Agilent Technologies TPS-mini 9699180 User manual

TPS-mini
Models
969
9180, 9699181, 9699182
Manuale di istruzioni
Instruksjon manual
Bedienungshandbuch
Ohjekäsikirja
Notice de mode d’emploi
Felhasználói kézikönyv
Manual de istrucciones
Podrecznik instrukcji
Manual de istruções
Návod k použití
Bedrijfshandleiding
Návod na obsluhu
Istrukstionsbog
Priročnik za navodila
Bruksanvisning
User Manual
87-901-003-01 (E)
12/2018

TPS-mini User Manual / 87-901-003-01 (E)
Notices
© Agilent Technologies, Inc. 2015
No part of this manual may be
reproduced in any form or by any
means (including electronic storage
and retrieval or translation into a
foreign language) without prior
agreement and written consent from
Agilent Technologies, Inc. as governed
by United States and international
copyright laws.
Manual Part Number
Publication Number: 87-901-003-01(E)
Edition
Edition 12/2018
Printed in ITALY
Agilent Technologies Italia S.p.A.
Vacuum Products Division
Via F.lli Varian, 54
10040 Leinì (TO)
ITALY
Warranty
The material contained in this
document is provided “as is,” and is
subject to being changed, without
notice, in future editions. Further, to
the maximum extent permitted by
applicable law, Agilent disclaims all
warranties, either express or implied,
with regard to this manual and any
information contained herein,
including but not limited to the
implied warranties of merchantability
and fitness for a particular purpose.
Agilent shall not be liable for errors
or for incidental or consequential
damages in connection with the
furnishing, use, or performance of
this document or of any information
contained herein. Should Agilent and
the user have a separate written
agreement with warranty terms
covering the material in this
document that conflict with these
terms, the warranty terms in the
separate agreement shall control.
Technology Licenses
The hardware and/or software
described in this document are
furnished under a license and may be
used or copied only in accordance
with the terms of such license.
Restricted Rights Legend
If software is for use in the
performance of a U.S. Government
prime contract or subcontract,
Software is delivered and licensed as
“Commercial computer software” as
defined in DFAR 252.227-7014 (June
1995), or as a “commercial item” as
defined in FAR 2.101(a) or as
“Restricted computer software” as
defined in FAR 52.227-19 (June 1987)
or any equivalent agency regulation or
contract clause. Use, duplication or
disclosure of Software is subject to
Agilent Technologies’ standard
commercial license terms, and non-
DOD Departments and Agencies of the
U.S. Government will receive no
greater than Restricted Rights as
defined in FAR 52.227-19(c)(1-2) (June
1987). U.S. Government users will
receive no greater than Limited Rights
as defined in FAR 52.227-14 (June
1987) or DFAR 252.227-7015 (b)(2)
(November 1995), as applicable in any
technical data.
Trademarks
Windows and MS Windows are U.S.
registered trademarks of Microsoft
Corporation.
Safety Notices
A CAUTION notice denotes a hazard.
It calls attention to an operating
procedure, practice, or the like that, if
not correctly performed or adhered to,
could result in damage to the product
or loss of important data. Do not
proceed beyond a CAUTION notice
until the indicated conditions are fully
understood and met.
A WARNING notice denotes a
hazard. It calls attention to an
operating procedure, practice, or the
like that, if not correctly performed
or adhered to, could result in
personal injury or death. Do not
proceed beyond a WARNING notice
until the indicated conditions are
fully understood and met.
WARNING
CAUTION

TPS-mini
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TPS-mini

TPS-mini User Manual
251/318
Instructions for Use
Safety Guideline for Turbomolecular Pumps 252
General Information 253
Symbols used 255
Storage 256
Preparation for installation 256
Installation 257
Use 261
Switching on and Use of TPS-mini 262
TPS-mini Switching off 263
Emergency Stop 263
Maintenance 264
Cleaning 264
Disposal 265
Original Instructions

16
Instructions for Use
Safety Guideline for Turbomolecular Pumps
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Safety Guideline for Turbomolecular Pumps
Turbomolecular pumps as described in the following operating
manual contain a large amount of kinetic energy due to the high
rotational speed in combination with the specific mass of their
rotors.
In case of a malfunction of the system for example rotor/stator
contact or even a rotor crash the rotational energy may be released.
WARNING!
To avoid damage to equipment and to prevent injuries to operating personnel
the installation instructions as given in this manual should be strictly
followed!

Instructions for Use
General Information
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General Information
This equipment is destined for use by professionals. The user should
read this instruction manual and any other additional information
supplied by Agilent before operating the equipment. Agilent will not
be held responsible for any events occurring due to non-compliance,
even partial, with these instructions, improper use by untrained
persons, non-authorized interference with the equipment or any
action contrary to that provided for by specific national standards.
The TPS-mini is an integrated system with a turbo-molecular pump
for high and ultra-high vacuum applications associated with its
relevant controller and its primary pump. The system can pump any
type of gas or gas compound. It is not suitable for pumping liquids or
solid particles. The pumping action is obtained through a high speed
turbine driven by a high-performance 3-phase electric motor. The
TPS-mini is free of contaminating agents and, therefore, is suitable
for applications requiring a "clean" vacuum.
The TPS-mini is equipped with auxiliary connectors to control the
vent valve, to be controlled from a remote site by means of an host
computer connected through a serial line.
The following paragraphs contain all the information necessary to
guarantee the safety of the operator when using the equipment.
Detailed information is supplied in the appendix "Technical
Information".

16
Instructions for Use
General Information
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This manual uses the following conventions
WARNING!
Warning messages are for attracting the attention of the operator to a
particular procedure or practice
which, if not followed correctly, could lead
to serious injury.
CAUTION
!
The caution messages are displayed before procedures which, if
not followed,
could cause damage to the equipment
NOTE Notes contain important information taken from the text.

Instructions for Use
General Information
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Symbols used
The following symbols are used consistently throughout in all
illustration:
Warning “see
installation/operating”
Protective conductor
terminal
Hot surface “Danger of
burns if hot parts are
touched”
On (Power)
Caution, risk of electric
shock
Off (Power)
WARNING!
When employing the pump for pumping toxic, flammable, or radioactive
gases, please follow the required procedures for each gas disposal. Do not
use the pump in presence of explosive gases. The pump is designed to pump
high throughput of N2, Ar and lighter gas. Should you need to pump gases
heavier than Ar, please contact Agilent technical support for informations.

16
Instructions for Use
Storage
256/318 TPS-mini User Manual / 87-901-003-01 (E)
Storage
In order to guarantee the maximum level of performance and
reliability of Agilent Turbomolecular pumps, the following guidelines
must be followed:
when shipping, moving and storing pumps, the following
environmental specifications should not be exceeded:
temperature range: refer to the manuals of the single TPS
components
relative humidity range: refer to the manuals of the single TPS
components
the turbomolecular pumps must be always soft-started when
received and operated for the first time by the customer
the shelf life of a turbomolecular pump is 12 months from the
shipping date.
CAUTION
!
If for any reason the shelf life time is exceeded, the pump has to be returned to
the factory. Please contact the local Agilent Vacuum Sales and Service
representative for informations.
Preparation for installation
The TPS-mini is supplied in a special protective packing. If this
shows signs of damage which may have occurred during transport,
contact your local sales office.
When unpacking the system, be sure not to drop it and avoid any
kind of sudden impact or shock vibration to it.
Do not dispose of the packing materials in an unauthorized manner.
The material is 100 % recyclable and complies with EEC Directive
85/399.

Instructions for Use
Installation
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CAUTION
!
In order to prevent outgassing problems, do not use bare hands to handle
components which will be exposed to vacuum. Always use gloves or other
appropriate protection.
Figure 1
NOTE Normal exposure to the environment cannot damage the TPS-mini .
Nevertheless, it is advisable to keep it closed until it is installed in the system,
thus preventing any form of pollution by dust.
Installation
CAUTION
!
Do not remove the adhesive and protective cap before connecting the
turbopump to the system.

16
Instructions for Use
Installation
258/318 TPS-mini User Manual / 87-901-003-01 (E)
Figure 2
Do not install or use the pump in an environment exposed to
atmospheric agents (rain, snow, ice), dust, aggressive gases, or in
explosive environments or those with a high fire risk. During
operation, the following environmental conditions must be respected:
maximum pressure: 2 bar above atmospheric pressure
temperature: refer to the manuals of the single TPS components
relative humidity: refer to the manuals of the single TPS
components.
In the presence of magnetic fields the pump must be protected using
a ferromagnetic shield. See the appendix "Technical Information" for
detailed information.
The TPS-mini can be installed in any position. Fix the TPS-mini in a
stable position connecting the inlet flange of the turbopump to a
fixed counter-flange capable of withstanding a torque of 50 Nm
around its axis.
The turbopump with ISO inlet flange must be fixed to the vacuum
chamber by means of clamps or claws. The following table shows, for
each fixing device, the necessary number of clamps or claws and the
relevant fixing torque.

Instructions for Use
Installation
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Tab. 1
FLANGE
FIXING DEVICE
N.
FIXING TORQUE
ISO 63
M10 clamps
4
22 Nm
M8 claws
4
11 Nm
The turbopump with ConFlat inlet flange must be fixed to the
vacuum chamber by means of the appropriate Agilent hardware. See
the appendix "Technical Information" for a detailed description.
NOTE The TPS-mini cannot be fixed by means of its base.
For installation of optional accessories, see "Technical Information".
WARNING!
The System must be installed in a way that allows an easy interruption of the
line voltage.
WARNING!
Power supply cord: The correct cable for electrical wiring is a three wires
(Ph+N+Earth) cable. The wire section has to be at least 0.75 mm2 (AWG18).

16
Instructions for Use
Installation
260/318 TPS-mini User Manual / 87-901-003-01 (E)
CAUTION
!
Assure a free space all around the system at minimum of 20 cm to allow proper
air circulation.

Instructions for Use
Use
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Use
This paragraph details the fundamental operating procedures.
Make all electrical an pneumatic connections before the use of the
system.
While heating the vacuum chamber, the temperature of the inlet
flange must not exceed 120 °C with ConFlat flanging and 80 °C with
ISO flanging.
WARNING!
Never use the turbopump when the inlet flange is not connected to the
vacuum chamber or is not blanked.
WARNING!
Do not touch the turbopump or any of its accessories during the heating
process. The high temperatures may cause burns.
WARNING!
Avoid impacts or harsh movements of the pump when in operation. The
bearings may become damaged and damages to the persons or the things
could be taken place.

16
Instructions for Use
Use
262/318 TPS-mini User Manual / 87-901-003-01 (E)
CAUTION
!
Use inert gas free from dust, particles or humidity (like Nitrogen) for venting the
pump. The pressure at the vent port must be less than 2 bar (above atmospheric
pressure).
WARNING!
When employing the pump for pumping toxic, flammable, or radioactive
gases, please follow the required procedures for each gas disposal.
Do not use the pump in presence of explosive gases.
Switching on and Use of TPS-mini
To switch on the TPS-mini it is sufficient to supply the mains and
then move the external switch to ON position (red light on). The
integrated controller automatically recognizes the mains presence
and start up the pump.
At the first start up it is recommended to use the "Soft Start" mode by
enabling it on the controller. For the following start ups it is
recommended to disable the "Soft Start" mode. For the "Soft Start"
mode activation procedure, see the paragraph "Signal Description" in
the chapter "Technical Information".

Instructions for Use
Use
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The blue LED “STATUS” located on the TPS-mini base front panel
indicates with its flashing frequency the system operating conditions:
with no flashing: the pump is normally rotating;
slowly flashing (period of about 400 ms): the system is in ramp,
or in braking, or in Stop, or in “Waiting for interlock” status;
fast flashing (period of about 200 ms): error condition.
See the appendix "Technical Information" for a detailed description
of the TPS-mini control panel.
TPS-mini Switching off
To switch off the TPS-mini it is sufficient to move the external switch
to OFF position (red light off). The integrated controller immediately
stops the pump.
Emergency Stop
To immediately stop the TPS-mini in an emergency condition it is
necessary to remove the supply cable from the mains plug or moving
the external switch to OFF position.

16
Instructions for Use
Maintenance
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Maintenance
The TPS-mini does not require any maintenance. Any work
performed on the system must be carried out by authorized
personnel.
WARNING!
Before carrying out any work on the system, disconnect it from the mains,
vent the pump by opening the appropriate valve, wait until the rotor has
stopped turning and wait until the surface temperature of the pump falls
below 50 °C.
In the case of breakdown, contact your local Agilent service center.
NOTE Before returning the system to the constructor for repairs, the "Request for
Return" sheet attached to this instruction manual must be filled-
in and sent to
the local sales office. A copy of the sheet must be inserted in the system
package before shipping.
If a system is to be scrapped, it must be disposed of in accordance
with the specific national standards.
Cleaning
The exterior surfaces of the TPS-Mini may be cleaned with mild
detergents only.

Instructions for Use
Disposal
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Disposal
Meaning of the "WEEE" logo found in labels.
The following symbol is applied in accordance with the EC WEEE
(Waste Electrical and Electronic Equipment) Directive.
This symbol (valid only in countries of the European Community)
indicates that the product it applies to must NOT be disposed of
together with ordinary domestic or industrial waste but must be sent
to a differentiated waste collection system.
The end user is therefore invited to contact the supplier of the device,
whether the Parent Company or a retailer, to initiate the collection
and disposal process after checking the contractual terms and
conditions of sale.
For more information refer to;
http://www.agilent.com/environment/product/index.shtml

16
Instructions for Use
Disposal
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TPS-mini User Manual
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Technical Information
Description of the TPS-mini 269
Turbopump Description269
Controller Description 271
Diaphragm Forepump Description 271
Control Panel Description 271
Technical Specification273
TPS-mini Outline 275
Inlet Screen Installation 278
High Vacuum Flange Connection 280
High Vacuum Flange Connection Configurations 282
Interconnections 283
Input Power Connector283
P1 – Vent 283
J5 – Gauge Connector 284
Pressure Display Module 285
J1 – IN-OUT 288
Signal Description 289
Original Instructions