Edwards ES Series User manual

A352-02-840
Issue A
Original Instructions
Instruction Manual
ES EH Combination Kit Assembly Instructions
Description Item Number
ES100 - EH250 Combination Kit A52010100
ES100 - EH500 Combination Kit A52010120
ES200/300 - EH500 Combination Kit A52010130
ES200/300 - EH1200 Combination Kit A52010140
ES300 - EH2600/4200 Combination Kit A52010150
ES630 - EH1200 Combination Kit A52010160
ES630 - EH2600/4200 Combination Kit A52010170

This product has been manufactured under a quality management system certified to ISO 9001:2008
Declaration of Conformity
We, Edwards,
Innovation Drive,
Burgess Hill,
West Sussex,
RH15 9TW, UK
declare under our sole responsibility, as manufacturer and person within the EU authorised to assemble the
technical file, that the product(s)
ES100 – EH250 Combination Kit A52010100
ES100 – EH500 Combination Kit A52010120
ES200/300 – EH500 Combination Kit A52010130
ES200/300 – EH1200 Combination Kit A52010140
ES300 – EH2600/4200 Combination Kit A52010150
ES630 – EH1200 Combination Kit A52010160
ES630 – EH2600/4200 Combination Kit A52010170
to which this declaration relates is in conformity with the following standard(s) or other normative document(s)
ENISO12100:2010 Safety of machinery. General principles for design. Risk assessment and risk
reduction.
EN1012-2:1996+A1:2009 Compressors and Vacuum Pumps. Safety Requirements. Vacuum Pumps
EN50581:2012 Technical Documentation for the Assessment of Electrical and
Electronic Products with respect to the Restriction of Hazardous
Substances
EN60034-1: 2010 Rotating electrical machines. Rating and performance
and fulfils all the relevant provisions of
2006/42/EC Machinery Directive
2014/35/EU Low Voltage Directive
2011/65/EU Restriction of Certain Hazardous Substances (RoHS) Directive
Note: This declaration covers all product serial numbers from the date this Declaration was signed onwards.
09.05.2016, Burgess Hill
Mr Peter Meares
Senior Technical Support Manager, General Vacuum Date and Place
P200-08-940 Issue B

© Edwards Limited 2014. All rights reserved. Page i
Edwards and the Edwards logo are trademarks of Edwards Limited.
Contents
A352-02-840 Issue A
Contents
Section Page
1 Introduction ....................................................................................... 1
1.1 Scope and definitions ................................................................................................... 1
2 Safety ............................................................................................... 1
3 Unpack and Inspect ............................................................................... 1
4 EH - ES direct mount assembly procedure .................................................... 6
4.1 Base runner mounting to pump ........................................................................................ 6
4.2 Adapter mounting to booster .......................................................................................... 7
4.3 Mount the EH to the ES pump .......................................................................................... 8
4.4 Leak test the system .................................................................................................... 9
5 EH - ES frame mount assembly procedure .................................................. 10
5.1 Base runner preparation ...............................................................................................11
5.2 Grub screw alignment and installation ..............................................................................12
5.3 Base runner alignment .................................................................................................13
5.4 Main frame assembly ...................................................................................................14
5.5 Move assembly ..........................................................................................................16
5.6 Bellows installation .....................................................................................................17
5.7 Booster installation .....................................................................................................19
5.8 Leak test the system ...................................................................................................20
For return of equipment, complete the HS Forms at the end of this manual.
cg/04/14

A352-02-840 Issue A
Page ii © Edwards Limited 2014. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Contents
Illustrations
Figure Page
1 Base runner mounting ................................................................................................... 6
2 Adapter mounting ........................................................................................................ 7
3 Mount the EH to the ES pump .......................................................................................... 8
4 Base runner preparation ...............................................................................................11
5 Grub screw alignment and installation ..............................................................................12
6 Base runner alignment .................................................................................................13
7 Base runner installation ...............................................................................................14
8 Move assembly ..........................................................................................................16
9 Bellows installation .....................................................................................................17
10 Connect EH booster to ES pump ......................................................................................19
11 Attach EH booster to main frame .................................................................................... 20
Tables
Table Page
1 ES/EH combination mounts ............................................................................................ 1
2 ES100 - EH250 combination kit (A520-10-100) ...................................................................... 2
3 ES100 - EH500 combination kit (A520-10-120) ...................................................................... 2
4 ES200/ES300 - EH500 combination kit (A520-10-130) .............................................................. 3
5 ES200/ES300 - EH1200 combination kit (A520-10-140) ............................................................. 3
6 ES300 - EH2600/4200 combination kit (A520-10-150) .............................................................. 3
7 ES630 - EH1200 combination kit (A520-10-160) ..................................................................... 4
8 ES630 - EH2600/4200 combination kit (A520-10-170) .............................................................. 5
9 Required tools ............................................................................................................ 6
10 Required tools ...........................................................................................................10
Associated publications
Publication title Publication number
ES65/ES100/ES200/ES300 and ES630 Single Stage Rotary Vane Pumps A352-01-880
EH Mechanical Booster/ES Single Stage Rotary Pump Combination Pumping Systems A352-02-880
Vacuum Pump and Vacuum System Safety P400-40-100

© Edwards Limited 2014. All rights reserved. Page 1
Edwards and the Edwards logo are trademarks of Edwards Limited.
Introduction
A352-02-840 Issue A
1Introduction
1.1 Scope and definitions
This manual provides assembly instructions for ES/EH combinations when the EH mechanical booster pump, ES single
stage rotary pump and ES/EH combination kit are purchased separately and not as a pre-built system.
Depending on the ES/EH variant the completed combination system will either be direct mounted or frame mounted.
Please refer to combination instruction manual A53202880, pump instruction manual A35201880 and EH booster
instruction manual A30151880 for full details.
Full ES/EH installation and commissioning instructions are given in ES/EH Combination instruction manual A53202880.
The part numbers and mounting type are given in Table 1 below:
2Safety
The units used throughout this manual conform to the SI international system of units of measurement.
3 Unpack and Inspect
Remove all packaging and check that all items listed have been received. If not, notify the supplier as soon as
possible.
WARNING
Ensure base runners are fitted to the combination system. Failure to fit base runners may make
the combination system unstable.
WARNING
Only lift the combination system as defined in the ES/EH combination instruction manual
A53202880.
Table 1 - ES/EH combination mounts
Description Mount Item Number
ES100 - EH250 Combination Kit Direct A52010100
ES100 - EH500 Combination Kit Direct A52010120
ES200/300 - EH500 Combination Kit Direct A52010130
ES200/300 - EH1200 Combination Kit Direct A52010140
ES300 - EH2600/4200 Combination Kit Frame A52010150
ES630 - EH1200 Combination Kit Direct A52010160
ES630 - EH2600/4200 Combination Kit Frame A52010170
WARNING
Ensure the pumps are disconnected from the electrical supply to avoid accidental operation.

A352-02-840 Issue A
Page 2 © Edwards Limited 2014. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Unpack and Inspect
Table 2 - ES100 - EH250 combination kit (A520-10-100)
Qty Part Number Description Check ()
2 A20501052 Frame/base runner 
1 C10007087 ISO40 bolted to ISO63 adaptor (including bolts) 
1 B27158165 ISO40 trapped O-ring 
1 B27158170 ISO63 trapped O-ring 
4 C10007151 ISO63-ISO100 half claw for tapped holes 
2 218181412 M8 x 25 bolts for pump to runners 
2 218981310 M8 washer 
2 218983510 M8 s.coil washer 
2 218181452 M10 x 25 bolt 
2 218981311 M10 washer 
2 218983511 M10 s.coil washer 
1 A35202880 EH Mechanical Booster/ES Single Stage Rotary Pump
Combination Pumping Systems instruction manual

1 A35202840 ES EH Combination Kits instruction manual 
Table 3 - ES100 - EH500 combination kit (A520-10-120)
Qty Part Number Description Check ()
2 A20501052 Frame/base runner 
1 C10007155 Adaptor ISO63-ISO63 bolted (including bolts) 
2 B27158170 ISO63 trapped O-ring 
4 C10007151 ISO63-ISO100 half claw for tapped holes 
2 218181412 M8 x 25 bolts for pump to runners 
2 218981310 M8 washer 
2 218983510 M8 s.coil washer 
2 218181452 M10 x 25 bolt 
2 218981311 M10 washer 
2 218983511 M10 s.coil washer 
1 A35202880 EH Mechanical Booster/ES Single Stage Rotary Pump
Combination Pumping Systems instruction manual

1 A35202840 ES EH Combination Kits instruction manual 

© Edwards Limited 2014. All rights reserved. Page 3
Edwards and the Edwards logo are trademarks of Edwards Limited.
Unpack and Inspect
A352-02-840 Issue A
Table 4 - ES200/ES300 - EH500 combination kit (A520-10-130)
Qty Part Number Description Check ()
2 A20501052 Frame/base runner 
1 C10007155 Adaptor ISO63-ISO63 bolted (including bolts) 
2 B27158170 ISO63 trapped O-ring 
4 C10007151 ISO63-ISO100 half claw for tapped holes 
4 218181452 10 x 25 bolt 
4 218981311 M10 washer 
4 218983511 M10 s.coil washer 
1 A35202880 EH Mechanical Booster/ES Single Stage Rotary Pump
Combination Pumping Systems instruction manual

1 A35202840 ES EH Combination Kits instruction manual 
Table 5 - ES200/ES300 - EH1200 combination kit (A520-10-140)
Qty Part Number Description Check ()
2 A20501052 Frame/base runner 
1 C10009111 ISO100-ISO63 adaptor 
1 B27158170 ISO63 trapped O-ring 
1 B27158171 ISO100 trapped O-ring 
12 C10007151 ISO63-ISO100 half claw for tapped holes 
4 218181452 M10 x 25 bolt 
4 218981311 M10 washer 
4 218983511 M10 s.coil washer 
1 A35202880 EH Mechanical Booster/ES Single Stage Rotary Pump
Combination Pumping Systems instruction manual

1 A35202840 ES EH Combination Kits instruction manual 
Table 6 - ES300 - EH2600/4200 combination kit (A520-10-150)
Qty Part Number Description Check ()
2 A22440100 Frame ends 
2 A22440101 Frame upper support channel 
2 A22440102 Frame base runner 
2 A22440103 Frame cross brace 
1 A22440124 Support cross piece 
1 B27158170 ISO63 trapped O-ring 
2 B27158171 ISO100 trapped O-ring 
12 C10007151 ISO63-ISO100 half claw 
4 C10007156 ISO63-ISO100 single claw clamp 
1 C10009120 ISO100-ISO63 stainless steel spacer 
1 C10009670 ISO100 bellows 
4 218181497 M12 x 50 hex head screw - stainless steel 
2 218181501 M12 x 70 hex head screw - stainless steel 
4 218181502 M12 x 80 hex head screw - stainless steel 

A352-02-840 Issue A
Page 4 © Edwards Limited 2014. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Unpack and Inspect
Qty Part Number Description Check ()
8 218181564 M16 x 60 hex head screw - stainless steel 
4 218181566 M16 x 80 hex head screw - stainless steel 
4 218181658 M20 x 80 hex head screw - stainless steel 
4 218430160 M10 x 30 hex head socket grub screw 
4 218790011 M16 eye bolt 
4 218960911 M10 full nut stainless steel 
10 218960912 M12 full nut stainless steel 
4 218960916 M20 full nut stainless steel 
2 218981311 M10 plain washer 
20 218981312 M12 plain washer 
8 218981314 M16 plain washer 
8 218981316 M20 plain washer 
4 218983511 M10 spring coil washer 
10 218983512 M12 spring coil washer 
8 218983514 M16 spring coil washer 
4 218983516 M20 spring coil washer 
1 A35202880 EH Mechanical Booster/ES Single Stage Rotary Pump
Combination Pumping Systems instruction manual

1 A35202840 ES EH Combination Kits instruction manual 
Table 7 - ES630 - EH1200 combination kit (A520-10-160)
Qty Part Number Description Check ()
2 A20501055 Frame/base r unner 
1 C10009160 Nipple ISO100 
2 B27158171 ISO100 TRAPPED O-RING 
16 C10007151 ISO63-ISO100 HALF CLAW for tapped holes 
2 218181451 M10 x 20 Bolt 
4 218981311 M10 Washer 
4 218983511 M10 Scoil washer 
1 A35202880 EH Mechanical Booster/ES Single Stage Rotary Pump
Combination Pumping Systems instruction manual

1 A35202840 ES EH Combination Kits instruction manual 
Table 6 - ES300 - EH2600/4200 combination kit (A520-10-150) (continued)

© Edwards Limited 2014. All rights reserved. Page 5
Edwards and the Edwards logo are trademarks of Edwards Limited.
Unpack and Inspect
A352-02-840 Issue A
Table 8 - ES630 - EH2600/4200 combination kit (A520-10-170)
Qty Part Number Description Check ()
2 A22440120 Frame ends 
2 A22440121 Frame upper support channel 
2 A22440122 Frame base runner 
2 A22440123 Frame cross brace 
1 A22440124 Support cross piece 
3 B27158171 ISO100 trapped O-ring 
16 C10007151 ISO63-ISO100 half claw clamp 
1 C10009125 ISO100 spacer stainless steel 
1 C10009670 ISO100 bellows 
4 218181497 M12 x 50 hex head screw - stainless steel 
2 218181501 M12 x 70 hex head screw - stainless steel 
4 218181502 M12 x 80 hex head screw - stainless steel 
8 218181564 M16 x 60 hex head screw - stainless steel 
4 218181566 M16 x 80 hex head screw - stainless steel 
4 218181658 M20 x 80 hex head screw - stainless steel 
4 218430160 M10 x 30 hex head socket grub screw 
4 218790011 M16 eye bolt 
4 218960911 M10 full nut stainless steel 
10 218960912 M12 full nut stainless steel 
4 218960916 M20 full nut stainless steel 
2 218981311 M10 plain washer 
20 218981312 M12 plain washer 
8 218981314 M16 plain washer 
8 218981316 M20 plain washer 
4 218983511 M10 spring coil washer 
10 218983512 M12 spring coil washer 
8 218983514 M16 spring coil washer 
4 218983516 M20 spring coil washer 
1 A35202880 EH Mechanical Booster/ES Single Stage Rotary Pump
Combination Pumping Systems instruction manual

1 A35202840 ES EH Combination Kits instruction manual 

A352-02-840 Issue A
Page 6 © Edwards Limited 2014. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
EH - ES direct mount assembly procedure
4 EH - ES direct mount assembly
procedure
See Table 9 for required tools for performing this procedure.
4.1 Base runner mounting to pump
Refer to Figure 1.
Figure 1 - Base runner mounting
Table 9 - Required tools
Tool description Quantity
½ inch torque wrench 2
13 mm socket (for M8 in feet) 1
30 mm socket (for M20) 2
24 mm socket (for M16) 1
19 mm socket (for M12) 2
17 mm socket (for M10) 2
13 mm spanner (for M8 on claws) 1
Ref Description ES100 ES200 / ES300 ES630
1 ES pump weight 88 kg 144/180 kg 506 kg
2 Base runner A20501052 A20501052 A20501055
3 Bolt M8 x 25 - 218181412 (x2)
M10 x 25 - 218181452 (x2)
M10 x 25 - 218181452 M10 x 25 - 218181452
4 Washer 218981310 (x2)
218981311 (x2)
218981311 218981311
5 S.coil washer 218983510 (x2)
218983511 (x2)
218983511 218983511
A. Lift the pump safely and support to allow
underside access.
B. Bolt the base runners to the ES pump feet
using 4 bolts. Tighten the bolts to 70 Nm.

© Edwards Limited 2014. All rights reserved. Page 7
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EH - ES direct mount assembly procedure
A352-02-840 Issue A
4.2 Adapter mounting to booster
Refer to Figure 2.
Figure 2 - Adapter mounting
Ref Description ES100/
EH250
ES100/
EH500
ES200/
EH500
ES200/
EH1200
ES300/
EH500
ES300/
EH1200
ES630/
EH1200
1EHbooster
2 O-ring B27158165 B27158170 B27158170 B27158171 B27158170 B27158171 B27158171
3 Adapter C10007087 C10007155 C10007155 C10009111 C10007155 C10009111 C10009160
4 Clamps C10007151 C10007151 C10007151 C10007151 C10007151 C10007151 C10007151
A. Lift the EH booster.
B. Remove the blanking plate.
C. Fit the O-ring and adapter to the exhaust on the EH pump.
D. Secure the adapter to the exhaust on the EH pump with the bolts supplied.

A352-02-840 Issue A
Page 8 © Edwards Limited 2014. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
EH - ES direct mount assembly procedure
4.3 Mount the EH to the ES pump
Refer to Figure 3.
Figure 3 - Mount the EH to the ES pump
Ref Description ES100/
EH250
ES100/
EH500
ES200/
EH500
ES200/
EH1200
ES300/
EH500
ES300/
EH1200
ES630/
EH1200
1 O-ring B27158170 B27158170 B27158170 C10009111 B27158170 B27158170 B27158171
2 Clamp C10007151 C10007151 C10007151 C10007151 C10007151 C10007151 C10007151
A. Lift the booster.
B. Insert the trapped O-ring then lower the EH pump onto the ES pump.
C. Secure the EH pump to the ES pump using the bolts provided.

© Edwards Limited 2014. All rights reserved. Page 9
Edwards and the Edwards logo are trademarks of Edwards Limited.
EH - ES direct mount assembly procedure
A352-02-840 Issue A
4.4 Leak test the system
Leak test the system after installation is complete and seal any leaks found. Hazardous substances which leak from
the system will be dangerous to people and there will be a danger of explosion if air leaks into the system.
Edwards recommend that the leak rate is 1 x 10-3 mbar l s-1 (1 x 10-1 Pa l s-1) helium or less.
WARNING
Leak test the system after installation is complete and seal any leaks found to prevent leakage of
hazardous substances out of the system and leakage of air into the system.

A352-02-840 Issue A
Page 10 © Edwards Limited 2014. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
EH - ES frame mount assembly procedure
5 EH - ES frame mount assembly
procedure
See Table 10 for the required tools for performing this procedure.
Table 10 - Required tools
Tool description Quantity
½ inch torque wrench 2
13 mm spanner (for M8 on claws) 1
24 mm spanner (for M16) 1
24 mm socket (for M16) 2
18 mm socket (for M12) 2
19 mm spanner (for M12) 1
17 mm socket (for M10) 2
13 mm spanner (for M8 on claws) 1
30 mm spanner (for M20 bolt) 1

© Edwards Limited 2014. All rights reserved. Page 11
Edwards and the Edwards logo are trademarks of Edwards Limited.
EH - ES frame mount assembly procedure
A352-02-840 Issue A
5.1 Base runner preparation
Refer to Figure 4.
Place the base runners on the work bench.
Set the hole centres at 376 mm.
Figure 4 - Base runner preparation
Ref Description ES300 ES630
2 Base runner A22440102 A22440122
A. Work bench requirements.
B. Place base runners on work bench and set hole centres.
1. Work bench
2. Base runners (2 off)
3. Motor side of ES300/630 pump

A352-02-840 Issue A
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Edwards and the Edwards logo are trademarks of Edwards Limited.
EH - ES frame mount assembly procedure
5.2 Grub screw alignment and installation
Refer to Figure 5.
Screw the grub screws into the feet of the pump.
Figure 5 - Grub screw alignment and installation
Ref Description ES300 ES630
1 ES pump weight 180 kg 506 kg
2 Grub screws (4 off) 218430160 218430160
3 Base runners (2 off) A22440122 A22440102

© Edwards Limited 2014. All rights reserved. Page 13
Edwards and the Edwards logo are trademarks of Edwards Limited.
EH - ES frame mount assembly procedure
A352-02-840 Issue A
5.3 Base runner alignment
Refer to Figure 6.
Line up the grub screws with the holes in the base runners and lower the pump.
Figure 6 - Base runner alignment
Ref Description Part number
1 M10 nut (4 off) 2189609011
2 M10 spring washer (4 off) 218983511
3 M10 washer (4 off) 218981311
A. Lowering ES pump onto base runners
B. ES pump located on base runners
C. Secure ES pump to base runners

A352-02-840 Issue A
Page 14 © Edwards Limited 2014. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
EH - ES frame mount assembly procedure
5.4 Main frame assembly
Refer to Figure 7.
Figure 7 - Base runner installation
Corner plate to be facing
outwards
A. Main frame exploded diagram
B. Connect end frames to base runners
C. Connect cross braces to main frame
D. Connect upper support channels to main frame
E. Connect pump brace to upper support channels

© Edwards Limited 2014. All rights reserved. Page 15
Edwards and the Edwards logo are trademarks of Edwards Limited.
EH - ES frame mount assembly procedure
A352-02-840 Issue A
Ref Description ES300 ES630
1Eye bolt M16 - 218790011 M20 - 218790010
2Main frame A22440100 A22440120
3Upper support channel A22440101 A22440121
4Support cross piece A22440124 A22440124
5Cross brace A22440103 A22440123
6Screw - 60 mm long M16 - 218181564 M20 - 218181658
7Washer M16 - 218981314 M20 - 218981316
8Spring washer M16 - 218983514 M20 - 218983516
9M12 x 50 bolt 218181497 218181497
10 M12 washer 218981312 218981312
11 M12 spring washer 218983512 218983512
12 M12 nut 218960912 218960912
13 M12 x 80 screw 218181502 218181502

A352-02-840 Issue A
Page 16 © Edwards Limited 2014. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
EH - ES frame mount assembly procedure
5.5 Move assembly
Refer to Figure 8.
Figure 8 - Move assembly
A. Attach slings and lift combination from bench
B. Place assembly on floor