Leica EM ACE600 User manual

Leica EM ACE600
Operating Manual
167202032 Version 06/15

Important Note
/HLFD0LNURV\VWHPH*PE+UHVHUYHVWKHULJKWWRFKDQJHWHFKQLFDOVSHFL¿FDWLRQVDVZHOO
DVPDQXIDFWXULQJSURFHVVHVZLWKRXWSULRUQRWLFH2QO\LQWKLVZD\LVLWSRVVLEOHWRFRQ-
tinuously improve the technology and manufacturing techniques used to provide our
customers Zith e[cellent products
$ny copyrights of this document are retained Ey /eica 0iNrosysteme *mE+ 9ienna
$ny reproduction of te[t and illustrations or any parts thereofEy printingphotocopy-
ingor other methods including electronic systems and mediarequires e[press prior
permission in Zriting
Issued by:
Leica Mikrosysteme GmbH
Hernalser Hauptstrasse 219
A-1170 Vienna

Leica EM ACE600
2SHUDWLQJ0DQXDO
Leica EM ACE600 Serial Number:
Date of purchase:
For the instrument serial number, please refer to the name type label on the
back of the instrument!
Please read this instruction manual carefully
before operating the instrument.
For Research use only!

Operating Manual Leica EM ACE600 Version 06/15 Page 1
Important note
Please read this instruction manual carefully before operating the instrument. This user
manual is intended to provide essential information about the Leica EM ACE600 coating
system. It includes important information regarding correct operation, servicing and
troubleshooting. Following these instructions will help to prevent hazards, reduce repair and
downtime costs and prolong the system's life.
The Leica EM ACE600 coater system can be handled safely
and easily provided it is operated in accordance with the
instructions in this manual. Ignoring safety instructions may
endanger people and the system.
Users must familiarize themselves with the system before operation. Particular attention
must be paid to the aspect of safety. The Leica EM ACE600 must not be used beyond the
limits specified in the technical data sheet.
When hazardous substances (e.g. radioactive, toxic or explosive substances) are processed,
the substance-specific safety precautions must be implemented. It is forbidden to process
substances that release corrosive or poisonous gases when they are placed in vacuum
and/or are coated.
Any warranty claims can only be considered when the instrument is used according to the
guidelines given in this manual.
In addition, all generally applicable legal and otherwise binding regulations for preventing
accidents and protecting the environment must be observed and communicated.
Leica reserves the right to change technical specifications as well as manufacturing
processes without prior notice. Only in this way is it possible to continuously improve the
technology and manufacturing techniques used to provide our customers with excellent
products.
Any copyrights of this document are retained by Leica Mikrosysteme GmbH, Vienna. Any
reproduction of text and illustrations (or any parts thereof) by printing, photocopying, or other
methods (including electronic systems and media) as well as handing over to third parties
requires approval of Leica Mikrosysteme GmbH.

Operating Manual Leica EM ACE600 Version 06/15 Page 2
Symbols used in this manual
Danger!
Instructions regarding possible hazards are identified with this
symbol. Ignoring these alerts may result in serious injury! Users
of the instrument must comply with instructions at all times.
Caution!
This symbol alerts the user to important information which may
endanger staff or result in damage to the system if it is ignored.
This Dewar contains LN2. Follow safety procedures when handling
liquid nitrogen.
Lifting hazard. Single person lift could cause injury.
Use assistance when moving or lifting the coater.
Note!
This symbol indicates further information relating to a previous
explanation which does not have a safety-critical function. However,
it is important to follow this information to ensure that the system
functions optimally.
Wear clean, powder-free gloves.


Operating Manual Leica EM ACE600 Version 06/15 Page 3
Table of contents
1.INTRODUCTION.........................................................................................................................................5
1.1SAFETY........................................................................................................................................................6
1.2INSTRUMENTOVERVIEW.................................................................................................................................8
2.INSTALLATIONANDSETUP.......................................................................................................................9
2.1.DELIVERYOFTHEINSTRUMENT.........................................................................................................................9
2.2.INSTALLATIONREQUIREMENTS.........................................................................................................................9
2.3.UNPACKINGANDCONNECTION......................................................................................................................10
2.4INSERTINGCHAMBERSHIELDING.....................................................................................................................14
2.5SHUTTERINSTALLATION................................................................................................................................18
2.6.QUARTZCRYSTALMEASUREMENTINSTALLATION................................................................................................20
2.7.STAGEINSTALLATION....................................................................................................................................23
2.8ECCENTRICQUARTZHOLDER..........................................................................................................................27
3.OPERATION............................................................................................................................................29
3.1TOUCHSCREENCONTROLPANEL.....................................................................................................................29
3.1.1Settings............................................................................................................................................30
3.1.2Menu...............................................................................................................................................31
3.1.3Filehandling....................................................................................................................................32
3.1.4Softwareupdate..............................................................................................................................33
3.2PUMPANDVENT.........................................................................................................................................34
3.3VACUUMTEST............................................................................................................................................35
3.4PROCESSSTARTANDSTOP.............................................................................................................................35
3.5VENTAFTERPROCESS...................................................................................................................................36
3.6THICKNESSMONITORINGANDGEOMETRICALCORRECTION(QSG).........................................................................36
3.7CARBONTHREADCOATING............................................................................................................................38
3.7.1Loadingacarbonthread.................................................................................................................39
3.7.2Choosingacarbonthreadprotocol.................................................................................................43
3.7.3Runningacarbonthreadprocess....................................................................................................45
3.8SPUTTERCOATING.......................................................................................................................................49
3.8.1Loadingthesputtertarget..............................................................................................................50
3.8.2Choosingasputteringprotocol.......................................................................................................51
3.8.3Runningasputteringprocess..........................................................................................................53
3.9EͲBEAMCOATING........................................................................................................................................58
3.9.1LoadinganeͲbeamevaporationsource..........................................................................................60
3.9.2ChoosinganeͲbeamprotocol.........................................................................................................78
3.9.3RunninganeͲbeamprocess............................................................................................................79
3.10.CARBONRODCOATING.................................................................................................................................81
3.10.1Loadingacarbonrod......................................................................................................................82
3.10.2Choosingacarbonrodprotocol......................................................................................................89
3.10.3Runningacarbonrodprocess.........................................................................................................90
3.11GLOWDISCHARGE.......................................................................................................................................92
3.11.1Choosingaglowdischargeprotocol...............................................................................................92
3.11.2Runningaglowdischargeprocess..................................................................................................94
3.12.RUNNINGASEQUENCE.................................................................................................................................94
3.13EDITINGAPROTOCOLORSEQUENCE................................................................................................................98

Operating Manual Leica EM ACE600 Version 06/15 Page 4
3.13.1Editingacarbonthreadprocess......................................................................................................98
3.13.2Editingasputteringprocess..........................................................................................................101
3.13.3EditinganeͲbeamprocess............................................................................................................105
3.13.4Editingacarbonrodprocess.........................................................................................................108
3.13.5Editingaglowdischargeprocess..................................................................................................110
3.13.6Editingasequence.........................................................................................................................112
3.13.7Manualstage:differenceinuserinterfaceandsetͲup.................................................................114
3.14DEFININGACOATINGMATERIAL...................................................................................................................115
3.14.1Defineacarbonthread..................................................................................................................116
3.14.2Defineasputtertarget..................................................................................................................118
3.14.3DefineaneͲbeamtarget...............................................................................................................119
3.14.4Defineacarbonrodmaterial........................................................................................................120
4.MAINTENANCEANDSERVICE................................................................................................................123
4.1GENERALINSTRUCTIONSFORMAINTENANCEANDCLEANING..............................................................................123
4.1.1Sourcecover..................................................................................................................................124
4.2CLEANINGOFTHELEICAEMACE600..........................................................................................................124
4.2.1Removingthedoor........................................................................................................................127
4.2.2Removingshutterandinternalshielding......................................................................................128
4.2.3Exchangingtheglassshieldingforthechamberlight...................................................................128
5.TROUBLESHOOTING..............................................................................................................................129
5.1ERRORMESSAGES......................................................................................................................................130
6.SERVICINGANDREPAIR........................................................................................................................137
7.TECHNICALDATASHEET........................................................................................................................138
8.ECDECLARATIONOFCONFORMITY.......................................................................................................139


Operating Manual Leica EM ACE600 Version 06/15 Page 5
1. Introduction
The Leica EM ACE600 coating system is used for precise coating of samples for
subsequent examination with an electron microscope (EM). Up to two angled
sources can be configured. Automated stage rotation is integrated for best
distribution. Integrated quartz crystal measurement accurately determines the
layer thickness Automated height and tilt adjustment is optional, otherwise tilt and
height are set manually. The optional glow discharge makes grids hydrophilic. A
planetary drive stage for even distribution of coating material is available.
The samples are metal coated using the sputtering method where argon plasma
erodes a target material or e-beam evaporation . Carbon coating is achieved by
carbon thread, carbon rod or e-beam evaporation. Any sample can be processed
as long as it is not sensitive to vacuum, argon plasma or the heat generated
during carbon coating.
The Leica EM ACE600 coater can be configured with up to two (some limitations)
of the following processes: sputtering, carbon thread evaporation, carbon rod
evaporation, e-beam evaporation.
The removable shielding, shutter, source and door are designed to enable easy
and comprehensive cleaning of the system
The vacuum system creates an ultimate vacuum 2x10-6 mbar. Pressure is
monitored by a combined thermal and cold cathode vacuum gauge (see technical
data sheet for all specifications, 7).
Main components:
The Leica EM ACE600 coating system includes the following main functional
units, depending on the configuration:
xVacuum Chamber
xTouch screen control panel (see 3.1)
xRotating sample stage, 24 positions for 12,7mm SEM stubs (exchangeable,
see 2.7)
xRemovable shielding, shutter and door (see 2.4, 2.5, 4.2.1)
xHousing
xQuartz (QSG) thickness measurement (see 2.6 and 3.6)
xCarbon thread source or sputter source or e-beam source or carbon rod
source (see 3.7, 3.8, 3.9, 3.10)
Optional:
xPlanetary drive stage (see 2.7)
xAutomated or manual height and tilt adjustment (see 2.7)
xSample stage for two 76 mm x 26 mm (3” x 1”) glass slide, sample stage for
low angle rotary shadowing and clamping grids (60mm diameter)
(exchangeable, see 2.7)
xGlow discharge (see 2.5 and 3.11)

Operating Manual Leica EM ACE600 Version 06/15 Page 6
1.1 Safety
All electronic components are protected by covers: door lock (1), source cover (2),
housing (3).The door and source covers are equipped with sensors which cut off
power when they are opened. The housing must not be opened except by an
authorized Leica representative. Additionally there are software switches which
cut off power when a malfunction is noticed.
There is an overheat protection for the sources. When reaching 65°C the process
is stopped until a temperature of 45°C is reached then the process automatically
continues.
When there is a sudden vacuum break down the instrument switches off
automatically to protect pump and electric parts.
The housing must not be opened except by an authorized Leica representative.
If the Leica EM ACE600 coating system is damaged or malfunctions, all use of the
system should be suspended until the malfunction or damage has been corrected.
All modifications and conversions to the system are prohibited and invalidate the
warranty.
3
2
1

Operating Manual Leica EM ACE600 Version 06/15 Page 7
Note
For maintenance and servicing the system has to be switched off!
Caution
There is a danger of electric shock when the housing is removed.
Injuries may be sustained that could lead to death.
The Leica EM ACE600 coating system must not be operated unless all
covers are properly in place.
Caution!
Some of the components inside the system may become hot and present a
danger of injury.
Burns may be sustained.
Caution!
There is danger from the edges of the metal sheet of the internal
shielding and shutter.
Personal injury (e.g. cuts) may occur.
Safety measures during installation
The following measures must be implemented to prevent incorrect use:
xConnecting to electricity and gas must be carried out by a technically
qualified person.
xGas bottles must be secured and stand upright when connected. The system
must be connected to the gas supply by a technically qualified person.
xRepairs may only be made by Leica authorized service staff or authorized
representatives.
xIf the Leica EM ACE600 coating system is installed incorrectly, the system
may be damaged and may incur injury to the user
Emergency procedure
Caution
If unusual operating conditions or unaccustomed noises occur, the system
must be switched off using the mains switch on the rear of the system.
If fire fighting measures are called for, a CO2fire extinguisher must be used.
Technical Service must be consulted before resuming work with the system.

Operating Manual Leica EM ACE600 Version 06/15 Page 8
1.2 Instrument overview
1. Source cover
2. Source head (sputter (a) or carbon thread (b))
3. Shutter
4. Chamber
5. Sample stage
6. Touch sensitive control panel
7. Adjustable feet
8. Chamber door
9. USB port
10. Power supply switch
11. Mains power inlet for coater
12. Argon gas inlet
13. Nitrogen gas inlet
1
3
4
5
6
7
8
9
2a
b
10 11
12
13

Operating Manual Leica EM ACE600 Version 06/15 Page 9
2. Installation and set up
2.1. Delivery of the instrument
The Leica EM ACE600 coating system is delivered assembled apart from
accessories, table, back plates for the internal shielding, shutter and quartz crystal
measurement. They are packed separately and have to be installed (see 2.4, 2.5
and 2.6).
Please check the condition of the system upon delivery and file a damage report
with the shipping company if the equipment is damaged. The customer must
immediately inform the Leica representative for any possible damage in transit.
2.2. Installation requirements
A working area of about 150mm must be maintained all around the system, to
allow the supply connections to be made and also to enable access for essential
servicing activities by the customer. The Leica EM ACE600 has to be set up on a
stable laboratory workbench with a surface area of at least 680mm depth and 450
mm width. The coater is 640 mm high. When selecting a setup location, bear in
mind that the system weighs approx. 70 kg. All feet have to be adjusted and
counter locked to maintain level and stable positioning. When moving the coater
make sure to lift it up. The membrane pump stands on 4 legs to absorb vibrations
which should not be dragged.
The instrument must be placed on the bench in such a manner to allow
access to the mains switch and mains plug at any time!
External elements (dust, grease, etc.) may prevent achieving the required
vacuum.
When working on the vacuum chamber or parts which are in the vacuum chamber
of the Leica EM ACE600 coating system it is essential to follow the principles of
vacuum hygiene. Gloves must be worn when disassembling and assembling
components in the vacuum area, and also for all adjustment work.
All work must be carried out in a clean, oil/grease-free and dust-free environment.
The following connections need to be prepared:
xOne electrical supply: 100/115/230 VAC, 50/60 Hz
xArgon (only if sputter option is available), reduced pressure:~ 500 (+/- 100)
mbar, purity: min. 99.99%
xNitrogen (if wanting to vent with nitrogen), reduced pressure: ~ 500 (+/- 100)
mbar
Venting with nitrogen can improve the vacuum and pump down time of the
coating system.

Operating Manual Leica EM ACE600 Version 06/15 Page 10
2.3. Unpacking and connection
The Leica EM ACE600 coating system should be transported with a forklift truck.
Lift up the outer box.
Remove top foam lid.

Operating Manual Leica EM ACE600 Version 06/15 Page 11
Some material of the coater is packaged in top lid. Following items are to find
(note, depending on the configuration these items can change)
1. Back plate of the internal shielding (top part)
2. Planetary drive stage
3. Stage for SEM stubs
4. Carbon thread
5. Covers for the motorized stage connections
6. Back plate for the internal shielding (left botton)
7. Back plate for the internal shielding (right bottom)
8. Electrodes for glow discharge
9. Quartz- head and chrystals
10. Springs for the shutter
11. Torx key and brush for the carbon thread head
12. Bayonette ring for sputter target
13. Shutters
Remove accessory box and all protection foam material,
then remove the inner framing upwards.
1 2
345
6 7
89
10 11
12
13

Operating Manual Leica EM ACE600 Version 06/15 Page 12
Lift out the unit by grasping underneath the back and the front as indicated in the
picture (packaging provides recess for hands) and place it on a table.
Two strong people are required to lift the coater!
Place the EM ACE600 on a stable bench.
Adjusted all feet and counter lock (flat spanner 13 mm) to maintain level and
stable positioning. Connect mains cable.
If venting with nitrogen gas, connect to nitrogen gas (supplied hose, 6 mm
diameter). Regulate nitrogen pressure to ~0.5 bar over atmosphere.

Operating Manual Leica EM ACE600 Version 06/15 Page 13
For sputtering process only:
Connect to argon gas (supplied hose, 6 mm diameter). Purge argon line before
connecting to remove the air from inside the hose. This can help to reduce the
pump down time. Regulate argon pressure to ~0.5 bar over atmosphere.
We strongly recommend using a two-stage pressure regulator on the argon
bottle.

Operating Manual Leica EM ACE600 Version 06/15 Page 14
2.4 Inserting chamber shielding
For transporting, the main shielding only is secured in the vacuum chamber. To
install the back shielding take the main shielding out of the vacuum chamber and
place it on a clean surface. Start with placing the glass shielding for the chamber
light in the main shielding. A pack of 100 glass shields is included in the delivery.
Take out the main shielding and unscrew the screw on the top middle of the
chamber shielding which holds the part to separate and close the gap between
the two shutters.

Operating Manual Leica EM ACE600 Version 06/15 Page 15
Take out the metal holder.
Put in a glass shield.
(Or take out the coated round glass and replace it with a new one).
Put the metal bar back to its spot and screw it on gently.

Operating Manual Leica EM ACE600 Version 06/15 Page 16
Take the back plate of the shielding out of the packaging (3 flat sheets).
The three plates fit together in the rear of the coater like as shown here:
The first shield goes into the right top corner of the rear of the coating chamber.
Align hole to the pin on the chamber wall and push on.
1 2
3
1