Agilent Technologies TwisTorr 305-ICQ User manual

Agilent TwisTorr 305-ICQ & 305-IC SF
User Manual

2 Agilent TwisTorr 305-ICQ & 305-IC SF User Manual
Notices
Manual Part Number
D0007035
Edition A.00, December 2020
Copyright
© Agilent Technologies, Inc. 2020
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Storage Temperature: -40°C ÷70°C
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WARNING
CAUTION

Contents
Agilent TwisTorr 305-ICQ & 305-IC SF User Manual 3
Contents
1Istruzioni per l’uso 13
Informazioni su questo manuale 14
Validità 14
Definizioni e terminologia 15
Definizione di Attenzione, Avvertenza e Nota 15
Simboli di avvertenza 16
Sicurezza 18
Uso corretto 18
Uso improprio 19
Attrezzatura di protezione 20
Linee guida di sicurezza per pompe turbomolecolari 21
Trasporto & Immagazzinamento 22
Descrizione del prodotto 23
Installazione 24
Preparazione per l’installazione 24
Apertura 26
Fissaggio della TwisTorr 305-ICQ & 305-IC SF 27
Collegamento della flangia per alto vuoto 28
Installazione della flangia ISO-K 29
Installazione della flangia ConFlat 30
Collegamento della pompa di pre-vuoto 31
Avvio e funzionamento della TwisTorr 305-ICQ & 305-IC SF 32
Arresto della TwisTorr 305-ICQ & 305-IC SF 35
Arresto di emergenza 35

Contents
4 Agilent TwisTorr 305-ICQ & 305-IC SF User Manual
Manutenzione 36
Vita del rotore 36
Soft Start 37
Pulizia 37
Smaltimento 38
Servizio Post Vendita 39
2Betriebsanleitung 40
Informationen über diese Betriebsanleitung 41
Gültigkeit 41
Definitionen und Terminologie 42
Definition von Vorsicht, Warnung und Hinweis 42
Warnsymbole 43
Sicherheit 45
Sachgemäße Verwendung 45
Unsachgemäße Anwendung 46
Schutzausrüstung 47
Sicherheitsrichtlinie für Turbomolekularpumpen 48
Transport und Lagerung 49
Produktbeschreibung 50
Installation 51
Vorbereitung zum Einbau 51
Einrichten 53
Montage von TwisTorr 305-ICQ & 305-IC SF 54
Anschluss des Hochvakuumflansches 55
Installation des ISO-K-Flansches 56
Installation des ConFlat-Flansches 57

Contents
Agilent TwisTorr 305-ICQ & 305-IC SF User Manual 5
Anschluss der Vorvakuumpumpe 58
Inbetriebnahme und Betrieb des TwisTorr 305-ICQ & 305-IC SF 59
Stoppen des TwisTorr 305-ICQ & 305-IC SF 62
Notausschaltung 62
Wartung 63
Rotordauer 63
Sanftanlauf 64
Reinigung 64
Entsorgung 65
Service 66
3Mode d’emploi 67
À propos de ce manuel 68
Validité 68
Définitions et terminologie 69
Signification des messages d’attention, d’avertissement et des notes 69
Symboles d'avertissement 70
Sécurité 72
Utilisation appropriée 72
Utilisation inappropriée 73
Équipements de protection individuelle 74
Directive de sécurité pour les pompes turbomoléculaire 75
Transport et entreposage 76
Description du produit 77
Installation 78
Préparation pour l’installation 78
Configuration 80

Contents
6 Agilent TwisTorr 305-ICQ & 305-IC SF User Manual
Montage de la TwisTorr 305-ICQ & 305-IC SF 81
Raccordement de la bride à vide élevé 82
Installation de la bride ISO-K 83
Installation de la bride ConFlat 84
Raccordement de la bride à vide préliminaire 85
Démarrage et utilisation de la TwisTorr 305-ICQ & 305-IC SF 86
Arrêt de la TwisTorr 305-ICQ & 305-IC SF 89
Arrêt d’urgence 89
Entretien 90
Durée de vie du rotor 90
Démarrage progressif 91
Nettoyage 91
Élimination 92
Service 93
4Instrucciones de uso 94
Acerca del manual 95
Validez 95
Definiciones y terminología 96
Definición de Precaución, Advertencia y Nota 96
Símbolos de advertencia 97
Seguridad 99
Uso correcto 99
Uso incorrecto 100
Equipo de protección 101
Pautas de seguridad para bombas turbomoleculares 102
Transporte y almacenamiento 103

Contents
Agilent TwisTorr 305-ICQ & 305-IC SF User Manual 7
Descripción del producto 104
Instalación 105
Preparación para instalación 105
Puesta en marcha 107
Montaje de la TwisTorr 305-ICQ & 305-IC SF 108
Conexión de la brida de alto vaciado 109
Instalación de la brida ISO-K 110
Instalación de la brida ConFlat 111
Conexión de la bomba pre-vaciado 112
Puesta en marcha y funcionamiento de la TwisTorr 305-ICQ & 305-IC SF
113
Parada de la TwisTorr 305-ICQ & 305-IC SF 116
Parada de emergencia 116
Mantenimiento 117
Vida del rotor 117
Arranque suave (“Soft Start”) 118
Limpieza 118
Eliminación 119
Servicio 120
5使用说明121
关于本手册 122
有效性 122
定义与术语 123
小心、警告和注意的定义123
警告符号 124

Contents
8 Agilent TwisTorr 305-ICQ & 305-IC SF User Manual
安全 126
正确使用 126
使用不当 127
防护设备 128
涡轮分子泵安全指南 129
运输及存储130
产品描述 131
安装 132
安装准备132
设置134
TwisTorr 305-ICQ & 305-IC SF 的安装 135
高真空法兰的连接136
ISO-K 法兰的安装 137
ConFlat 法兰的安装 138
前真空泵的连接139
TwisTorr 305-ICQ & 305-IC SF 的启动和运行 140
停止 TwisTorr 305-ICQ & 305-IC SF 143
紧急停止 143
维护 144
转子寿命 144
慢启动145
清洗 145

Contents
Agilent TwisTorr 305-ICQ & 305-IC SF User Manual 9
处置146
服务147
6取扱説明書 148
この説明書について 149
有効期 149
定義と用語 150
警告・注意・注の定義 150
警告の記号 151
安全性 153
適切な使用 153
不適切な使用 154
保護用装備 155
ターボ分子ポンプ用安全ガイドライン 156
移送＆保管 157
製品説明 158
取り付け 159
取り付けの準備 159
セットアップ 161
TwisTorr 305-ICQ & 305-IC SF 実装 162
高真空フランジの接続 163
ISO-K フランジの取り付け 164
ConFlat フランジの取り付け 165
フォア真空ポンプの接続 166
TwisTorr 305-ICQ & 305-IC SF の起動開始と操作 167

Contents
10 Agilent TwisTorr 305-ICQ & 305-IC SF User Manual
TwisTorr 305-ICQ & 305-IC SF を停止する 170
緊急停止 170
メンテナンス 171
ローターの寿命 171
ソフトスタート 172
クリーニング 172
処分 173
サービス 174
7Instructions for Use 175
About this manual 176
Validity 176
Definitions and terminology 177
Definition of Caution, Warning and Note 177
Warning Symbols 178
Safety 180
Proper use 180
Improper use 181
Protective equipment 182
Safety guideline for Turbomolecular Pumps 183
Transport & Storage 184
Product description 185
Installation 186
Preparation for installation 186
Set-up 188
TwisTorr 305-ICQ & 305-IC SF Mounting 189