Agilent Technologies TwisTorr 304 FS User manual

AGILENT TWISTORR 304 FS
QUICK REFERENCE GUIDE
Agilent TwisTorr 304FS
A quick, detailed reference guide to install and
operate the TwisTorr 304 FS.
1. Accessories and Conguration
2. Preparation for installation
3. Controller Connection and Start up sequence
4. Purge & Vent valve
5. How to enable the soft start
6. Troubleshooting: Pump and Controller
Vacuum Products

QUICK REFERENCE GUIDE
AGILENT TWISTORR 304FS
2
1. Accessories and Conguration
Accessories High Vacuum
Valve
Inlet Screen
Dry Scroll Technology
Rotary Vane Technology
Aluminium
Block Valves
Controller Unit
Suggested Agilent
Foreline pumps
SH 110
IDP 15
TS 300
DS 42
DS102/202/302
Active
Gauges
Vent Valve
Water Cooling
Air Cooling
Purge Valve
On board Navigator
24V - 110/220V
RACK 110/220 V
Available accessories and products to complete your perfect conguration. Images are for reference only

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AGILENT TWISTORR 304FS
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INLET SCREEN
Not supplied with the pump. The screen protects the pump
blades against solid particles.
Always use the appropriate inlet screen according to the
pump anges as shown in the table.
MECHANICAL FIXING
Pump can be installed in any position. However do not
operate the pump until it is safely and securely xed in a
stable position, mounting the inlet ange to the system
ange with a connection capable of withstanding a torque
of 1000 Nm around its axis.
All inlet ange bolts should be retightened once the system
is under vacuum.
Do not install/x the TMP through its base.
The safety condition in the table must be respected
COOLING REQUIREMENTS
TwisTorr 304FS can be water cooled or air cooled, according
to the pump model. The 304FS with the water cooling option
can also be air cooled but not the other way round.
Temperature requirements:
● Max forced cooling air temperature ≤ 35°C
● Max cooling water temperature ≤ 25°C
2. Preparation for Installation
ISO 100 X3500-68000
ISO 160 X3500-68001
CFF6’’ 9699302
CFF8’’ 9699304
ISO 100/160 4xM10 Claw-Clamps with xing torque 22Nm
CFF6’’ 16 screws with xing Torque 20Nm
CFF 8’’ 20 screws with xing torque 20Nm
For water cooling:
ow of 50 l/hr is mandatory if ambient temperature is
> 35°C or pumping high gas load.
If none of above conditions the air cooling can be used.
CONNECTION TO A FORELINE PUMP
As a backing pump use a dry scroll vacuum pump or a rotary
vane pump from the Agilent catalog.
Minimum requirement is SH110 (Dry)/DS102 (Wet). Backing
pump must have an ultimate pressure of < 5 mbar.
Connect the fore-vacuum line with small-ange components
or threaded hose couplings.
A valve can be also used in between the Turbo foreline and
the backing pump.
ACCESSORIES
A few accessories can be interfaced with turbopump and
controller:
Vent valve: different option available according to the
controller type, orice, with or without delay time and N.O.
or N.C. (see paragraph).
Purge: to be used in presence of heavy gases or Oxygen.
Wide 10 and 20 SCCM purge valves selection range is
available (see paragraph)
Gauges: only for 304AG RACK (contact Customer Care).
Valves: a complete series of valves can be interfaced witht
the 304FS for a full system compatibility. Check that the
accessories are well connected and xed properly and that
the vent screw is tightened properly.

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AGILENT TWISTORR 304FS
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3. Controller Connection and Start up Sequence
ELECTRONIC CONNECTION
A Power supply (Controller) is necessary to drive and operate the Turbopump. Connect the controller cable to the pump connector.
If turbopump has been stored or not used for a long period of time (> 6 months), the soft start procedure might be necessary. To
enable the soft start refers to the dedicated «How to enable the soft start» paragraph.
SWITCH ON THE TURBO PUMP
1) Via RS232 - Tplus software
● Connect the controller to the pump
● Connect a RS232 cable from a PC to the controller Serial
Port.
● Power on the controller
● Launch theTPlus Software. Enable the Serial mode.
● Connect the 15 pin mating connector to J1 connector
● Start the primary backing pump and reach a vacuum
pressure of < 1 mbar
● Pump can be started by pressing the «Start» button.
● To stop the pump select the Stop button and decelerate
the rotor by opening the vent screw of about ¼ to ½ turn.
● To vent the pump see the «Vent procedure» paragraph
2) Plug and pump:
● Connect the power supply
● Connect the pump cable to controller.
● Start the primary backing pump and reach a vacuum
pressure of < 1 mbar
● Connecting the 15 pin mating connector to J1 connector
the pump will start immediately.
● To stop the pump remove the J1 connector and
decelerate the rotor by opening the vent screw of about
¼ to ½ turn.
304 ON BOARD NAVIGATOR CONTROLLER
There are 2 ways to start the pump: using the
Tplus Software or by «plug and Pump»
304 AG RACK CONTROLLER
● Plug the 9 pin interlock connector (provided together
the controller) in the P1 IN connector. If not «waiting
interlock» message will appear and pump will not start).
Connect the main power cord.
● Start the primary pump and reach a vacuum pressure of
< 1 mbar
● Configure the controller to operate from the Front Panel
by pressing simultaneously the two upper buttons to
enter into the configuration menu and scroll till the
«configuration is displayed: select FRONT.
● Press again the two upper button simultaneously to exit
from configuration menu.
● Press the START button to run the pump. Press the
STOP button to stop the pump.
● To vent the pump please see the «vent Procedure»
paragraph.

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AGILENT TWISTORR 304FS
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4. Purge and Vent Valve
How to vent the pump
Vent valve is Normally Open (N.O.)
● Available in 0.5 and 1.2 mm orice.
● Through Tplus (RS232)
● No setting available
● If the vent valve is connected to the controller
automatically at the stop button the vent valve will
open.
304 ON BOARD NAVIGATOR CONTROLLER
How to vent the pump (AG Rack Controller)
Vent valve is Normally Open (N.O.)
● Available in 0.5 and 1.2 mm orice.
● By using the Vent Valve (N.O)
● Opening delay and open valve time are both
selectable through front panel/via RS232
● Click on Stop button then the controller will
perform the procedure according to the settings.
304 AG RACK CONTROLLER
PURGE VALVE
There are several models of purge valve available with different inlet anges and orices (10 or 20 SCCM) to
protect the bearings from particulates, corrosive gases or O2that might be pumped.
Inert gas, such as Nitrogen or Argon must ow into the pump body around the upper bearing towards the fore
vacuum line.
To supply the inert purge gas (e. g. nitrogen) to the pump through the purge port, connect a gas purge valve
between the pressure regulator and the pump. Inlet ow rate should be 0.5 to 0.8 mbar l/s.
Unplug the purge screw and tight up the purge valve.
VENT VALVE
Vent valve is used to automatically vent the pump/vacuum system.
Connect the vent valve to the proper connector according to the controller model, J1 (Navigator) or J7 (Rack) and
follow the below instruction to vent the the pump throught the valve.

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AGILENT TWISTORR 304FS
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5. How to enable the Soft Start
(FACTORY DISABLED)
● Check that the 15 pin Interlock mating connector
(provided with the controller) is installed into J1
connector (if not «waiting interlock» message will appear
and pump will not start).
● Connect a RS232 cable from a PC to the controller Serial Port
● Power on the controller
● Launch theTPlus SW. And enable the SERIAL mode.
Select “Conguration” from the list / Select “Soft Start”
/ Select Enable
304 ON BOARD NAVIGATOR CONTROLLER
Controller is now ready to start in Soft Start mode.
● Connect the pump cable from the controller to Pump.
● Start the pump by clicking on START button
After the pump has reached the full speed it can be stopped
and then the Soft start can be disabled (it cannot be disabled
whilst the turbo is powered).
Please note that the Navigator controller is always congured
in Remote mode when powered on. To operate the pump via
SERIAL and activate the soft start click on Remote button.
If a PC is not available the soft start can be still be activated
by using the 15 pin mating connector, modifying the pin-out
7-9 and 8-15 through a jumper.
Check that the 9 pin interlock connector is properly
installed in the P1 IN connector, if not «check
connection» message will appear and pump will not
start).
● Power on the controller.
● Press simultaneously the two upper buttons to enter
into the conguration menu and scroll till the SOFT
START menu is displayed.
● Select YES and press the two upper buttons
simultaneously again to exit from conguration menu.
● Press the START button to run up the pump through
the Soft Start mode. During this phase the controller
will show «pump starting» message.
Once the rotor has reached the maximum speed the
soft start will need to be disabled after stopping the
pump by following the procedure in reverse mode.
If using a previous generation of controller (301 or
older) please contact Tech Support before starting the
pump.
304 AG RACK CONTROLLER

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AGILENT TWISTORR 304FS
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CONTROLLER MESSAGE CAUSE RESOLUTION
NO MESSAGE
The controller does not turn on
No voltage to the unit ● Check for cable connection between mains power and
the controller.
● Check for cable integrity.
WAITING INTERLOCK
Navigator: LED is fast ashing*
T-Plus: pump status 205
Rack AG: message on display
The interlock jumper on remote I/O connector
is missing or faulty
J1 on Navigator
P1 on Rack AG
Navigator controller: short pin 3-9 and 4-15.
Rack controller, short pin 3-8.
A mating connector with interlock contact is provided
inside the accessory bag.
AUTOTUNING
Navigator: LED?
T-Plus: pump status 205
Rack AG: message on display
Autotuning is not an error condition but a
specic working condition when pump is not
able to reach/maintain the full speed, due to:
● Excessive gas load
● System leak
● Bad foreline pressure (> 15 mbar)
● Bearing issue or rotor sized.
After 15 minute of AUTOTUNING, an error
message is displayed.
● Check the foreline pressure (<15mbar).
● Check for leak in the system.
● Verify vent and purge screws/valves to be closed or
properly working.
● Check the gas load in the chamber.
● Check if rotor spins freely; if not, replace the pump.
PUMP OVERTEMPERATURE
Navigator: LED is fast ashing*
T-Plus: error code 2
Rack AG: message I displayed
Controller has measured a temperature at the
upper bearing > 60°C
Wait till the pump temperature has decreased, then if,
after restarting the pump the message is still present:
● Check if power and current consumption have
increased, there may be a bearing issue.
● Check if cooling fan/water is working properly.
● Check if the rotor spins freely. If not, replace the pump.
CONTROLLER OVERTEMPERATURE
Navigator: LED is fast ashing*
T-Plus: error code 4
Rack AG: message I displayed
The temperature inside the control unit has
increased >60°C
Temperature of the MOS > 60°C
Temperature transformer > 90°C
Internal Fan fault
Ambient temperature too high
Wait till the controller temperature has decreased.
Then after restarting the controller the message is still
present:
● Check if the internal cooling fan is working properly.
● Check if ambient temperature is according to
requirements.
6. Troubleshooting - Pump and Controller
* Fast ashing : 400 msec / ** Slow Flashing: 200 msec

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AGILENT TWISTORR 304FS
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* Fast ashing : 400 msec / ** Slow Flashing: 200 msec
CONTROLLER MESSAGE CAUSE RESOLUTION
POWER FAIL
Navigator: LED is fast ashing*
T-Plus: error code 8
Rack AG: message I displayed
Internal bus voltage is too low Replace the controller.
VERIFY LINE SELECT
Navigator: LED is fast ashing*
T-Plus: error code 16
Rack AG: message I displayed
The main voltage is out of range
(100-240 V or 24V)
Check the main voltage, there could be spikes in the
main power or it’s not regular
OVERVOLTAGE/UNDERVOLTAGE
Navigator: LED is fast ashing*
T-Plus: error code 32
Rack AG: message I displayed
Vbus > fail threshold
Vbus < fail threshold
Check if error is duplicated without the pump (put
10 KOHM between pins A and F on the pump cable
connector)
Yes à replace the controller;
No à error is not in the controller; check for
external electrical noise.
SHORT CIRCUIT
Navigator: LED is fast ashing*
T-Plus: error code 64
Rack AG: message I displayed
Loss of insulation motor windings in relation to
ground
Ramp currents too high (Vbus control not correct)
One or more Mosfet is/are faulty, shorted (after
start) or in some cases interrupted (during ramp)
Connection of a phase interrupted (controller/cable/
pump), generally displayed during the ramp up.
Contact Agilent Customer Care and ask for dedicated
“Short Circuit” Test Procedure.
TOO HIGH LOAD
Navigator: LED is fast ashing*
T-Plus: error code 128
Rack AG: message I displayed
There is a too high load.
Gas load in the chamber is too high, or exceeds the
pump’s specications.
Friction in the pump rotor; it does not rotate freely.
● Check the foreline pressure, < 15 mbar.
● Check for pump parameters (current-power-
temperature) with no gas load.
● Check for leak in the system.
● Check if the rotor spins freely; if not, replace the
pump.
Pump remains at 100 HZ
Navigator: slow ashing
T-plus: pump is starting
Rack AG: 100 Hz is displayed
Large leak
Vent screw is open
Rotor is seized
Check the system for leaks.
Check the vent valve to be closed.
Check if the rotor spins freely.
If not, replace the pump.