PI H-850 Series User manual

Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany
Phone [phone], Fax [phone], Email [email protected], www.pi.ws
MS202E
H
-850 Hexapod Microrobot
User Manual
Version: 2.4.0
Date: 21.07.2022
This document describes the following
hexapod
microrobots:

H-850.H2A

H-850.H2V

H-850.G2A

H-850.G2V

The following company names and brands are registered trademarks of Physik Instrumente (PI) GmbH & Co.
KG:
PI®, NanoCube®, PICMA®, PILine®, NEXLINE®, PiezoWalk®, NEXACT®, Picoactuator®, PInano®, PIMag®,
Q-Motion®
The patents held by PI are found in our patent list: https://www.physikinstrumente.com/en/about-pi/patents
Notes on brand names and third-party trademarks:
BiSS is a registered trademark of iC-Haus GmbH.
© 2022 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text, photographs, and drawings in
this manual are protected by copyright. With regard thereto, Physik Instrumente (PI) GmbH & Co. KG retains
all the rights. The use of any text, images and drawings is permitted only in part and only when indicating the
source.
Original instructions
First printing: 21.07.2022
Document number: MS202E, BRo, EWei, Version 2.4.0
Subject to change. This manual is superseded by any new release. The latest respective release is available for
download (p. 3) on our website.

1About this Document 1
1.1 Objective and Target Audience of this User Manual ................................................. 1
1.2 Symbols and Typographic Conventions ..................................................................... 1
1.3 Figures ........................................................................................................................ 2
1.4 Other Applicable Documents ..................................................................................... 2
1.5 Downloading Manuals................................................................................................ 3
2Safety 5
2.1 Intended Use .............................................................................................................. 5
2.2 General Safety Instructions ........................................................................................ 5
2.3 Organizational Measures............................................................................................ 5
2.4 Measures for Handling Vacuum-Compatible Products.............................................. 6
3Product Description 7
3.1 Features and Applications .......................................................................................... 7
3.2 Model Overview ......................................................................................................... 7
3.3 Suitable Controllers .................................................................................................... 8
3.4 Product View .............................................................................................................. 9
3.5 Scope of Delivery........................................................................................................ 9
3.6 Technical Features.................................................................................................... 11
3.6.1 Struts ........................................................................................................... 11
3.6.2 Reference Switch and Limit Switches.......................................................... 11
3.6.3 Control......................................................................................................... 12
3.6.4 Motion ......................................................................................................... 12
3.6.5 ID Chip ......................................................................................................... 17
4Unpacking 19
4.1 Unpacking the Hexapod ........................................................................................... 19
4.2 Removing the Transport Safeguard.......................................................................... 20
4.2.1 Removing the Transport Safeguard for the H-850.x2V Models .................. 20
4.2.2 Removing the Transport Safeguard for the H-850.x2A Models .................. 21
5Installation 23
5.1 General Notes on Installing ...................................................................................... 23
5.2 Determining the Permissible Load and Workspace ................................................. 24
5.3 Grounding the Hexapod ........................................................................................... 25
5.4 Mounting the Hexapod on a Surface ....................................................................... 26
5.5 Fixing the Load to the Hexapod................................................................................ 27
Contents

5.6 Optional: Removing the Coordinate Cube ............................................................... 28
5.7 Connecting the Hexapod to the Controller .............................................................. 29
6Startup 33
6.1 General Notes on Startup......................................................................................... 33
6.2 Starting Up the Hexapod System ............................................................................. 34
6.3 Baking Out Vacuum-Compatible Models ................................................................. 35
7Maintenance 37
7.1 Performing a Maintenance Run ............................................................................... 37
7.2 Packing the Hexapod for Transport.......................................................................... 38
7.2.1 Attaching the Transport Safeguard ............................................................. 38
7.2.2 Packing the Hexapod ................................................................................... 43
7.3 Cleaning the Hexapod .............................................................................................. 46
8Troubleshooting 47
9Customer Service 53
10 Technical Data 55
10.1 Specifications............................................................................................................ 55
10.1.1 Data Table.................................................................................................... 55
10.1.2 Specifications for Vacuum-Compatible Versions ........................................ 59
10.1.3 Maximum Ratings ........................................................................................ 63
10.2 Specifications for Data Transmission and Power Supply Cables .............................. 64
10.3 Specifications for Data Transmission and Power Supply Cables for Vacuum .......... 66
10.4 Ambient Conditions and Classifications ................................................................... 67
10.5 Dimensions ............................................................................................................... 68
10.6 Load Curves .............................................................................................................. 70
10.7 Pin Assignment ......................................................................................................... 74
10.7.1 Power Supply Connection ........................................................................... 74
10.7.2 Data Transmission Connection.................................................................... 74
11 Old Equipment Disposal 77
12 Glossary 79
13 Appendix 83
13.1 Explanations of the Performance Test Sheet ........................................................... 83
13.2 European Declarations of Conformity...................................................................... 85

1 About this Document
H-850 Hexapod Microrobot MS202E Version: 2.4.0 1
In this Chapter
Objective and Target Audience of this User Manual..................................................................... 1
Symbols and Typographic Conventions ......................................................................................... 1
Figures............................................................................................................................................ 2
Other Applicable Documents......................................................................................................... 2
Downloading Manuals ................................................................................................................... 3
1.1 Objective and Target Audience of this User Manual
This manual contains information on using the H-850 as intended.
It assumes that the reader has a fundamental understanding of basic servo systems as well as
motion control concepts and applicable safety procedures.
The latest versions of the user manuals are available for download (p. 3) on our website.
1.2 Symbols and Typographic Conventions
The following symbols and typographic conventions are used in this user manual:
CAUTION
Dangerous situation
Failure to comply could lead to minor injury.
Precautionary measures for avoiding the risk.
NOTICE
Dangerous situation
Failure to comply could cause damage to equipment.
Precautionary measures for avoiding the risk.
INFORMATION
Information for easier handling, tricks, tips, etc.
1
About this Document

1 About this Document
2 Version: 2.4.0 MS202E H-850 Hexapod Microrobot
Symbol/
Label
Meaning
1.
2.
Action consisting of several steps whose sequential order must
be observed

Action consisting of one or several steps whose sequential order
is irrelevant

List item
p. 5
Cross-reference to page 5
RS-232
Labeling of an operating element on the product (example:
socket of the RS-232 interface)
Warning sign on the product which refers to detailed information
in this manual.
1.3 Figures
For better understandability, the colors, proportions, and degree of detail in illustrations can
deviate from the actual circumstances. Photographic illustrations may also differ and must not
be seen as guaranteed properties.
1.4 Other Applicable Documents
The devices and software tools from PI mentioned in this documentation are described in
separate manuals.
Device/program Document
no.
Document content
C-887.5xx controller
MS247EK
Short instructions for hexapod systems
MS244E
User manual
C887T0011
EtherCAT interface of the C-887.53 controller series
C887T0007
Coordinate Systems for Hexapod Microrobots
C887T0021
Motion of the Hexapod. Position and Orientation in
Space, Center of Rotation
PI Hexapod Simulation
Tool
A000T0068
Determining the workspace and the permissible load of
the hexapod
PC software included
in the controller's
scope of delivery
Various
For details, see the user manual for the C-887.5xx
controller.

1 About this Document
H-850 Hexapod Microrobot MS202E Version: 2.4.0 3
1.5 Downloading Manuals
INFORMATION
If a manual is missing or problems occur with downloading:
Contact our customer service department (p. 53).
Downloading Manuals
1. Open the website www.pi.ws.
2. Search the website for the product number (e.g., P-882) or the product family (e.g.,
PICMA® bender).
3. Click the corresponding product to open the product detail page.
4. Click the Downloads tab.
The manuals are shown under Documentation. Software manuals are shown under
General Software Documentation.
5. Click the desired manual and fill out the inquiry form.
The download link will then be sent to the email address entered.

2 Safety
H-850 Hexapod Microrobot MS202E Version: 2.4.0 5
In this Chapter
Intended Use.................................................................................................................................. 5
General Safety Instructions ........................................................................................................... 5
Organizational Measures ............................................................................................................... 5
Measures for Handling Vacuum-Compatible Products ................................................................. 6
2.1 Intended Use
The hexapod microrobot (short "hexapod") is a laboratory device as defined by DIN EN 61010-1.
It is built for indoor use and use in an environment which is free of dirt, oil, and lubricants.
In accordance with its design, the hexapod is intended for positioning, adjusting, and shifting of
loads on six axes at various velocities.
The hexapod can only be used as intended in conjunction with a suitable controller available
from PI (p. 8), which coordinates all motion of the hexapod.
2.2 General Safety Instructions
The H-850 is built according to state-of-the-art technology and recognized safety standards.
Improper use can result in personal injury and/or damage to the H-850.
Use the H-850 for its intended purpose only, and only when it is in perfect technical
condition.
Read the user manual.
Eliminate any malfunctions that may affect safety immediately.
The operator is responsible for the correct installation and operation of the H-850.
2.3 Organizational Measures
User manual
Always keep this user manual together with the H-850.
The latest versions of the user manuals are available for download (p. 3) on our
website.
Add all information from the manufacturer to the user manual, for example
supplements or technical notes.
2
Safety

2 Safety
6 Version: 2.4.0 MS202E H-850 Hexapod Microrobot
If you give the H-850 to a third party, include this user manual as well as other relevant
information provided by the manufacturer.
Do the work only if the user manual is complete. Missing information due to an
incomplete user manual can result in minor injury and damage to equipment.
Install and operate the H-850 only after you have read and understood this user
manual.
Personnel qualification
The H-850 may only be installed, started, operated, maintained, and cleaned by authorized and
appropriately qualified personnel.
2.4 Measures for Handling Vacuum-Compatible Products
When handling the vacuum version of the hexapod, attention must be paid to appropriate
cleanliness. At PI, all parts are cleaned before assembly. During assembly and measurement,
powder-free gloves are worn. Afterwards, the hexapod is cleaned once again by wiping and
shrink-wrapped twice in vacuum-compatible film.
Touch the hexapod only with powder-free gloves.
If necessary, wipe the hexapod clean after unpacking.

3 Product Description
H-850 Hexapod Microrobot MS202E Version: 2.4.0 7
In this Chapter
Features and Applications ............................................................................................................. 7
Model Overview............................................................................................................................. 7
Suitable Controllers ....................................................................................................................... 8
Product View.................................................................................................................................. 9
Scope of Delivery ........................................................................................................................... 9
Technical Features ....................................................................................................................... 11
3.1 Features and Applications
The various models (p. 7) of H-850 hexapod that are offered differ with respect to the sensor
type, the maximum velocity, and load capacity as well as suitability for use in a vacuum.
The parallel-kinematic design of the hexapod offers the following advantages:
Positioning operations in six independent axes (three translational axes, three
rotational axes) with short settling times
The center of rotation moves together with the motion platform
High accuracy and step resolution in all axes
No accumulation of errors of individual axes
No friction and torques from moving cables
The hexapod is controlled with a controller that can be ordered separately from PI (p. 8). The
position commands to the controller are entered as Cartesian coordinates.
3.2 Model Overview
Model Designation
H-850.H2A
Precision Hexapod microrobot, brushless DC gear motor, absolute encoder,
250 kg load capacity, 0.5 mm/s velocity. Connecting cables are not included in
the scope of delivery and must be ordered separately.
H-850.H2V
Precision Hexapod microrobot, DC gear motor, rotary encoder, 80 kg load
capacity, 0.15 mm/s velocity, vacuum compatible to 10-6 hPa, cable set 2 m
vacuum side, feedthrough. Air side connecting cables are not included in the
scope of delivery and must be ordered separately.
3
Product Description

3 Product Description
8 Version: 2.4.0 MS202E H-850 Hexapod Microrobot
Model Designation
H-850.G2A Precision Hexapod microrobot, brushless DC gear motor, absolute encoder, 50
kg load capacity, 8 mm/s velocity. Connecting cables are not included in the
scope of delivery and must be ordered separately.
H-850.G2V Precision Hexapod microrobot, DC gear motor, rotary encoder, 25 kg load
capacity, 2.5 mm/s velocity, vacuum compatible to 10-6 hPa, cable set 2 m
vacuum side, feedthrough. Air side connecting cables are not included in the
scope of delivery and must be ordered separately.
3.3 Suitable Controllers
Model Description
C-887.52
6-axis controller for hexapods, TCP/IP, RS-232, benchtop device, incl.
control of two additional axes
C-887.521
6-axis controller for hexapods, TCP/IP, RS-232, benchtop device, incl.
control of two additional axes, analog inputs
C-887.522
6-axis controller for hexapods, TCP/IP, RS-232, benchtop device, incl.
control of two additional axes, motion stop
C-887.523
6-axis controller for hexapods, TCP/IP, RS-232, benchtop device, incl.
control of two additional axes, motion stop, analog inputs
C-887.53
6-axis controller for hexapods, TCP/IP, RS-232, benchtop device, incl.
control of two additional axes, EtherCAT interface
C-887.531
6-axis controller for hexapods, TCP/IP, RS-232, benchtop device, incl.
control of two additional axes, EtherCAT interface, analog inputs
C-887.532
6-axis controller for hexapods, TCP/IP, RS-232, benchtop device, incl.
control of two additional axes, EtherCAT interface, motion stop
C-887.533
6-axis controller for hexapods, TCP/IP, RS-232, benchtop device, incl.
control of two additional axes, EtherCAT interface, motion stop, analog
inputs
To order, contact our customer service department (p. 53).

3 Product Description
H-850 Hexapod Microrobot MS202E Version: 2.4.0 9
3.4 Product View
Figure 1: Product view, here: H-850.G2A
1Panel plug for data transmission cable
2Panel plug for power supply cable
3Motion platform
4Strut
5Coordinate cube
6Base plate
3.5 Scope of Delivery
Order number Components
H-850 Hexapod according to your order (p. 7)
Note that the cables required for connecting the H-850 to the electronics must be ordered
separately.
For the H-850.H2V and H-850.G2V vacuum-compatible models, a 2 m cable set for the vacuum
side is included in the scope of delivery. Air side connecting cables are not included in the
scope of delivery and must be ordered separately.
K040B0254
Data transmission cable on the vacuum side, HD D-sub 78 m/f, 1:1, 2 m
4668
Vacuum feedthrough for data transmission, HD D-sub 78 m/f
K060B0132
Power supply cable on the vacuum side, LEMO 2-pole (m) 180° to 2-
pole (f) 90°, 2 m
C887B0002
Vacuum feedthrough for power supply, LEMO 2-pole (f) to M12 (m)

3 Product Description
10 Version: 2.4.0 MS202E H-850 Hexapod Microrobot
Order number Components
Packaging, consisting of:
Transport safeguard with mounting kit
Inner and outer box
Foam and corrugated cardboard cushions
Pallet
Documentation, consisting of:
H850T0001
Printed technical note on unpacking the hexapod
MS247EK
Short instructions for hexapod systems
Screw sets and tools:
000034605
Mounting kit:
6 socket head screws, M6×30 ISO 4762
1 hex key 5.0 DIN 911
000077312 Double open-ended wrench 10 x 13 mm DIN 895
000036450 Accessories for connecting to the grounding system:
1 flat-head screw with cross recess, M4x8 ISO 7045
2 flat washers, form A-4.3 DIN 7090
2 lock washers, Schnorr Ø 4 mm N0110
Note that the cables required for connecting the H-850 to the electronics must be ordered
separately:
Order number Data transmission cable, available lengths
C-815.82D02 Data transmission cable for hexapods, drag chain compatible, HD D-sub 78
m/f, 2 m
C-815.82D03 Data transmission cable for hexapods, drag chain compatible, HD D-sub 78
m/f, 3 m
C-815.82D05
Data transmission cable for hexapods, drag chain compatible, HD D-sub 78
m/f, 5 m
C-815.82D07
Data transmission cable for hexapods, drag chain compatible, HD D-sub 78
m/f, 7.5 m
C-815.82D10
Data transmission cable for hexapods, drag chain compatible, HD D-sub 78
m/f, 10 m
C-815.82D20
Data transmission cable for hexapods, drag chain compatible, HD D-sub 78
m/f, 20 m

3 Product Description
H-850 Hexapod Microrobot MS202E Version: 2.4.0 11
Order Number Power Supply Cables, Available Lengths
C-815.82P02A
Power supply cable for hexapods, drag-chain compatible, M12 m/f angled,
2 m
C-815.82P03A
Power supply cable for hexapods, drag-chain compatible, M12 m/f angled,
3 m
C-815.82P05A
Power supply cable for hexapods, drag-chain compatible, M12 m/f angled,
5 m
C-815.82P07A
Power supply cable for hexapods, drag-chain compatible, M12 m/f angled,
7.5 m
C-815.82P10A
Power supply cable for hexapods, drag-chain compatible, M12 m/f angled,
10 m
C-815.82P20A Power supply cable for hexapods, drag-chain compatible, M12 m/f angled,
20 m
To order, contact our customer service department (p. 53).
3.6 Technical Features
3.6.1 Struts
The hexapod has six adjustable-length struts. Each strut carries out linear motion. Each set of
settings of the six struts defines a position of the motion platform in six degrees of freedom
(three translational axes and three rotational axes).
Each strut is equipped with the following components:
One actuator
Reference and limit switches
Joints for connecting to the base plate and motion platform
The actuator contains the following components:
H-850.G2V, .H2V: DC motor with incremental rotary encoder
H-850.G2A, .H2A: Brushless DC motor, absolute-measuring encoder
Gearhead
Drive screw
3.6.2 Reference Switch and Limit Switches
The reference switch of a strut functions independently of the angular positions of the strut
ends and the lengths of the other struts.
When a limit switch is activated, the power source of the motor is switched off to protect the
hexapod against damage from malfunctions.

3 Product Description
12 Version: 2.4.0 MS202E H-850 Hexapod Microrobot
3.6.3 Control
Der hexapod is intended for operation with a suitable controller from PI (p. 8). The controller
makes it possible to command motion of individual axes, combinations of axes or all six axes at
the same time in a single motion command.
The controller calculates the settings for the individual struts from the target positions given for
the translational and rotational axes. The velocities and accelerations of the struts are
calculated so that all struts start and stop at the same time.
Every time the controller of a hexapod equipped with incremental encoders is switched on or
rebooted, the hexapod must complete a reference move, in which each strut moves to its
reference switch. After the reference move, the motion platform is in the reference position
and can be commanded to move to absolute target positions.
A reference move is not required for a hexapod with absolute-measuring sensors.
For further information, see the user manual for the controller.
3.6.4 Motion
The platform moves along the translational axes X, Y, and Z and around the rotational axes U, V,
and W.
Using the controller, custom coordinate systems can be defined and used instead of the default
coordinate system.
Default and user-defined coordinate systems are always right-handed systems. It is notpossible
to convert a right-handed system to a left-handed system.

3 Product Description
H-850 Hexapod Microrobot MS202E Version: 2.4.0 13
The following is a description of how the hexapod behaves with the default coordinate system.
Work with user-defined coordinate systems is described in the C887T0007 technical note.
Figure 2: Coordinate system and rotations to the rotational coordinates U, V, and W. The coordinate
system is depicted above the platform for better clarity.
Translation
Translations are described in the spatially-fixed coordinate system. The translational axes X, Y,
and Z meet at the origin of the coordinate system (0,0,0). For further information, see the
glossary (p. 79).

3 Product Description
14 Version: 2.4.0 MS202E H-850 Hexapod Microrobot
Rotation
Rotations take place around the rotational axes U, V, and W. The rotational axes meet at the
center of rotation (also referred to as "pivot point"). The rotational axes and therefore also the
center of rotation always move together with the platform of the hexapod (see also the
example below for consecutive rotations).
A given rotation in space is calculated from the individual rotations in the order U -> V- > W.
For further information on the center of rotation, see the glossary (p. 79).
INFORMATION
The dimensional drawing (p. 68) contains the following:
Orientation of the default coordinate system
Position of the default center of rotation

3 Product Description
H-850 Hexapod Microrobot MS202E Version: 2.4.0 15
Example: Consecutive rotations
INFORMATION
For a clearer view, the figures have been adapted as follows:
Round platform replaced by T-shaped platform
Coordinate system shown shifted
Center of rotation in the top left corner of the platform
1. The U axis is commanded to move to position 10.
The rotation around the U axis tilts the rotational axes V and W.
Figure 3: Rotation around the U axis
Platform in reference position
Platform position: U = 10 (U parallel to spatially-fixed X axis)

3 Product Description
16 Version: 2.4.0 MS202E H-850 Hexapod Microrobot
2. The V axis is commanded to move to position –10.
The rotation takes place around rotational axis V, which was tilted during the previous
rotation.
The rotation around the V axis tilts the rotational axes U and W.
Figure 4: Rotation around the V axis
Platform in reference position
Platform position: U = 10, V = –10 (U and V parallel to the platform level)