PI Q-521 User manual

PI miCos GmbH, Freiburger Strasse 30, 79427 Eschbach, Germany
Phone [phone], Fax [phone], Email [e-mail], www.pi.ws
MP145E
Q
-521 Miniature Stage
User Manual
Version: 1.0.0
Date: 17.03.2016
This document describes the following products:

Q-521
Q-Motion miniature linear positioning stage,
piezoelectric inertia drive
This document applies to various model
versions of the Q-
521. The model version of the
Q-521 is coded in the order number by means
of three characters after a period. Meaning of
the characters and valid values:
First character after the period:
Travel range
1= 12 mm
2= 22 mm
3= 32 mm
Second character after the period:
Sensor equipment
0 = without sensor
3= with sensor, sensor resolution 4 nm
4= with sensor, sensor resolution 1 nm
Third character after the period:
Vacuum suitability
0= suitable to 10-6 hPa
U= suitable to 10-9 hPa

Physik Instrumente (PI) GmbH & Co. KG is the owner of the following trademarks:
PI®, PIC®, PICMA®, PILine®, PIFOC®, PiezoWalk®, NEXACT®, NEXLINE®, NanoCube®, NanoAutomation®,
Picoactuator®, PInano®, PIMag®
© 2016 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text, photographs and drawings in
this manual are protected by copyright. With regard thereto, Physik Instrumente (PI) GmbH & Co. KG retains
all the rights. Use of said text, photographs and drawings is permitted only in part and only upon citation of
the source.
Original instructions
First printing: 17.03.2016
Document number: MP145E, KSch, version 1.0.0
Subject to change without notice. This manual is superseded by any new release. The latest release is
available for download (p. 3) on our website.

1About this Document 1
1.1 Objective and Target Audience of this User Manual.................................................. 1
1.2 Symbols and Typographic Conventions...................................................................... 1
1.3 Definition.................................................................................................................... 2
1.4 Figures ........................................................................................................................ 2
1.5 Other Applicable Documents ..................................................................................... 3
1.6 Downloading Manuals................................................................................................ 3
2Safety 5
2.1 Intended Use .............................................................................................................. 5
2.2 General Safety Instructions ........................................................................................ 5
2.3 Organizational Measures............................................................................................ 6
2.4 Measures for Handling Vacuum-Compatible Products.............................................. 6
3Product Description 7
3.1 Model Overview ......................................................................................................... 7
3.2 Product View ............................................................................................................ 10
3.3 Product Labeling....................................................................................................... 12
3.4 Scope of Delivery...................................................................................................... 13
3.5 Accessories ............................................................................................................... 14
3.6 Suitable Electronics .................................................................................................. 15
3.7 Technical Features.................................................................................................... 17
3.7.1 Linear Encoder (Sensor)............................................................................... 17
3.7.2 Reference Point Switch................................................................................ 17
3.7.3 ID Chip.......................................................................................................... 17
4Unpacking 19
5Installation 21
5.1 General Notes on Installation................................................................................... 21
5.2 Mounting the Q-521 on a Surface and Connecting It to a Protective Earth
Conductor................................................................................................................. 23
5.3 Setting Up a Multi-Axis System ................................................................................ 25
5.3.1 General Information on Setting Up a Multi-Axis System ............................ 27
5.3.2 Setting Up an XY System.............................................................................. 27
5.3.3 Setting Up a Z System with an Adapter Bracket.......................................... 30
5.4 Affixing the Load to the Q-521 ................................................................................. 36
5.5 Connecting the Q-521 to the Electronics ................................................................. 38
Contents

5.5.1 Connecting the Q-521 to the Drive Electronics ........................................... 38
5.5.2 Connecting the Q-521 to the Controller...................................................... 41
6Start-Up and Operation 47
6.1 General Notes on Start-Up and Operation............................................................... 47
6.2 Starting Up the stage................................................................................................ 50
6.2.1 Starting Up the Q-521.x0x with Drive Electronics ....................................... 51
6.2.2 Starting Up the Q-521.x3x or Q-521.x4x with a Controller ......................... 52
7Maintenance 55
7.1 General Notes on Maintenance ............................................................................... 55
7.2 Performing a Maintenance Run ............................................................................... 55
7.3 Cleaning the Q-521................................................................................................... 55
8Troubleshooting 57
9Customer Service 59
10 Technical Data 61
10.1 Specifications............................................................................................................ 61
10.1.1 Data Table.................................................................................................... 61
10.1.2 Maximum Ratings........................................................................................ 63
10.1.3 Ambient Conditions and Classifications ...................................................... 63
10.2 Operating Time......................................................................................................... 64
10.3 Dimensions ............................................................................................................... 65
10.3.1 Q-521.1xx..................................................................................................... 65
10.3.2 Q-521.2xx..................................................................................................... 66
10.3.3 Q-521.3xx..................................................................................................... 67
10.3.4 Q-121.80U Adapter Plate ............................................................................ 68
10.3.5 Q-121.10U Adapter Bracket ........................................................................ 69
10.3.6 Q-121.20U Adapter Bracket ........................................................................ 70
10.3.7 Q-121.30U Adapter Bracket ........................................................................ 71
10.3.8 Vacuum Feedthroughs................................................................................. 72
10.4 Pin Assignment ......................................................................................................... 78
10.4.1 Q-521.xx0..................................................................................................... 78
10.4.2 Q-521.xxU .................................................................................................... 79
10.4.3 C-815.VF Vacuum Feedthrough................................................................... 80
10.4.4 C-815.VFUx Vacuum Feedthrough .............................................................. 81
10.4.5 5604500041 Adapter................................................................................... 83

11 Old Equipment Disposal 85
12 EC Declaration of Conformity 87

1 About this Document
Q-521 Miniature Stage MP145E Version: 1.0.0 1
In this Chapter
Objective and Target Audience of this User Manual..................................................................... 1
Symbols and Typographic Conventions ......................................................................................... 1
Definition ....................................................................................................................................... 2
Figures............................................................................................................................................ 2
Other Applicable Documents......................................................................................................... 3
Downloading Manuals ................................................................................................................... 3
1.1 Objective and Target Audience of this User Manual
This manual contains the necessary information on the intended use of the Q-521.
It assumes that the reader has a fundamental understanding of basic servo systems as well as
motion control concepts and applicable safety procedures.
The latest versions of the user manuals are available for download (p. 3) on our website.
1.2 Symbols and Typographic Conventions
The following symbols and typographic conventions are used in this user manual:
CAUTION
Dangerous situation
If not avoided, the dangerous situation will result in minor injuries or damage to the
equipment.
Actions to take to avoid the situation.
NOTICE
Dangerous situation
If not avoided, the dangerous situation will result in damage to the equipment.
Actions to take to avoid the situation.
1
About this Document

1 About this Document
2 Version: 1.0.0 MP145E Q-521 Miniature Stage
INFORMATION
Information for easier handling, tricks, tips, etc.
Symbol/
Label
Meaning
1.
2.
Action consisting of several steps whose
sequential order must be observed
Action consisting of one or several steps whose
sequential order is irrelevant
List item
p. 5 Cross-reference to page 5
RS-232 Labeling of an operating element on the product
(example: socket of the RS-232 interface)
Warning sign affixed to the product that refers to
detailed information in this manual.
1.3 Definition
Term Explanation
Load capacity Maximum load capacity in the vertical direction when the stage is
mounted horizontally. The contact point of the load is in the center of
the platform.
Linear encoder The linear encoder is an incremental sensor for capturing changes in
position. Signals from the sensor are used for axis position feedback.
After switching on the controller a reference point definition must be
performed before absolute target positions can be commanded and
reached.
1.4 Figures
For better understandability, the colors, proportions and degree of detail in illustrations can
deviate from the actual circumstances. Photographic illustrations may also differ and must not
be seen as guaranteed properties.

1 About this Document
Q-521 Miniature Stage MP145E Version: 1.0.0 3
1.5 Other Applicable Documents
The devices and software tools which are mentioned in this documentation are described in
their own manuals.
Description Document
E-870.10, E-870.11, E-870.21, E-870.41 Piezomotor /
PiezoMike Drive Electronics, OEM Board, 1 to 4 Channels
E870T0001 Technical Note
E-870.1G, E-870.2G, E-870.4G Piezomotor / PiezoMike
Drive Electronics, Bench-Top, 1 to 4 Channels
E870T0002 Technical Note
E-871.1A1 Q-Motion® Controller, 1 Channel, USB Interface PZ241E User Manual
E-873.1A1, E-873.1AR, E-873.1AT Q-Motion® Controller,
1 Channel, USB Interface
E873T0001 Technical Note
PIMikroMove SM148E Software Manual
1.6 Downloading Manuals
INFORMATION
If a manual is missing or problems occur with downloading:
Contact our customer service department (p. 59).
INFORMATION
For products that are supplied with software (CD in the scope of delivery), access to the
manuals is protected by a password. Protected manuals are only displayed on the website after
entering the password.
The password is included on the CD of the product.
For products with CD: Identify the password
1. Insert the product CD into the PC drive.
2. Switch to the Manuals directory on the CD.
3. In the Manuals directory, open the Release News (file including releasenews in the file
name).
4. Find the user name and the password in the section "User login for software download"
in the Release News.

1 About this Document
4 Version: 1.0.0 MP145E Q-521 Miniature Stage
Downloading Manuals
1. Open the website http://www.pi.ws.
2. Click Info.
3. If you have a user name and password:
a) Click Login.
b) Log in with the user name and password.
4. Click >> Product Downloads.
5. In the Product Files area, click the corresponding product category.
6. On the right-hand side of the page, select the corresponding subcategory.
7. Navigate to the product code on the page.
The following manuals are displayed:
−Freely accessible manuals
−Manuals that are protected by a password
8. Click the desired manual and save it to the hard disk of your PC or to a data storage
medium.

2 Safety
Q-521 Miniature Stage MP145E Version: 1.0.0 5
In this Chapter
Intended Use.................................................................................................................................. 5
General Safety Instructions............................................................................................................ 5
Organizational Measures............................................................................................................... 6
Measures for Handling Vacuum-Compatible Products ................................................................. 6
2.1 Intended Use
The Q-521 is a laboratory device as defined by DIN EN 61010-1. It is intended to be used in
interior spaces and in an environment which is free of dirt, oil, and lubricants.
In accordance with its design and realization, the Q-521 is intended for single-axis positioning,
adjusting and shifting of loads at different velocities in interval operation. The Q-521 uses a
PIShift piezomotor as a drive. When at rest, the drive is self-locking, requires no current,
generates no heat, and maintains its position.
The Q-521 can be mounted in any orientation. The specifications of the Q-521 apply to
horizontal mounting (p. 61).
The Q-521 is not intended for applications in areas in which a failure would present severe risks
to human beings or the environment. For further information on the operating conditions of
the Q-521, see "Technical Data" (p. 61).
Some models of the Q-521 are equipped with a linear encoder for direct position measurement.
The intended use of the Q-521 is only possible when completely mounted and connected. The
Q-521 must be operated with suitable electronics (p. 15). The electronics are not included in the
scope of delivery of the Q-521.
2.2 General Safety Instructions
The Q-521 is built according to state-of-the-art technology and recognized safety standards.
Improper use can result in personal injury and/or damage to the Q-521.
Only use the Q-521 for its intended purpose, and only use it if it is in a good working
order.
Read the user manual.
Immediately eliminate any faults and malfunctions that are likely to affect safety.
The operator is responsible for the correct installation and operation of the Q-521.
2
Safety

2 Safety
6 Version: 1.0.0 MP145E Q-521 Miniature Stage
2.3 Organizational Measures
User manual
Always keep this user manual available with the Q-521.
The latest versions of the user manuals are available for download (p. 3) on our
website.
Add all information from the manufacturer to the user manual, for example
supplements or Technical Notes.
If you give the Q-521 to other users, also include this user manual as well as other
relevant information provided by the manufacturer.
Only use the device on the basis of the complete user manual. Missing information due
to an incomplete user manual can result in minor injury and damage to equipment.
Only install and operate the Q-521 after you have read and understood this user
manual.
Personnel qualification
The Q-521 may only be installed, started up, operated, maintained, and cleaned by authorized
and appropriately qualified personnel.
2.4 Measures for Handling Vacuum-Compatible Products
When handling the vacuum version of the stage, attention must be paid to appropriate
cleanliness. At PI, all parts are cleaned before assembly. During assembly and measurement,
powder-free gloves are worn. In addition, the Q-521.xxU models are wipe cleaned afterwards
and then shrink-wrapped twice in vacuum-compatible film.
Only touch the stage with powder-free gloves.
If necessary, wipe the stage clean after unpacking.

3 Product Description
Q-521 Miniature Stage MP145E Version: 1.0.0 7
In this Chapter
Model Overview............................................................................................................................. 7
Product View................................................................................................................................ 10
Product Labeling .......................................................................................................................... 12
Scope of Delivery ......................................................................................................................... 13
Accessories................................................................................................................................... 14
Suitable Electronics...................................................................................................................... 15
Technical Features ....................................................................................................................... 17
3.1 Model Overview
Classification of the Q-521 models
The model version of the Q-521 is coded in the order number by means of three characters
after a period; see also "Detailed model names". Each character codes a feature of the model
version:
First character Second character Third character
Feature Travel range Sensor (linear encoder) Vacuum suitability
Feature value 1 = 12 mm
2 = 22 mm
3 = 32 mm
0 = without sensor
3 = with sensor,
sensor resolution 4 nm
4 = with sensor,
sensor resolution 1 nm
0 = suitable to 10-6 hPa
U = suitable to 10-9 hPa
If the value "x" is used in this manual for a character after the period, the corresponding
description or instruction applies to all feature values of the corresponding feature.
Detailed model names
Order number Product name
Q-521.100 Q-Motion® Miniature Linear Positioning Stage, 12 mm Travel Range,
Without Position Sensor for Open-Loop Operation, 1 N Push/Pull Force,
Dimensions 21 × 30 × 10 mm (W × L × H), Piezoelectric Inertia Drive,
Vacuum-Compatible to 10-6 hPa
3
Product Description

3 Product Description
8 Version: 1.0.0 MP145E Q-521 Miniature Stage
Order number Product name
Q-521.10U Q-Motion® Miniature Linear Positioning Stage, 12 mm Travel Range,
Without Position Sensor for Open-Loop Operation, 1 N Push/Pull Force,
Dimensions 21 × 30 × 10 mm (W × L × H), Piezoelectric Inertia Drive,
Vacuum-Compatible to 10-9 hPa
Q-521.130 Q-Motion® Miniature Linear Positioning Stage, 12 mm Travel Range,
Linear Encoder, 4 nm Resolution, 1 N Push/Pull Force,
Dimensions 21 × 30 × 10 mm (W × L × H), Piezoelectric Inertia Drive,
Vacuum-Compatible to 10-6 hPa
Q-521.140 Q-Motion® Miniature Linear Positioning Stage, 12 mm Travel Range,
Linear Encoder, 1 nm Resolution, 1 N Push/Pull Force,
Dimensions 21 × 30 × 10 mm (W × L × H), Piezoelectric Inertia Drive,
Vacuum-Compatible to 10-6 hPa
Q-521.14U Q-Motion® Miniature Linear Positioning Stage, 12 mm Travel Range,
Linear Encoder, 1 nm Resolution, 1 N Push/Pull Force,
Dimensions 21 × 30 × 10 mm (W × L × H), Piezoelectric Inertia Drive,
Vacuum-Compatible to 10-9 hPa
Q-521.200 Q-Motion® Miniature Linear Positioning Stage, 22 mm Travel Range,
Without Position Sensor for Open-Loop Operation, 1 N Push/Pull Force,
Dimensions 21 × 32 × 10 mm (W × L × H), Piezoelectric Inertia Drive,
Vacuum-Compatible to 10-6 hPa
Q-521.20U Q-Motion® Miniature Linear Positioning Stage, 22 mm Travel Range,
Without Position Sensor for Open-Loop Operation, 1 N Push/Pull Force,
Dimensions 21 × 32 × 10 mm (W × L × H), Piezoelectric Inertia Drive,
Vacuum-Compatible to 10-9 hPa
Q-521.230 Q-Motion® Miniature Linear Positioning Stage, 22 mm Travel Range,
Linear Encoder, 4 nm Resolution, 1 N Push/Pull Force,
Dimensions 21 × 32 × 10 mm (W × L × H), Piezoelectric Inertia Drive,
Vacuum-Compatible to 10-6 hPa
Q-521.240 Q-Motion® Miniature Linear Positioning Stage, 22 mm Travel Range,
Linear Encoder, 1 nm Resolution, 1 N Push/Pull Force,
Dimensions 21 × 32 × 10 mm (W × L × H), Piezoelectric Inertia Drive,
Vacuum-Compatible to 10-6 hPa
Q-521.24U Q-Motion® Miniature Linear Positioning Stage, 22 mm Travel Range, Linear
Encoder, 1 nm Resolution, 1 N Push/Pull Force,
Dimensions 21 × 32 × 10 mm (W × L × H), Piezoelectric Inertia Drive,
Vacuum-Compatible to 10-9 hPa
Q-521.300 Q-Motion® Miniature Linear Positioning Stage, 32 mm Travel Range,
Without Position Sensor for Open-Loop Operation, 1 N Push/Pull Force,
Dimensions 21 × 42 × 10 mm (W × L × H), Piezoelectric Inertia Drive,
Vacuum-Compatible to 10-6 hPa

3 Product Description
Q-521 Miniature Stage MP145E Version: 1.0.0 9
Order number Product name
Q-521.30U Q-Motion® Miniature Linear Positioning Stage, 32 mm Travel Range,
Without Position Sensor for Open-Loop Operation, 1 N Push/Pull Force,
Dimensions 21 × 42 × 10 mm (W × L × H), Piezoelectric Inertia Drive,
Vacuum-Compatible to 10-9 hPa
Q-521.330 Q-Motion® Miniature Linear Positioning Stage, 32 mm Travel Range, Linear
Encoder, 4 nm Resolution, 1 N Push/Pull Force,
Dimensions 21 × 42 × 10 mm (W × L × H), Piezoelectric Inertia Drive,
Vacuum-Compatible to 10-6 hPa
Q-521.340 Q-Motion® Miniature Linear Positioning Stage, 32 mm Travel Range,
Linear Encoder, 4 nm Resolution, 1 N Push/Pull Force,
Dimensions 21 × 42 × 10 mm (W × L × H), Piezoelectric Inertia Drive,
Vacuum-Compatible to 10-6 hPa
Q-521.34U Q-Motion® Miniature Linear Positioning Stage, 32 mm Travel Range,
Linear Encoder, 4 nm Position Resolution, 1 N Push/Pull Force,
Dimensions 21 × 42 × 10 mm (W × L × H), Piezoelectric Inertia Drive,
Vacuum-Compatible to 10-9 hPa

3 Product Description
10 Version: 1.0.0 MP145E Q-521 Miniature Stage
3.2 Product View
Figure 1: Example for models without sensor: Q-521.200 stage
1 Moving platform
2Cable exit for drive connection
3Connection for drive; with Q-521.x00 models: Sub-D 15 (m) connector,
with Q-521.x0U models: Sub-D 15 (f) connector
4Type plate p. 12
5Base body

3 Product Description
Q-521 Miniature Stage MP145E Version: 1.0.0 11
Figure 2: Example for models with sensor: Q-521.240 stage
1 Moving platform
2Cable exit for connection of drive and sensor
3Warning sign "Electrostatic sensitive devices"
4Connection for drive and sensor; with Q-521.xx0 models:
Sub-D 15 (m) connector, with Q-521.xxU models: Sub-D 15 (f) connector
5ESD protection: ESD protective cap with Q-521.xx0; nonconductive foil with
Q-521.xxU
6Type plate p. 12
7Base body

3 Product Description
12 Version: 1.0.0 MP145E Q-521 Miniature Stage
Figure 3: Direction of motion of the platform of the Q-521, Q-521.240 used as an example
The arrow in the figure above shows the direction of motion on positive commanding.
3.3 Product Labeling
Figure 4: Example for models with sensor: Product labeling and type plate of the Q-521.240 stage

3 Product Description
Q-521 Miniature Stage MP145E Version: 1.0.0 13
Position Labeling Description
A, C
Manufacturer's logo
B
Symbol for the protective earth conductor,
marks the protective earth connection of the
Q-521 (p. 23)
B, C
Warning sign "Observe manual!"
B, C
CE conformity mark
C 113064246
Serial number (example), individual for each
Q-521
Meaning of the places (counting from left):
1 = internal information,
2 and 3 = year of manufacture,
4 to 9 = consecutive numbers
C Q-521.240 Product name (example), the characters
following the period refer to the model
C
Old equipment disposal
C WWW.PI.WS Manufacturer's address (website)
C
Warning sign "Electrostatic sensitive devices"
3.4 Scope of Delivery
The Q-521 is delivered with the following components:
Item ID Components
Q-521 Linear positioning stage as specified in the order (p. 7)
Q521B0003
Screw set for mounting the Q-521, consisting of:
2 dowel pins, A2 1.5 m6 x 4 ISO 2338
2 socket head cap screws, A2 M2x6 ISO 4762
MP139EK Short instructions for Q-5xx / Q-6xx PIShift stages
Only for models without sensor:
7202500042-0015 Air-side adapter cable for connection to the E-870 drive electronics,
Sub-D 15 (f) to Mini-DIN 4 (m), 0.3 m

3 Product Description
14 Version: 1.0.0 MP145E Q-521 Miniature Stage
Item ID Components
Only for models with sensor:
7202500043-0015 Air-side adapter cable for connection to the E-871 controller,
Sub-D 15 (f) to HD Sub-D 15 (m) and HD Sub-D 15 (f), 0.3 m
Only for models suitable for operation to 10-9 hPa:
5604500041 Adapter for operation outside of a vacuum chamber, Sub-D 15 (m/m)
3.5 Accessories
Order number Description
E-873.UHV1 Air-side extension cable from vacuum feedthrough or Q-521.xx0 to the
adapter cable to the electronics, Sub-D 15 (f) to Sub-D 15 (m), 1 m
E-873.UHV2 Air-side extension cable from vacuum feedthrough or Q-521.xx0 to the
adapter cable to the electronics, Sub-D 15 (f) to Sub-D 15 (m), 2 m
E-873.UHV3 Air-side extension cable from vacuum feedthrough or Q-521.xx0 to the
adapter cable to the electronics, Sub-D 15 (f) to Sub-D 15 (m), 3 m
Q-121.80U
Adapter plate for setting up an XY system consisting of two Q-
521, for use
in a vacuum to 10-9 hPa. Material: Aluminum alloy, uncoated; mass: 4.5 g;
including:
2 dowel pins, A2 1.5 m6 x 4 ISO 2338
3 machine screws, 1.4567 M2x4
Q-121.10U Adapter bracket for vertical mounting of a Q-521; for recommended
Z combinations, see p. 30.
For use in a vacuum to 10-9 hPa.
Material: Aluminum alloy, uncoated; mass: 13.5 g / 16.8 g / 26.6 g;
each including:
4 dowel pins A2 1.5 m6 x 5 ISO 2338
6 machine screws, 1.4567 M2x8
Q-121.20U
Q-121.30U