Agilent Technologies TriScroll 620 INV Series User manual

INSTALLATION AND
OPERATION MANUAL
Vacuum Products Division
DRAFT 11/28/16
TriScrollTM 620 INV
Series
Dry Scroll
Vacuum Pump
Manual No. X3828-90620
Revision A
September 2016

TriScroll 620 INV Series Vacuum Pump
Copyright 2016
Agilent, Inc.
DRAFT 11/28/16
TriScroll™620 INV
Dry Scroll Vacuum Pump
TriScroll is a trademark of Agilent, Inc.

3
TriScroll 620 INV Series Vacuum Pump
Contents
Warranty . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
Warranty Replacement and Adjustment . . . . . . . . 5
Instructions for Use . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
General Information . . . . . . . . . . . . . . . . . . . . . . . . . 7
Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
Pump Safety Symbols . . . . . . . . . . . . . . . . . . . . . . 7
Preparation for Installation . . . . . . . . . . . . . . . . . . 8
Installation Requirements . . . . . . . . . . . . . . . . . . . . . 9
Operation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
Start up Procedure . . . . . . . . . . . . . . . . . . . . . . . . 9
Shutdown Procedure . . . . . . . . . . . . . . . . . . . . . . 9
Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
Technical Information . . . . . . . . . . . . . . . . . . . . . . . . 10
Pump Electrical Controller . . . . . . . . . . . . . . . . . . . 12
Technical Specifications . . . . . . . . . . . . . . . . . . . 12
Serial Interface Specification RS485 and RS232 . 13
Connect the Serial and I/O Ports to an External Cable
15
Purge Kit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
Exhaust Silencer Kit . . . . . . . . . . . . . . . . . . . . . . . . 15
Vibration Isolation Kit. . . . . . . . . . . . . . . . . . . . . . . 15
HEPA Inlet filter . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
Cleaning. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
Unpacking and Inspection . . . . . . . . . . . . . . . . . . . 17
Installation Requirements . . . . . . . . . . . . . . . . . . . . 18
Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
Mechanical Connections . . . . . . . . . . . . . . . . . . . . 20
Pump Location . . . . . . . . . . . . . . . . . . . . . . . . . . 20
Vacuum Pump Isolation Valve . . . . . . . . . . . . . . 20
Pump Inlet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
Pump Exhaust. . . . . . . . . . . . . . . . . . . . . . . . . . . 20
Gas Ballast . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
Bearing Purge . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
Gas Ballast . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
Bearing Purge. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
Purge Kit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
General Information . . . . . . . . . . . . . . . . . . . . . . 24
Related TriScroll Manuals. . . . . . . . . . . . . . . . . . 24
Maintenance and Tooling Kits . . . . . . . . . . . . . . 24
Accessories. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
Contacting Agilent . . . . . . . . . . . . . . . . . . . . . . . 25
Request for Return Health and Safety Certification
List of Figures
Figure Caption Page
1 Interface Drawing with Dimensions . . . . . . 11
2 Pumping Speed Curves . . . . . . . . . . . . . . . 11
3 Driving Frequency vs. Analog Input . . . . . . 12
4 T+ Pumps List . . . . . . . . . . . . . . . . . . . . . . . 14
5 T-Unknown Pump. . . . . . . . . . . . . . . . . . . . 14
6 Serial and I/O Ports to External Cable . . . . . 15
7 TriScroll 620 INV Vacuum Pump . . . . . . . . 17
List of Tables
Table Title Page
1 Specifications . . . . . . . . . . . . . . . . . . . . . . . 10
2 P1 I/O-1 Interlock . . . . . . . . . . . . . . . . . . . . 12
3 J1 - Serial Port . . . . . . . . . . . . . . . . . . . . . . . 13
4 P2 I/O-2 Port on DB9 Male Connector . . . . 13
5 T-Plus Software Variables . . . . . . . . . . . . . . 13
6 Status LEDs . . . . . . . . . . . . . . . . . . . . . . . . . 14
7 Circuit Breaker Requirements . . . . . . . . . . . 19
8 Troubleshooting Chart. . . . . . . . . . . . . . . . . 22
9 Other Related Manuals . . . . . . . . . . . . . . . . 24
10 Maintenance and Tooling Kits. . . . . . . . . . . 24
11 Accessories . . . . . . . . . . . . . . . . . . . . . . . . . 25

TriScroll 620 INV Series Vacuum Pump
This page intentionally left blank.

5
TriScroll 620 INV Series Vacuum Pump
Warranty
Products manufactured by Seller are warranted against defects in materials and workmanship for twelve
(12) months from date of shipment thereof to Customer, and Seller’s liability under valid warranty
claims is limited, at the option of Seller, to repair, to replace, or refund of an equitable portion of the
purchase price of the Product. Items expendable in normal use are not covered by this warranty. All
warranty replacement or repair of parts shall be limited to equipment malfunctions which, in the sole
opinion of Seller, are due or traceable to defects in original materials or workmanship. All obligations of
Seller under this warranty shall cease in the event of abuse, accident, alteration, misuse, or neglect of
the equipment. In-warranty repaired or replaced parts are warranted only for the remaining unexpired
portion of the original warranty period applicable to the repaired or replaced parts. After expiration of
the applicable warranty period, Customer shall be charged at the then current prices for parts, labor,
and transportation.
Reasonable care must be used to avoid hazards. Seller expressly disclaims responsibility for loss or
damage caused by use of its Products other than in accordance with proper operating procedures.
Except as stated herein, Seller makes no warranty, express or implied (either in fact or by operation of
law), statutory or otherwise; and, except as stated herein, Seller shall have no liability under any
warranty, express or implied (either in fact or by operation of law), statutory or otherwise. Statements
made by any person, including representatives of Seller, which are inconsistent or in conflict with the
terms of this warranty shall not be binding upon Seller unless reduced to writing and approved by an
officer of Seller.
Warranty Replacement and Adjustment
All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto,
and must be received within the applicable warranty period by Seller or its authorized representative.
Such claims should include the Product serial number, the date of shipment, and a full description of
the circumstances giving rise to the claim. Before any Products are returned for repair and/or
adjustment, written authorization from Seller or its authorized representative for the return and
instructions as to how and where these Products should be returned must be obtained. Any Product
returned to Seller for examination shall be prepaid via the means of transportation indicated as
acceptable by Seller. Seller reserves the right to reject any warranty claim not promptly reported and
any warranty claim on any item that has been altered or has been returned by non-acceptable means of
transportation. When any Product is returned for examination and inspection, or for any other reason,
Customer shall be responsible for all damage resulting from improper packing or handling, and for loss
in transit, notwithstanding any defect or non-conformity in the Product. In all cases, Seller has the sole
responsibility for determining the cause and nature of failure, and Seller’s determination with regard
thereto shall be final.
If it is found that Seller’s Product has been returned without cause and is still serviceable, Customer will
be notified and the Product returned at its expense; in addition, a charge for testing and examination
may be made on Products so returned.

TriScroll 620 INV Series Vacuum Pump
This page intentionally left blank.

7
TriScroll 620 INV Series Vacuum Pump
DRAFT 11/28/16
Instructions for Use
General Information
This equipment is designed for use by professionals. The
user should read this instruction manual and any other
additional information supplied by Agilent before
operating the equipment. Agilent will not be held
responsible for any events that occur due to
non-compliance with these instructions, improper use by
untrained persons, non-authorized interference with the
equipment, or any action contrary to that provided for by
specific national standards.
The TriScroll™ 620 INV is a dry scroll vacuum pump
specifically optimized for helium leak detection
equipment. This pump is suitable for pumping air or inert
gases. The pump is not intended to pump toxic, corrosive,
explosive, or particulate-forming gases.
The following paragraphs contain all the information
necessary to guarantee the safety of the operator when
using the equipment. Detailed information is supplied in
“Technical Information” on page 10.
This manual uses the following standard safety protocol:
Storage
When transporting and storing the pump, the following
environmental requirements should not be exceeded:
Pump Safety Symbols
The following symbols are used to designate pump parts,
operations and hazards:
WARNING The warning messages are for attracting
the attention of the operator to a partic-
ular procedure or practice which, if not
followed correctly, could lead to serious
injury.
CAUTION The caution messages are displayed
before procedures, which if not fol-
lowed, could cause damage to the
equipment.
NOTE The notes contain important informa-
tion taken from the text.
Temperature: –20 °C to 60 °C (–4 °F to 140 °F)
Relative humidity: 0 to 95% (non-condensing)
Caution, Hot surface: Danger of
burns if hot parts are touched.
Warning: See
Installation/Operating mode
instructions.
Caution: Risk of electrical shock.

DRAFT 11/28/16
TriScroll 620 INV Series Vacuum Pump
8
Preparation for Installation
The pump is supplied in a special protective packing. If
this shows signs of damage, which may have occurred
during transport, contact your local sales office.
Total weight of the packing, including the pump, is
approximately 40 kg (87 lbs).
WARNING When unpacking the pump, be sure not
to drop it, and avoid any kind of sudden
impact or shock vibration to it.
WARNING The TriScroll 620 INV weighs 32 kg
(70 lbs). Use extreme caution when
handling heavy parts. A two person lift
is recommended. Failure to perform a
two person lift may result in personal
injury.
WARNING The System must be installed in a way
that allows an easy interruption of the
line voltage.
WARNING Power supply cord: The correct cable
for electrical wiring is a three wires
(Ph+N+Earth) cable. The wire section
has to be at least 0.75 mm2 (AWG18).
CAUTION Assure a free space all around the sys-
tem at minimum of 20 cm () to allow
proper air circulation.
NOTE Normal exposure to the environment
cannot damage the pump. Neverthe-
less, it is advisable to keep the pump
inlet closed until the pump is installed
in the system.

9
TriScroll 620 INV Series Vacuum Pump
DRAFT 11/28/16
Installation Requirements
Do not install or use the pump in an environment
exposed to atmospheric agents (rain, snow, ice), dust,
aggressive gases, or in explosive environments or those
with a high fire risk.
During operation, the following environmental
conditions must be respected:
Operation
In order to reach ultimate vacuum, the pump must be left
running for about an hour with the inlet sealed.
Unlike conventional oil-sealed pumps, Agilent’s dry scroll
pumps do not have fluid to cleanse them of accumulated
dust and debris. Run the pump periodically at atmosphere
for a minute or two to flush out the pump. Flush the pump
regularly and adjust this schedule according to your
specific conditions.
Start up Procedure
1. Be sure that the vacuum system isolation valve is
closed.
2. Turn on power to the pump.
3. Open the isolation valve.
Shutdown Procedure
1. Close the vacuum system isolation valve. This
prevents debris in pump from being transported into
the vacuum system.
2. Turn off power to the pump.
Maintenance
Personnel responsible for pump operation and
maintenance must be well-trained and aware of the
accident prevention rules.
If a pump is to be discarded, it must be disposed of in
accordance with specific national and local standards.
Temperature: +5 °C to +40 °C (41 °F to 104 °F)
Relative humidity: 0 to 95% (non-condensing)
WARNING During operation the outer surface of
the motor housing can become hot.
Avoid touching the motor housing
during pump operation.
WARNING When employing the pump for pump-
ing toxic, flammable, or radioactive
gases, please follow the required proce-
dures for each gas disposal. Do not use
the pumping system in presence of
explosive gases.
CAUTION Use inert gas free from dust, particles or
humidity (like Nitrogen) for venting the
pump. The pressure at the vent port
must be less than 2 bar (above atmo-
spheric pressure).
WARNING The pump is designed for operation
with neutral or noncorrosive fluids. It
is absolutely forbidden to use it with
potentially explosive, inflammable or
poisonous substances.
WARNING ❑Death may result from contact with
high voltages. Always take extreme care
and observe the accident prevention
regulations in force.
❑When the machine is powered up,
be careful of moving parts and high
voltages.
❑If you have to perform maintenance
on the pump after a considerable time
in operation, allow the pump to cool as
the temperature of the outer surface
may be in excess of 55 °C (131 °F).
❑Always disconnect your power
supply to the pump before beginning
maintenance work.
NOTE Before returning the pump to the factory
for repair, the “Health and Safety” sheet
attached to this instruction manual must
be completed and sent to the local sales
office. A copy of the sheet must be
inserted in the pump package before
shipping.

DRAFT 11/28/16
TriScroll 620 INV Series Vacuum Pump
10
Technical Information
Table 1 Specifications
Model TriScroll™ 620 INV Dry Scroll Vacuum Pump
Interface dimensions See Figure 2
Peak pumping speed 50 Hz: 420 l/m, 25.2 m3/hr (14.8 cfm)
60 Hz: 500 l/m, 30 m3/hr (17.7 cfm)
Media Clean air. No toxic, corrosive, explosive or particulate forming gases
Ultimate pressure (Torr) 7.0 x 10-3 Torr (9.3 x 10-3 mbar)
Maximum inlet pressure 1.0 atmosphere (0 psig)
Maximum continuous inlet pressure 100 Torr
Maximum outlet pressure 1.1 atmosphere (1.5 psig)
Inlet connection NW40
Exhaust connection Female 3/8" National Pipe Thread (NW25 adapter provided)
Gas ballast Female 1/4" National Pipe Thread (40 Micron sintered filter provided)
Ambient operating temperature 5 °C to 40 °C (41 °F to 104 °F)
Storage temperature –20 °C to 60 °C (–4 °F to 140 °F)
Motor rating 1.0 HP (0.75 kW)
Operating voltages 50-60 Hz/100-200 VAC
Motor thermal protection Automatic
Operating speed 35-64 Hz Factory setting: 62 Hz
Cooling system Air-cooled
Weight Pump only: 32 kg (71 lbs)
Shipping weight: 42 kg (92 lbs)
Noise level (per ISO 11201) Variable with frequency, 58-71 dB(A)
Vibration level at inlet (per ISO 10816-1) 6.3 mm/sec
Installation Pollution Degree: 2