Agilent Technologies TriScroll 620 INV Series User manual

INSTALLATION AND
OPERATION MANUAL
Vacuum Products Division
DRAFT 11/28/16
TriScrollTM 620 INV
Series
Dry Scroll
Vacuum Pump
Manual No. X3828-90620
Revision A
September 2016

TriScroll 620 INV Series Vacuum Pump
Copyright 2016
Agilent, Inc.
DRAFT 11/28/16
TriScroll™620 INV
Dry Scroll Vacuum Pump
TriScroll is a trademark of Agilent, Inc.

3
TriScroll 620 INV Series Vacuum Pump
Contents
Warranty . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
Warranty Replacement and Adjustment . . . . . . . . 5
Instructions for Use . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
General Information . . . . . . . . . . . . . . . . . . . . . . . . . 7
Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
Pump Safety Symbols . . . . . . . . . . . . . . . . . . . . . . 7
Preparation for Installation . . . . . . . . . . . . . . . . . . 8
Installation Requirements . . . . . . . . . . . . . . . . . . . . . 9
Operation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
Start up Procedure . . . . . . . . . . . . . . . . . . . . . . . . 9
Shutdown Procedure . . . . . . . . . . . . . . . . . . . . . . 9
Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
Technical Information . . . . . . . . . . . . . . . . . . . . . . . . 10
Pump Electrical Controller . . . . . . . . . . . . . . . . . . . 12
Technical Specifications . . . . . . . . . . . . . . . . . . . 12
Serial Interface Specification RS485 and RS232 . 13
Connect the Serial and I/O Ports to an External Cable
15
Purge Kit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
Exhaust Silencer Kit . . . . . . . . . . . . . . . . . . . . . . . . 15
Vibration Isolation Kit. . . . . . . . . . . . . . . . . . . . . . . 15
HEPA Inlet filter . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
Cleaning. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
Unpacking and Inspection . . . . . . . . . . . . . . . . . . . 17
Installation Requirements . . . . . . . . . . . . . . . . . . . . 18
Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
Mechanical Connections . . . . . . . . . . . . . . . . . . . . 20
Pump Location . . . . . . . . . . . . . . . . . . . . . . . . . . 20
Vacuum Pump Isolation Valve . . . . . . . . . . . . . . 20
Pump Inlet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
Pump Exhaust. . . . . . . . . . . . . . . . . . . . . . . . . . . 20
Gas Ballast . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
Bearing Purge . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
Gas Ballast . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
Bearing Purge. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
Purge Kit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
General Information . . . . . . . . . . . . . . . . . . . . . . 24
Related TriScroll Manuals. . . . . . . . . . . . . . . . . . 24
Maintenance and Tooling Kits . . . . . . . . . . . . . . 24
Accessories. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
Contacting Agilent . . . . . . . . . . . . . . . . . . . . . . . 25
Request for Return Health and Safety Certification
List of Figures
Figure Caption Page
1 Interface Drawing with Dimensions . . . . . . 11
2 Pumping Speed Curves . . . . . . . . . . . . . . . 11
3 Driving Frequency vs. Analog Input . . . . . . 12
4 T+ Pumps List . . . . . . . . . . . . . . . . . . . . . . . 14
5 T-Unknown Pump. . . . . . . . . . . . . . . . . . . . 14
6 Serial and I/O Ports to External Cable . . . . . 15
7 TriScroll 620 INV Vacuum Pump . . . . . . . . 17
List of Tables
Table Title Page
1 Specifications . . . . . . . . . . . . . . . . . . . . . . . 10
2 P1 I/O-1 Interlock . . . . . . . . . . . . . . . . . . . . 12
3 J1 - Serial Port . . . . . . . . . . . . . . . . . . . . . . . 13
4 P2 I/O-2 Port on DB9 Male Connector . . . . 13
5 T-Plus Software Variables . . . . . . . . . . . . . . 13
6 Status LEDs . . . . . . . . . . . . . . . . . . . . . . . . . 14
7 Circuit Breaker Requirements . . . . . . . . . . . 19
8 Troubleshooting Chart. . . . . . . . . . . . . . . . . 22
9 Other Related Manuals . . . . . . . . . . . . . . . . 24
10 Maintenance and Tooling Kits. . . . . . . . . . . 24
11 Accessories . . . . . . . . . . . . . . . . . . . . . . . . . 25

TriScroll 620 INV Series Vacuum Pump
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5
TriScroll 620 INV Series Vacuum Pump
Warranty
Products manufactured by Seller are warranted against defects in materials and workmanship for twelve
(12) months from date of shipment thereof to Customer, and Seller’s liability under valid warranty
claims is limited, at the option of Seller, to repair, to replace, or refund of an equitable portion of the
purchase price of the Product. Items expendable in normal use are not covered by this warranty. All
warranty replacement or repair of parts shall be limited to equipment malfunctions which, in the sole
opinion of Seller, are due or traceable to defects in original materials or workmanship. All obligations of
Seller under this warranty shall cease in the event of abuse, accident, alteration, misuse, or neglect of
the equipment. In-warranty repaired or replaced parts are warranted only for the remaining unexpired
portion of the original warranty period applicable to the repaired or replaced parts. After expiration of
the applicable warranty period, Customer shall be charged at the then current prices for parts, labor,
and transportation.
Reasonable care must be used to avoid hazards. Seller expressly disclaims responsibility for loss or
damage caused by use of its Products other than in accordance with proper operating procedures.
Except as stated herein, Seller makes no warranty, express or implied (either in fact or by operation of
law), statutory or otherwise; and, except as stated herein, Seller shall have no liability under any
warranty, express or implied (either in fact or by operation of law), statutory or otherwise. Statements
made by any person, including representatives of Seller, which are inconsistent or in conflict with the
terms of this warranty shall not be binding upon Seller unless reduced to writing and approved by an
officer of Seller.
Warranty Replacement and Adjustment
All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto,
and must be received within the applicable warranty period by Seller or its authorized representative.
Such claims should include the Product serial number, the date of shipment, and a full description of
the circumstances giving rise to the claim. Before any Products are returned for repair and/or
adjustment, written authorization from Seller or its authorized representative for the return and
instructions as to how and where these Products should be returned must be obtained. Any Product
returned to Seller for examination shall be prepaid via the means of transportation indicated as
acceptable by Seller. Seller reserves the right to reject any warranty claim not promptly reported and
any warranty claim on any item that has been altered or has been returned by non-acceptable means of
transportation. When any Product is returned for examination and inspection, or for any other reason,
Customer shall be responsible for all damage resulting from improper packing or handling, and for loss
in transit, notwithstanding any defect or non-conformity in the Product. In all cases, Seller has the sole
responsibility for determining the cause and nature of failure, and Seller’s determination with regard
thereto shall be final.
If it is found that Seller’s Product has been returned without cause and is still serviceable, Customer will
be notified and the Product returned at its expense; in addition, a charge for testing and examination
may be made on Products so returned.

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7
TriScroll 620 INV Series Vacuum Pump
DRAFT 11/28/16
Instructions for Use
General Information
This equipment is designed for use by professionals. The
user should read this instruction manual and any other
additional information supplied by Agilent before
operating the equipment. Agilent will not be held
responsible for any events that occur due to
non-compliance with these instructions, improper use by
untrained persons, non-authorized interference with the
equipment, or any action contrary to that provided for by
specific national standards.
The TriScroll™ 620 INV is a dry scroll vacuum pump
specifically optimized for helium leak detection
equipment. This pump is suitable for pumping air or inert
gases. The pump is not intended to pump toxic, corrosive,
explosive, or particulate-forming gases.
The following paragraphs contain all the information
necessary to guarantee the safety of the operator when
using the equipment. Detailed information is supplied in
“Technical Information” on page 10.
This manual uses the following standard safety protocol:
Storage
When transporting and storing the pump, the following
environmental requirements should not be exceeded:
Pump Safety Symbols
The following symbols are used to designate pump parts,
operations and hazards:
WARNING The warning messages are for attracting
the attention of the operator to a partic-
ular procedure or practice which, if not
followed correctly, could lead to serious
injury.
CAUTION The caution messages are displayed
before procedures, which if not fol-
lowed, could cause damage to the
equipment.
NOTE The notes contain important informa-
tion taken from the text.
Temperature: –20 °C to 60 °C (–4 °F to 140 °F)
Relative humidity: 0 to 95% (non-condensing)
Caution, Hot surface: Danger of
burns if hot parts are touched.
Warning: See
Installation/Operating mode
instructions.
Caution: Risk of electrical shock.

DRAFT 11/28/16
TriScroll 620 INV Series Vacuum Pump
8
Preparation for Installation
The pump is supplied in a special protective packing. If
this shows signs of damage, which may have occurred
during transport, contact your local sales office.
Total weight of the packing, including the pump, is
approximately 40 kg (87 lbs).
WARNING When unpacking the pump, be sure not
to drop it, and avoid any kind of sudden
impact or shock vibration to it.
WARNING The TriScroll 620 INV weighs 32 kg
(70 lbs). Use extreme caution when
handling heavy parts. A two person lift
is recommended. Failure to perform a
two person lift may result in personal
injury.
WARNING The System must be installed in a way
that allows an easy interruption of the
line voltage.
WARNING Power supply cord: The correct cable
for electrical wiring is a three wires
(Ph+N+Earth) cable. The wire section
has to be at least 0.75 mm2 (AWG18).
CAUTION Assure a free space all around the sys-
tem at minimum of 20 cm () to allow
proper air circulation.
NOTE Normal exposure to the environment
cannot damage the pump. Neverthe-
less, it is advisable to keep the pump
inlet closed until the pump is installed
in the system.

9
TriScroll 620 INV Series Vacuum Pump
DRAFT 11/28/16
Installation Requirements
Do not install or use the pump in an environment
exposed to atmospheric agents (rain, snow, ice), dust,
aggressive gases, or in explosive environments or those
with a high fire risk.
During operation, the following environmental
conditions must be respected:
Operation
In order to reach ultimate vacuum, the pump must be left
running for about an hour with the inlet sealed.
Unlike conventional oil-sealed pumps, Agilent’s dry scroll
pumps do not have fluid to cleanse them of accumulated
dust and debris. Run the pump periodically at atmosphere
for a minute or two to flush out the pump. Flush the pump
regularly and adjust this schedule according to your
specific conditions.
Start up Procedure
1. Be sure that the vacuum system isolation valve is
closed.
2. Turn on power to the pump.
3. Open the isolation valve.
Shutdown Procedure
1. Close the vacuum system isolation valve. This
prevents debris in pump from being transported into
the vacuum system.
2. Turn off power to the pump.
Maintenance
Personnel responsible for pump operation and
maintenance must be well-trained and aware of the
accident prevention rules.
If a pump is to be discarded, it must be disposed of in
accordance with specific national and local standards.
Temperature: +5 °C to +40 °C (41 °F to 104 °F)
Relative humidity: 0 to 95% (non-condensing)
WARNING During operation the outer surface of
the motor housing can become hot.
Avoid touching the motor housing
during pump operation.
WARNING When employing the pump for pump-
ing toxic, flammable, or radioactive
gases, please follow the required proce-
dures for each gas disposal. Do not use
the pumping system in presence of
explosive gases.
CAUTION Use inert gas free from dust, particles or
humidity (like Nitrogen) for venting the
pump. The pressure at the vent port
must be less than 2 bar (above atmo-
spheric pressure).
WARNING The pump is designed for operation
with neutral or noncorrosive fluids. It
is absolutely forbidden to use it with
potentially explosive, inflammable or
poisonous substances.
WARNING ❑Death may result from contact with
high voltages. Always take extreme care
and observe the accident prevention
regulations in force.
❑When the machine is powered up,
be careful of moving parts and high
voltages.
❑If you have to perform maintenance
on the pump after a considerable time
in operation, allow the pump to cool as
the temperature of the outer surface
may be in excess of 55 °C (131 °F).
❑Always disconnect your power
supply to the pump before beginning
maintenance work.
NOTE Before returning the pump to the factory
for repair, the “Health and Safety” sheet
attached to this instruction manual must
be completed and sent to the local sales
office. A copy of the sheet must be
inserted in the pump package before
shipping.

DRAFT 11/28/16
TriScroll 620 INV Series Vacuum Pump
10
Technical Information
Table 1 Specifications
Model TriScroll™ 620 INV Dry Scroll Vacuum Pump
Interface dimensions See Figure 2
Peak pumping speed 50 Hz: 420 l/m, 25.2 m3/hr (14.8 cfm)
60 Hz: 500 l/m, 30 m3/hr (17.7 cfm)
Media Clean air. No toxic, corrosive, explosive or particulate forming gases
Ultimate pressure (Torr) 7.0 x 10-3 Torr (9.3 x 10-3 mbar)
Maximum inlet pressure 1.0 atmosphere (0 psig)
Maximum continuous inlet pressure 100 Torr
Maximum outlet pressure 1.1 atmosphere (1.5 psig)
Inlet connection NW40
Exhaust connection Female 3/8" National Pipe Thread (NW25 adapter provided)
Gas ballast Female 1/4" National Pipe Thread (40 Micron sintered filter provided)
Ambient operating temperature 5 °C to 40 °C (41 °F to 104 °F)
Storage temperature –20 °C to 60 °C (–4 °F to 140 °F)
Motor rating 1.0 HP (0.75 kW)
Operating voltages 50-60 Hz/100-200 VAC
Motor thermal protection Automatic
Operating speed 35-64 Hz Factory setting: 62 Hz
Cooling system Air-cooled
Weight Pump only: 32 kg (71 lbs)
Shipping weight: 42 kg (92 lbs)
Noise level (per ISO 11201) Variable with frequency, 58-71 dB(A)
Vibration level at inlet (per ISO 10816-1) 6.3 mm/sec
Installation Pollution Degree: 2

11
TriScroll 620 INV Series Vacuum Pump
DRAFT 11/28/16
Figure 1 Interface Drawing with Dimensions
Figure 2 Pumping Speed Curves

DRAFT 11/28/16
TriScroll 620 INV Series Vacuum Pump
12
Pump Electrical Controller
The pump is powered by an inverter that converts single
phase line power into 3-phase power that drives an
induction motor at a user selectable frequency.
Several operational variables are modifiable through the
J2 serial port when using Agilent T-Plus software. A
number of additional system variables are also viewable.
Pump operation is interlocked through the P1 connector.
Pins 4 and 5, and Pins 8 and 9, must be connected
together to enable operation. A prewired connector is
supplied with the pump and should be plugged into P1.
The maximum power output of the inverter is 950 Watts.
At pump inlet pressures above approximately 20 Torr, the
pump will be power limited and the output frequency
will be reduced. This mode is known as autotuning.
At pump start, the drive frequency is ramped up over
several seconds. This provides for smooth starting and
eliminates large in-rush currents.
Technical Specifications
❑Input voltage: 100 V-240 V / 50-60 Hz
❑Max frequency: 64 Hz, factory set @ 62Hz
❑Normal Operation maximum power: 850 W
❑Protection level: IP 20
Remote speed setting allows you to control rotational
speed using a 0-10 V analog input:
❑Vin > 9 V: Driving frequency will be the full
speed (factory set @62 Hz)
❑Vin <1 V: Driving frequency will be the minimum
speed (35 Hz)
Figure 3 Driving Frequency vs. Analog Input
Table 2 P1 I/O-1 Interlock
PIN
#
SIGNAL NAME IN/OUT
1 Interlock contact 1 Out
2 0-10Vdc, with reference
to pin 5 remote control
In
3 No Connection
4 Start/Stop (-): Connect to
Pin 5
In
5 Groundout Out
6 Interlock contact 2 Out
7 No Connection
8 Start/Stop (+): Connect to
Pin 9
In
9 +24V ±5% 50mA, with
reference to pin 5
Out
NOTE Pump operation is interlock depen-
dent. The provided mating connec-
tor must be plugged into P1 to start
the pump.
Table 2 P1 I/O-1 Interlock
PIN
#
SIGNAL NAME IN/OUT

13
TriScroll 620 INV Series Vacuum Pump
DRAFT 11/28/16
Serial Interface Specification RS485 and
RS232
Physical level: RS232 or RS485
Maximum baud: 9600, 8 data bit, no parity, 1 stop bit.
Table 3 J1 - Serial Port
PIN
#
SIGNAL NAME
1 +5V ±5%, 50mA, with reference to pin 5
2RS232TX
3RS232RX
4 No Connection
5 GND
6RS485A
7 No Connection
8RS485B
9 No Connection
Table 4 P2 I/O-2 Port on DB9 Male Connector
PIN
#
SIGNAL NAME
1 No Connection
2 No Connection
3 No Connection
4 No Connection
5 GND
6 No Connection
7 No Connection
8 No Connection
9 VPI output +24V ±5% 400mA, with
reference to pin 5
Table 5 T-Plus Software Variables
WIN TYPE DESCRIPTION
000 Logical Start/Stop
(1=START; 0=STOP)
001 Logical Low Speed
[0=OFF / 1=ON]
008 Logical Remote/Serial Configuration
(1=REMOTE; 0=SERIAL)
102 Numerical Set Point Value
(Hz)
105 Numerical Set Point Hysteresis (%)
[0-100]
108 Numerical Baud Rate
(0-4)
[600-1200-2400-4200-9600]
117 Numerical Low Speed Adjust
(Hz)
120 Numerical Rotational Frequency Setting
[Hz] (High speed adjust)
200 Numerical Bus Current
[mA]
201 Numerical 3 Phase Voltage
[Vrms]
202 Numerical Power
[W]
203 Numerical Driving Frequency
[Hz]: (current driving
frequency)
205 Numerical Status:
❑0=stop
❑2=ramp
❑3=autotuning
❑5=normal
❑6=fail

DRAFT 11/28/16
TriScroll 620 INV Series Vacuum Pump
14
Using T-Plus Software To Change The Target
Frequency
1. Install T-Plus software on your PC by running
setup.exe.
2. Using a 9-pin serial cable, connect your PC to the J2
serial port on the inverter (Figure 4).
3. Start the pump using the On/Off switch. The provided
Interlock Connector must be installed in P1.
4. Start the T-Plus software and Figure 4 appears.
Figure 4 T+ Pumps List
5. Click Open Control Panel and Figure 5 appears.
6. Open the Speed Settings directory, and click Target
Frequency.
Figure 5 T-Unknown Pump
7. Enter the desired operating frequency into Insert New
Value. This must be an integer between 35 and 65.
8. Click Send. The pump immediately tries to change to
the new target frequency. If the pump requires more
than 750 Watts to attain the target frequency, the
206 Numerical Error Code:
❑Bit 7: motor block
❑Bit 6: short circuit
❑Bit 5: undervoltage
❑Bit 4: spare
❑Bit 3: power fail
❑Bit 2: controller overt
❑Bit 1: pump overt
❑Bit 0: spare
211 Numerical Controller Temperature
[°C]
216 Numerical Environment Temperature
[°C]
300 Numerical Cycle Time
[min]
301 Numerical Cycle Number
302 Numerical Pump Life
[h]
319 Alphanumeric Controller Model
323 Alphanumeric Controller Serial Number
325 Alphanumeric Electrical Modification Level
500 Logical Monitor Mode (write only)
503 Numerical RS485 Serial Address Setting
[0-31]
504 Logical Serial Type Select
(0=RS323; 1=RS485)
Table 6 Status LEDs
LED STATUS CONTROLLER STATUS
Off Stop
Green flashing Ramp or Autotuning
Green Normal Operation
Red Fail
Orange + Off Reset + selftest
Table 5 T-Plus Software Variables (Continued)
WIN TYPE DESCRIPTION
NOTE When the controller is switched on,
an electronic self-test occurs, during
which an orange LED illuminates for
one second and the turns off for two
seconds. During this time, the pump
will not start.
This self-test time is not required if
the pump is already powered, as
when remotely or serially operated.

15
TriScroll 620 INV Series Vacuum Pump
DRAFT 11/28/16
pump is power limited and will run at a lower
frequency (auto-tuning mode). This condition
continues until the power required drops below 750
Watts.
The target frequency is stored in the inverter even
when power to the pump is removed.
Connect the Serial and I/O Ports
to an External Cable
Figure 6 shows the correct procedure to connect a
cable to the I/O or to the serial port.
Use a shielded cable of 30 m (98.5’) maximum length
for both serial and I/O port connections.
Figure 6 Serial and I/O Ports to External Cable
In this way, you will be sure to reduce the influence
of the external noise and to accomplish the EMC
requests. In picture d is showed the cable assembled.
Purge Kit
A purge kit (Agilent part number PTSPURGEKIT) is
available to properly purge either the bearing purge or the
gas ballast. This kit contains a flowmeter and all
necessary valving and tubing.
Exhaust Silencer Kit
In certain applications it is desired to lower the noise
level emitted by the pump. For these cases, Agilent offers
Exhaust Silencer Kits (P/N EXSLRTRISCROLL, Manual
P/N: 699904380), which breaks up noise pulsation in the
discharge line.
The Exhaust Silencer Kits contain two basic components,
as well as installation hardware. A cylindrical resonator
chamber has been selected to attenuate the frequencies
associated with the exhaust gas pulsation noise. The
resonator is then plumbed to an exhaust muffler/filter.
This muffler provides the majority of the actual noise
reduction. It also contains an integral 5-micron paper
filter element to capture any tip seal debris. This paper
filter is replaceable; the recommended service interval is
whenever the pump tip seal or module maintenance is
performed.
Replacement polyester filter element rated 99% efficient
at the 5-micron particle size, P/N: REPLSLRFILTER,
Vibration Isolation Kit
A set of vibration isolation mounts (P/N PTSVIBISOKIT,
Manual P/N: 699904385) are available for Agilent scroll
pumps. These are used in place of the standard feet
installed on the pump for applications that require
minimal vibration transmission from the pump to the
installation. They can be used alone, or with inlet flexible
bellows to provide pump isolation.
The vibration isolation mounts in the Vibration Isolation
Kit have been designed to ensure the lowest vibration
level transmitted at the base of the pump.
Vibration level in every direction (axis), transmitted to the
surface the pump sits on, is reduced by a significant
amount. Typical vibration reduction levels are 75% for
the TriScroll 620 INV pump.
The TriScroll Vibration Isolation Kit consists of (4)
vibration isolation mounts. They have a M6 metric
threaded screw to attach to the TriScroll frame; the screw
is provided.
These mounts increase the height of the TriScroll pumps
by 0.75" compared to the standard mounting feet.
HEPA Inlet filter
Agilent now offers inlet filters for the scroll pumps, which
protect the pump from ingested particles, and keep
particles from migrating out of the pump. These HEPA
filters provide a rated 99.97% efficiency in trapping
particles > 0.3 microns.
NW 40 Inlet Trap with HEPA filter insert: P/N#:
SCRINTRPNW40.
Replacement HEPA filter element P/N#: RPLHEPAFILTER1
NOTE Ensure a good contact between the
metallic case and the external shield
of the wire. This operation must be
done at least on the controller side.

DRAFT 11/28/16
TriScroll 620 INV Series Vacuum Pump
16
Cleaning
Exterior: The exterior surfaces of the TriScroll may be
cleaned with mild detergents only.
Interior: Internal dry scroll pumps do not contain fluid for
the cleansing of accumulated dust and debris. Run the
pump periodically at atmosphere for a minute or two to
flush it out.

17
TriScroll 620 INV Series Vacuum Pump
DRAFT 11/28/16
Figure 7 TriScroll 620 INV Vacuum Pump
Unpacking and Inspection
The shipping container is a double carton.
1. After opening the outer box, remove the foam
packing.
2. Slit open the inner box.
3. Lift the pump with the plywood base out of the inner
box.
4. Remove the four bolts securing the pump frame to the
plywood base.
5. Locate the NW25 exhaust fitting and set it aside.
6. Inspect the pump for damage. If there is shipping
damage, contact the freight carrier and your local
Agilent sales office immediately.
7. Save the carton and packing materials.
2
1
3
4
5
7
8
16
15
14
13
12
11
10
6
9
Cowling Screws; M5 (3)
Cowling
Inlet (NW40)
Inlet Screen
Bearing Purge Port (1/4” NPT)
Gas Ballast Port (1/4” NPT)
Mounting Holes; 11 mm diameter thru (4)
Rubber Feet (4)
Thermal Protection Switch Cable
Power Connector (IEC 320)
On/Off Switch
Serial Port J1
Interlock Port P1 I/O-1
Interlock Port P2 I/O-2
Exhaust Adapter
Lifting Ring
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16

DRAFT 11/28/16
TriScroll 620 INV Series Vacuum Pump
18
Installation Requirements
Safety
Do not remove or modify any safety or insulating
equipment from the pump. To do so may create a serious
safety hazard and may void the warranty.
During operation, the following environmental
conditions should not be exceeded:
WARNING ❑This pump is designed to pump
and exhaust air and inert gases only;
it is not designed to pump explosive,
flammable, toxic, or corrosive gases.
They can cause bodily injury,
explosion, or fire.
❑Install in an area that is not
exposed to rain, steam, or excessive
humidity. They can cause electric
shock, short circuits, and severe
bodily injury.
❑Before inspecting or servicing the
pump, be sure the electrical supply
is disconnected.
❑Consult a qualified electrician
whenever wiring the pump.
❑An exhaust silencer option is
available for those applications in
which it is desirable to diminish the
sound level produced by the pump.
❑To prevent bodily injury, avoid
exposing any part of the human
body to vacuum.
❑The pump is a heavy object. To
avoid muscle strain or back injury,
use lifting aides and proper lifting
techniques when removing or
replacing.
CAUTION Although the pump can pump trace
particulates normally found in the
atmosphere, it is not designed for
process solids, chemicals, powders,
solvents, condensates, or other par-
ticulates. They can damage the
equipment, degrade its performance,
or shorten its useful life.
The pump operates in a clockwise
direction when viewed from the
motor end. (Note the arrow on the
pump frame.) Improper rotation can
cause permanent damage to the
pump.
Temperature: +5 °C to +40 °C (41 °F to 104 °F)
Relative humidity: 0 to 95% (non-condensing)
CAUTION Do not block the fan ducts because the
pump can become overheated. A pump
surface temperature in excess of 55 °C
(131 ° F) is potentially damaging. If such
conditions are observed, turn pump off
and allow to cool. Disassemble, inspect
for damage, and repair if necessary.
CAUTION To reduce the risk of electric shock,
do not expose to rain; store indoors.

19
TriScroll 620 INV Series Vacuum Pump
DRAFT 11/28/16
Power Cord
Several power cord options are available from your
Agilent dealer.
Grounding Instructions
This product should be grounded. In the event of an elec-
trical short circuit, grounding reduces the risk of electric
shock by providing an escape wire for the electric cur-
rent. This pump is equipped with a power cord that has a
grounding wire with an appropriate grounding plug. The
plug must be inserted into an outlet that is properly
installed and grounded in accordance with all local codes
and ordinances.
Extension Cords
If you must use an extension cord with this product:
❑Agilent recommends using only extension cords
with a minimum of 16-gauge wire and a
maximum length of 25’ (7.6 m).
❑Use only a 3-wire extension cord that accepts the
plug.
❑Ensure the extension is in good condition.
❑Ensure the extension cord is rated high enough to
carry the current the products draws. An
undersized cord causes a drop in line voltage,
resulting in loss of power and overheating.
Circuit Breakers
Table 7 lists the circuit breaker capacity recommended
for the pump. Locate the switch or circuit breaker near
the pump.
NOTE The pump must be connected to the
power supply using a high voltage
IEC-320 type power cord of at least 15
A capacity.
WARNING Check with a qualified electrician or
serviceman if the grounding instructions
are not completely understood, or if
you are in doubt as to whether the
product is properly grounded.
Do not modify the plug provided; if it
does not fit the outlet, have the proper
outlet installed by a qualified electrician.
Connect the product only to an outlet
that has the same configuration as the
plug.
Do not use an adapter with this
product.
Table 7 Circuit Breaker Requirements
PTS08001INV 100-240 VAC
50/60 Hz
Breaker capacity 15 Amperes

DRAFT 11/28/16
TriScroll 620 INV Series Vacuum Pump
20
Mechanical Connections
Pump Location
Locate the pump on a firm, level surface.
Clearance mounting holes provided in the frame can be
used to provide permanent attachment. Attach the
provided rubber mounts to the threaded holes at the
frame base to minimize vibration.
Do not to position the equipment so that it is difficult to
operate the disconnecting device.
Vacuum Pump Isolation Valve
Scroll pumps return to atmospheric pressure quickly
when shut off. Thus, an integrated fast acting, automatic,
normally closed isolation valve is standard equipment to
prevent pump debris from being transported back into the
vacuum chamber when the pump is turned off:
❑The opening of this valve must occur 350 ms
after pump startup.
❑Valve closing must occur 250 ms after pump
shut off.
The VPI Valve status is controlled by motor
operation. The VPI Valve:
❑Opens when the pump is running and
❑Closes when it is stopped due to switch off or
overload protection.
This TriScroll 620 INV Inverter Scroll pump includes the
necessary communication cable, needed to operate the
pump.
Pump Inlet
Use NW40, or larger, clean vacuum hardware with as
short a length as practical between the pump inlet and the
vacuum chamber.
Use a bellows to provide both vibration isolation and
strain relief between the pump and vacuum chamber.
Pump Exhaust
A female 3/8 National Pipe Thread exhaust fitting is
located underneath the scroll module. This fitting swivels
360°. Additionally, a NW25 adapter is provided with a
3/8 National Pipe Thread male thread.
Gas Ballast
The pump incorporates an automatic gas ballast to
prevent water and other condensates from accumulating
within the pump. The standard configuration is a sintered
filter installed in the 1/4" National Pipe Thread gas ballast
port (item 8 on Figure 7 on page 17). This allows enough
atmospheric air to enter the pump in order to purge
condensates while not affecting pump ultimate pressure
or pumping speed.
For applications where the ingress of atmospheric air is
undesirable, dry nitrogen at a flow rate of  5 lpm can be
bled into the gas ballast port. See item 8 on Figure 7 on
page 17. Blocking of the gas ballast port is not
recommended.
Bearing Purge
A 1/4" National Pipe Thread bearing purge port (item 5 on
Figure 7 on page 17) protects the main crankshaft
bearings in applications where large amounts of water are
being pumped. In the standard configuration, this port is
sealed.
To enable the bearing purge, dry nitrogen at a flow rate of
5 lpm can be bled into the bearing purge port. This gas
supply should be maintained at 2 psig or less and must be
kept below 5 psig.
See “Purge Kit” on page 21.