PI Q-521 User manual

PI miCos GmbH, Freiburger Strasse 30, 79427 Eschbach, Germany
Phone [phone], Fax [phone], Email [e-mail], www.pi.ws
MP145E
Q
-521 Miniature Stage
User Manual
Version: 1.0.0
Date: 17.03.2016
This document describes the following products:

Q-521
Q-Motion miniature linear positioning stage,
piezoelectric inertia drive
This document applies to various model
versions of the Q-
521. The model version of the
Q-521 is coded in the order number by means
of three characters after a period. Meaning of
the characters and valid values:
First character after the period:
Travel range
1= 12 mm
2= 22 mm
3= 32 mm
Second character after the period:
Sensor equipment
0 = without sensor
3= with sensor, sensor resolution 4 nm
4= with sensor, sensor resolution 1 nm
Third character after the period:
Vacuum suitability
0= suitable to 10-6 hPa
U= suitable to 10-9 hPa

Physik Instrumente (PI) GmbH & Co. KG is the owner of the following trademarks:
PI®, PIC®, PICMA®, PILine®, PIFOC®, PiezoWalk®, NEXACT®, NEXLINE®, NanoCube®, NanoAutomation®,
Picoactuator®, PInano®, PIMag®
© 2016 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text, photographs and drawings in
this manual are protected by copyright. With regard thereto, Physik Instrumente (PI) GmbH & Co. KG retains
all the rights. Use of said text, photographs and drawings is permitted only in part and only upon citation of
the source.
Original instructions
First printing: 17.03.2016
Document number: MP145E, KSch, version 1.0.0
Subject to change without notice. This manual is superseded by any new release. The latest release is
available for download (p. 3) on our website.

1About this Document 1
1.1 Objective and Target Audience of this User Manual.................................................. 1
1.2 Symbols and Typographic Conventions...................................................................... 1
1.3 Definition.................................................................................................................... 2
1.4 Figures ........................................................................................................................ 2
1.5 Other Applicable Documents ..................................................................................... 3
1.6 Downloading Manuals................................................................................................ 3
2Safety 5
2.1 Intended Use .............................................................................................................. 5
2.2 General Safety Instructions ........................................................................................ 5
2.3 Organizational Measures............................................................................................ 6
2.4 Measures for Handling Vacuum-Compatible Products.............................................. 6
3Product Description 7
3.1 Model Overview ......................................................................................................... 7
3.2 Product View ............................................................................................................ 10
3.3 Product Labeling....................................................................................................... 12
3.4 Scope of Delivery...................................................................................................... 13
3.5 Accessories ............................................................................................................... 14
3.6 Suitable Electronics .................................................................................................. 15
3.7 Technical Features.................................................................................................... 17
3.7.1 Linear Encoder (Sensor)............................................................................... 17
3.7.2 Reference Point Switch................................................................................ 17
3.7.3 ID Chip.......................................................................................................... 17
4Unpacking 19
5Installation 21
5.1 General Notes on Installation................................................................................... 21
5.2 Mounting the Q-521 on a Surface and Connecting It to a Protective Earth
Conductor................................................................................................................. 23
5.3 Setting Up a Multi-Axis System ................................................................................ 25
5.3.1 General Information on Setting Up a Multi-Axis System ............................ 27
5.3.2 Setting Up an XY System.............................................................................. 27
5.3.3 Setting Up a Z System with an Adapter Bracket.......................................... 30
5.4 Affixing the Load to the Q-521 ................................................................................. 36
5.5 Connecting the Q-521 to the Electronics ................................................................. 38
Contents

5.5.1 Connecting the Q-521 to the Drive Electronics ........................................... 38
5.5.2 Connecting the Q-521 to the Controller...................................................... 41
6Start-Up and Operation 47
6.1 General Notes on Start-Up and Operation............................................................... 47
6.2 Starting Up the stage................................................................................................ 50
6.2.1 Starting Up the Q-521.x0x with Drive Electronics ....................................... 51
6.2.2 Starting Up the Q-521.x3x or Q-521.x4x with a Controller ......................... 52
7Maintenance 55
7.1 General Notes on Maintenance ............................................................................... 55
7.2 Performing a Maintenance Run ............................................................................... 55
7.3 Cleaning the Q-521................................................................................................... 55
8Troubleshooting 57
9Customer Service 59
10 Technical Data 61
10.1 Specifications............................................................................................................ 61
10.1.1 Data Table.................................................................................................... 61
10.1.2 Maximum Ratings........................................................................................ 63
10.1.3 Ambient Conditions and Classifications ...................................................... 63
10.2 Operating Time......................................................................................................... 64
10.3 Dimensions ............................................................................................................... 65
10.3.1 Q-521.1xx..................................................................................................... 65
10.3.2 Q-521.2xx..................................................................................................... 66
10.3.3 Q-521.3xx..................................................................................................... 67
10.3.4 Q-121.80U Adapter Plate ............................................................................ 68
10.3.5 Q-121.10U Adapter Bracket ........................................................................ 69
10.3.6 Q-121.20U Adapter Bracket ........................................................................ 70
10.3.7 Q-121.30U Adapter Bracket ........................................................................ 71
10.3.8 Vacuum Feedthroughs................................................................................. 72
10.4 Pin Assignment ......................................................................................................... 78
10.4.1 Q-521.xx0..................................................................................................... 78
10.4.2 Q-521.xxU .................................................................................................... 79
10.4.3 C-815.VF Vacuum Feedthrough................................................................... 80
10.4.4 C-815.VFUx Vacuum Feedthrough .............................................................. 81
10.4.5 5604500041 Adapter................................................................................... 83

11 Old Equipment Disposal 85
12 EC Declaration of Conformity 87

1 About this Document
Q-521 Miniature Stage MP145E Version: 1.0.0 1
In this Chapter
Objective and Target Audience of this User Manual..................................................................... 1
Symbols and Typographic Conventions ......................................................................................... 1
Definition ....................................................................................................................................... 2
Figures............................................................................................................................................ 2
Other Applicable Documents......................................................................................................... 3
Downloading Manuals ................................................................................................................... 3
1.1 Objective and Target Audience of this User Manual
This manual contains the necessary information on the intended use of the Q-521.
It assumes that the reader has a fundamental understanding of basic servo systems as well as
motion control concepts and applicable safety procedures.
The latest versions of the user manuals are available for download (p. 3) on our website.
1.2 Symbols and Typographic Conventions
The following symbols and typographic conventions are used in this user manual:
CAUTION
Dangerous situation
If not avoided, the dangerous situation will result in minor injuries or damage to the
equipment.
Actions to take to avoid the situation.
NOTICE
Dangerous situation
If not avoided, the dangerous situation will result in damage to the equipment.
Actions to take to avoid the situation.
1
About this Document

1 About this Document
2 Version: 1.0.0 MP145E Q-521 Miniature Stage
INFORMATION
Information for easier handling, tricks, tips, etc.
Symbol/
Label
Meaning
1.
2.
Action consisting of several steps whose
sequential order must be observed
Action consisting of one or several steps whose
sequential order is irrelevant
List item
p. 5 Cross-reference to page 5
RS-232 Labeling of an operating element on the product
(example: socket of the RS-232 interface)
Warning sign affixed to the product that refers to
detailed information in this manual.
1.3 Definition
Term Explanation
Load capacity Maximum load capacity in the vertical direction when the stage is
mounted horizontally. The contact point of the load is in the center of
the platform.
Linear encoder The linear encoder is an incremental sensor for capturing changes in
position. Signals from the sensor are used for axis position feedback.
After switching on the controller a reference point definition must be
performed before absolute target positions can be commanded and
reached.
1.4 Figures
For better understandability, the colors, proportions and degree of detail in illustrations can
deviate from the actual circumstances. Photographic illustrations may also differ and must not
be seen as guaranteed properties.

1 About this Document
Q-521 Miniature Stage MP145E Version: 1.0.0 3
1.5 Other Applicable Documents
The devices and software tools which are mentioned in this documentation are described in
their own manuals.
Description Document
E-870.10, E-870.11, E-870.21, E-870.41 Piezomotor /
PiezoMike Drive Electronics, OEM Board, 1 to 4 Channels
E870T0001 Technical Note
E-870.1G, E-870.2G, E-870.4G Piezomotor / PiezoMike
Drive Electronics, Bench-Top, 1 to 4 Channels
E870T0002 Technical Note
E-871.1A1 Q-Motion® Controller, 1 Channel, USB Interface PZ241E User Manual
E-873.1A1, E-873.1AR, E-873.1AT Q-Motion® Controller,
1 Channel, USB Interface
E873T0001 Technical Note
PIMikroMove SM148E Software Manual
1.6 Downloading Manuals
INFORMATION
If a manual is missing or problems occur with downloading:
Contact our customer service department (p. 59).
INFORMATION
For products that are supplied with software (CD in the scope of delivery), access to the
manuals is protected by a password. Protected manuals are only displayed on the website after
entering the password.
The password is included on the CD of the product.
For products with CD: Identify the password
1. Insert the product CD into the PC drive.
2. Switch to the Manuals directory on the CD.
3. In the Manuals directory, open the Release News (file including releasenews in the file
name).
4. Find the user name and the password in the section "User login for software download"
in the Release News.

1 About this Document
4 Version: 1.0.0 MP145E Q-521 Miniature Stage
Downloading Manuals
1. Open the website http://www.pi.ws.
2. Click Info.
3. If you have a user name and password:
a) Click Login.
b) Log in with the user name and password.
4. Click >> Product Downloads.
5. In the Product Files area, click the corresponding product category.
6. On the right-hand side of the page, select the corresponding subcategory.
7. Navigate to the product code on the page.
The following manuals are displayed:
−Freely accessible manuals
−Manuals that are protected by a password
8. Click the desired manual and save it to the hard disk of your PC or to a data storage
medium.