Agilent Technologies MS40+ User manual

vacuum technologies
MS40+
Single Stage
Rotary Vane Pumps
Model 949-9225
Model 949-9240
Model 949-9241
87-901-008-01(A)
NOVEMBER 2008
(I) MANUALE DI ISTRUZIONI
(D) BEDIENUNGSHANDBUCH
(F) NOTICE DE MODE D’EMPLOI
(GB) INSTRUCTION MANUAL
NOTICE: This document contains references to Varian.
Please note that Varian, Inc. is now part of Agilent
Technologies. For more information, go to
www.agilent.com/chem.

MS40+
SINGLE STAGE
ROTARY VANE PUMPS

ISTRUZIONI PER L’USO ....................................................................................................1
GEBRAUCHSANLEITUNG .................................................................................................3
MODE D’EMPLOI................................................................................................................5
INSTRUCTIONS FOR USE.................................................................................................7
TECHNICAL INFORMATION ..............................................................................................9
SECTION I .....................................................................................................................................9
TECHNICAL DESCRIPTION.........................................................................................................9
VACUUM SEALS...........................................................................................................................9
ANTI-SUCKBACK DEVICE............................................................................................................9
TECHNICAL DATA......................................................................................................................10
Dimensions........................................................................................................................11
SAFETY PRECAUTIONS............................................................................................................12
TRANSPORT AND INSTALLATION............................................................................................12
PRELIMINARY OPERATIONS....................................................................................................12
SECTION II ..................................................................................................................................13
CONNECTION TO THE ELECTRIC SUPPLY ............................................................................13
CONNECTIONS TO THE INLET AND EXHAUST FLANGES ....................................................13
STARTING AND RUNNING THE PUMP.....................................................................................13
STOPPING THE PUMP...............................................................................................................13
SAFETY RULES..........................................................................................................................13
WARNING Notes .....................................................................................................14
CAUTION Notes ..........................................................................................................14
MAINTENANCE ACTIONS..........................................................................................................15
OIL AND FILTER CARTRIDGE REPLACEMENT PROCEDURES............................................16
Oil Change Procedure.......................................................................................................16
Filter Cartridge Replacement Procedure...........................................................................16
LUBRICANTS ..............................................................................................................................16
PUMP ELECTRONIC CONTROLLER.........................................................................................18
Technical Specifications....................................................................................................18
Input/Output Communications:..........................................................................................18
RS 232/RS 485 COMMUNICATION DESCRIPTION..................................................................19
J2 – Serial Port ..................................................................................................................19
Communication Format .....................................................................................................19
Communication Protocol....................................................................................................19
Windows Meaning .............................................................................................................21
Electronic Self-test.............................................................................................................21
Rotor Lock Test..................................................................................................................21
Oil Level Check..................................................................................................................21
ACCESSORIES...........................................................................................................................22

ISTRUZIONI PER L’USO
1/22 87-901-008-01(A)
INFORMAZIONI GENERALI
Questa apparecchiatura è destinata ad uso professiona-
le. L'utilizzatore deve leggere attentamente il presente
manuale di istruzioni ed ogni altra informazione addizio-
nale fornita dalla Varian prima dell'utilizzo dell'apparec-
chiatura. La Varian si ritiene sollevata da eventuali
responsabilità dovute all'inosservanza totale o parziale
delle istruzioni, ad uso improprio da parte di personale
non addestrato, ad interventi non autorizzati o ad uso
contrario alle normative nazionali specifiche.
Le MS40+ Single Stage Rotary Vane Pumps sono delle
pompe rotative monostadio a palette, a tenuta in bagno
d'olio, azionate da motore elettrico trifase.
Queste pompe da alto vuoto sono adatte al pompaggio
di gas non corrosivi.
Nei paragrafi seguenti sono riportate tutte le informazioni
necessarie a garantire la sicurezza dell'operatore duran-
te l'utilizzo dell'apparecchiatura. Informazioni dettagliate
sono fornite nell'appendice “Technical information”.
Questo manuale utilizza le seguenti convenzioni:
PERICOLO!
I messaggi di pericolo attirano l'attenzione dell'operatore
su una procedura o una pratica specifica che, se non
eseguita in modo corretto, potrebbe provocare gravi le-
sioni personali.
ATTENZIONE!
I messaggi di attenzione sono visualizzati prima di pro-
cedure che, se non osservate, potrebbero causare danni
all'apparecchiatura.
NOTA
Le note contengono informazioni importanti estrapolate
dal testo.
IMMAGAZZINAMENTO
Durante il trasporto e l'immagazzinamento delle pompe
non devono essere superate le seguenti condizioni am-
bientali:
−temperatura: da -20 °C a +70 °C
−umidità relativa: 0 - 95% (non condensante)
PREPARAZIONE PER L'INSTALLAZIONE
La pompa viene fornita in un imballo protettivo speciale;
se si presentano segni di danni, che potrebbero essersi
verificati durante il trasporto, contattare l'ufficio vendite
locale.
Il peso dell’imballo, comprensivo della pompa, è, al
massimo, di circa 35 Kg.
Durante l'operazione di disimballaggio, prestare partico-
lare attenzione a non lasciar cadere la pompa e a non
sottoporla ad urti o vibrazioni.
Non disperdere l'imballo nell'ambiente. Il materiale è
completamente riciclabile e risponde alla direttiva CEE
85/399 per la tutela dell'ambiente.
NOTA
La pompa non può essere danneggiata rimanendo sem-
plicemente esposta all'atmosfera. Si consiglia comunque
di mantenerla chiusa fino al momento dell'installazione
sul sistema onde evitare eventuale inquinamento da
polvere.
NOTA
La pompa è fornita con alcuni accessori standard:
•1 connettore "D" a 9 contatti per I/O (femmina)
(escluso il modello 949-9241)
•1 connettore "D" a 9 contatti per RS232 (maschio)
(escluso il modello 949-9241)
•Molla di ritenuta per presa IEC320
INSTALLAZIONE
Non installare e/o utilizzare la pompa in ambienti esposti
ad agenti atmosferici (pioggia, gelo, neve), polveri, gas
aggressivi, in ambienti esplosivi o con elevato rischio di
incendio.
Durante il funzionamento è necessario che siano rispet-
tate le seguenti condizioni ambientali:
−temperatura: da +12 °C a +40 °C
−umidità relativa: 0 - 95% (non condensante)
−valore di IP.
PERICOLO!
Per proteggere contro corto-circuiti o sovraccarichi, si
deve installare un interruttore automatico sulla linea
d’alimentazione principale verso i dispositivi Varian, di
capacità adeguata (vedere la tabella seguente):
P/N Capacità Interruttore
949-9225 10A
949-9240 10A
949-9241 10A
ATTENZIONE!
Prima di avviare la pompa, verificare il livello dell’olio.
PERICOLO!
Togliere i tappi di protezione posti sulle flange di aspira-
zione e scarico prima di ogni successiva operazione.
L’aria contenuta all’interno della pompa, in caso di ac-
censione involontaria, può proiettarli violentemente con-
tro l’operatore e ferirlo.

ISTRUZIONI PER L’USO
2/22 87-901-008-01(A)
PERICOLO!
Durante l'installazione, prestare la massima attenzione
che la flangia di aspirazione sia collegata alla camera da
evacuare e che la flangia di scarico non sia tappata (ve-
dere la figura seguente).
La pompa non deve essere usata come compressore.
La massima pressione interna al contenitore dell'olio non
deve superare 1,5 bar (abs).
L'inosservanza di queste precauzioni può causare danni
alla macchina ed all'operatore.
ATTENZIONE!
Controllare che la tensione di alimentazione corrisponda
al campo di valori indicati sulla targhetta del controller.
Collegare la pompa all’alimentazione.
USO
L'accensione della pompa non richiede particolari mano-
vre; è sufficiente collegarla all’alimentazione elettrica
agendo sull’interruttore bipolare.
PERICOLO!
La pompa è progettata per operare con fluidi neutri o
non corrosivi. È assolutamente vietato l'impiego con so-
stanze potenzialmente esplosive o infiammabili.
MANUTENZIONE
Il personale addetto alla condotta ed alla manutenzione
della pompa deve essere ben addestrato e deve avere
un'approfondita conoscenza delle norme antinfortunisti-
che.
PERICOLO!
Le alte tensioni possono causare morte al contatto. Ope-
rare sempre con la massima cautela e secondo le nor-
me antinfortunistiche in vigore.
PERICOLO!
Quando la macchina è alimentata prestare attenzione
per la presenza di parti in movimento e di alta tensione.
PERICOLO!
Nel caso si debba procedere ad operazioni di manuten-
zione della pompa al termine di un prolungato periodo di
esercizio, è necessario lasciarla raffreddare, poichè la
temperatura esterna può superare i 60 °C.
PERICOLO!
Escludere sempre l'alimentazione della pompa prima di
compiere operazioni di manutenzione. Apporre specifici
cartelli di avvertenza: APPARECCHIATURA IN
MANUTENZIONE - NON INSERIRE L'ALIMENTAZIO-
NE, in corrispondenza dell'interruttore di alimentazione.
Al termine ripristinare i dispositivi di sicurezza.
PERICOLO!
Non effettuare la sostituzione dell’olio subito dopo
l’arresto della macchina, in quanto la temperatura dello
stesso può essere elevata.
NOTA
Prima di rispedire al costruttore una pompa per ripara-
zioni è indispensabile compilare e far pervenire al locale
ufficio vendite la scheda "Health and Safety Certifica-
tion" allegata al presente manuale di istruzioni. Copia
della stessa deve essere inserita nell'imballo della pom-
pa prima della spedizione.
Qualora una pompa dovesse essere rottamata, procede-
re alla sua eliminazione nel rispetto delle normative na-
zionali specifiche.
SMALTIMENTO
Significato del logo "WEEE" presente sulle etichette
Il simbolo qui sotto riportato applicato in ottemperanza alla di-
rettiva CE denominata "WEEE".
Questo simbolo (valido solo per i paesi della Comunità Eu-
ropea) indica che il prodotto sul quale è applicato, NON deve
essere smaltito insieme ai comuni rifiuti domestici o industriali,
ma deve essere avviato ad un sistema di raccolta differenziata.
Si invita pertanto l'utente finale a contattare il fornitore del di-
spositivo, sia esso la casa madre o un rivenditore, per avviare il
processo di raccolta e smaltimento, dopo opportuna verifica dei
termini e condizioni contrattuali di vendita.
Flangia di scarico
Flangia di aspirazione

GEBRAUCHSANLEITUNG
3/22 87-901-008-01(A)
ALLGEMEINE HINWEISE
Dieses Gerät ist für den professionellen Gebrauch be-
stimmt. Vor dem Gebrauch soll der Benutzer dieses
Handbuch sowie alle weiteren von Varian mitgelieferten
Zusatzinformationen genau lesen. Bei vollständiger bzw.
teilweiser Nichtbeachtung der enthaltenen Hinweise, un-
sachgemäßem Gebrauch durch ungeschultes Personal,
nicht autorisierten Eingriffen und Benutzung unter Miss-
achtung der nationalen Bestimmungen übernimmt Firma
Varian keinerlei Haftung.
Die Pumpen MS40+ Single Stage Rotary Vane Pumps
sind dichte ölbadgeschmierte einstufige Flügelzellen-
pumpen, die von einem Dreiphasenstrommotor betätigt
werden.
Diese Hochvakuumpumpen eignen sich für das Pumpen
von nicht korrosiven Gasen.
In den folgenden Abschnitten sind alle erforderlichen In-
formationen für die Sicherheit des Bedieners bei der
Verwendung des Geräts aufgeführt. Detaillierte techni-
sche Informationen sind im Anhang "Technical Informa-
tion" enthalten.
In dieser Gebrauchsanleitung werden Sicherheits-
hinweise folgendermaßen hervorgehoben:
GEFAHR!
Diese Warnung weist auf gefährliche Arbeitsschritte hin,
die bei unsachgemäßer Durchführung das Risiko von
Personenschäden bergen.
ACHTUNG!
Diese Warnung weist auf Arbeitsschritte hin, die das Ri-
siko von Schäden am Gerät bergen.
ANMERKUNG
Die Anmerkungen enthalten wichtige Informationen, die
aus dem Text hervorgehoben werden.
LAGERUNG
Während des Transports und der Lagerung der Pumpen
sollen die folgenden Umgebungsbedingungen gegeben
sein:
−Temperatur: -20 °C bis +70 °C
−Relative Feuchtigkeit: 0 – 95 % (niederschlagsfrei)
VOR DER INSTALLATION
Die Pumpe wird in einer speziellen Schutzverpackung
geliefert. Eventuelle Transportschäden sind der zustän-
digen örtlichen Verkaufsstelle zu melden.
Das Verpackungsgewicht beträgt, einschließlich der
Pumpe, maximal 36 kg.
Beim Auspacken ist darauf zu achten, dass die Pumpe
nicht fallengelassen oder Stößen oder Vibrationen aus-
gesetzt wird.
Das Verpackungsmaterial ist ordnungsgemäß zu ent-
sorgen. Es ist vollständig recyclebar und entspricht der
EG-Richtlinie 85/399 für den Umweltschutz.
ANMERKUNG
Die Pumpe kann, wenn sie einfach der Atmosphäre
ausgesetzt ist, nicht beschädigt werden. Sie sollte je-
doch bis zur Installation an der Anlage geschlossen blei-
ben, um Verunreinigungen durch Staub zu vermeiden.
ANMERKUNG
Die Pumpe wird mit einigen Standardzubehörteilen ge-
liefert:
•1 9-Stift-Stecker "D" für I/O (Steckbuchse) (mit Au-
snahme der 949-9241-model)
•1 9-Stift-Stecker "D" für RS232 (Stecker) (mit Aus-
nahme der 949-9241-model)
•Rückhaltefeder für Anschluss IEC320
INSTALLATION
Die Pumpe darf nicht in Umgebungen installiert und/oder
benutzt werden, die ungeschützt vor Witterungsbedin-
gungen (Regen, Frost, Schnee), Staub und aggressiven
Gasen sind und in denen Explosions- oder erhöhte
Brandgefahr besteht.
Während des Betriebs sollen die folgenden Umge-
bungsbedingungen gegeben sein:
−Temperatur: +12 °C bis +40 °C
−Relative Feuchtigkeit: 0 - 95% (niederschlagsfrei)
−IP Wert.
GEFAHR!
Zum Schutz vor Kurzschlüssen oder Überlastungen
muss ein automatischer Schalter in die Hauptspeisungs-
leitung zu den Varian-Vorrichtungen installiert werden
(siehe folgende Tabelle):
P/N Leistung des Schutzschalters
949-9225 10A
949-9240 10A
949-9241 10A
ACHTUNG!
Vor Inbetriebnahme der Pumpe muss der Ölstand kon-
trolliert werden.
GEFAHR!
Vor Aufnahme jeglicher Arbeiten sind die Schutzkappen
an den Saug- und Druckflanschen zu entfernen. Die im
Pumpeninnern enthaltene Luft könnte diese bei unbeab-
sichtigter Einschaltung gegen den Bediener schleudern.

GEBRAUCHSANLEITUNG
4/22 87-901-008-01(A)
GEFAHR!
Bei der Installation ist unbedingt darauf zu achten, dass
der Saugflansch an die zu entleerende Kammer ange-
schlossen ist und der Ablassflansch nicht verschlossen
ist (siehe nachstehende Abbildung).
Die Pumpe darf nicht als Verdichter verwendet werden.
Der Druck im Ölbehälter darf nicht größer als 1,5 bar
(abs) sein.
Bei Nichtbeachtung dieser Anweisungen besteht Scha-
densgefahr für das Gerät und die Bedienperson.
ACHTUNG!
Vergewissern Sie sich, dass die Versorgungsspannung
mit dem Wertbereich auf dem Typenschild des Kontrol-
lers übereinstimmt.
Die Pumpe an das Versorgungsnetz anschließen.
GEBRAUCH
Die Einschaltung der Pumpe erfordert keine speziellen
Schritte, sie braucht nur durch Betätigung des zweipoli-
gen Schalters an den Strom angeschlossen zu werden.
GEFAHR!
Die Pumpe ist für den Betrieb mit neutralen und nicht
korrosiven Fluiden konzipiert. Der Einsatz mit potentiell
explosions- oder feuergefährlichen Substanzen ist
streng verboten.
WARTUNG
Das für den Betrieb und die Wartung zuständige Perso-
nal soll geschult sein und über eine solide Kenntnis der
Unfallschutzvorschriften verfügen.
GEFAHR!
Hochspannungen können bei Kontakt tödliche Folgen
haben. Es ist stets mit größter Vorsicht und gemäß den
geltenden Unfallschutzvorschriften vorzugehen.
GEFAHR!
Bei eingeschaltetem Gerät ist auf Bewegungs- und
Hochspannungsteile zu achten.
GEFAHR!
Falls die Pumpe im Anschluss an den Betrieb gewartet
werden soll, ist abzuwarten, bis sie abgekühlt ist, da ihre
Oberfläche eine Temperatur von 60 °C überschreiten
kann.
GEFAHR!
Vor Wartungsarbeiten ist die Pumpe stets energiefrei zu
schalten. Am Netzschalter sind spezielle Warnschilder
“INSTANDHALTUNG AM GERÄT – NICHT
EINSCHALTEN” anzubringen. Nach Abschluss der Ar-
beiten sind die Sicherheitseinrichtungen wieder zu akti-
vieren.
GEFAHR!
Keine Ölwechsel unmittelbar nach Stillsetzung des Ge-
rätes vornehmen, da die Öltemperatur sehr hoch sein
kann.
ANMERKUNG
Bevor dem Hersteller eine Pumpe zur Reparatur zurück-
gesandt wird, ist das Formular “Sicherheit und Gesund-
heit” in der Anlage zum vorliegenden Handbuch
auszufüllen und der lokalen Verkaufsstelle zuzustellen.
Eine Kopie des Formulars ist der Pumpenverpackung
vor dem Versand beizulegen.
Bei eventueller Verschrottung einer Pumpe ist diese
entsprechend der einschlägigen nationalen Vorschriften
zu entsorgen.
ENTSORGUNG
Bedeutung des "WEEE"-Logos auf den Etiketten
Das folgende Symbol ist in Übereinstimmung mit der EU-
Richtlinie WEEE (Waste Electrical and Electronic Equipment)
angebracht.
Dieses Symbol (nur in den EU-Ländern gültig) zeigt an, dass
das betreffende Produkt nicht zusammen mit Haushaltsmüll
entsorgt werden darf sondern einem speziellen Sammelsystem
zugeführt werden muss.
Der Endabnehmer sollte daher den Lieferanten des Geräts – d.
h. die Muttergesellschaft oder den Wiederverkäufer – kontaktie-
ren, um den Entsorgungsprozess zu starten, nachdem er die
Verkaufsbedingungen geprüft hat.
Ablassflansch
Saugflansch

MODE D'EMPLOI
5/22 87-901-008-01(A)
INFORMATION GÉNÉRALE
Cet appareil a été conçu en vue d'une utilisation profes-
sionnelle. Il est conseillé à l'utilisateur de lire attentive-
ment cette notice ainsi que toute autre information
fournie par Varian avant de l'utiliser. Varian décline toute
responsabilité en cas de non-respect total ou partiel des
instructions fournies, d'utilisation incorrecte de la part du
personnel non formé, d'opérations non autorisées ou
d'un emploi contraire aux réglementations nationales
spécifiques.
MS40+ Single Stage Rotary Vane Pumps sont des pom-
pes rotatives monoétages, à palettes, étanches en bain
d'huile, actionnées par un moteur électrique triphasé.
Ces pompes à haut vide sont adaptées au pompage de
gaz non corrosifs.
Les paragraphes suivants fournissent toute l‘information
nécessaire pour garantir la sécurité de l'opérateur pen-
dant l'utilisation de l'appareil. Des renseignements plus
détaillés se trouvent dans l'appendice «Technical infor-
mation».
Cette notice utilise les signes conventionnels sui-
vants:
DANGER!
Les messages de danger attirent l'attention de l'opéra-
teur sur une procédure ou une manœuvre spéciale dont
la mauvaise exécution risque de provoquer de graves
lésions.
ATTENTION!
Les messages d'attention apparaissent avant certaines
procédures dont le non-respect pourrait endommager
sérieusement l'appareil.
NOTE
Les notes contiennent des renseignements importants,
isolés du texte.
EMMAGASINAGE
Pendant le transport et l'emmagasinage des pompes,
veiller à respecter les conditions environnementales sui-
vantes:
−température: de -20 °C à +70 °C
−humidité relative: 0 - 95 % (sans condensation)
PRÉPARATION POUR L'INSTALLATION
La pompe est fournie dans un emballage de protection
spécial; si l'on constate des marques de dommages
pouvant s'être produites pendant le transport, contacter
aussitôt le bureau de vente local.
Le poids total de l'emballage avec la pompe est
d’environ 35 kg maximum.
Pendant l'opération d'ouverture de l'emballage, veiller
tout particulièrement à ne pas laisser tomber la pompe
et à ne lui faire subir aucun choc ni aucune vibration.
Ne pas jeter l'emballage dans la nature. Le matériel est
entièrement recyclable et il est conforme à la directive
CEE 85/399 en matière de protection de l'environne-
ment.
NOTE
La pompe ne peut être endommagée en restant sim-
plement exposée à l'atmosphère. Il est de toute façon
conseillé de la garder dans son emballage jusqu'au
moment de sa mise en place sur le système afin d'éviter
toute pollution due à la poussière.
NOTE
La pompe est équipée de certains accessoires standard:
•1 connecteur “D” à 9 broches pour E/S (femelle)
(l’exclusion du modèle 949-9241)
•1 connecteur “D” à 9 broches pour RS232 (mâle)
(l’exclusion du modèle 949-9241)
•Ressort de maintien pour prise IEC320
INSTALLATION
Ne pas installer et/ou utiliser la pompe dans des milieux
exposés aux agents atmosphériques (pluie, gel, neige),
à des poussières, à des gaz agressifs ainsi que dans
des milieux explosifs ou à risque élevé d'incendie.
Pendant le fonctionnement, il est nécessaire de respec-
ter les conditions environnementales suivantes:
−Température: de +12 °C à +40 °C
−Humidité relative: 0 - 95 % (sans condensation)
−Valeur d'IP.
DANGER!
Pour protéger contre les courts-circuits ou les surintensi-
tés, il faut installer un disjoncteur automatique sur la li-
gne d’alimentation principale vers les dispositifs Varian,
de capacité adéquate (voir tableau ci-dessous):
P/N Ampérage du disjoncteur
949-9225 10A
949-9240 10A
949-9241 10A
ATTENTION!
Avant toute utilisation de la pompe, vérifier le niveau de
l’huile.
DANGER!
Avant toute autre opération, retirer les bouchons de pro-
tection placés sur les brides d'aspiration et de vidange.
En cas de mise en marche inopinée de l'appareil, l'air
contenu à l'intérieur de la pompe peut les projeter contre
l'opérateur et le blesser.

MODE D'EMPLOI
6/22 87-901-008-01(A)
DANGER!
Pendant l'installation, faire très attention à ce que la
bride d'aspiration soit reliée à la chambre à vider et que
la bride de vidange ne soit pas bouchée (voir la figure ci-
après).
La pompe ne doit pas être utilisée comme un compres-
seur.
La pression maximale à l'intérieur du réservoir d'huile ne
doit pas dépasser 1,5 bar (abs).
Le non-respect de ces précautions peut entraîner un
danger pour l'opérateur et endommager la machine.
ATTENTION!
Contrôler que la tension d'alimentation correspond à la
gamme de tensions indiquées sur la plaquette du
contrôleur.
Brancher la pompe à la source d'alimentation.
UTILISATION
La mise en marche de la pompe ne requiert aucune
manœuvre particulière; il suffit de la brancher à l'alimen-
tation électrique et d’actionner l'interrupteur bipolaire.
DANGER!
La pompe a été conçue pour fonctionner avec des flui-
des neutres ou non corrosifs. L'emploi de substances
potentiellement explosives ou inflammables est stricte-
ment interdit.
MAINTENANCE
Le personnel chargé de la conduite et de la mainte-
nance de la pompe doit avoir la formation nécessaire et
posséder une connaissance approfondie des normes de
prévention des accidents du travail.
DANGER!
Les hautes tensions peuvent entraîner la mort par
contact. Veiller à toujours opérer avec le maximum de
prudence et dans le respect des normes de prévention
des accidents du travail en vigueur.
DANGER!
Lorsque la machine est sous tension, faire attention à la
présence d'organes en mouvement et de haute tension.
DANGER!
En cas de devoir procéder à des opérations de mainte-
nance de la pompe au terme d'une longue période de
fonctionnement, il est indispensable de la laisser refroidir
car sa température extérieure peut dépasser 60 °C.
DANGER!
Avant toute opération de maintenance, il est impératif de
toujours couper l'alimentation de la pompe. Placer les
panneaux spécifiques d'avertissement: APPAREIL EN
COURS DE MAINTENANCE – NE PAS BRANCHER
L'ALIMENTATION, près de l'interrupteur d'alimentation.
Au terme des opérations de maintenance, restaurer les
dispositifs de sécurité.
DANGER!
Ne pas effectuer la substitution d'huile immédiatement
après l'arrêt de la machine car la température de celle-là
peut être élevée.
NOTE
Avant de retourner une pompe au constructeur pour ré-
paration, il est indispensable de remplir et d'adresser au
bureau local de vente la fiche “Health and Safety Certifi-
cation” jointe à la présente notice. Une copie de celle-ci
devra être mise dans l'emballage de la pompe avant ex-
pédition.
En cas de mise au rebut de la pompe, procéder à son
élimination conformément aux réglementations nationa-
les en la matière.
MISE AU REBUT
Signification du logo “WEEE” figurant sur les étiquettes
Le symbole ci-dessous est appliqué conformément à la direc-
tive CE nommée “WEEE”.
Ce symbole (uniquement valide pour les pays de la Com-
munauté européenne) indique que le produit sur lequel il est
appliqué NE doit PAS être mis au rebut avec les ordures mé-
nagères ou les déchets industriels ordinaires, mais passer par
un système de collecte sélective.
Après avoir vérifié les termes et conditions du contrat de vente,
l’utilisateur final est donc prié de contacter le fournisseur du
dispositif, maison mère ou revendeur, pour mettre en œuvre le
processus de collecte et mise au rebut.
Bride de vidan
g
e
Bride d'aspiration

INSTRUCTION MANUAL
7/22 87-901-008-01(A)
GENERAL INFORMATION
This equipment is destined for use by professionals. The
user should read this instruction manual and any other
additional information supplied by Varian before operat-
ing the equipment. Varian will not be held responsible for
any events occurring due to non-compliance, even par-
tial, with these instructions, improper use by untrained
persons, non-authorized interference with the equipment
or any action contrary to that provided for by specific na-
tional standards.
The MS40+ Single Stage Rotary Vane Pumps are sin-
gle-stage, rotary vane pumps oil sealed, driven by a
three-phase electric motor.
These high vacuum pumps are suitable for pumping non
corrosive gases.
The following paragraphs contain all the information
necessary to guarantee the safety of the operator when
using the equipment. Detailed information is supplied in
the appendix "Technical Information".
This manual uses the following standard protocol:
WARNING!
The warning messages are for attracting the attention of
the operator to a particular procedure or practice which,
if not followed correctly, could lead to serious injury.
CAUTION
The caution messages are displayed before procedures
which, if not followed, could cause damage to the
equipment.
NOTE
The notes contain important information taken from the
text.
STORAGE
When transporting and storing the pumps, the following
environmental requirements should not be exceeded:
−temperature: from -20° to +70 °C
−relative humidity: 0 - 95% (non-condensing)
PREPARATION FOR INSTALLATION
The pump is supplied in a special protective packing. If
this shows signs of damage which may have occurred
during transport, contact your local sales office.
Total weight of the pack, including the pump, is approx.
35 Kg.
When unpacking the pump, be sure not to drop it and
avoid any kind of sudden impact or shock vibration to it.
Do not dispose of the packing materials in an unauthor-
ized manner. The material is 100% recyclable and com-
plies with EEC Directive 85/399.
NOTE
Normal exposure to the environment cannot damage the
pump. Nevertheless, it is advisable to keep it closed until
it is installed in the system, thus preventing any form of
pollution by dust.
NOTE
The pump is provided with some standard accessories:
•1 9 pin "D" connector for I/O (female) (excluding
model 949-9241)
•1 9 pin "D" connector for RS232 (male) (excluding
model 949-9241)
•IEC320 retention spring
INSTALLATION
Do not install or use the pump in an environment ex-
posed to atmospheric agents (rain, snow, ice), dust, ag-
gressive gases, or in explosive environments or those
with a high fire risk.
During operation, the following environmental conditions
must be respected:
−temperature: from +12 °C to +40 °C
−relative humidity: 0 - 95% (non-condensing)
−IP value.
WARNING!
Protect against short circuits and overload by installing
on Varian Device electrical main line an automatic circuit
breaker of proper capacity (see table here below):
P/N Circuit Breaker capacity
949-9225 10A
949-9240 10A
949-9241 10A
CAUTION
Before starting the pump, check the oil level.
WARNING!
Take out the protective caps on the suction and exhaust
flanges before doing anything else. In the event of an
accidental start-up, the air inside the pump could vio-
lently expel the protective caps and harm the operator.

INSTRUCTION MANUAL
8/22 87-901-008-01(A)
WARNING!
During installation, pay maximum attention that the suc-
tion flange is connected to the vacuum chamber and the
exhaust flange is not closed (see the following figure).
The pump must not be used as a compressor.
Maximum pressure inside the oil container must not ex-
ceed 1.5 bar (abs.)
Non-observance of these precautions may be danger-
ous for the machine and the operator.
CAUTION
Check that your electrical mains voltage corresponds to
the range indicated on controller label.
Connect the pump to the power supply.
USE
There are no special procedures for switching the pump
on; it needs only to be connected to the electric power
by means of the bipolar switch.
WARNING!
The pump is designed for operation with neutral or non-
corrosive fluids. It is absolutely forbidden to use poten-
tially explosive or flammable substances.
MAINTENANCE
Personnel responsible for pump operation and mainte-
nance must be well-trained and must be aware of the
accident prevention rules.
WARNING!
Death may result from contact with high voltages. Al-
ways take extreme care and observe the accident pre-
vention regulations in force.
WARNING!
When machine is powered take care on account of mov-
ing parts and high voltages.
WARNING!
If you have to perform maintenance on the pump after a
considerable time in operation, leave it to cool as tem-
perature of the outer surface may be in excess of 60 °C.
WARNING!
Always disconnect the power supply to the pump before
starting maintenance work. Place a special warning
signs over the power supply breaker switch: MACHINE
UNDERGOING MAINTENANCE - DO NOT POWER
ON. When finished, remove the safety warning.
WARNING!
Do not change the oil immediately after stopping the
machine as the oil temperature may still be high.
NOTE
Before returning the pump to the constructor for repairs
the "Health and Safety Certification" sheet attached to
this instruction manual must be filled-in and sent to the
local sales office. A copy of the sheet must be inserted
in the pump package before shipping.
If a pump is to be scrapped, it must be disposed of in
accordance with the specific national standards.
DISPOSAL
Meaning of the "WEEE" logo found in labels
The following symbol is applied in accordance with the EC
WEEE (Waste Electrical and Electronic Equipment) Directive.
This symbol (valid only in countries of the European Com-
munity) indicates that the product it applies to must NOT be
disposed of together with ordinary domestic or industrial waste
but must be sent to a differentiated waste collection system.
The end user is therefore invited to contact the supplier of the
device, whether the Parent Company or a retailer, to initiate the
collection and disposal process after checking the contractual
terms and conditions of sale.
Inlet Flange Outlet Flange

TECHNICAL INFORMATION
9/22 87-901-008-01(A)
SECTION I
TECHNICAL DESCRIPTION
The MS40+ Single Stage Rotary Vane Pumps are
rotary vane pumps oil sealed, driven by a three-
phase electric motor.
These vacuum pumps are suitable for pumping
non corrosive gases.
The main features are:
- all parts in direct contact with the fluid pumped
are free of copper alloys;
- all materials are carefully selected to provide
extended life;
- due to its design features and low number of
gaskets, the pump requires little maintenance,
disassembly and reassemble are easy and
require minimal time.
The oil guarantees perfect sealing of the discharge
valves, enters the pump to ensure lubrication and
sealing of the parts inside, facilitates heat dissipa-
tion and reduces pump noise.
The pump is equipped with a special anti-
suckback device which automatically isolates the
vacuum system when the pump stops. This avoids
rises in pressure or oil flow in the vacuum system
while air is allowed back into the stator chambers.
The air entering the pump after the anti-suckback
device has closed prevents the oil in the casing
from filling the stator chambers.
VACUUM SEALS
A special feature of this pump is the low number of
gaskets that are employed.
The seals in the circuit are obtained by means of
VITON gaskets.
Sealing of the rotor shaft is guaranteed by a rotat-
ing gasket with dust-guard lip.
The suction flange and duct are sealed by mean of
OR gaskets.
ANTI-SUCKBACK DEVICE
The pump is equipped with a special anti-
suckback device to avoid air pressure rises and/or
oil backflow towards the evacuated vessel when
the pump is switched off. This device has a shutter
which automatically closes the suction duct.
In this way the pump and vacuum system are
completely isolated from each other and air can
enter the pump without any risk for the vacuum
produced in the system.
The device includes some special features,
namely:
- drive obtained avoiding any form of con-
tamination of the inlet duct by fluids (oil
and/or air). Thanks to this, when the pump
is started again, the pumpdown to vacuum
conditions is extremely fast as these con-
taminants are not present and no de-
gassing is therefore required.

TECHNICAL INFORMATION
10/22 87-901-008-01(A)
TECHNICAL DATA
The following table lists the main technical data of the MS40+ Single Stage Rotary Vane Pumps.
TECHNICAL DATA RPM UNITS 949-9225 949-9240 949-9241
PUMPING SPEED (at 5 mbar inlet pressure) 1450 m3/h 40 40 40
ULTIMATE TOTAL PRESSURE * mbar 5x10-2 5x10-2 5x10-2
OIL CAPACITY min/max l 1 1 1
MOTOR RATING 3ph Kw 0.75 0.75 0.75
ROTATIONAL FREQUENCY min/max Hz 40-60 40-60 40-60
NOISE LEVEL with gas ballast closed dB(A) ≤62 ≤62 ≤62
OIL TEMPERATURE °C 60 60 60
(pump operating) ** °F 140 140 140
IP Value 20
Installation category II
Pollution degree 2
OPERATING TEMPERATURE RANGE °C 12 – 40 12 – 40 12 – 40
Kg 33 33 33WEIGHT
lb 72.7 72.7 72.7
INLET FLANGE DN 25KF 40KF 40KF
EXHAUST FLANGE DN 25KF 25KF 25KF
Main Dimensions:
- length mm 418 418 418
- width mm 297 297 297
- height mm 228 228 228
Nominal Input Voltage V 200-240 200-240 200-240
Input frequency Hz 50 / 60 50 / 60 50 / 60
Max input power VA 1200 1200 1200
Internal Main Fuse (TT type) A 12.5 12.5 12.5
* According to PNEUROP 6602 ** At ultimate total pressure, 20 °C (68 °F) room temperature

TECHNICAL INFORMATION
11/22 87-901-008-01(A)
Dimensions
The following figure shows the pumps layout and dimensions:
MS40+ Single Stage Rotary Vane Pumps layout
MS40+ Single Stage Rotary Vane Pumps dimensions
INLET
FLANGE
OIL LEVEL
INDICATOR
OUTLET
FLANGE
OIL FILTER
ELECTRONIC
CONTROLLER
PUMPING
BLOCK
ELECTRIC
MOTOR

TECHNICAL INFORMATION
12/22 87-901-008-01(A)
SAFETY PRECAUTIONS
- Always carry the pump by means of the ring-
bolt provided.
- The pump must be set in position taking the
upmost care in order to avoid accidental falls.
WARNING!
In case of a need to handle the pump after a pe-
riod of operation, it must be left to cool first as the
external surface temperature may be in excess of
60 °C.
TRANSPORT AND INSTALLATION
The pumps are shipped to the customer inside
cardboard boxes.
Total weight of the pack, including the pump, is
about 35 Kg.
The case must be handled with care, using appro-
priate lifting equipment.
CAUTION
When moving the case, ensure that it is securely
bound to the lifting equipment and that the equip-
ment is strong enough to support the weight.
The pump’s working environment is a traditional
industrial environment. Naturally sites with corro-
sive vapors or excessive heat are best avoided.
Room temperature should ideally be between 12
°C and 40 °C.
If the temperature is not inside this range, consult
Varian technical service for the changes required.
Setting the pump in position should be performed
as follows:
- Pump laid on the ground. There are no special
instructions for this type of installation, except
that the floor should be as flat as possible and
suited to bear the weight of the pump (it
should ideally be a concrete floor) and of any
accessories mounted on it. Note that the
pump is stable on its base plate and it should
not be necessary to anchor it to the floor with
bolts and screws; also vibrations to and from
the pump are greatly reduced by the use of
rubber feet.
- Pump off the ground. In this case, the user
must design a suitable support structure, re-
membering the following points:
* the plane supporting the pump must be
perfectly horizontal;
* the structure should be adequately rigid;
* the relevant safety precautions should be
applied.
Note also that the pump should be attached to
the supporting structure after replacing the
rubber feet with special anti-vibration feet,
which should be screwed to the pump base
and to the supporting plane.
After taking the pump out of its packing case, you
are advised to make the following checks:
a. Ensure that the pump has not suffered any
damage during shipping.
b. Check that there are no uncovered or loose
parts.
PRELIMINARY OPERATIONS
Before starting the pump, check for oil level.
CAUTION
Oil must be poured into the casing through the
special threaded plug hole and NOT through the
suction line.
WARNING!
Take out the protective caps on the suction and
exhaust flanges before doing anything else. In the
event of an accidental start-up, the air inside the
pump could violently expel the protective caps and
harm the operator.

TECHNICAL INFORMATION
13/22 87-901-008-01(A)
SECTION II
CONNECTION TO THE ELECTRIC SUPPLY
CAUTION
It is recommended to connect the pump to the
power supply through a dedicated safety switch on
the main electrical panel of the installation, or in
proximity of the power supply connection point.
CONNECTIONS TO THE INLET AND EXHAUST
FLANGES
Remove the protective caps from both flanges.
Connect the system to be evacuated to the inlet
flange, using a centering ring with OR and a lock-
ing collar.
NOTE
For guaranteed reliable sealing, use an OR gasket
in Perbunan or Viton.
The inlet duct is equipped with a sieve filter pre-
venting solid particles from entering and damaging
the pump.
NOTE
When the gases to be pumped out contain dust, it
is advisable to insert a dust filter before the inlet
flange.
NOTE
When the gases to be pumped out contain large
quantities of vapor, it is advisable to include a con-
dense separator before the inlet flange.
To make best use of the pump’s capacity, use only
short, straight piping, with a diameter not smaller
than that of the inlet flange.
NOTE
If rigid piping is used, it is good practice to use a
flexible joint in order to avoid undue forcing of the
connection on the pump.
The exhaust duct must be connected to a pipe that
will take away the pumped out gases.
NOTE
An internal oil mist eliminator avoids pollution of
the surrounding atmosphere by the oil present in
the exhaust duct during pump operation.
CAUTION
Never block the pump exhaust line. This would
cause overpressure in the casing with the risk of
breaking the oil tank.
STARTING AND RUNNING THE PUMP
WARNING!
The pump is designed for operation with neutral or
non-corrosive fluids. It is absolutely forbidden to
use potentially explosive or flammable substances.
NOTE
If the pump is started with cold oil, initially more
than normal noise will be heard; this will last for a
few minutes only until the oil reaches its working
temperature.
There are no special instructions for normal opera-
tion of the pump, which is delivered to you after
completion of a running-in cycle in the factory.
NOTE
To allow the pump starting you have to wire prop-
erly the interlock pins by connecting the mating
connector provided with the pump.
NOTE
For repetitive work cycles, with brief time intervals
in between, it is better not to stop the pump.
STOPPING THE PUMP
There are no special procedures for switching the
pump off; it needs only to be disconnected from
the electric power by means of the bipolar switch.
When the pump is stopped, the anti-suckback de-
vice makes it possible to maintain vacuum in the
vessel connected on the inlet flange of the pump.
SAFETY RULES
Personnel responsible for pump operation and
maintenance must be well-trained and must be
aware of the accident prevention rules.
The accident prevention precautions contained in
this section must be respected at all times during
operation and maintenance of the pump to avoid
damage to operators and to the pump.
These precautions are provided in the form of
WARNING and CAUTION notes.
WARNING!
Operating procedures, technical information and
precautions which, if not respected and/or imple-
mented correctly may cause body harm to opera-
tors.

TECHNICAL INFORMATION
14/22 87-901-008-01(A)
NOTE
Before connecting the IEC320 mains cable, install
the Retention Spring provided with the MS40+.
The Retention Spring has to be fastened to
IEC320 connector lateral screws.
NOTE
Use the Retention Spring to secure the mains ca-
ble into the IEC320 socket.
CAUTION
Operating procedures, technical information and
precautions which, if not respected and/or imple-
mented correctly may cause damage to the pump.
WARNING Notes 
a. Death may result from contact with high volt-
ages. Always take extreme care and observe
the accident prevention regulations in force.
b. Always disconnect the power supply to the
pump before maintenance work. Place a spe-
cial warning signs over the power supply
breaker switch: MACHINE UNDERGOING
MAINTENANCE - DO NOT POWER ON.
c. If you are performing maintenance after the
pump has been operating for a considerable
time, allow sufficient time for it to cool as the
external surface temperature may be in ex-
cess of 60 °C.
d. Failure to provide the pump with an earth con-
nection may cause serious damage to opera-
tors. Always ensure that there is an earth
connection and that it complies with the stan-
dards.
e. When cleaning the pump and its component
parts, avoid the use of flammable or toxic sol-
vents, such as benzin, benzol, ether or alco-
hol. The recommendation is to use a soap and
water solution, preferably in ultrasound wash-
ing machines, taking care to dry all the
cleaned parts at temperatures under 100 °C in
order to eliminate residual moisture.
f. Prolonged overloads or breakdowns may
cause the electric motor to overheat, and to
release noxious smoke; remove the power
immediately as a precaution and do not ap-
proach the pump at least until you have pro-
vided ventilation to drive out the smoke. Take
care not to breathe in the fumes remaining in-
side the pump in the course of repair work.
g. In case of fire, do not throw water on the
pump. Switch the power off and use CO2 ex-
tinguishers.
h. Carefully inspect the flanges to ensure that
there are no dust, oil, dirt or defects of the
mating surfaces, before making the required
connections.
i. Ensure that all joints and couplings are locked
correctly before starting the pump again after
repair work.
j. Do not wear any objects that may become en-
tangled in the mechanisms and/or act as con-
ductors (chains, bracelets, etc.).
k. Ensure that the tools to be used are in perfect
working condition and have insulating grips,
where necessary. Check that the insulating
material of the cables and that the conductors
of the test equipment do not show any signs
of damage.
l. Do not replace the oil immediately after stop-
ping the machine as the oil may still be at high
temperature.
m. Perform repairs in clean and, where possible,
dust-free areas. Protect all the clearances of
connection points with suitable plastic caps and
cover the machined surface areas of all parts
stripped down until they are put back on the
pump again.
CAUTION Notes 
a. Before putting the pump back into operation
after a breakdown, inspect it and check care-
fully for any other signs of damage.
b. Use only tools that are in perfect working or-
der and specially designed for the job; use of
inappropriate or ineffective tools may cause
serious damage.
c. Perform repairs in clean and, where possible,
dust-free areas. Protect all the clearances of
connection points with suitable plastic caps
and cover the machined surface areas of all
parts stripped down until they are put back on
the pump again.
d. Always check the lubricant and that it is prop-
erly distributed through the pump; inadequate
lubrication may damage the pump seriously.
e. Give the parts some form of marking as you
strip them down to ensure that you reassem-
ble them again in the proper order.
f. Check that there are no scratches or grooves
on the machined shafts, in their seats inside
the pump or on machine-ground surfaces.
Slight scratches and abrasions may be elimi-
nated with very fine emery paper or by a little
light grinding.
g. Before putting a group together, always
spread a little oil over inner parts and mating
surfaces. Replace all seals with original spare
parts before reassembling components.

TECHNICAL INFORMATION
15/22 87-901-008-01(A)
MAINTENANCE ACTIONS
Maintenance may be seen as the totality of all
scheduled and unscheduled maintenance work.
•SCHEDULED MAINTENANCE: Maintaining
the nominal state of operation.
•Oil level checking Daily (before every
starting)
•Oil change 8.000 hours (light ap-
plications)
•Exhaust filter re-
placement If oil mist at exhaust or
yearly
•Anti such-back valve
checking 6 months
•Fan cover cleaning 6 months
NOTE
The scheduled maintenance is supported by an
automatic timer provided by the electronic controller.
After 8000 h of operation the status led starts blink-
ing (400ms period) orange. The led blinking high-
lights that is necessary to change the oil. To switch
off the alarm its necessary to use the serial interface
(see window list in the following pages).
It is possible to read the Scheduled Maintenance
timer by using the serial interface.
•UNSCHEDULED MAINTENANCE: Restoring
the nominal state of operation.
NOTE
The frequency with which repairs are performed de-
pends on the process and presence of substances
that shorten pump life (dust, abrasives, solvents,
water, chemically aggressive substances).
The pump must be cleaned at regular intervals of
time.
CAUTION
Do not clean with Alcohol the plastic or rubber
components of the pump.
Use only the strictly necessary amount of lubricant;
an excess of lubricating oil, like when there is
none, may sometimes compromise proper opera-
tion of the pump.
Only the recommended lubricants, or lubricating
oils with similar characteristics and known and ex-
perimented quality, should be used.
Oil changes must be made with the oil at a suffi-
ciently high temperature, after leaving the pump to
cool for a few minutes following operation.
The drain and filler plugs must not be left open any
longer than is strictly necessary.
When performing maintenance, look out for all sig-
nals that may precede a breakdown, in particular:
•traces of corrosion;
•oil leaks;
•slack joints or couplings.
Maintenance technicians must:
•be aware of all applicable national directives
concerning accident prevention during work
on motor-driven pumps and should know how
to apply them;
•have read and understood all the sections on
“Safety Rules";
•be familiar with the essential design features
and operation of the pump;
•know how to use and consult the pump docu-
mentation;
•be concerned about proper operation of the
pump;
•make a note of any irregularities in operation
of the pump and take the necessary action,
where appropriate.
Use original spare parts wherever possible and
repair a broken part as best as possible on site or
send it back to the manufacturer for repairs.
For all problems arising, or to order spare parts,
refer to our service department.
Varian S.p.A. - Vacuum Technologies
Via Varian 54
10040 Leinì (Torino) - Italy
Telephone: [phone]
Fax: [phone]
Here following the correct procedures for MS40+
Oil Change and Filter Cartridge Replacement are
described.