Sunx M Series User manual

Thank you very much for using SUNX products. Please read this Instruc-
tion Manual carefully and thoroughly for the correct and optimum use of this
product. Kindly keep this manual in a convenient place for quick reference.
INSTRUCTION MANUAL
MSeries
Wafer Address Sensor
Photoelectric Sensor
OUTLINE
1
This product detects wafers in a wafer
cassette simultaneously in the process
of manufacturing semiconductors.
Since the emitter and the receiver are
comb-like structure, number or position
of wafers can be checked.
As the I/O part is the connector type,
maintenance can be easily done.
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Wafer
Wafer cassette
Sensor body
MOUNTING
2
Attached spacers must be used to mount the sensor.
The tightening torque of the M4 screws should be 0.78 N·m or less.
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Adjust the mounting of the sensor
so that when the wafers are inserted
into the spaces between the sensor
probes, the distance between the ori-
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12mm or less.
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M4 screw
Mounting board
Spring washer
Plain washer
Spacer (Accessory)
Wafer
Good Not good
12mm or less
Sensor body
Orientation flat
Wafer
Carefully mount the sensor so that
the sensing probes do not touch any
wafer.
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CONNECTION METHOD
3
Recommended mating connectorƔ
Model No. Manufacturer
HIF3BA-30D-2.54R Hirose Electric Co., LTD.
Note: Since the recommended mating connector is not attached, please arrange
separately.
Recommended mating
connector
WARNING
Never use this product as a sensing device for personnel protection.
In case of using sensing devices for personnel protection, use products
which meet laws and standards, such as OSHA, ANSI or IEC etc., for
personnel protection applicable in each region or country.
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I/O CIRCUIT DIAGRAM
4
Main circuit
(2) + V
20 to 26.4V DC
+
í
*1
(30) Test input
(Emission halt input)
Users’ circuitInternal circuit
(29)
Output
invalid input
(3) Channel 1 sensing output
(28) Channel 26 sensing
output (Note 1)
(1) 0V
5V
5V
20mA max.
20mA max.
Terminal No.
*1
Non-voltage contact or NPN open-collector transistor
or
Test input (Emission halt input)
Low (+1.5V or less): Emission halt, High (+3.6V or more): Emission
Output invalid input
Low (+1.5V or less): All channels OFF, High (+3.6V or more): Output possible
•
•
Notes: 1) Terminal No. 28 of M-825 and M-625 is assigned 0V.
2) The sensing output does not incorporate a short-circuit protection circuit.
Do not connect it directly to a power supply or a capacitive load.
Recommended mating connector components
The recommended mating connector consists of the following three
components.
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15.6mm
42.67mm
<Main body>
<Protector>
<Clamp>
Assembly diagram
Connection methodƔ
1. Prepare the exclusive jigs as follows, and a jig for cutting the cable.
2. Cut the cable to the required length.
3. Fix the guide plate and the pressing block to the connection press.
Set the components to the guide plate in order of protector, cable, and
the main body, then press down by the connection press.
4. Bend the cable and mount the clamp.
Jig Product name HRS No. Manufacturer
Connection press Hi-Flex connection press HHP 502 550-0082-2 Hirose Electric
Co., LTD.
Pressing block Pressing block A-01 550-0133-1
Guide plate HIF3-CPA2 550-0156-7
Connection press
Cable
Polarity mark
Protector
Orientation mark
Main body
Pressing block
Guide plate
Clamp
<Completion drawing>
Note : Match the orientation mark of the cable with the polarity mark.

TEST INPUT (EMISSION HALT) FUNCTION
5
When the test input (emission halt input) is turned ON (+1.5V or less,) all
LEDs stop emission, generating the wafer sensed condition, and output
transistors of all channels become ON.
The output circuit of the sensor can be checked by using the test input
(emission halt input.)
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ON
OFF
Emission
Emission
halt
ON
[Emitting LED]
[Output]
Normal Error
OFF
Test input
(Emission halt input)
OUTPUT INVALID (EXTERNAL SYNCHRONIZATION) FUNCTION
6
If the output invalid input is turned ON (+1.5V or less,) the output transistors of
all channels stay in the OFF state irrespective of the wafer detection condition.
Several sensors can be used in parallel by using the output invalid inputs,
thereby reducing the required PLC input points.
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Output
Output invalid
input 1
Output invalid input 2
Sensor 1Sensor 2
Switch position Sensor operation
1
2Only Sensor 2 is operative
1
2Only Sensor 1 is operative
Connector pin positionƔ
2927252321191715131197531
30282624222018161412108642
Orientation mark
Recommended mating connector
HIF3BA-30D-2.54R
[Manufactured by Hirose Electric Co., LTD.]
Connector
HIF3BA-30PD-2.54R-MC
[Manufactured by Hirose Electric Co., LTD.]
Terminal No. Description Terminal No. Description
1 0V 16 OUT 14
2 +V 17 OUT 15
3 OUT 1 18 OUT 16
4 OUT 2 19 OUT 17
5 OUT 3 20 OUT 18
6 OUT 4 21 OUT 19
7 OUT 5 22 OUT 20
8 OUT 6 23 OUT 21
9 OUT 7 24 OUT 22
10 OUT 8 25 OUT 23
11 OUT 9 26 OUT 24
12 OUT 10 27 OUT 25
13 OUT 11 28
OUT 26 (Note)
14 OUT 12 29 Output invalid input
15 OUT 13 30 Test input (Emission halt input)
Note: Terminal No.28 of M-825 and M-625 is
assigned 0V.
PRINTED IN JAPAN
Overseas Sales Dept. (Head Office)
2431-1 Ushiyama-cho, Kasugai-shi, Aichi, 486-0901, Japan
Phone: [phone] FAX: [phone]
Europe Headquarter: Panasonic Electric Works Europe AG
Rudolf-Diesel-Ring 2, D-83607 Holzkirchen, Germany
Phone: [phone]
US Headquarter: Panasonic Electric Works Corporation of America
629 Central Avenue New Providence, New Jersey 07974 USA
Phone: [phone]
URL : sunx.com
SUNX Limited
SPECIFICATIIONS
7
Type For 8 inch wafer
For 6 inch wafer
25 pieces 26 pieces 25 pieces
Item
Model No. M-825 M-826 M-625
Wafer pitch 6.35mm 4.76mm
Supply voltage 20 to 26.4V DC Ripple P-P 10% or less
Current consumption 200mA or less
Sensing output
NPN open-collector transistor
Maximum sink current: 20mA
Applied voltage: 30V DC or less
(between sensing output and 0V)
Residual voltage: 1V or less (at 20mA sink current)
•
•
•
Number of channels 25 channels 26 channels 25 channels
Output operation Dark-ON
Response time 1ms or less
Power indicator Red LED (lights up when the power is ON)
Ambient temperature
0 to +40 Û& (No dew condensation,) Storage: -25 to +60 Û C
Ambient humidity 35 to 85% RH, Storage: 35 to 85% RH
Emitting element Infrared LED (modulated)
Material Enclosure: ABS, Sensing probe: PPS, Connector: PBT
Cable PPSLWFKFRUHÀH[LEOHÀDWFDEOHPPORQJZLWK
clamp connector
Weight 150g approx.
Accessory Spacer: 2 pcs.
CAUTIONS
8
This product has been developed / produced for industrial use only.
Make sure that the power supply is off while wiring.
Do not run the wires together with high-voltage lines or power lines or put
them in the same raceway. This can cause malfunction due to induction.
Verify that the supply voltage variation is within the rating.
If power is supplied from a commercial switching regulator, ensure that
the frame ground (F.G.) terminal of the power supply is connected to an
actual ground.
In case noise generating equipment (switching regulator, inverter motor,
etc.) is used in the vicinity of this product, connect the frame ground (F.G.)
terminal of the equipment to an actual ground.
Do not use during the initial transient time (100ms.) after the power sup-
ply is switched on.
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Make sure that stress by forcible bend or pulling is not applied directly
to the sensor cable joint.
Take care that the sensor is not directly exposed to fluorescent lamp
from a rapid-starter lamp, a high frequency lighting device or sunlight
etc., as it may affect the sensing performance.
Before use the product, make sure to eliminate the static electricity of
the wafer.
Make sure that stress is not applied to the sensor probe.
Wafer which transmits infrared light cannot be detected, since the infra-
red LED is used for the emitting element.
This sensor is suitable for indoor use only.
Avoid dust, dirt, and steam.
Take care that the product does not come in contact with water, oil,
grease, organic solvents, such as thinner, etc., strong acid or alkaline.
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INTENDED PRODUCTS FOR CE MARKING
9
The models listed under “ SPECIFICATIONS” come with
CE Marking.
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