PI H-824 User manual

Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany
Phone [phone], Fax [phone], Email [e-mail], www.pi.ws
MS200E
H
-824 Hexapod Microrobot
User Manual
Version: 2.4.0
Date: 11.01.2023
This document describes the following products:

H-824.G2
Compacter Hexapod microrobot, gearhead, 10
kg load capacity, 1 mm/s velocity, D-sub
connector

H-824.G2V
Compacter Hexapod microrobot, gearhead,
vacuum compatible to 10-6 hPa, 5 kg load
capacity, 0.5 mm/s velocity, D-sub connector

H-824.D2
Compacter Hexapod microrobot, direct drive, 5
kg load capacity, 25 mm/s velocity, D-sub
connector

H-824.D2V
Compacter Hexapod microrobot, direct drive,
vacuum compatible to 10-6 hPa, 2.5 kg load
capacity, 12.5 mm/s velocity, D-sub connector

The following company names and brands are registered trademarks of Physik Instrumente (PI) GmbH & Co.
KG:
PI®, NanoCube®, PICMA®, PILine®, NEXLINE®, PiezoWalk®, NEXACT®, Picoactuator®, PInano®, PIMag®,
Q-Motion®
The patents held by PI are found in our patent list: https://www.physikinstrumente.com/en/about-pi/patents
Notes on brand names and third-party trademarks:
BiSS is a registered trademark of iC-Haus GmbH.
© 2023 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text, photographs, and drawings in
this manual are protected by copyright. With regard thereto, Physik Instrumente (PI) GmbH & Co. KG retains
all the rights. The use of any text, images and drawings is permitted only in part and only when indicating the
source.
Original instructions
First printing: 11.01.2023
Document number: MS200E, BRo, EWEI, ASt, Version 2.4.0
Subject to change. This manual is superseded by any new release. The latest respective release is available for
download (p. 3) on our website.

1About this Document 1
1.1 Objective and Target Group of this User Manual ...................................................... 1
1.2 Symbols and Typographic Conventions...................................................................... 1
1.3 Figures ........................................................................................................................ 2
1.4 Other Applicable Documents ..................................................................................... 2
1.5 Downloading Manuals................................................................................................ 3
2Safety 5
2.1 Intended Use .............................................................................................................. 5
2.2 General Safety Instructions ........................................................................................ 5
2.3 Organizational Measures............................................................................................ 5
2.4 Measures for Handling Vacuum-Compatible Products.............................................. 6
3Product Description 7
3.1 Features and Applications .......................................................................................... 7
3.2 Model Overview ......................................................................................................... 8
3.3 Product View .............................................................................................................. 8
3.4 Technical Features...................................................................................................... 9
3.4.1 Struts.............................................................................................................. 9
3.4.2 Reference Switch and Limit Switches.......................................................... 10
3.4.3 Control......................................................................................................... 10
3.4.4 Motion ......................................................................................................... 10
3.4.5 ID Chip.......................................................................................................... 14
3.5 Scope of Delivery...................................................................................................... 15
3.6 Optional Accessories ................................................................................................ 16
3.7 Suitable Controllers .................................................................................................. 16
4Unpacking 19
4.1 Unpacking the Hexapod ........................................................................................... 19
4.2 Removing the Transport Safeguard.......................................................................... 20
5Installing 23
5.1 General Notes on Installation................................................................................... 23
5.2 Determining the Permissible Load and Workspace ................................................. 24
5.3 Grounding the Hexapod ........................................................................................... 24
5.4 Mounting the Hexapod on a Surface ....................................................................... 25
5.5 Fixing the Load to the Hexapod................................................................................ 26
5.6 Optional: Removing the Coordinate Cube ............................................................... 28
Contents

5.7 Connecting the Hexapod to the Controller .............................................................. 28
6Startup 33
6.1 General Notes on Startup......................................................................................... 33
6.2 Starting Up the Hexapod System ............................................................................. 34
6.3 Baking Out Vacuum-Compatible Models ................................................................. 34
7Maintenance 37
7.1 Performing a Maintenance Run ............................................................................... 37
7.2 Cleaning the Hexapod .............................................................................................. 38
7.3 Packing the Hexapod for Transport.......................................................................... 38
7.3.1 Attaching the Transport Safeguard ............................................................. 39
7.3.2 Packing the Hexapod ................................................................................... 45
8Troubleshooting 49
9Customer Service Department 53
10 Technical Data 55
10.1 Specifications............................................................................................................ 55
10.1.1 Data Table.................................................................................................... 55
10.1.2 Specifications for Vacuum-Compatible Models .......................................... 57
10.1.3 Maximum Ratings........................................................................................ 60
10.1.4 Specifications for Data Transmission and Power Supply Cables ................. 60
10.2 Ambient Conditions and Classifications ................................................................... 63
10.3 Dimensions ............................................................................................................... 64
10.4 Pin Assignment ......................................................................................................... 65
10.4.1 Power Supply Connection............................................................................ 65
10.4.2 Data Transmission Connection.................................................................... 65
11 Old Equipment Disposal 69
12 Glossary 71
13 Appendix 75
13.1 Explanations of the Performance Test Sheet ........................................................... 75
13.2 European Declarations of Conformity...................................................................... 77

1 About this Document
H-824 Hexapod Microrobot MS200E Version: 2.4.0 1
In this Chapter
Objective and Target Group of this User Manual.......................................................................... 1
Symbols and Typographic Conventions......................................................................................... 1
Figures............................................................................................................................................ 2
Other Applicable Documents......................................................................................................... 2
Downloading Manuals ................................................................................................................... 3
1.1 Objective and Target Group of this User Manual
This user manual contains the information necessary for using the H-824 as intended.
We assume that the user has basic knowledge of closed-loop systems, motion control concepts,
and applicable safety measures.
The latest versions of the user manuals are available for download on our website (p. 3).
1.2 Symbols and Typographic Conventions
The following symbols and typographic conventions are used in this user manual:
CAUTION
Dangerous situation
Failure to comply could lead to minor injury.
Precautionary measures to avoid the risk.
NOTICE
Dangerous situation
If this situation is not avoided, it will damage the equipment.
Precautionary measures to avoid the risk.
INFORMATION
Information for easier handling, tricks, tips, etc.
1
About this Document

1 About this Document
2 Version: 2.4.0 MS200E H-824 Hexapod Microrobot
Symbol/Label Meaning
1.
2.
Action consisting of several steps with strict sequential
order

Action consisting of one or more steps without relevant
sequential order

Bullet points
p. 5
Cross-reference to page 5
RS-232
Label on the product indicating an operating element
(example: RS-232 interface socket)
Warning sign on the product referring to detailed
information in this manual.
1.3 Figures
For better understandability, the colors, proportions, and degree of detail in illustrations can
deviate from the actual circumstances. Photographic illustrations may also differ and must not
be seen as guaranteed properties.
1.4 Other Applicable Documents
The devices and software tools from PI mentioned in this documentation are described in
separate manuals.
Device/program Document
no.
Document content
C-887.5xx controller MS247EK Short instructions for hexapod systems
MS244E User manual
C887T0011 EtherCAT interface of the C-887.53 controller series
C887T0007 Coordinate Systems for Hexapod Microrobots
C887T0021
Motion of the Hexapod. Position and Orientation in
Space, Center of Rotation
PI Hexapod Simulation
Tool
A000T0068
Determining the workspace and the permissible load
of the hexapod
PC software included in
the controller's scope of
delivery
Various
For details, see the user manual for the C-887.5xx
controller.

1 About this Document
H-824 Hexapod Microrobot MS200E Version: 2.4.0 3
1.5 Downloading Manuals
INFORMATION
If a manual is missing or problems occur with downloading:
Contact our customer service department (p. 53).
Downloading manuals
1. Open the website www.pi.ws.
2. Search the website for the product number (e.g., H-824).
3. Click the corresponding product to open the product detail page.
4. Click the Downloads tab.
The manuals are shown under Documentation. Software manuals are shown under
General Software Documentation.
5. Click the desired manual and fill out the inquiry form.
The download link will then be sent to the email address entered.

2 Safety
H-824 Hexapod Microrobot MS200E Version: 2.4.0 5
In this Chapter
Intended Use.................................................................................................................................. 5
General Safety Instructions............................................................................................................ 5
Organizational Measures............................................................................................................... 5
Measures for Handling Vacuum-Compatible Products ................................................................. 6
2.1 Intended Use
The hexapod microrobot (short "hexapod") is a laboratory device as defined by DIN EN 61010-1.
It is built for indoor use and use in an environment which is free of dirt, oil, and lubricants.
In accordance with its design, the hexapod is intended for positioning, adjusting, and shifting of
loads on six axes at various velocities.
The hexapod can only be used as intended in conjunction with a suitable controller available
from PI (p. 16), which coordinates all motion of the hexapod.
2.2 General Safety Instructions
The H-824 is built according to state-of-the-art technology and recognized safety standards.
Improper use of the H-824 may result in personal injury and/or damage to the H-824.
Use the H-824 for its intended purpose only, and only when it is in perfect condition.
Read the user manual.
Immediately eliminate any faults and malfunctions that are likely to affect safety.
The operator is responsible for installing and operating the H-824 correctly.
2.3 Organizational Measures
User manual
Always keep this user manual together with the H-824. The latest versions of the user
manuals are available for download on our website (p. 3).
Add all information from the manufacturer such as supplements or technical notes to
the user manual.
2
Safety

2 Safety
6 Version: 2.4.0 MS200E H-824 Hexapod Microrobot
If you give the H-824 to other users, include this user manual as well as all other
relevant information provided by the manufacturer.
Do the work only if the user manual is complete. Missing information due to an
incomplete user manual can result in minor injury and damage to equipment.
Install and operate the H-824 only after you have read and understood this user
manual.
Personnel qualification
The H-824 may only be installed, started, operated, maintained, and cleaned by authorized and
appropriately qualified personnel.
2.4 Measures for Handling Vacuum-Compatible Products
When handling the vacuum model of the hexapod, attention must be paid to appropriate
cleanliness. At PI, all parts are cleaned before assembly. During assembly and measurement,
powder-free gloves are worn. Afterwards, the hexapod is cleaned once again by wiping and
shrink-wrapped twice in vacuum-compatible film.
Touch the hexapod only with powder-free gloves.
If necessary, wipe the hexapod clean after unpacking.

3 Product Description
H-824 Hexapod Microrobot MS200E Version: 2.4.0 7
In this Chapter
Features and Applications ............................................................................................................. 7
Model Overview............................................................................................................................. 8
Product View.................................................................................................................................. 8
Technical Features ......................................................................................................................... 9
Scope of Delivery ......................................................................................................................... 15
Optional Accessories.................................................................................................................... 15
Suitable Controllers ..................................................................................................................... 16
3.1 Features and Applications
Four models of the H-824 hexapod are available:
Models for higher velocities:
−The H-824.D2 directly driven model reaches velocities of up to 25 mm/s.
−The vacuum-compatible H-824.D2V model reaches velocities of up to 12.5 mm/s.
Models with a higher load capacity:
−The H-824.G2 model equipped with DC gearhead motors reaches a load capacity of
10 kg vertically and 5 kg in any orientation.
−The vacuum-compatible H-824.G2V model reaches a load capacity of 5 kg vertically
and 2.5 kg in any orientation.
The parallel-kinematic design offers the following advantages:
Positioning operations on six independent axes (three translational axes, three
rotational axes) with short settling times
High accuracy and step resolution on all axes
No accumulation of errors of individual axes
No friction and torques from moving cables
The hexapod is controlled with a controller that can be ordered separately from PI (p. 16). The
position commands to the controller are entered in Cartesian coordinates.
3
Product Description

3 Product Description
8 Version: 2.4.0 MS200E H-824 Hexapod Microrobot
3.2 Model Overview
Model Description
H-824.G2
Compact hexapod microrobot, gearhead, 1 mm/s, 10 kg load, D-sub
connector. Connecting cables are not in the scope of delivery and must be
ordered separately.
H-824.G2V
Compact hexapod microrobot, gearhead, 0.5 mm/s, 5 kg load, vacuum
compatible to 10-6 hPa, D-sub connector, cable set 2 m vacuum side,
feedthrough. Air side connecting cables are not included in the scope of
delivery and must be ordered separately.
H-824.D2
Compact hexapod microrobot, direct drive, 25 mm/s, 5 kg load, D-sub
connector. Connecting cables are not in the scope of delivery and must be
ordered separately.
H-824.D2V
Compact hexapod microrobot, direct drive, 12.5 mm/s, 2.5 kg load, vacuum
compatible to 10-6 hPa, D-sub connector, cable set 2 m vacuum side,
feedthrough. Air side connecting cables are not included in the scope of
delivery and must be ordered separately.
3.3 Product View
Figure 1: Product view

3 Product Description
H-824 Hexapod Microrobot MS200E Version: 2.4.0 9
1Clear Aperture
2Motion platform
3Strut
4Coordinate cube
5Base plate
Figure 2: Connections
1
Panel plug for power supply cable
2Panel plug for data transmission cable
3.4 Technical Features
3.4.1 Struts
The hexapod has six adjustable-length struts. Each strut carries out linear motion. Each set of
settings of the six struts defines a position of the motion platform in six degrees of freedom
(three translational axes and three rotational axes).
Each strut is equipped with the following components:
One actuator
Reference and limit switches
Joints for connecting to the base plate and motion platform
The actuator contains the following components:
H-824.G2, H-824.G2V:
DC motor with gearhead and rotary encoder, drive screw; folded design
H-824.D2, H-824.D2V:
Direct drive, consisting of DC motor with rotary encoder and drive screw; folded design

3 Product Description
10 Version: 2.4.0 MS200E H-824 Hexapod Microrobot
3.4.2 Reference Switch and Limit Switches
The reference switch of a strut functions independently of the angular positions of the strut
ends and the lengths of the other struts.
When a limit switch is activated, the power source of the motor is switched off to protect the
hexapod against damage from malfunctions.
3.4.3 Control
Der hexapod is intended for operation with a suitable controller from PI (p. 16). The controller
makes it possible to command motion of individual axes, combinations of axes or all six axes at
the same time in a single motion command.
The controller calculates the settings for the individual struts from the target positions given for
the translational and rotational axes. The velocities and accelerations of the struts are
calculated so that all struts start and stop at the same time.
Every time the controller of a hexapod equipped with incremental encoders is switched on or
rebooted, the hexapod must complete a reference move, in which each strut moves to its
reference switch. After the reference move, the motion platform is in the reference position
and can be commanded to move to absolute target positions.
A reference move is not required for a hexapod with absolute-measuring sensor.
For further information, see the user manual for the controller.
3.4.4 Motion
The platform moves along the translational axes X, Y, and Z and around the rotational axes U, V,
and W.
Using the controller, custom coordinate systems can be defined and used instead of the default
coordinate system.
Default and user-defined coordinate systems are always right-handed systems. It is not possible
to convert a right-handed system to a left-handed system.
The following is a description of how the hexapod behaves with the default coordinate system.
Work with user-defined coordinate systems is described in the C887T0007 technical note.

3 Product Description
H-824 Hexapod Microrobot MS200E Version: 2.4.0 11
Figure 3: Coordinate system and rotations to the rotational coordinates U, V, and W. The coordinate
system is depicted above the platform for better clarity
Translation
Translations are described in the spatially-fixed coordinate system. The translational axes X, Y,
and Z meet at the origin of the coordinate system (0,0,0). For further information, see the
glossary (p. 71).
Rotation
Rotations take place around the rotational axes U, V, and W. The rotational axes meet at the
center of rotation (also referred to as "pivot point"). The rotational axes and therefore also the
center of rotation always move together with the platform of the hexapod (see also the
example below for consecutive rotations).
A given rotation in space is calculated from the individual rotations in the order U -> V- > W.
For further information on the center of rotation, see the glossary (p. 71).

3 Product Description
12 Version: 2.4.0 MS200E H-824 Hexapod Microrobot
INFORMATION
The dimensional drawing (p. 64) contains the following:
Orientation of the default coordinate system
Position of the default center of rotation
Example: Consecutive rotations
For a clearer view, the figures have been adapted as follows:
Round platform replaced by T-shaped platform
Coordinate system shown shifted
Center of rotation in the top left corner of the platform
1. The U axis is commanded to move to position 10.
The rotation around the U axis tilts the rotational axes V and W.
Figure 4: Rotation around the U axis
Platform in reference position
Platform position: U = 10 (U parallel to spatially-fixed X axis)

3 Product Description
H-824 Hexapod Microrobot MS200E Version: 2.4.0 13
2. The V axis is commanded to move to position –10.
The rotation takes place around rotational axis V, which was tilted during the previous
rotation.
The rotation around the V axis tilts the rotational axes U and W.
Figure 5: Rotation around the V axis
Platform in reference position
Platform position: U = 10, V = –10 (U and V parallel to the platform level)

3 Product Description
14 Version: 2.4.0 MS200E H-824 Hexapod Microrobot
3. The W axis is commanded to move to position 10.
The rotation takes place around the rotational axis W, which was tilted during the
previous rotations. The W axis is always vertical to the platform level.
The rotation around the W axis tilts the rotational axes U and V.
Figure 6: Rotation around the W axis
Platform in reference position
Platform position: U = 10, V = –10, W = 10 (U and V parallel to the platform level, W
vertical to the platform level)
For further data on the travel ranges, see the "Specifications" section (p. 55).
3.4.5 ID Chip
The hexapod has an ID chip that contains data on the type of hexapod, its serial number, and
the date of manufacture. The data is loaded from the ID chip when the controller is switched on
or rebooted. Depending on the data loaded, the controller keeps the current configuration or
installs a new configuration.
For simple replacement, the configuration data for all standard hexapods is stored at the
factory in every standard controller (e.g., geometry data and control parameters). The
configuration data for customized hexapods is only stored on the controller if the hexapod and
controller are delivered together, or if PI was correspondingly informed before delivery of the
controller.
For further information and application notes, see the documentation of the controller used.

3 Product Description
H-824 Hexapod Microrobot MS200E Version: 2.4.0 15
3.5 Scope of Delivery
Order number Components
H-824 Hexapod according to your order (p. 8)
For the H-824.D2V and H-824.G2V vacuum-compatible models, a 2 m cable set for the vacuum
side is included in the scope of delivery. Air side connecting cables are not included in the
scope of delivery and must be ordered separately.
K040B0254
Data transmission cable on the vacuum side, HD D-sub 78 m/f, 1:1, 2 m
4668
Vacuum feedthrough for data transmission, HD D-sub 78 m/f
K060B0132
Power supply cable on the vacuum side, LEMO 2-pin (m) 180° to 2-
pin (f) 90°, 2 m
C887B0002
Vacuum feedthrough for power supply, LEMO 2-pin (f) to M12 (m)
Packaging, consisting of:
Transport safeguard with mounting kit
Inner and outer box
Foam and corrugated cardboard cushions
Pallet
Documentation, consisting of:
H824T0001
Printed technical note on unpacking the hexapod
MS247EK
Short instructions for hexapod systems
Screw sets and tools:
000034605
Mounting kit:
6 socket head screws, M6x30 ISO 4762
1 hex key 5.0 DIN 911
000077312
Double open-end wrench, 10 x 13 mm DIN 895
000036450
Accessories for connecting to the grounding system:
1 flat-head screw with cross recess, M4x8 ISO 7045
2 flat washers, form A-4.3 DIN 7090
2 safety washers, Schnorr Ø 4 mm N0110
Note that the cables required for connecting the H-824 to the electronics must be ordered
separately.

3 Product Description
16 Version: 2.4.0 MS200E H-824 Hexapod Microrobot
3.6 Optional Accessories
Order number Data transmission cable, available lengths
C-815.82D02
Data transmission cable for hexapods, drag chain compatible, HD D-sub 78
m/f, 2 m
C-815.82D03
Data transmission cable for hexapods, drag chain compatible, HD D-sub 78
m/f, 3 m
C-815.82D05
Data transmission cable for hexapods, drag chain compatible, HD D-sub 78
m/f, 5 m
C-815.82D07
Data transmission cable for hexapods, drag chain compatible, HD D-sub 78
m/f, 7.5 m
C-815.82D10
Data transmission cable for hexapods, drag chain compatible, HD D-sub 78
m/f, 10 m
C-815.82D20
Data transmission cable for hexapods, drag chain compatible, HD D-sub 78
m/f, 20 m
Order Number Power Supply Cables, Available Lengths
C-815.82P02A
Power supply cable for hexapods, drag-chain compatible, M12 m/f angled,
2 m
C-815.82P03A Power supply cable for hexapods, drag-chain compatible, M12 m/f angled,
3m
C-815.82P05A
Power supply cable for hexapods, drag-chain compatible, M12 m/f angled,
5 m
C-815.82P07A
Power supply cable for hexapods, drag-chain compatible, M12 m/f angled,
7.5 m
C-815.82P10A
Power supply cable for hexapods, drag-chain compatible, M12 m/f angled,
10 m
C-815.82P20A
Power supply cable for hexapods, drag-chain compatible, M12 m/f angled,
20 m
To order, contact our customer service department (p. 53).
3.7 Suitable Controllers
Model Description
C-887.52
6-axis controller for hexapods, TCP/IP, RS-232, benchtop device, incl.
control of two additional axes
C-887.521
6-axis controller for hexapods, TCP/IP, RS-232, benchtop device, incl.
control of two additional axes, analog inputs