Agilent Technologies TriScroll 610 User manual

D R A F T 4 / 1 4 / 11
INSTALLATION AND
OPERATION MANUAL
Vacuum Products Division
TriScroll
TM
610
Dry Scroll
Vacuum Pump
Manual No.699904295
Revision F
February 2005

D R A F T 4 / 1 4 / 11
Copyright 2005
Agilent, Inc.
TriScroll
™
610
Dry Scroll Vacuum Pump
TriScroll is a trademark of Agilent.
Loctite and PST are registered trademarks of Loctite Corporation.
Krytox, Teflon and Viton are registered trademarks of E. I. du Pont de Nemours and Company.

TriScroll 610 Dry Scroll Vacuum Pump
D R A F T 4 / 1 4 / 1 1
iii
Contents
Contacting Agilent . . . . . . . . . . . . . . . . . . . . . . . . . vi
Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
Unpacking and Inspection . . . . . . . . . . . . . . . . . . . . 4
Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
Electrical Connections . . . . . . . . . . . . . . . . . . . . . 6
Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
Start Up Procedure . . . . . . . . . . . . . . . . . . . . . . 11
Shutdown Procedure . . . . . . . . . . . . . . . . . . . . . 11
Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
TriScroll 600 Series Maintenance Manual . . . . . . . 13
General Information . . . . . . . . . . . . . . . . . . . . . 13

TriScroll 610 Dry Scroll Vacuum Pump
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D R A F T 4 / 1 4 / 1 1

Agilent, Inc.
declare under our sole responsibility that the product,
erklären, in alleniniger Verantwortung, daß dieses Produkt,
déclarons sous notre seule responsabilité que le produit,
declaramos, bajo nuestra sola responsabilidad, que el producto,
verklaren onder onze verantwoordelijkheid, dat het product,
dichiariamo sotto nostra unica responsabilità, che il prodotto,
Declaration of Conformity
Konformitätserklärung
Déclaration de Conformité
Declaración de Conformidad
Verklaring de Overeenstemming
Dichiarazione di Conformità
to which this declaration relates is in conformity with the following standard(s) or other normative documents.
auf das sich diese Erklärung bezieht, mit der/den flogenden Norm(en) oder Richtlinie(n) übereinstimmt.
auquel se réfère cette déclaration est conforme à la (auz) norme(s) ou au(x) document(s) normatif(s).
al que se refiere esta declaración es conforme a la(s) norma(s) u otro(s) documento(s) normativo(s).
waamaar deze verklaring verwijst, aan de volende norm(en) of richtlijn(en) beantwoodt.
a cui se rifersce questa dichiarazione è conforme alla/e sequente/I norma/o documento/I normativo/i.
John Ehmann
Operations Manager
Agilent, Inc.
We
Wir
Nous
Nosotros
Wij
Noi Lexington, MA, 02421-3133 USA
121 Hartwell Avenue
Vacuum Products Division
Lexington, Massachusetts, USA
Agilent, Inc.
98/37/EEC, Machinery Directive
EN 1012-2:1996 Compressors and Vacuum Pumps Safety Requirements; Part 2 Vacuum Pumps
EN 1050:1996 Safety of machinery - principles for risk assessment
EN 60204-1 Electrical equipment of industrial machines; general requirements
73/023/EEC, Low Voltage Directive
EN 60034 part 1 Rotating electrical machines - Part 1: Rating and performance
89/336/EEC, Electromagnetic Compatibility Directive
EN 61000-4-2 Testing and Measurement Techniques - Electrostatic Discharge Immunity Test
TriScroll Series Vacuum Pump
Declaration of Conformity
March 2003

vi
TriScroll 610 Dry Scroll Vacuum Pump
D R A F T 4 / 1 4 / 11
Contacting Agilent
In the United States, you can contact Agilent Customer Service at 1-800-882-7426. See the back cover
of this manual for a listing of our sales and service offices.
Visit our web site at:
http://www.chem.agilent.com/en-US/Products/Instruments/vacuum/pages/default.aspx.

1
TriScroll 610 Dry Scroll Vacuum Pump
Specifications
Figure 1 TriScroll 610 Vacuum Pump (Single Phase Pump)
Table 1 lists the TriScroll 610 specifications.
Table 1 Specifications
Item Specification
Model TriScroll 610
Interface dimensions See Figure 2 on page 3
Peak pumping speed 50 Hz: 420 I/m, 25.2 m3/hr, 14.8 cfm
60 Hz: 500 I/m, 30 m3/hr, 17.6 cfm
Ultimate pressure (Torr) 7.0 x 10
-3
Torr (9.3 x 10
-3
mbar)
Maximum inlet pressure One atmosphere
Inlet connection NW40
Exhaust connection 3/8" Female National Pipe Thread
(NW25 adapter provided)
Ambient operating temperature 5 °C to 40 °C (41 °F to 104 °F)
Storage temperature -20 °C to 60 °C (-4 °F to 140 °F)

TriScroll 610 Dry Scroll Vacuum Pump
2
Motor rating
Single phase model PIN -
PTS06001 UNIV
Three phase model PIN -
PTS06003UNIV
1.00 HP (0.75 kW)
1 phase/50-60 HZ/1 00-115:200-230 VAC
1.00 HP (0.75 kW)
3 phase/50 Hz/200-230:380-415 VAC
3 Phase/60 Hz/200-230:460 VAC
Motor full load currents See Table 2
Motor thermal protection Type N automatic
Operating speed 1725 RPM; 60 Hz
1425 RPM; 50 Hz
Cooling system Air-cooled
Weight 31 kg (69 Ibs).
Media Clean air. No toxic, corrosive, explosive or
particulate forming gases.
Table 1 Specifications (Continued)
Item Specification

3
TriScroll 610 Dry Scroll Vacuum Pump
Figure 2 TriScroll 610 Vacuum Pump Interface Drawing

TriScroll 610 Dry Scroll Vacuum Pump
4
Figure 3 TriScroll 610 Vacuum Pump Speed Curves
Unpacking and Inspection
The shipping container is a double carton. After opening the outer box, removing the foam packing and this manual, slit
open the inner box. Lift the pump, with plywood base, out of the inner box. Remove the four bolts securing the pump
frame to the plywood base. Locate the NW25 exhaust fitting and set aside. Inspect the pump for damage. If there is
shipping damage, contact the freight carrier immediately and be sure to save the carton and packing materials.

5
TriScroll 610 Dry Scroll Vacuum Pump
Installation
Safety
Installation
Startup
WARNING Do not remove or modify any safety or
insulating equipment from the pump.
To do so may create a serious safety
hazard and may void the warranty.
This pump is designed to pump air only;
it is not designed to pump explosive,
flammable, toxic, or corrosive gases.
They can cause bodily injury, explo-
sion, or fire.
Although the pump can pump trace
particulates normally found in the
atmosphere, it is not designed for pro-
cess solids, chemicals, powders, sol-
vents, condensates, or particulates.
They can damage the equipment,
degrade its performance, or shorten its
useful life.
This pump is designed to pump air only;
it is not designed to pump explosive,
flammable, toxic, or corrosive gases.
They can cause bodily injury, explo-
sion, or fire.
Although the pump can pump trace
particulates normally found in the
atmosphere, it is not designed for pro-
cess solids, chemicals, powders, sol-
vents, condensates, or particulates.
They can damage the equipment,
degrade its performance, or shorten its
useful life.
Install in an area that is not exposed to
rain, steam, or excessive humidity. They
can cause electric shock, short circuits,
and severe bodily injury.
WARNING Before inspecting or servicing the
pump, be sure the electrical supply is
disconnected.
Consult a qualified electrician when-
ever changing wiring on the pump.
Protect against short circuits by install-
ing a circuit breaker of the proper
capacity.
CAUTION Consult a qualified electrician when-
ever changing wiring on the pump.
The pump operates in a clockwise
direction when viewed from the motor
end. (Note the arrow on the pump
frame.) Improper rotation can cause
permanent damage to the pump.
NOTE Check that the inlet screen is installed
in each pump model before beginning
operation.
WARNING Do not insert a finger or foreign object
in the path of the fan; serious personal
injury may result or the pump may be
damaged.
CAUTION Do not block the fan ducts because the
pump can become overheated. A pump
surface temperature in excess of 55 °C
(131 °F) is potentially damaging. If such
conditions are observed, turn the pump
off and allow it to cool. Disassemble,
inspect for damage, and repair if neces-
sary.
Operate the pump at the ambient tem-
perature of 5 °C to 40 ° C (41 °F to 104
°F), otherwise damage to the pump or
shortened operating life may result.
Close the isolation valve between the
vacuum pump and the vacuum cham-
ber before startup or shutdown; debris
may be sucked back into the vacuum
chamber.

TriScroll 610 Dry Scroll Vacuum Pump
6
Electrical Connections
Wire the motor and electrical interlocks (if applicable) in accordance with local electrical codes and the relevant electrical
component manufacturer's instructions. Table 2 lists the full load motor currents in Amps at various voltages.
Table 2 TriScroll 610 Full Load Motor Currents
VAC
100 115 200 230
1 phase motor 50 Hz
14.0 13.6 7.0 6.8
1 phase motor 60 Hz
15.2 12.6 7.6 6.3
VAC
200 230 380 415 460
3 phase motor 50 Hz
4.4 4.4 2.2 2.2 -
3 phase motor 60 Hz
4.4 4.4 - - 2.2

7
TriScroll 610 Dry Scroll Vacuum Pump
Single Phase Motor Connection
1. Remove the motor cover (item 13 in Figure 1 on
page 1) by removing three screws (items 12 in
Figure 1 on page 1).
2. Check the electrical supply voltage. The motor can
be wired for low (100-115) or high (200-230) voltage.
3. As supplied from the factory, the single phase motor
is wired for low voltage. Refer to Figure 4 to
configure the motor circuit to match your supply
voltage.
4. Two options are available to strain relieve the
electrical supply cable. The cable can be
mechanically held under the electrical cover in the
groove provided. The groove is sized for a 14 gauge
cable. A 1;2 -14 NPSM hole is also provided next to
the motor cover. (The clamp fitting is not provided.)
5. Wire L 1 and L2 per Figure 4 using right angle flag
connectors or ring connectors. Make certain that no
exposed wiring is in proximity to the electrical cover
or to other terminals on the board.
6. Secure the ground wire under the ground screw using
a ring connector.
7. Install the motor electrical cover with three (3)
screws.
Figure 4 Motor Electrical Connections: 1 Phase Motor
5
.4.
1.
2.
High Voltage
..
Low Voltage
5
.4.
1.
2.
L1 Power Cord L1 Power Cord
Blue (Internal)
VPI Valve (Optional)
L2 Power Cord
VPI Valve (Optional)
Violet Violet (Internal)
VPI Valve (Optional)
Blue (Internal)
L2 Power Cord
VPI Valve (Optional)

TriScroll 610 Dry Scroll Vacuum Pump
8
Three Phase Motor Connection
1. Remove the motor cover (item 13 in Figure 1) by
removing three screws (items 12 in Figure 1 on
page 1).
2. Check the electrical supply voltage. The motor can
be wired for low (200 - 230) or high (380 - 415, 460)
voltage. As supplied from the factory, the three phase
motor is wired for low voltage. Refer to Figure 5 on
page 8 to configure the motor circuit to match your
supply voltage.
Two options are available to strain relieve the
electrical supply cable. The cable can be
mechanically held under the electrical cover in the
groove provided. The groove is sized for a 14 gauge
cable. A 1/2 -14 NPSM hole is also provided next to
the motor cover. (The clamp fitting is not provided.)
3. Wire L 1, L2 and L3 per Figure 5 using right angle flag
connectors or ring connectors. Make certain that no
exposed wiring is in proximity to the electrical cover
or to other terminals on the board.
4. Secure the ground wire under the ground screw using
a ring connector.
5. Install the motor electrical cover with three (3)
screws.
6. Momentarily switch on the pump to verify proper
rotation. With the intake uncovered, a large gas flow
should come out the pump exhaust. If there is no
flow out the exhaust, reverse any two of the leads (L
1, L2 or L3). Repeat the test to verify correct rotation.
Figure 5 Motor Electrical Connections: 3 Phase Motor
Mechanical Connections
Pump Location
Locate the pump on a firm, level surface. Mounting holes
provided in the frame can be used to provide permanent
attachment. The rubber feet on the frame can be removed
if desired.
Isolation Valve
Because scroll pumps return to atmospheric pressure
quickly when shut off, the installation of a fast acting,
automatic, normally closed isolation valve is strongly
recommended to prevent pump debris from being
transported back into the vacuum chamber when the
pump is turned off. The opening of this valve should
occur simultaneously with or after pump start up. Valve
closing should occur before, simultaneously with, but no
later than 250 milliseconds after pump shut off. This valve
should be NW40 or larger and mounted as close as
possible to the pump inlet. Mounting to the pump inlet is
ideal (see Figure 6).
7 8 9
. . .
. . .
. . .
5
2
6
3
4
1
High Voltage
.
L1
VPI Valve (Optional)
VPI Valve (Optional)
L3
L2
RED (7) ORG (5)
YEL (6)
BLU (9)
7 8 9
. . .
. . .
. . .
5
2
6
3
4
1
Low Voltage
.
L1
VPI Valve
(Optional)
L3
L2
WHT (8)
YEL (6) RED (7)
BRN (4)
BLU (9)
ORG (5)
VPI Valve
(Optional)

9
TriScroll 610 Dry Scroll Vacuum Pump
Figure 6 Isolation Valve Location
Agilent offers a variety of manual, electromagnetic and electro-pneumatic controlled vacuum valves for vacuum
applications. The Agilent Vacuum Pump Isolation (VPI) Valve is highly recommended for vacuum pump isolation
applications. The VPI valve application and installation information for use with TriScroll vacuum pumps has been
included below. Consult your Agilent catalog or sales representative for the appropriate valve for your application.
Table 3 VPI Valve Installation Data
TriScroll Vacuum Pump VPI Valve Part #
NW25
VPI Valve Part #
NW40
Solenoid Operating Volt-
age Range
Wiring Diagram
100-120 V 50/60 Hz 1
Phase
VPI251205060 VPI401205060 90-132 V 50/60 Hz Figure 4 on
page 7 low
voltage
200-230 V 50/60 Hz 1
Phase
VPI251205060 VPI401205060 90-132 V 50/60 Hz Figure 4 on
page 7 high
voltage
200 V 50/60 Hz
3 Phase
VPI251205060 VPI401205060 90-132 V 50/60 Hz* Figure 5 on
page 8 low
voltage
230 V 50/60 Hz
3 Phase
VPI251335060 VPI401335060 120-146 V
50/60 Hz*
Figure 5 on
page 8 low
voltage
380 V 50/60 Hz
3 Phase
VPI252205060 VPI402205060 180-264 V
50/60 Hz*
Figure 5 on
page 8 high
voltage
415 V 50/60 Hz
3 Phase
VPI252205060 VPI402205060 180-264 V
50/60 Hz*
Figure 5 on
page 8 high
voltage

TriScroll 610 Dry Scroll Vacuum Pump
10
* Solenoid operating voltages are lower than the TriScroll
vacuum pump operating voltages in order to utilize the
TriScroll motor's internal thermal switch to actuate the
VPI Valve.
Overview
When installed correctly, the position of the VPI Valve is
controlled by the TriScroll vacuum pump motor internal
thermal switch and its electrical supply. The VPI Valve
will open when the pump is running and close when it is
stopped. It will also close if the TriScroll motor thermal
overload protection switch shuts down the pump.
NOTE To prevent damage to the VPI Valve it
must be installed only as specified bel-
low.
Wiring
Reference Table 3 to verify that the VPI Valve to be
installed is compatible with the TriScroll Vacuum Pump
supply voltage and frequency. Then, find the proper
wiring diagram to use from Table 2. Remove the pump
motor cover and connect the VPI Valve solenoid wire
leads to the pump motor as shown in the diagram.
Replace the pump motor cover, and verify that the valve
is properly grounded prior to applying electrical power.
Rotation of Pump Module with Respect to Frame
The standard pump configuration is the intake fitting
positioned vertically. If necessary for installation, the
pump intake can be rotated 90° in either direction.
(Installation at angles other than 0° and ± 90° is not
possible.)
A.
1. Remove two (2) M5 screws (item 14 on figure 1) that
secure the inlet fitting to the scroll module.
2. Remove the inlet fitting, complete with the inlet
screen, inlet clamp and inlet O-ring.
3. Remove three (3) M5 screws (item 1 on Figure 1 on
page 1) that secure the cowling to the scroll module.
Remove the cowling.
4. Tilt the pump back so that the rear end of the motor
touches the floor.
5. Remove four (4) M6 screws (item 8 on Figure 1 on
page 1) holding the frame and scroll module together.
0 Axially separate the frame and scroll module.
6. Rotate the module 90° in either direction and realign
the two (2) locating pins on the scroll module with
the mating frame holes. Ensure that the rubber spider
is still on the motor coupling and that the coupling
teeth are properly aligned.
7. Rejoin the scroll module with the frame and install
and tighten four (4) M6 screws.
8. Reinstall the cowling using three (3) M5 screws.
B.
❑ Reinstall the inlet fitting, inlet screen, inlet clamp
and inlet O-ring using two (2) M5 screws.
Pump Inlet
Use NW40, or larger, clean vacuum hardware with as
short a length as practical between the pump and vacuum
chamber.
Use a bellows to provide both vibration isolation and
strain relief between the pump and vacuum chamber.
Pump Exhaust
A female 3/8 National Pipe Thread exhaust fitting is
located underneath the scroll module. This fitting swivels
360°. Additionally, a NW25 adapter is provided with a
3/8 National Pipe Thread male thread.
To avoid overheating the pump, do not restrict the
exhaust flow with long lengths of small diameter tubing.
Use as short as practical lengths of NW16, or larger,
diameter hardware.
460 V 50/60 Hz
3 Phase
VPI252665060 VPI402665060 239-293 V
50/60 Hz*
Figure 5 on
page 8 high
voltage
Table 3 VPI Valve Installation Data (Continued)
TriScroll Vacuum Pump VPI Valve Part #
NW25
VPI Valve Part #
NW40
Solenoid Operating Volt-
age Range
Wiring Diagram

11
TriScroll 610 Dry Scroll Vacuum Pump
Gas Ballast
The pump incorporates an automatic gas ballast to
prevent water and other condensates from accumulating
within the pump. The standard configuration is a sintered
filter installed in the 1/4 National Pipe Thread gas ballast
port (item 9 on Figure 1 on page 1). This allows enough
atmospheric air to enter the pump in order to purge
condensates while not effecting pump ultimate pressure
or pumping speed.
For applications where the ingress of atmospheric air is
undesirable, dry nitrogen at a flow rate of -5 lpm can be
bled into the gas ballast port. Blocking of the gas ballast
port is not recommended.
Bearing Purge
A 1/4 National Pipe Thread bearing purge port (item 6 on
Figure 1 on page 1) is provided to protect the main
crankshaft bearings in applications where large amounts
of water are being pumped. In the standard configuration,
the port is sealed. Contact Agilent for further information.
Operation
Unlike conventional oil-sealed pumps, Agilent's dry
scroll pumps contain no fluid to cleanse them of
accumulated dust and debris. Therefore, it is good
practice to run the pump periodically at atmosphere for a
minute or two to flush out the pump. Until experience is
gained on your specific process, flush the pump regularly
and adjust according to your specific conditions.
Start Up Procedure
1. Ensure that the vacuum system isolation valve is
closed.
2. Turn on pump.
3. Open the isolation valve.
Shutdown Procedure
1. Close the vacuum system isolation valve. This
prevents debris in pump from being transported into
the vacuum system.
2. Turn off pump.

TriScroll 610 Dry Scroll Vacuum Pump
12
Troubleshooting
Table 4 contains a list of possible problems, their probable causes, and corrective actions.
Table 4 Troubleshooting Chart, TriScroll 610 Pump
Problem Possible Cause Corrective Action
Pump won't start Circuit breaker open Close breaker. Identify cause
of overload.
Motor thermal
protector open
Allow motor to cool. Identify
cause of overload.
Electrical short under
motor electrical cover
Inspect and repair.
Wiring loose or cut Repair or replace.
Excessive voltage drop Check size and length of cable.
Defective motor Inspect. Contact Agilent.
Poor ultimate pressure System leak Locate and repair leak.
Water in pump Flush pump with air or dry
nitrogen.
Solvent in pump Flush pump with air or dry
nitrogen. Install trap or filter.
Seals worn out Rebuild pump.
Poor conductance to
pump
Replumb with shorter and/or
larger diameter tubing.
Pump makes
hammering noise
Pump overheated Check ventilation to pump.
Check ambient temperature.
Debris in pump Check intake screen.
Flush pump.
Disassemble pump and inspect.

13
TriScroll 610 Dry Scroll Vacuum Pump
TriScroll 600 Series
Maintenance Manual
General Information
Agilent TriScroll 600 series pumps are designed to provide years of trouble-free service if maintenance procedures and
intervals are observed. Cleaning, bearing grease replenishment and tip seal replacement is recommended when pump
base pressure has risen to an unacceptably high level for your application. Bearings, rotary seals and o-rings should also
be replaced if the pump exhibits humming or grinding noises form the bearings. Main bearing life may be shortened if
your application requires the pumping of high quantities of water vapor. Use of the bearing purge described earlier will
keep this water from impacting bearing life.
Maintenance should be performed in accordance with procedures, tooling and materials specified in the manuals listed
below.
Related TriScroll Manuals
Other manuals related to the Installation and Operation, Tip Seal and Pump Module Replacement for TriScroll 600 series
pumps are listed in Table 5.
Maintenance and Tooling Kits
Material and tooling required to perform maintenance on TriScroll pumps is provided in kit form. A description of each kit
and ordering information is provided in Table 6.
Table 5 Related TriScroll Manuals
Part Number Title Applicable TriScroll Model
699904290 Installation and Operation Manual All TriScroll 600 models
699904295 Installation and Operation Manual All TriScroll 610 models
699904310 Tip Seal Replacement Manual All TriScroll 600 and 610 models
699904300 Pump Module Replacement Manual All TriScroll 600 and 610 models
699904305 Maintenance Manual All TriScroll 600 and 610 models
699904300 Maintenance Manual All TriScroll 600 and 610 models
Table 6 Maintenance and Troubleshooting Kits
Part Number Description Contents Applicable TriScroll
Model
PTSS0600MK Maintenance Kit All bearings, bearing
seals, bearing
lubricant, O-rings, and
tip seals required to
rebuild TriScroll 600
series pumps.
All TriScroll 600 and
610 models
PTSS0600TK Maintenance Tool Kit All fixtures and tools
required to perform
any maintenance on
TriScroll 300 series and
TriScroll 600 series
pumps.
All TriScroll 300, 310,
600 and
610 models

TriScroll 610 Dry Scroll Vacuum Pump
14
Factory Service Options
Agilent offers factory-rebuild service or advance exchange of complete TriScroll Pumps or Factory Service Options
(Table 7).
PTSS0600TS Replacement Tip Seal
Set
Replacement Tip Seals
and static O-rings for
TriScroll 600 series
pumps.
Note: Maintenance
Tool Kit required for
tip seal replacement.
All TriScroll 600 and
610 models.
Table 6 Maintenance and Troubleshooting Kits (Continued)
Part Number Description Contents Applicable TriScroll
Model
Table 7 Factory Service Options
Model Factory Service Options
EXPPTS06001 Advance Exchange TriScroll 600 Single Phase Pump
EXPPTS06003 Advance Exchange TriScroll 600 Three Phase Pump
EXPPTS06101 Advance Exchange TriScroll 610 Single Phase Pump
EXPPTS06103 Advance Exchange TriScroll 610 Three Phase Pump
EXPTS0600SC Advance Exchange TriScroll 600 Pump Module Only
EXPTS0610SC Advance Exchange TriScroll 610 Pump Module Only
PTS0600KMA Service/Rebuild TriScroll 600 Pump (Single, or Three Phase)
TS0610KMA Service/Rebuild TriScroll 610 Pump (Single, or Three Phase)
PTS0600SCRP Service/Rebuild TriScroll 600 Pump Module Only
PTS0610SCRP Service/Rebuild TriScroll 610 Pump Module Only