Agilent Technologies IDP-15 User manual

DRAFT 8/22/13
INSTRUCTION MANUAL
Vacuum Products Division
IDP-15
Dry Scroll
Vacuum Pump
Manual No. X3815 90000
Revision B
August 2013

DRAFT 8/22/13
Copyright 2013
Agilent, Inc.
IDP-15
Dry Scroll Vacuum Pump

3
IDP-15 Dry Scroll Vacuum Pump
DRAFT 8/22/13
Warranty
Products manufactured by Seller are warranted against defects in materials and workmanship for twelve (12) months from
date of shipment thereof to Customer, and Seller's liability under valid warranty claims is limited, at the option of Seller, to
repair, to replace, or refund of an equitable portion of the purchase price of the Product. Items expendable in normal use
are not covered by this warranty. All warranty replacement or repair of parts shall be limited to equipment malfunctions
which, in the sole opinion of Seller, are due or traceable to defects in original materials or workmanship. All obligations of
Seller under this warranty shall cease in the event of abuse, accident, alteration, misuse, or neglect of the equipment.
In-warranty repaired or replaced parts are warranted only for the remaining unexpired portion of the original warranty
period applicable to the repaired or replaced parts. After expiration of the applicable warranty period, Customer shall be
charged at the then current prices for parts, labor, and transportation.
Reasonable care must be used to avoid hazards. Seller expressly disclaims responsibility for loss or damage caused by use
of its Products other than in accordance with proper operating procedures.
Except as stated herein, Seller makes no warranty, expressed or implied (either in fact or by operation of law), statutory or
otherwise; and, except as stated herein, Seller shall have no liability under any warranty, expressed or implied (either in
fact or by operation of law), statutory or otherwise. Statements made by any person, including representatives of Seller,
which are inconsistent or in conflict with the terms of this warranty shall not be binding upon Seller unless reduced to
writing and approved by an officer of Seller.
Warranty Replacement and Adjustment
All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto, and must be
received within the applicable warranty period by Seller or its authorized representative. Such claims should include the
Product serial number, the date of shipment, and a full description of the circumstances giving rise to the claim. Before any
Products are returned for repair and/or adjustment, written authorization from Seller or its authorized representative for the
return and instructions as to how and where these Products should be returned must be obtained. Any Product returned to
Seller for examination shall be prepaid via the means of transportation indicated as acceptable by Seller. Seller reserves
the right to reject any warranty claim not promptly reported and any warranty claim on any item that has been altered or
has been returned by non-acceptable means of transportation. When any Product is returned for examination and inspec-
tion, or for any other reason, Customer shall be responsible for all damage resulting from improper packing or handling,
and for loss in transit, notwithstanding any defect or non-conformity in the Product. In all cases, Seller has the sole respon-
sibility for determining the cause and nature of failure, and Seller's determination with regard thereto shall be final.
If it is found that Seller's Product has been returned without cause and is still serviceable, Customer will be notified and
the Product returned at the Customer's expense; in addition, a charge for testing and examination may be made on Prod-
ucts so returned.

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Contents
Instructions for Use ........................................................................................................................... 7
General Information ..................................................................................................................... 7
Storage.................................................................................................................................... 8
Maintenance ................................................................................................................................. 8
Technical Information ......................................................................................................................... 9
Unpacking and Inspection........................................................................................................... 13
Preparation for Installation ....................................................................................................13
Installation................................................................................................................................... 14
Safety .................................................................................................................................... 14
Setting the Mains Voltage ..................................................................................................... 15
Startup................................................................................................................................... 15
Electrical Connections........................................................................................................... 16
Run Currents......................................................................................................................... 18
Start Current.......................................................................................................................... 18
Mechanical Connections ....................................................................................................... 19
Operation .................................................................................................................................... 20
Cleaning the Pump................................................................................................................ 20
IDP-15 Integrated Isolation Valve ...............................................................................................20
Troubleshooting .......................................................................................................................... 22
Maintenance ............................................................................................................................... 23
Cleaning ................................................................................................................................ 23
Kits and Service Options....................................................................................................... 23
Tip Seal Replacement........................................................................................................... 24

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IDP-15 Dry Scroll Vacuum Pump
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Instructions for Use
General Information
This equipment is designed for use by professionals. The user should read this
instruction manual and any other additional information supplied by Agilent before
operating the equipment. Agilent will not be held responsible for any events that occur
due to non-compliance with these instructions, improper use by untrained persons,
non-authorized interference with the equipment, or any action contrary to that provided
for by specific national standards.
The IDP-15 is a hermetic, dry scroll vacuum pump. This pump is suitable for pumping air
or inert gases. The pump is not intended to pump corrosive, explosive, or
particulate-forming gases.
The following paragraphs contain all the information necessary to guarantee the safety of
the operator when using the equipment. Detailed information is supplied in “Technical
Information” on page 10.
This manual uses the following standard safety protocol:
WARNING The warning messages are for attracting the attention of the
operator to a particular procedure or practice which, if not
followed correctly, could lead to serious injury.
CAUTION The caution messages are displayed before procedures,
which if not followed, could cause damage to the equipment.
NOTE The notes contain important information taken from the text.

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Storage
When transporting and storing the pump, the following environmental requirements
should not be exceeded:
Maintenance
Personnel responsible for pump operation and maintenance must be well-trained and
aware of the accident prevention rules.
WARNING ❑Death may result from contact with high voltages. Always take
extreme care and observe the accident prevention regulations in
force.
❑When machine is powered up, be careful of moving parts and high
voltages.
❑If you have to perform maintenance on the pump after a considerable
time in operation, allow it to cool as the temperature of the interior
metal parts can be in excess of 60 °C.
❑Always disconnect your power supply to the pump before beginning
maintenance work.
NOTE Before returning the pump to the factory for repair, the “Health
and Safety” sheet attached to this instruction manual must be
completed and sent to the local sales office. A copy of the
sheet must be inserted in the pump package before shipping.
If a pump is to be discarded, it must be disposed of in accordance with specific national
standards.
Temperature: 20 °C to +60 °C (4 °F to 140 °F)
Relative humidity: 0 to 95% (non-condensing)
Atmospheric
pressure:
500 to 1060 hPa

IDP-15 Dry Scroll Vacuum Pump
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Technical Information
Table 1 Specifications
Model IDP-15 Dry Scroll Single Hermetic Vacuum Pump
Interface dimensions See Figure 1 on page 12
Peak pumping speed ❑50 Hz: 257 L/m, 15.4 m3/hr
❑60 Hz: 213 L/m, 12.8 m3/hr
Media No corrosive, explosive or particulate forming gases
Ultimate pressure 10 x 103Torr (13.3 x 103mbar)
Maximum inlet pressure 1.0 atmosphere (0 psig)
Maximum outlet pressure 6.5 psig
Inlet connection NW25
Exhaust connection NW16
Gas ballast 1/4" NPTF (two positions)
Water vapor handling per PNCUROP 6602:
❑Position 1: 20.7 g/hr
❑Position 2: 235 g/hr
Ambient operating temperature 5 °C to 40 °C (41 °F to 104 °F)
Storage temperature –20 °C to 60 °C (–4 °F to 140 °F)
Motor rating 0.75 HP (560 W)
Operating voltages ❑1 phase/ 100 (± 10%) VAC, 50/60 Hz
❑1 phase/ 115 (± 10%) VAC, 60 Hz
❑1 phase/ 220-230 (± 10%) VAC, 50/60 Hz
Run current See Table 5 on page 19
Motor thermal protection Automatic thermal protection
Operating speed 60 Hz: 1725 RPM, 50 Hz: 1450 RPM
Cooling system Air-cooled
Weight Pump only: 34 kg (75 lbs)
Shipping weight: 45 kg (100 lbs)
Leak rate (with exhaust and gas
ballast sealed)
<1 x 106sccs helium
Vibration level at inlet, per ISO
10816-1
9 mms-1 rms

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Noise level, per ISO 11201 50 dBA ± 2dBA
Fuse type Littelfuse, Series 215, 10 A, 250 V, 20 mm L x 5.2 mm D,
Time Delay / Slow Blow or equivalent, vendor part number 0215010
P.
Pollution Degree 2
Installation Category II
Altitude 2000 m
Humidity 0- 95% (non-condensing)
Indoor use only
Table 1 Specifications (Continued)

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Figure 1 Interface Drawing with Dimensions

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Figure 2 Outline Drawing and Principal Items
➀ Front Cowling Screws; M5 (6)
➁ Front Cowling
➂ Inlet (NW25)
➃ Inlet Screen
➄ Exhaust NW16
➅ Gas Ballast Port 1 (1/4" NPT filter plug,
provided)
➆ Gas Ballast Port 2 (1/4" NPT filter plug,
provided)
Mounting Holes
Rear Cowling Screws: M5 (2)
On/Off Switch/Power Connection
(IEC-320) and Fuse Holder
Hour Meter
Voltage Selector Switch
Access holes: shipping locks
Rear cowling
8
9
10
11
12
13
14

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Unpacking and Inspection
Preparation for Installation
The pump is supplied in a special protective packing. If this shows signs of damage,
which may have occurred during transport, contact your local sales office.
Total weight of the packing, IDP-15 pump included, is approximately 45.5 kg (100 lbs).
WARNING When unpacking the pump, be sure not to drop it and avoid
any kind of sudden impact or shock vibration to it.
NOTE Normal exposure to the environment cannot damage the
pump. Nevertheless, it is advisable to keep the pump inlet
closed until the pump is installed in the system.
CAUTION Before operating the IDP-15 disengage the shipping locks
(Figure 2 on page 13).
1. Orient the shipping container with This End Up on top.
2. Open the box, remove the foam block and carefully lift the IDP-15 out of the box.
Remove the plywood base.
3. Save the carton and all packing materials.
4. Inspect the pump for damage. If there is shipping damage, contact the freight carrier
and your local Agilent sales office immediately.
5. Loosen the two front and two rear cowling screws and slide the L-brackets up.
Retighten the cowling screws. The pump now rests on its rubber feet.
6. Disengage shipping locks and enable vibration isolation by inserting a 4 mm Allen
wrench into each of the four shipping lock access holes (Figure 2 on page 13) and
turning the screws clockwise until significant resistance occurs. The pump body is
now floating on its isolation mounts.
CAUTION Engage the shipping locks (Figure 2 on page 13) when
shipping, moving a long distance or during long-term storage.

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Installation
There are two versions of the IDP-15:
❑Fixed speed: 100-115/200-230 VAC, 50/60 Hz
❑Inverter drive: 100-115/200-230 VAC, 50/60 Hz, user-settable drive frequency,
40-75 Hz
During operation, the following environmental conditions must be respected:
Safety
WARNING Do not remove or modify any safety or insulating equipment
from the pump. To do so may create a serious safety hazard
and may void the warranty.
WARNING The pump is designed for operation with neutral or
noncorrosive gases. Do not use it with potentially explosive or
inflammable substances.
WARNING ❑This pump is capable of pumping air and inert gases only. It is not
designed to pump explosive, flammable, corrosive or particulate
forming gases. They can cause bodily injury, explosion, or fire.
❑Install in an area that is not exposed to rain, steam, or excessive
humidity. They can cause electric shock, short circuits, and severe
bodily injury.
❑Before inspecting or servicing the pump, be sure the electrical supply
is disconnected.
❑The gas ballast must be sealed whenever pumping any gas not
intended to be vented to the atmosphere
CAUTION ❑Although the pump can pump trace particulates normally found in the
atmosphere, it is not designed to process solids, chemicals, powders,
solvents, condensates, or other particulates. They can damage the
equipment, degrade its performance, or shorten its useful life.
❑Do not install or use the pump in an environment exposed to
atmospheric agents (rain, snow, ice), dust, aggressive gases, or in
explosive environments or those with a high fire risk.
❑If placing the IDP-15 pump inside an enclosure, provide ample room
to supply ambient air to both the front and rear air intakes of the
pump.
Temperature: +5 °C to +40 °C (41 °F to 104 °F)
Relative humidity: 0 to 95% (non-condensing)

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DRAFT 8/22/13
CAUTION Engage the shipping locks (Figure 2 on page 13) when
shipping, moving a long distance or during long-term storage.
CAUTION ❑Be certain that your electrical mains power voltage corresponds to
that indicated on the fuse/voltage switch.
❑Connect the pump to the power supply using an IEC-320 style power
cord of at least 10 A capacity.
Setting the Mains Voltage
To set the mains voltage:
❑Slide the voltage selector switch to 115 for 115-120 V mains, or to 230 for 200-230
V mains.
Startup
In order to reach maximum vacuum, the pump must be left running for about an hour with
the inlet sealed.
There are no special instructions for starting the pump; it need only be switched on using
the On/Off switch.
1. Check that the inlet screen is installed before beginning operation.
WARNING Do not insert a finger or any foreign object in the path of the
fan; serious personal injury may result or the pump may be
damaged.
2. Operate the pump at an ambient temperature of 5 °C to 40 °C (41 °F to 104 °F),
otherwise damage to the pump or shortened operating life may result.
CAUTION Do not block the fan ducts. Blocking these ducts can cause
pump overheating. A pump surface temperature in excess of
65 °C (150 °F) is potentially damaging. If such conditions are
observed, turn the pump off and allow it to cool. Disassemble,
inspect for damage, and repair, if necessary.

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Electrical Connections
For 100/115 V service, connect the IDP-15 to a 15 A circuit. Operation in a smaller
capacity circuit can cause nuisance circuit breaker trips when the motor is started,
especially if mains voltage is below 100 V.
When incorporating the IDP-15 into other equipment, only use circuit breakers rated for
the motor start service. Use of circuit breakers smaller than 15 A or that are not rated for
motor starting can result in nuisance trips.
Power Cord
Several power cord options are available from your Agilent dealer. Descriptions of the
available power cords and their ordering numbers are given in Table 3.
NOTE For high voltage operation, the pump must be connected to
the power supply using a high voltage IEC-320 type power
shielded cord of at least 10 A rated capacity.
CAUTION Be certain that your electrical mains power voltage
corresponds to that indicated on the rear of the pump.
Table 3 IDP-15 Power Cord Selection
Country Power Cord Specification Order
Europe 10 A / 220-230 VAC, 2.5 m 656494220
Denmark 10 A / 220-230 VAC, 2.5 m 656494225
Switzerland 10 A / 230 VAC, 2.5 m 656494235
UK/Ireland 13 A / 230 VAC, 2.5 m 656494250
India 10 A / 220-250 VAC, 2.5 m 656494245
Israel 10 A / 230 VAC, 2.5 m 656494230
Japan 12 A / 100 VAC, 2.3 m 656494240
North America
15 A / 125 VAC, 2.0 m 656458203
10 A / 230 VAC, 2.5 m 656494255

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Grounding Instructions
This product should be grounded. In the event of an electrical short circuit, grounding
reduces the risk of electric shock by providing an escape wire for the electric current. This
pump must be equipped with a power cord that has a grounding wire with an appropriate
grounding plug. The plug must be inserted into an outlet that is properly installed and
grounded in accordance with all local codes and ordinances.
WARNING Improper installation of the grounding plug can result in a risk
of electrical shock. For United States and Canadian
installations:
❑When this product is configured for use on a nominal 120 V circuit, it
must be used with a grounding plug that looks like the plug illustrated
in Figure 4.
❑If repair or replacement of the cord or plug is necessary, connect
the grounding wire to the grounding terminal only.
❑The grounding wire is insulated and its outer surface is green. It may
or may not have yellow stripes.
❑When this product is configured for use on a nominal 220 V circuit, it
must be used with a factory supplied cord and plug that permits
connection to the proper electric circuit. See “Electrical Connections”
on page 17 for proper rating and type of cord set.
WARNING ❑Check with a qualified electrician or serviceman if the grounding
instructions are not completely understood, or if you are in doubt as to
whether the product is properly grounded.
❑Do not modify the plug provided; if it does not fit the outlet, have the
proper outlet installed by a qualified electrician.
❑Connect the product only to an outlet that has the same configuration
as the plug. Do not use an adapter with this product.
Figure 4 Grounding Plug and Outlet
WARNING If the product must be reconnected for use on a different type
of electric circuit, the connector should be replaced by
qualified service personnel.
Extension Cords
Do not use extension cords.
Grounding Pin
Grounded
Outlet
Grounded
Outlet
Box

IDP-15 Dry Scroll Vacuum Pump
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Run Currents
Typical run currents listed in Table 5 are with pump blanked off.
Start Current
Table 6 lists the typical IDP-15 maximum starting current and duration.
Table 5 IDP-15 Typical Run Currents (A)
Frequency 100 V Nominal 115 V Nominal 220 V Nominal 230 V Nominal
90 V 100 V 110 V 103.5 V 115 V 127 V 198 V 220 V 230 V 253 V
60 Hz 4.23 4.06 4.02 4.03 4.06 4.74 2.87 2.77 2.64 2.51
50 Hz 4.20 4.50 6.13 N/A N/A N/A 1.93 2.42 2.81 4.02
Table 6 Typical IDP-15 Maximum Starting Current and Duration
Mains
Voltage
50 Hz 60 Hz
Current (A) Time (ms) Current (A) Time (ms)
100 V 22.6 < 1 sec. 23.5 < 1 sec.
115 V N/A N/A 21.2 < 1 sec.
220 V 11.9 < 1 sec. 14.2 < 1 sec.
230 V 11.7 < 1 sec. 13.9 < 1 sec.

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Mechanical Connections
Pump Inlet
Use NW25, or larger, clean vacuum hardware with as short a length as practical between
the pump and vacuum chamber.
Insert a bellows between the pump and vacuum chamber to provide both vibration
isolation and strain relief.
Pump Exhaust
An NW16 exhaust fitting is located on the side of the pump. To avoid overheating the
pump, do not restrict the exhaust flow with long lengths of small diameter tubing. Use as
short as practical lengths of 16 mm ID, or larger, diameter hardware.
Gas Ballast
When pumping gas loads containing water vapor or condensable gases, use the gas
ballast. To activate gas ballast, remove the solid 1/4 NPT plug from either port 1 or port 2,
and install the sintered filter plug provided with the pump (see Figure 2 on page 13).
CAUTION If hazardous materials are pumped, do not use gas ballast.
Gas ballast port 1 is used for moderate water vapor loads (up to 20.7 g/hr), such as
intermittently pumping out a volume exposed to normal ambient humidity. Gas ballast port
2 is used for high water vapor loads (up to 235 g/hr), such as repetitively pumping out a
volume exposed to excessive ambient humidity, or process gas loads with a high water
vapor content.
For applications where ingress of air is undesirable, dry nitrogen at a flow rate of
approximately 5 l/min can be provided to the gas ballast inlet by making a 1/4 NPT
connection to the port.
CAUTION Pumping high water vapor loads can cause a temporary
increase in ultimate pressure, due to adsorption and
absorption of water vapor by the internal surfaces of the
pump. Pumping water vapor loads in excess of the water
vapor handling capability of the gas ballast can cause
reduced time between tip seal replacements.

IDP-15 Dry Scroll Vacuum Pump
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Operation
Cleaning the Pump
Unlike conventional oil-sealed pumps, Agilent dry scroll pumps do not contain fluid for the
cleansing of accumulated dust and debris. Run the pump periodically with the inlet open
to atmosphere for a minute or two to flush it out. Until experience is gained on your
specific process, flush the pump regularly and adjust this schedule according to your
specific conditions.
IDP-15 Integrated Isolation Valve
The IDP-15 scroll pump offers an optional, factory-installed Integrated Isolation Valve built
into pump module. This option is installed into the body of the pump and does not affect
the external size of the pump or the height of the inlet flange.
All IDP-15 scroll pumps are supplied with an exhaust valve to prevent rapid leak-up to
atmospheric pressure. However, any vacuum pump generates a small increase in inlet
line pressure when turned off. This can cause a small amount of pump debris to be
carried back into the vacuum line or chamber when pump power is interrupted. For
applications where the process is sensitive to contamination from pump debris, install a
fast acting, automatic, normally closed valve at the pump inlet to prevent pump debris
from migrating backwards through the pump inlet.
The Integrated Isolation Valve is a safety valve that protects the vacuum system in the
event of power failure by isolating the vacuum system from the vacuum pump and venting
the pump to atmospheric pressure. The Integrated Isolation Valve is designed to prevent
any tip seal debris back streaming into the vacuum system. The valve operates with
atmospheric pressure and activates upon loss of electrical power. The lifetime is in
excess of 200,000 cycles, which translates into years of trouble free use in suitable
environments. The opening burst pressure, approximately 5 x-10-2 Torr, is typically less
than the critical backing pressure for turbo molecular and diffusion pumps.
The Integrated Isolation Valve's solenoid valve is connected in parallel with the IDP-15
electrical supply. When the electrical power is on, the solenoid valve is closed, which
allows the pump to keep the Integrated Isolation Valve's body and the vacuum system
evacuated. Interruption of electrical power to the pump causes the solenoid valve to
open. Air is admitted into the Integrated Isolation Valve causing it to close very quickly.
This isolates the vacuum system from the pump, while the pressure differential between
the outside atmosphere (inside the pump) and the vacuum system provides the force
necessary to maintain the valve in its closed position without electric or pneumatic power.