PI Q-Motion Q-545 Series User manual

PI miCos GmbH, Freiburger Strasse 30, 79427 Eschbach, Germany
Phone: [phone], Fax: [phone], E-mail: [e-mail]
MP135E
Q
-545 Stage
User Manual
Version: 1.0.0
Date: 10.07.2015
This document describes the following
products:

Q-545
Q-Motion linear positioning stage,
piezoelectric inertia drive
This document applies to various model
versions of the Q-
545. The model version of
the Q-545 is coded in the order number by
means of three characters after a period.
Meaning of the places and valid values:
First character after the period:
Travel range
1= 13 mm
2= 26 mm
Second character after the period:
Sensor equipment
0 = without sensor
4= with sensor
Third character after the period:
Vacuum suitability
0= suitable to 10-6 hPa
U= suitable to 10-9 hPa

Physik Instrumente (PI) GmbH & Co. KG is the owner of the following trademarks:
PI®, PIC®, PICMA®, PILine®, PIFOC®, PiezoWalk®, NEXACT®, NEXLINE®,
NanoCube®, NanoAutomation®, Picoactuator®, PInano®, PIMag®
© 2015 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text,
photographs and drawings in this manual are protected by copyright. With regard
thereto, Physik Instrumente (PI) GmbH & Co. KG retains all the rights. Use of said
text, photographs and drawings is permitted only in part and only upon citation of the
source.
Original instructions
First printing: 10.07.2015
Document number: MP135E, KSch, version 1.0.0
Subject to change without notice. This manual is superseded by any new release. The
latest release is available for download (p. 3) on our website.

1About this Document 1
1.1 Objective and Target Audience of this User Manual............................................1
1.2 Symbols and Typographic Conventions...............................................................1
1.3 Definition...............................................................................................................2
1.4 Figures..................................................................................................................3
1.5 Other Applicable Documents................................................................................3
1.6 Downloading Manuals ..........................................................................................3
2Safety 5
2.1 Intended Use ........................................................................................................5
2.2 General Safety Instructions..................................................................................5
2.3 Organizational Measures......................................................................................6
2.4 Measures for Handling Vacuum-Compatible Products ........................................6
3Product Description 7
3.1 Model Overview....................................................................................................7
3.2 Product View.........................................................................................................9
3.3 Product Labeling.................................................................................................11
3.4 Scope of Delivery ...............................................................................................12
3.5 Accessories ........................................................................................................13
3.6 Suitable Electronics............................................................................................15
3.7 Technical Features.............................................................................................16
3.7.1 Linear Encoder (Sensor) ..................................................................16
3.7.2 Reference Point Switch ....................................................................16
3.7.3 ID Chip..............................................................................................17
4Unpacking 19
5Installation 21
5.1 General Notes on Installation.............................................................................21
5.2 Mounting the Q-545 on a Surface and Connecting It to a Protective Earth
Conductor ...........................................................................................................23
5.3 Setting Up a Multi-Axis System..........................................................................26
5.3.1 General Information on Setting Up a Multi-Axis System..................27
5.3.2 Setting Up an XY System.................................................................27
5.3.3 Setting Up a Z System with an Adapter Bracket..............................30
Contents

5.4 Affixing the Load to the Q-545............................................................................35
5.5 Connecting the Q-545 to the Electronics............................................................38
5.5.1 Connecting the Q-545 to the Drive Electronics ................................38
5.5.2 Connecting the Q-545 to the Controller............................................42
6Start-Up and Operation 47
6.1 General Notes on Start-Up and Operation.........................................................47
6.2 Starting Up the stage..........................................................................................50
6.2.1 Starting Up the Q-545.x0x with the E-870 Drive Electronics............51
6.2.2 Starting Up the Q-545.x4x with the E-871.1A1 Controller................53
7Maintenance 55
7.1 General Notes on Maintenance..........................................................................55
7.2 Performing a Maintenance Run..........................................................................55
7.3 Cleaning the Q-545 ............................................................................................55
8Troubleshooting 57
9Customer Service 59
10 Technical Data 61
10.1 Specifications......................................................................................................61
10.1.1 Data Table........................................................................................61
10.1.2 Maximum Ratings.............................................................................63
10.1.3 Ambient Conditions and Classifications ...........................................63
10.2 Operating Time...................................................................................................64
10.3 Dimensions.........................................................................................................65
10.3.1 Q-545.10x.........................................................................................65
10.3.2 Q-545.14x.........................................................................................66
10.3.3 Q-545.20x.........................................................................................67
10.3.4 Q-545.24x.........................................................................................68
10.3.5 Q-145.1001 and Q-145.10U1 Adapter Brackets..............................69
10.3.6 Q-145.200 and Q-145.20U Adapter Brackets..................................70
10.3.7 Vacuum Feedthroughs .....................................................................71
10.4 Pin Assignment...................................................................................................76
10.4.1 Q-545.xx0.........................................................................................76
10.4.2 Q-545.xxU.........................................................................................77
10.4.3 C-815.VF Vacuum Feedthrough.......................................................78
10.4.4 C-815.VFUx Vacuum Feedthrough..................................................80
10.4.5 5604500041 Adapter........................................................................81

11 Old Equipment Disposal 83
12 EC Declaration of Conformity 85

1 About this Document
Q-545 Stage MP135E Version: 1.0.0 1
In this Chapter
Objective and Target Audience of this User Manual..................................................... 1
Symbols and Typographic Conventions........................................................................ 1
Definition........................................................................................................................ 2
Figures........................................................................................................................... 3
Other Applicable Documents......................................................................................... 3
Downloading Manuals................................................................................................... 3
1.1 Objective and Target Audience of this User Manual
This manual contains information on the intended use of the Q-545.
It assumes that the reader has a fundamental understanding of basic servo systems
as well as motion control concepts and applicable safety procedures.
The latest versions of the user manuals are available for download (p. 3) on our
website.
1.2 Symbols and Typographic Conventions
The following symbols and typographic conventions are used in this user manual:
CAUTION
Dangerous situation
If not avoided, the dangerous situation will result in minor injuries or damage to the
equipment.
Actions to take to avoid the situation.
NOTICE
Dangerous situation
If not avoided, the dangerous situation will result in damage to the equipment.
Actions to take to avoid the situation.
1
About this Document

1 About this Document
2 Version: 1.0.0 MP135E Q-545 Stage
INFORMATION
Information for easier handling, tricks, tips, etc.
Symbol/
Label Meaning
1.
2. Action consisting of several steps whose
sequential order must be observed
Action consisting of one or several steps
whose sequential order is irrelevant
 List item
p. 5 Cross-reference to page 5
RS-232 Labeling of an operating element on the
product (example: socket of the RS-232
interface)
Warning sign affixed to the product that
refers to detailed information in this manual.
1.3 Definition
Term Explanation
Load capacity Maximum load capacity in the vertical direction when the
stage is mounted horizontally. The contact point of the load is
in the center of the platform.
Linear encoder The linear encoder is an incremental sensor for capturing
changes in position. Signals from the sensor are used for axis
position feedback. After switching on the controller a reference
point definition must be performed before absolute target
positions can be commanded and reached.

1 About this Document
Q-545 Stage MP135E Version: 1.0.0 3
1.4 Figures
For better understandability, the colors, proportions and degree of detail in illustrations
can deviate from the actual circumstances. Photographic illustrations may also differ
and must not be seen as guaranteed properties.
1.5 Other Applicable Documents
The devices and software tools which are mentioned in this documentation are
described in their own manuals.
Description Document
E-870.10, E-870.11, E-870.21, E-870.41 Piezomotor
/ PiezoMike Drive Electronics, OEM Board,
1 to 4 Channels
E870T0001 Technical Note
E-870.1G, E-870.2G, E-870.4G Piezomotor /
PiezoMike Drive Electronics, Bench-Top,
1 to 4 Channels
E870T0002 Technical Note
E-871.1A1 Q-Motion Controller, 1 Channel,
USB Interface PZ241E User Manual
PIMikroMove SM148E Software Manual
1.6 Downloading Manuals
INFORMATION
If a manual is missing or problems occur with downloading:
Contact our customer service department (p. 59).
INFORMATION
For some products (e.g. Hexapod systems and electronics that are delivered with a
CD), access to the manuals is password-protected. The password is stored on the
CD. Availability of the manuals:
Password-protected manuals: FTP download directory
Freely available manuals: PI website
Follow the corresponding instructions for downloading.

1 About this Document
4 Version: 1.0.0 MP135E Q-545 Stage
Downloading freely accessible manuals
1. Open the website http://www.pi-portal.ws.
2. Click Downloads.
3. Click the corresponding product category.
4. Go to the corresponding product code.
The available manuals are displayed.
5. Click the desired manual and save it on the hard disk of your PC or on a data
storage medium.
Downloading password-protected manuals
1. Insert the product CD in the PC drive.
2. Switch to the Manuals directory on the CD.
3. In the Manuals directory, open the Release News (file including releasenews
in the file name).
4. Find the user name and the password in the section "User login for software
download" in the Release News.
5. Open the FTP download directory (ftp://pi-ftp.ws).
−Windows operating systems: Open the FTP download directory in
Windows Explorer.
6. Log in with the user name and the password from the Release News.
7. In the directory of the corresponding product, go to the Manuals sub-directory.
8. Copy the desired manual to the hard disk of your PC or to a data storage
medium.