PI Q-Motion Q-545 Series User manual

PI miCos GmbH, Freiburger Strasse 30, 79427 Eschbach, Germany
Phone: [phone], Fax: [phone], E-mail: [e-mail]
MP135E
Q
-545 Stage
User Manual
Version: 1.0.0
Date: 10.07.2015
This document describes the following
products:

Q-545
Q-Motion linear positioning stage,
piezoelectric inertia drive
This document applies to various model
versions of the Q-
545. The model version of
the Q-545 is coded in the order number by
means of three characters after a period.
Meaning of the places and valid values:
First character after the period:
Travel range
1= 13 mm
2= 26 mm
Second character after the period:
Sensor equipment
0 = without sensor
4= with sensor
Third character after the period:
Vacuum suitability
0= suitable to 10-6 hPa
U= suitable to 10-9 hPa

Physik Instrumente (PI) GmbH & Co. KG is the owner of the following trademarks:
PI®, PIC®, PICMA®, PILine®, PIFOC®, PiezoWalk®, NEXACT®, NEXLINE®,
NanoCube®, NanoAutomation®, Picoactuator®, PInano®, PIMag®
© 2015 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text,
photographs and drawings in this manual are protected by copyright. With regard
thereto, Physik Instrumente (PI) GmbH & Co. KG retains all the rights. Use of said
text, photographs and drawings is permitted only in part and only upon citation of the
source.
Original instructions
First printing: 10.07.2015
Document number: MP135E, KSch, version 1.0.0
Subject to change without notice. This manual is superseded by any new release. The
latest release is available for download (p. 3) on our website.

1About this Document 1
1.1 Objective and Target Audience of this User Manual............................................1
1.2 Symbols and Typographic Conventions...............................................................1
1.3 Definition...............................................................................................................2
1.4 Figures..................................................................................................................3
1.5 Other Applicable Documents................................................................................3
1.6 Downloading Manuals ..........................................................................................3
2Safety 5
2.1 Intended Use ........................................................................................................5
2.2 General Safety Instructions..................................................................................5
2.3 Organizational Measures......................................................................................6
2.4 Measures for Handling Vacuum-Compatible Products ........................................6
3Product Description 7
3.1 Model Overview....................................................................................................7
3.2 Product View.........................................................................................................9
3.3 Product Labeling.................................................................................................11
3.4 Scope of Delivery ...............................................................................................12
3.5 Accessories ........................................................................................................13
3.6 Suitable Electronics............................................................................................15
3.7 Technical Features.............................................................................................16
3.7.1 Linear Encoder (Sensor) ..................................................................16
3.7.2 Reference Point Switch ....................................................................16
3.7.3 ID Chip..............................................................................................17
4Unpacking 19
5Installation 21
5.1 General Notes on Installation.............................................................................21
5.2 Mounting the Q-545 on a Surface and Connecting It to a Protective Earth
Conductor ...........................................................................................................23
5.3 Setting Up a Multi-Axis System..........................................................................26
5.3.1 General Information on Setting Up a Multi-Axis System..................27
5.3.2 Setting Up an XY System.................................................................27
5.3.3 Setting Up a Z System with an Adapter Bracket..............................30
Contents

5.4 Affixing the Load to the Q-545............................................................................35
5.5 Connecting the Q-545 to the Electronics............................................................38
5.5.1 Connecting the Q-545 to the Drive Electronics ................................38
5.5.2 Connecting the Q-545 to the Controller............................................42
6Start-Up and Operation 47
6.1 General Notes on Start-Up and Operation.........................................................47
6.2 Starting Up the stage..........................................................................................50
6.2.1 Starting Up the Q-545.x0x with the E-870 Drive Electronics............51
6.2.2 Starting Up the Q-545.x4x with the E-871.1A1 Controller................53
7Maintenance 55
7.1 General Notes on Maintenance..........................................................................55
7.2 Performing a Maintenance Run..........................................................................55
7.3 Cleaning the Q-545 ............................................................................................55
8Troubleshooting 57
9Customer Service 59
10 Technical Data 61
10.1 Specifications......................................................................................................61
10.1.1 Data Table........................................................................................61
10.1.2 Maximum Ratings.............................................................................63
10.1.3 Ambient Conditions and Classifications ...........................................63
10.2 Operating Time...................................................................................................64
10.3 Dimensions.........................................................................................................65
10.3.1 Q-545.10x.........................................................................................65
10.3.2 Q-545.14x.........................................................................................66
10.3.3 Q-545.20x.........................................................................................67
10.3.4 Q-545.24x.........................................................................................68
10.3.5 Q-145.1001 and Q-145.10U1 Adapter Brackets..............................69
10.3.6 Q-145.200 and Q-145.20U Adapter Brackets..................................70
10.3.7 Vacuum Feedthroughs .....................................................................71
10.4 Pin Assignment...................................................................................................76
10.4.1 Q-545.xx0.........................................................................................76
10.4.2 Q-545.xxU.........................................................................................77
10.4.3 C-815.VF Vacuum Feedthrough.......................................................78
10.4.4 C-815.VFUx Vacuum Feedthrough..................................................80
10.4.5 5604500041 Adapter........................................................................81

11 Old Equipment Disposal 83
12 EC Declaration of Conformity 85

1 About this Document
Q-545 Stage MP135E Version: 1.0.0 1
In this Chapter
Objective and Target Audience of this User Manual..................................................... 1
Symbols and Typographic Conventions........................................................................ 1
Definition........................................................................................................................ 2
Figures........................................................................................................................... 3
Other Applicable Documents......................................................................................... 3
Downloading Manuals................................................................................................... 3
1.1 Objective and Target Audience of this User Manual
This manual contains information on the intended use of the Q-545.
It assumes that the reader has a fundamental understanding of basic servo systems
as well as motion control concepts and applicable safety procedures.
The latest versions of the user manuals are available for download (p. 3) on our
website.
1.2 Symbols and Typographic Conventions
The following symbols and typographic conventions are used in this user manual:
CAUTION
Dangerous situation
If not avoided, the dangerous situation will result in minor injuries or damage to the
equipment.
Actions to take to avoid the situation.
NOTICE
Dangerous situation
If not avoided, the dangerous situation will result in damage to the equipment.
Actions to take to avoid the situation.
1
About this Document

1 About this Document
2 Version: 1.0.0 MP135E Q-545 Stage
INFORMATION
Information for easier handling, tricks, tips, etc.
Symbol/
Label Meaning
1.
2. Action consisting of several steps whose
sequential order must be observed
Action consisting of one or several steps
whose sequential order is irrelevant
 List item
p. 5 Cross-reference to page 5
RS-232 Labeling of an operating element on the
product (example: socket of the RS-232
interface)
Warning sign affixed to the product that
refers to detailed information in this manual.
1.3 Definition
Term Explanation
Load capacity Maximum load capacity in the vertical direction when the
stage is mounted horizontally. The contact point of the load is
in the center of the platform.
Linear encoder The linear encoder is an incremental sensor for capturing
changes in position. Signals from the sensor are used for axis
position feedback. After switching on the controller a reference
point definition must be performed before absolute target
positions can be commanded and reached.

1 About this Document
Q-545 Stage MP135E Version: 1.0.0 3
1.4 Figures
For better understandability, the colors, proportions and degree of detail in illustrations
can deviate from the actual circumstances. Photographic illustrations may also differ
and must not be seen as guaranteed properties.
1.5 Other Applicable Documents
The devices and software tools which are mentioned in this documentation are
described in their own manuals.
Description Document
E-870.10, E-870.11, E-870.21, E-870.41 Piezomotor
/ PiezoMike Drive Electronics, OEM Board,
1 to 4 Channels
E870T0001 Technical Note
E-870.1G, E-870.2G, E-870.4G Piezomotor /
PiezoMike Drive Electronics, Bench-Top,
1 to 4 Channels
E870T0002 Technical Note
E-871.1A1 Q-Motion Controller, 1 Channel,
USB Interface PZ241E User Manual
PIMikroMove SM148E Software Manual
1.6 Downloading Manuals
INFORMATION
If a manual is missing or problems occur with downloading:
Contact our customer service department (p. 59).
INFORMATION
For some products (e.g. Hexapod systems and electronics that are delivered with a
CD), access to the manuals is password-protected. The password is stored on the
CD. Availability of the manuals:
Password-protected manuals: FTP download directory
Freely available manuals: PI website
Follow the corresponding instructions for downloading.

1 About this Document
4 Version: 1.0.0 MP135E Q-545 Stage
Downloading freely accessible manuals
1. Open the website http://www.pi-portal.ws.
2. Click Downloads.
3. Click the corresponding product category.
4. Go to the corresponding product code.
The available manuals are displayed.
5. Click the desired manual and save it on the hard disk of your PC or on a data
storage medium.
Downloading password-protected manuals
1. Insert the product CD in the PC drive.
2. Switch to the Manuals directory on the CD.
3. In the Manuals directory, open the Release News (file including releasenews
in the file name).
4. Find the user name and the password in the section "User login for software
download" in the Release News.
5. Open the FTP download directory (ftp://pi-ftp.ws).
−Windows operating systems: Open the FTP download directory in
Windows Explorer.
6. Log in with the user name and the password from the Release News.
7. In the directory of the corresponding product, go to the Manuals sub-directory.
8. Copy the desired manual to the hard disk of your PC or to a data storage
medium.

2 Safety
Q-545 Stage MP135E Version: 1.0.0 5
In this Chapter
Intended Use ................................................................................................................. 5
General Safety Instructions........................................................................................... 5
Organizational Measures............................................................................................... 6
Measures for Handling Vacuum-Compatible Products ................................................. 6
2.1 Intended Use
The Q-545 is a laboratory device as defined by DIN EN 61010-1. It is intended to be
used in interior spaces and in an environment which is free of dirt, oil, and lubricants.
In accordance with its design and realization, the Q-545 is intended for single-axis
positioning, adjusting and shifting of loads at different velocities in interval operation.
The Q-545 uses a PIShift piezomotor as a drive. When at rest, the drive is self-locking,
requires no current, generates no heat, and maintains its position.
The Q-545 can be mounted in any orientation. The specifications of the Q-545 apply
to horizontal mounting (p. 61).
The Q-545 is not intended for applications in areas in which a failure would present
severe risks to human beings or the environment. For further information on the
operating conditions of the Q-545, see "Technical Data" (p. 61).
Some models of the Q-545 are equipped with a linear encoder for direct position
measurement.
The intended use of the Q-545 is only possible when completely mounted and
connected. The Q-545 must be operated with suitable electronics (p. 15). The
electronics are not included in the scope of delivery of the Q-545.
2.2 General Safety Instructions
The Q-545 is built according to state-of-the-art technology and recognized safety
standards. Improper use can result in personal injury and/or damage to the Q-545.
Only use the Q-545 for its intended purpose, and only use it if it is in a good
working order.
2
Safety

2 Safety
6 Version: 1.0.0 MP135E Q-545 Stage
Read the user manual.
Immediately eliminate any faults and malfunctions that are likely to affect
safety.
The operator is responsible for the correct installation and operation of the Q-545.
2.3 Organizational Measures
User manual
Always keep this user manual available with the Q-545.
The latest versions of the user manuals are available for download (p. 3) on
our website.
Add all information given by the manufacturer to the user manual, for example
supplements or Technical Notes.
If you pass the Q-545 on to other users, also include this user manual as well
as other relevant information provided by the manufacturer.
Only use the device on the basis of the complete user manual. Missing
information due to an incomplete user manual can result in minor injury and
property damage.
Only install and operate the Q-545 after you have read and understood this
user manual.
Personnel qualification
The Q-545 may only be installed, started up, operated, maintained and cleaned by
authorized and appropriately qualified personnel.
2.4 Measures for Handling Vacuum-Compatible Products
When handling the vacuum version of the stage, attention must be paid to appropriate
cleanliness. At PI, all parts are cleaned before assembly. During assembly and
measurement, powder-free gloves are worn. In addition, the Q-545.xxU models are
wipe cleaned afterwards and then shrink-wrapped twice in vacuum-compatible film.
Only touch the stage with powder-free gloves.
If necessary, wipe the stage clean after unpacking.

3 Product Description
Q-545 Stage MP135E Version: 1.0.0 7
In this Chapter
Model Overview............................................................................................................. 7
Product View ................................................................................................................. 9
Product Labeling.......................................................................................................... 11
Scope of Delivery ........................................................................................................ 12
Accessories ................................................................................................................. 13
Suitable Electronics..................................................................................................... 15
Technical Features...................................................................................................... 16
3.1 Model Overview
Classification of the Q-545 models
The model version of the Q-545 is coded in the order number by means of three
characters after a period; see also "Detailed model names". Each character codes a
feature of the model version:
First character Second character Third character
Feature Travel range Sensor (linear encoder) Vacuum suitability
Feature value 1 = 13 mm
2 = 26 mm 0 = without sensor 4 = with sensor 0 = suitable to 10
-6
hPa
U = suitable to 10-9 hPa
If the value "x" is used in this manual for a character after the period, the
corresponding description or instruction applies to all feature values of the
corresponding feature.
3
Product Description

3 Product Description
8 Version: 1.0.0 MP135E Q-545 Stage
Detailed model names
Order
number Product name
Q-545.100 Q-Motion Linear Stage, 13 mm Travel Range, without Position
Sensor for Open-Loop Operation, 8 N Push / Pull Force,
Dimensions 45 × 48 × 15 mm (W × L × H), Piezoelectric Inertia Drive,
Vacuum-Compatible to 10-6 hPa
Q-545.140 Q-Motion Linear Stage, 13 mm Travel Range, Linear Encoder, 1 nm
Resolution, 8 N Push / Pull Force, Dimensions 45 × 48 × 15 mm
(W × L × H), Piezoelectric Inertia Drive,
Vacuum-Compatible to 10-6 hPa
Q-545.200 Q-Motion Linear Stage, 26 mm Travel Range, without Position
Sensor for Open-Loop Operation, 8 N Push / Pull Force,
Dimensions 45 × 63 × 15 mm (W × L× H), Piezoelectric Inertia Drive,
Vacuum-Compatible to 10-6 hPa
Q-545.240 Q-Motion Linear Stage, 26 mm Travel Range, Linear Encoder, 1 nm
Resolution, 8 N Push / Pull Force, Dimensions 45 × 63 × 15 mm
(W × L × H), Piezoelectric Inertia Drive,
Vacuum-Compatible to 10-6 hPa
Q-545.10U Q-Motion Linear Stage, 13 mm Travel Range, without Position
Sensor for Open-Loop Operation, 8 N Push / Pull Force,
Dimensions 45 × 48 × 15 mm (W × L × H), Piezoelectric Inertia Drive,
Vacuum-Compatible to 10-9 hPa
Q-545.14U Q-Motion Linear Stage, 13 mm Travel Range, Linear Encoder, 1 nm
Resolution, 8 N Push / Pull Force, Dimensions 45 × 48 × 15 mm
(W × L × H), Piezoelectric Inertia Drive,
Vacuum-Compatible to 10-9 hPa
Q-545.20U Q-Motion Linear Stage, 26 mm Travel Range, without Position
Sensor for Open-Loop Operation, 8 N Push / Pull Force,
Dimensions 45 × 63 × 15 mm (W × L× H), Piezoelectric Inertia Drive,
Vacuum-Compatible to 10-9 hPa
Q-545.24U Q-Motion Linear Stage, 26 mm Travel Range, Linear Encoder, 1 nm
Resolution, 8 N Push / Pull Force, Dimensions 45 × 63 × 15 mm
(W × L × H), Piezoelectric Inertia Drive,
Vacuum-Compatible to 10-9 hPa

3 Product Description
Q-545 Stage MP135E Version: 1.0.0 9
3.2 Product View
Figure 1: Example for models without sensor: Q-545.200 stage
1 Moving platform
2 Cable exit for drive connection
3 Connection for drive; with Q-545.x00 models: Sub-D 15 (m) connector, with
Q-545.x0U models: Sub-D 15 (f) connector
4 Type plate p. 11
5 Base body

3 Product Description
10 Version: 1.0.0 MP135E Q-545 Stage
Figure 2: Example for models with sensor: Q-545.240 stage
1 Moving platform
2 Cable exit for drive connection
3 Warning sign "Electrostatic sensitive devices"
4 Connection for drive and sensor; with Q-545.x40 models: Sub-D 15 (m)
connector, with Q-545.x4U models: Sub-D 15 (f) connector
5 ESD protection: ESD protective cap with Q-545.x40; nonconductive foil with
Q-545.x4U
6 Type plate p. 11
7 Cable exit for sensor connection
8 Base body

3 Product Description
Q-545 Stage MP135E Version: 1.0.0 11
Figure 3: Direction of motion of the platform of the Q-545, Q-545.240 used as example
The arrow in the figure above shows the direction of motion on positive commanding.
3.3 Product Labeling
Figure 4: Example for models with sensor: Product labeling and type plate of the Q-545.240 stage
Position Labeling Description
A, C Manufacturer's logo
B, C CE conformity mark

3 Product Description
12 Version: 1.0.0 MP135E Q-545 Stage
Position Labeling Description
B, C Warning sign "Observe manual!"
B
Symbol for the protective earth conductor,
marks the protective earth connection of the
Q-545 (p. 23)
C Warning sign "Electrostatic sensitive devices"
C 113064246
Serial number (example), individual for each
Q-545
Meaning of the places (counting from left):
1 = internal information,
2 and 3 = year of manufacture,
4 to 9 = consecutive numbers
C Q-545.240 Product name (example), the characters
following the period refer to the model
C Old equipment disposal
C WWW.PIMICOS.COM Manufacturer's address (website)
3.4 Scope of Delivery
The Q-545 is delivered with the following components:
Item ID Components
Q-545 Linear positioning stage as specified in the order (p. 7)
5861500010
Screw set for mounting the Q-545, consisting of:
2 dowel pins A2 2.5 m6 x 5 ISO 8734
4 socket head cap screws A2 M2.5x5 ISO 4762
MP139EK Short instructions for Q-5xx / Q-6xx PIShift stages
Only for models without sensor:
7202500042-0015 Air-side adapter cable for connection to the E-870 drive
electronics, Sub-D 15 (f) to Mini-DIN 4 (m), 0.3 m

3 Product Description
Q-545 Stage MP135E Version: 1.0.0 13
Item ID Components
Only for models with sensor:
7202500043-0015 Air-side adapter cable for connection to the E-871 controller,
Sub-D 15 (f) to HD Sub-D 15 (m) and HD Sub-D 15 (f), 0.3 m
Only for models suitable for operation to 10-9 hPa:
5604500041 Adapter for operation outside of a vacuum chamber,
Sub-D 15 (m/m)
3.5 Accessories
Order
number Description
E-873.UHV1 Air-side extension cable from vacuum feedthrough or Q-545.xx0 to the adapter cable to the electronics, Sub-D 15 (f) to Sub-D 15 (m),
1 m
E-873.UHV2 Air-side extension cable from vacuum feedthrough or Q-545.xx0 to the adapter cable to the electronics, Sub-D 15 (f) to Sub-D 15 (m),
2 m
E-873.UHV3 Air-side extension cable from vacuum feedthrough or Q-545.xx0 to the adapter cable to the electronics, Sub-D 15 (f) to Sub-D 15 (m),
3 m
For Q-545.xx0 models only (suitable for use in a vacuum
to 10-6 hPa):
Order
number Description
C-815.VF Vacuum feedthrough (drive and sensor signals), Sub-D 15 (m/f),
including C815T0003 Technical Note

3 Product Description
14 Version: 1.0.0 MP135E Q-545 Stage
Order
number Description
Q-145.1001
Adapter bracket for vertical mounting of Q-545.1x0 stages. Material:
Aluminum (3.3206), anodized; mass: 42 g; includes:
2 dowel pins A2 2.5 m6 x 4 ISO 2338
4 socket head cap screws A2 M2.5x8 ISO 4762
Q-145.200
Adapter bracket for vertical mounting of Q-545.2x0 stages. Material:
Aluminum (3.3206), anodized; mass: 49 g; includes:
2 dowel pins A2 2.5 m6 x 4 ISO 2338
4 socket head cap screws A2 M2.5x8 ISO 4762
For Q-545.xxU models only (suitable for use in a vacuum
to 10-9 hPa):
Order
number Description
C-815.VFU1 Vacuum feedthrough (drive and sensor signals), Sub-D 15 (m/m),
DN40CF
C-815.VFU3 Vacuum feedthrough (drive and sensor signals), 3 x Sub-D 15 (m/m),
DN63CF
C-815.VFU6 Vacuum feedthrough (drive and sensor signals), 6 x Sub-D 15 (m/m),
DN100CF
C-815.VFU15
Vacuum feedthrough (drive and sensor signals),
15 x Sub-D 15 (m/m), DN160CF
Q-145.10U1
Adapter bracket for vertical mounting of Q-545.1xU stages. Material:
Aluminum (3.3206), uncoated; mass: 42 g; includes:
2 dowel pins A2 2.5 m6 x 4 ISO 2338
4 socket head cap screws A2 M2.5x8 ISO 4762