
Specifications and External Dimensions
264 ZW-7000/5000
User's Manual
9-1
Specifications and External Dimensions
Sensor Head
Specifications
● ZW-S7010/S7020/S7030
*1: The measurement range is higher 28 μs than measurement cycle.
*2: Capacity value when OMRON standard mirror surface target is measured at the measurement center distance as the average of 16,384
times
When connected with the controller for the Export Control Trade Ordinance (ZW-7000T), the minimum resolution is 0.25 μm, regardless of
the Sensor head or setting condition.
*3: Material setting for the OMRON standard mirror surface target: Error from an ideal straight line when measuring on mirror surface.
*4: Capacity value defined by 1/e2(13.5%) of the peak optical intensity of the measurement wavelength.
When an extension fiber cable of 5.5 mm or longer is connected, the setting rage of the measurement cycle (exposure time) changes. For
details, refer to "Setting Measurement Cycle" in this manual.
*5: When an extension fiber cable of 5 mm or longer is connected, the setting rage of the measurement cycle (exposure time) changes. For
details, refer to "Setting Measurement Cycle" in this manual.
*6: Capacity value of temperature characteristic at the measurement center distance when fastened with an aluminum jig between the Sensor
Head and the target and the Sensor Head and the Sensor Controller are set in the same temperature environment.
Item Specifications
ZW-S7010 ZW-S7020 ZW-S7030
Sensor controller ZW-7000@
Measurement center distance 10 mm 20 mm 30 mm
Measuring range *1 ±0.5 mm ±1 mm ±2 mm
Static resolution *2 0.004 μm 0.008 μm 0.016 μm
Linearity *3 ±0.45 μm ±0.9 μm ±2.0 μm
Spot diameter (Total measurent
range) *4 50 μm dia. 70 μm dia. 100 μm dia.
Measuring cycle*5 20 μs to 400 μs
Operating ambient illumination Illumination on object surface max.30000 Lx: (incandescent light)
Ambient temperature range Operation: 0 to 50°C, Storage: -15 to +60°C
(No freezing and condensation)
Ambient humidity range Operation/storage: 35 or 85%RH (No condensation)
Degree of protection IP40 (IEC60529)
Vibration resistance (destructive) 10 to 150 Hz (half amplitude 0.35 mm), 80 mins in each of X/Y/Z directions
Shock resistance (destructive) 150 m/s2, 6 direction, 3 times each (up/down, left/right, forward/backward)
Temperature characteristic *6 0.6 μm/°C1.1μm/°C1.8μm/°C
LED Safety Risk Group 3 (IEC62471)
Material Chassis: aluminum die cast
Fiber cable sheath: PVC
Calibration ROM: PC
Fiber cable length 0.3 m, 2 m (flex-resistant cable)
Fiber cable minimum bend radius 20 mm
Insulation resistance (Calibration
ROM)
Between case and all terminals: 20 MΩ(by 250 VDC)
Dielectric strength (Calibration
ROM)
Between case and all terminals: 1000 VAC, 50/60 Hz, 1 min
Weight Fiber cable length 0.3m Approx. 170g
Fiber cable length 2m Approx. 180g
Accessories Calibration ROM fixing screws (M2), 2 Fiber cable protective cap, 2 Fiber straps, Instruction
Manual, Precautions