Agilent Technologies IMG-500 User manual

Contents
Product Identification 6
Validity 6
Intended Use 7
Functional Principle 7
1Safety 8
1.1 Symbols Used 8
1.2 Personnel Qualifications 8
1.3 General Safety Instructions 9
1.4 Liability and Warranty 10
2Technical Data 11
3Installation 166
3.1 Vacuum Connection 16
3.2 Power Connection 21
4Operation 22
5Deinstallation 244
6Maintenance, Troubleshooting 25
7Returning the Product 26
8Disposal 27
9Literature 28
For cross-references within this document, the symbol (XY) is used,
for cross-references to further documents, listed under literature, the
symbol ([Z]).

Compact Cold Cathode Gauge IMG-500
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Product Identification
In all communications with Agilent, please specify the infor-
mation given on the product nameplate. For convenient refer-
ence copy that information into the space provided below.
Model:
PN:
SN:
V Hz VA
Made in Liechtenstein
Agilent Technologies
Validity
This document applies to products with the following part num-
bers: IMG500KF25 (DN 25 ISO-KF)
IMG500CF35 (DN 40 CF-F)
The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this
document correspond to the product with part number
IMG500KF25. They apply to the other product by analogy.
Wereserve the right to make technical changes without prior
notice.
All dimensions in mm.

Compact Cold Cathode Gauge IMG-500
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Intended Use
The Compact Cold Cathode Gauge IMG-500 has been designed
for vacuum measurement of gases in the pressure range of
2×10-9 …1×10-2 mbar.
The gauges can be operated in connection with an Agilent
Vacuum Gauge Controller AGC-100, an Agilent Turbo AG Rack
Controller, or with another controller.
Functional Principle
The gauge functions with a cold cathode ionization measure-
ment circuit (according to the inverted magnetron principle).
Over the whole measurement range, the measuring signal is
output as a logarithm of the pressure.

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1 Safety
1.1 Symbols Used
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environ-
mental damage.
Caution
Information on correct handling or use. Disregard can lead to
malfunctions or minor equipment damage.
Notice
1.2 Personnel Qualifications
Skilled personnel
All work described in this document may only be carried out by
persons who have suitable technical training and the neces-
sary experience or who have been instructed by the end-user
of the product.

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1.3 General Safety Instructions
Adhere to the applicable regulations and take the necessary
precautions for the process media used.
Consider possible reactions with the product materials.
Consider possible reactions (e.g. explosion) of the process
media due to the heat generated by the product.
Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider the
safety instructions in this document.
Before beginning to work, find out whether any vacuum com-
ponents are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contamin-
ated parts.
DANGER
DANGER: magnetic fields
Strong magnetic fields can disturb electronic
devices like heart pacemakers or impair their
function.
Maintain a safety distance of ≥10 cm between the
magnet and the heart pacemaker or prevent the
influence of strong magnetic fields by antimagnetic
shielding.
Communicate the safety instructions to all other users.

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1.4 Liability and Warranty
Agilent assumes no liability and the warranty becomes null and
void if the end-user or third parties
disregard the information in this document
use the product in a non-conforming manner
make any kind of interventions (modifications, alterations etc.)
on the product
use the product with accessories not listed in the product
documentation.
The end-user assumes the responsibility in conjunction with the
process media used.
Gauge failures due to contamination or wear and tear, as well as
expendable parts (e.g. seals), are not covered by the warranty.

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2 Technical Data
Measuring range (air, N2)
2×10-9 …1×10-2 mbar
Accuracy
±30% (in the range
1×10-8 …1×10-3 mbar)
Reproducibility
±5% (in the range
1×10-8 …1×10-3 mbar)
Output signal (measuring signal)
Voltage range
0 …+10.5 V
Voltage vs. pressure
logarithmic , 1.0 V/decade
Error signal
<0.5 V no supply
Output impedance
2×10 
Minimum loaded impedance
10 k, short-circuit proof
Response time
p > 10-6 mbar
(pressure dependent)
<10 ms
p = 10-8 mbar
1000 ms
Identification gauge
100 k, referenced to
supply common
Supply
DANGER
The gauge may only be connected to power sup-
plies, instruments or control devices that conform
to the requirements of a grounded protective extra-
low voltage (SELV). The connection to the gauge
has to be fused 1).
Voltage at the gauge
15 …30 VDC
(ripple 1 Vpp)
1
)Agilent controllers fulfill this requirement.

Compact Cold Cathode Gauge IMG-500
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Power consumption
≤2 W
Fuse 1)
≤1 AT
Voltage at the supply unit with
maximum cable length
16 …30 VDC
(ripple ≤1 Vpp) 2)
Adjustment
the gauge is adjusted at the
factory and requires no
maintenance.
Electrical connection
FCC68 socket, 8-pin
Sensor cable
8-pin, shielded
Line length
≤50 m (80.14 mm²)
Operating voltage
≤3.3 kV
Operating current
≤500 µA
Grounding concept
"Power Connection"
Vacuum connection –measuring
common
connected via 10 k(max.
voltage differential with
respect to safety ±50 V
accuracy ±10 V)
Supply common –signal common
conducted separately;
differential measurement
recommended for cable
lengths ≥10 m
Materials on the vacuum side
Vacuum connection
Measurement chamber
Feedthrough isolation
Internal seal
Anode
Ignition aid
stainless steel
stainless steel
ceramic (Al2O3)
FPM 75
Mo
stainless steel
Internal volume
20 cm³
Pressure
≤10 bar (absolute),
limited to inert gases
2
)The minimum voltage of the power supply unit must be increased
proportionally to the length of the sensor cable.

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Temperatures
Operation
Bakeout
Storage
+5 …+55 °C
150 °C (without electronics
and magnetic shielding)
-40 …+65 °C
Relative humidity
≤80% at temperatures
≤+31°C decreasing to 50%
at +40°C
Mounting orientation
any
Use
indoors only, altitude up to
2000 m
Degree of protection
IP 40
Dimensions [mm]
DN 40 CF-F
24
92
ø 63.5
28 55
60
75
18
DN 25 ISO-KF
Weight
≤950 g

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Measuring Signal vs. Pressure
1E+00
1E–01
1E–02
1E–03
1E–04
1E–05
overrange
Measurement signal U [V]
0.0 0.5 1.0 1.5 2.5 3.5 4.5 5.5 6.5 7.5 8.5 9.5 10.52.0 3.0 4.0 5.0 6.0 7.0 8.0 9.0 10.0
1E–06
1E–07
1E–08
1E–09
1E–10
sensor error
underrange
Pressure p
Pa
mbar
torr
p = 10U-c

U = c + log10 p
mbar
Pa
Torr
c
10.5
8.5
10.625
valid in the range 2×10-9 mbar < p < 1×10-2 mbar
1.5×10-9 Torr < p < 7.5 ×10-3 Torr
2×10-7 Pa < p < 1 Pa

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Gas Type Dependence
Indicated pressure (gauge calibrated for air)
4
2
10–3
8
6
4
2
10–4
8
6
4
2
10–5
8
6
4
2
10–6
8
6
4
2
10–7
10–7 2 4 6 10–6 2 4 6 10–5 2 4 6 10–4 2 4 6 10–3 2 4 6 10–2
Xe Kr
Luft / Air
O2
CO
N2H2Ne He
peff [mbar]
p [mbar]
Ar
In the range below 10-5 mbar, the pressure indication is linear.
For gases other than air, the pressure can be determined by
means of a simple conversion formula:
peff = K × pressure reading
Where
Gas type
K (mean values)
Air (O2, CO, N2)
Xe
Kr
Ar
H2
Ne
He
1.0
0.4
0.5
0.8
2.4
4.1
5.9

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3 Installation
3.1 Vacuum Connection
DANGER
DANGER: overpressure in the vacuum system
>1 bar
Injury caused by released parts and harm caused
by escaping process gases can result if clamps are
opened while the vacuum system is pressurized.
Do not open any clamps while the vacuum system
is pressurized. Use the type clamps which are
suited to overpressure.
DANGER
DANGER: overpressure in the vacuum system
>2.5 bar
KF flange connections with elastomer seals (e.g.
O-rings) cannot withstand such pressures. Process
media can thus leak and possibly damage your
health.
Use O-rings provided with an outer centering ring.

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DANGER
DANGER: protective ground
Products that are not correctly connected to ground
can be extremely hazardous in the event of a fault.
Electrically connect the gauge to the grounded
vacuum chamber. This connection must conform to
the requirements of a protective connection ac-
cording to EN 61010:
CF flanges fulfill this requirement.
For gauges with a KF flange, use a conductive
metallic clamping ring.
Caution
Caution: vacuum component
Dirt and damages impair the function of the vac-
uum component.
When handling vacuum components, take appro-
priate measures to ensure cleanliness and prevent
damages.
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with bare
hands increases the desorption rate.
Always wear clean, lint-free gloves and use clean
tools when working in this area.

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WARNING
WARNING: electric arcing
Helium may cause electric arcing with detrimental
effects on the electronics of the product.
Before performing any tightness tests put the pro-
duct out of operation and remove the electronics
unit.
The gauge may be mounted in any orientation. To keep
condensates and particles from getting into the measur-
ing chamber preferably choose a horizontal to upright
position and possibly use a seal with a centering ring
and filter.

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When making a CF flange connection, it can be ad-
vantageous to temporarily remove the electronics and
the magnet unit.
Hex. socket
AF 1.5
AF 7
Protective lid
Keep the protective lid.

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Remove the protective lid and connect the product to the
vacuum system.
or
Protective lid
Clamp
Seal with
centering ring
Seal with centering
ring and filter
Keep the protective lid.