)
3
aaaaaaaaaa: Accumulated flow (Equal to aaaaa.aaa Nm )
t: Either shown in 0 or 1
Local display mode: use this mode when only LCD display is needed.
a) send 0x9d via RS485 and receive the same returned 0x9d;
b) send 0x00 via RS485 and receive the same returned 0x00.
The interval time between two bytes sent to the meter must be longer than 5ms.
Then the meter will be at Local display mode at which the data will not be sent via RS485 by
the meter.
Protocol B
Protocol B is based on the standard Modbus communication protocol. It supports either single
meter communication or multi-meter networking. For detailed information, please contact the
manufacturer.
0x9d
MEMS Mass Flow Meter User Manual
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8.4 RS485 data communication protocole (External Power Model)
For purposes of computer control and networking, the RS485 is used for communication with the
following preferred settings:
Baud rate (Bits per second): 9600
Date bits: 8
Stop bits: 1
Parity: None
Flow control: None
The meter supports two protocols. Protocol A can be used for single meter communications only
while Protocol B is the standard Modbus.

Buttons Description
FUN Selection/confirmation of a setting
UP Scroll up the setup menu
SHIFT Shift to next item or next bit
FUN
UP
SHIFT
Fig. 8-5
MEMS Mass Flow Meter User Manual
8.5 4~20mA Connection (External Power Model)
Input: 24VDC
Output: 4~20 mA
3
(4mA @ 0 Nm /h; 20 mA@ Max. Flow)
The connection of the loop load resistor is illustrated
as Fig. 8-4:
8.6 Pulse Output (External Power Model)
The meter supply pulse output in form of even square wave. The even square wave is composed of
3 3 3 3
5 V signal high and 0V signal low, and every pulse equal to 1Nm , 0.1Nm , 0.01Nm , 0.001Nm or
3 3
0.0001Nm . (default is 1Nm )
4~20mA(LOOP+, )Blue
4~20mA GND(LOOP-, )Violet
Fig. 8-4
8.7 Automatic stored data
The meter can automatically record mass flow rate, accumulated flow rate and time. To retrieve
these data, please contact manufacturer for the necessary user interface software. The data storage
interval can be customized and please contact manufacturer for further information.
8.8 Buttons
Please contact Siargo for the detailed buttons operations.
17 www.Siargo.com

9. Safety and Maintenance
9.1 Wetted Materials and Compatibility
The meter body and pipe are made of stainless steel. Sensors comprise of silicon, silicon nitride and silicon
dioxide and the sensor surfaces are passivated with silicon nitride and silicon dioxide. The electronic sealing
is provided by RTV (room temperature vulcanizing) #643 Highly Chemical Resistant Coating.
9.2 Safety Precautions
The product is designed for use with general purpose gases such as nitrogen. It is advised that the
products are best used for non-corrosive clean gases unless otherwise packaged. This meter cannot
be used for gas metrology of fluoride or fluoride containing gases. For updates of the product
information, please contact the manufacturer or visit www.Siargo.com. Using for gases that are
extremely corrosive and toxic may cause the product malfunctioning or even severe damages.
The product pressure rating is ensured to work under working pressure of 200 psig and is leakage
proof before the shipment. But cautions and further leakage test are important at installation since
any leakage could cause severe safety issue.
The power supply for this product is 12~24 VDC, all precautions and measures for electrical
voltage handling must apply.
Attentions: any alternation and/or improper use of the product without the permission of the
manufacturer can cause unpredicted damage and even injuries or other severe situations.
Siargo Ltd. or any of its employees and subsidiaries shall not be held liable and indemnified
against consequences due to such circumstances via improper use of the product.
The meter at the time of shipping is fully calibrated at the conditions indicated on the product label. Use of
the product under other conditions will lead to unpredictable results. Please contact the manufacture before
proceeding to such applications.
To ensure the meter performance, the meter should be calibrated every 12 to 24 months.
Attention: without prior permission of the manufacturer, please do not attempt to alter any parts of the product
as it may cause unrecoverable damages. If there are any questions or doubts, please contact manufacturer
immediately before further actions. Please ensure the DC power is off before dismounting the meter from the
installation.
All maintenance of the sensor should be done from trained and certified personnel by Siargo Ltd.
MEMS Mass Flow Meter User Manual
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10. Maintenance
10.1 Calibration
10.2 Maintenance