PI Q-Motion Q-522 User manual

Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstr. 1, 76228 Karlsruhe, Germany
Phone: [phone], Fax: [phone], E-mail: [email protected]
MP134E
Q
-522 Miniature Stage
User Manual
Version: 1.0.1
Date: 23.08.2019
This document describes the following
products:

Q-522.xyz
Q-Motion Miniature Linear Stage,
Piezoelectric Inertia Drive
x: Travel range
0= 6.5 mm
1= 13 mm
2= 26 mm
y: Equipment with a sensor
0 = without sensor
3 = with sensor, sensor resolution 4 nm
4 = with sensor, sensor resolution 1 nm
z: Suitable for vacuum
0 = suitable to 0.1 hPa
U = suitable to 10 -9 hPa

Physik Instrumente (PI) GmbH & Co. KG is the owner of the following trademarks:
PI®, PIC®, PICMA®, PILine®, PIFOC®, PiezoWalk®, NEXACT®, NEXLINE®,
NanoCube®, NanoAutomation®, Picoactuator®, PInano®
© 2019 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text,
photographs and drawings in this manual are protected by copyright. With regard
thereto, Physik Instrumente (PI) GmbH & Co. KG retains all the rights. Use of said
text, photographs and drawings is permitted only in part and only upon citation of the
source.
Original instructions
First printing: 23.08.2019
Document number: MP134E, KSch, version 1.0.1
Subject to change without notice. This manual is superseded by any new release. The
latest release is available for download (p. 3) on our website.

1About this Document 1
1.1 Goal and Target Audience of this User Manual ...................................................1
1.2 Symbols and Typographic Conventions...............................................................1
1.3 Definition...............................................................................................................2
1.4 Figures..................................................................................................................2
1.5 Other Applicable Documents................................................................................3
1.6 Downloading Manuals ..........................................................................................3
2Safety 5
2.1 Intended Use ........................................................................................................5
2.2 General Safety Instructions..................................................................................5
2.3 Organizational Measures......................................................................................6
2.4 Measures for Handling Vacuum-Compatible Products ........................................6
3Product Description 7
3.1 Model Overview....................................................................................................7
3.2 Product View.......................................................................................................10
3.3 Product Labeling.................................................................................................12
3.4 Scope of Delivery ...............................................................................................13
3.5 Accessories ........................................................................................................13
3.6 Suitable Electronics............................................................................................14
3.7 Technical Features.............................................................................................15
3.7.1 Linear Encoder (Sensor) ..................................................................15
3.7.2 Reference Point Switch ....................................................................15
3.7.3 ID Chip..............................................................................................15
4Unpacking 17
5Installation 19
5.1 General Notes on Installation.............................................................................19
5.2 Mounting the Q-522 on a Surface and Connecting It to a Protective Earth
Conductor ...........................................................................................................21
5.3 Setting Up a Multi-Axis System..........................................................................24
5.4 Affixing the Load to the Q-522............................................................................26
5.5 Connecting the Q-522 to the Electronics............................................................29
5.5.1 Connecting the Q-522 to the Drive Electronics................................29
5.5.2 Connecting the Q-522 to the Controller............................................30
Contents

6Startup and Operation 33
6.1 General Notes on Startup and Operation...........................................................33
6.2 Starting Up the Stage.........................................................................................36
6.2.1 Starting Up the Q-522.x0z with the E-870 Drive Electronics............37
6.2.2 Starting Up the Q-522.x4z with the E-871 Controller.......................39
7Maintenance 41
7.1 General Notes on Maintenance..........................................................................41
7.2 Performing a Maintenance Run..........................................................................41
7.3 Cleaning the Q-522 ............................................................................................41
8Troubleshooting 43
9Customer Service 45
10 Technical Data 47
10.1 Specifications......................................................................................................47
10.1.1 Data Table........................................................................................47
10.1.2 Maximum Ratings.............................................................................49
10.1.3 Ambient Conditions and Classifications ...........................................49
10.2 Operating Time...................................................................................................50
10.3 Dimensions.........................................................................................................51
10.3.1 Q-522.00z.........................................................................................51
10.3.2 Q-522.0yz.........................................................................................52
10.3.3 Q-522.10z.........................................................................................53
10.3.4 Q-522.1yz.........................................................................................54
10.3.5 Q-522.20z.........................................................................................55
10.3.6 Q-522.2yz.........................................................................................56
10.4 Pin Assignment...................................................................................................57
10.4.1 Q-522.xy0 (Vacuum-Incompatible)...................................................57
10.4.2 Q-522.xyU (Vacuum-Compatible) ....................................................58
11 Old Equipment Disposal 59
12 EC Declaration of Conformity 61

1 About this Document
Q-522 Miniature Stage MP134E Version: 1.0.1 1
In this Chapter
Goal and Target Audience of this User Manual ............................................................ 1
Symbols and Typographic Conventions........................................................................ 1
Definition........................................................................................................................ 2
Figures........................................................................................................................... 2
Other Applicable Documents......................................................................................... 3
Downloading Manuals................................................................................................... 3
1.1 Goal and Target Audience of this User Manual
This manual contains information on the intended use of the Q-522.
It assumes that the reader has a fundamental understanding of basic servo systems
as well as motion control concepts and applicable safety procedures.
The latest versions of the user manuals are available for download (p. 3) on our
website.
1.2 Symbols and Typographic Conventions
The following symbols and typographic conventions are used in this user manual:
CAUTION
Dangerous situation
If not avoided, the dangerous situation will result in minor injury.
Actions to take to avoid the situation.
NOTICE
Dangerous situation
If not avoided, the dangerous situation will result in damage to the equipment.
Actions to take to avoid the situation.
1
About this Document

1 About this Document
2 Version: 1.0.1 MP134E Q-522 Miniature Stage
INFORMATION
Information for easier handling, tricks, tips, etc.
Symbol/Label Meaning
1.
2. Action consisting of several steps whose sequential
order must be observed
Action consisting of one or several steps whose
sequential order is irrelevant
 List item
p. 5 Cross-reference to page 5
RS-232 Labeling of an operating element on the product
(example: socket of the RS-232 interface)
Warning sign on the product which refers to detailed
information in this manual.
1.3 Definition
Term Explanation
Load capacity Maximum load capacity in the vertical direction when the
stage is mounted horizontally. The contact point of the load is
in the center of the platform.
Linear encoder The linear encoder is an incremental sensor for capturing
changes in position. Signals from the sensor are used for axis
position feedback. After switching on the controller a reference
point definition must be performed before absolute target
positions can be commanded and reached.
1.4 Figures
For better understandability, the colors, proportions and degree of detail in illustrations
can deviate from the actual circumstances. Photographic illustrations may also differ
and must not be seen as guaranteed properties.

1 About this Document
Q-522 Miniature Stage MP134E Version: 1.0.1 3
1.5 Other Applicable Documents
The devices and software tools which are mentioned in this documentation are
described in their own manuals.
Description Document
E-870.10, E-870.11, E-870.21, E-870.41
Piezomotor / PiezoMike Drive Electronics, OEM
Board, 1 to 4 Channels
E870T0001 Technical Note
E-870.1G, E-870.2G, E-870.4G Piezomotor /
PiezoMike Drive Electronics, Bench-Top,
1 to 4 Channels
E870T0002 Technical Note
E-871.1A1 PIShift Controller, 1 Channel,
Linear Encoder PZ241E User Manual
PIMikroMove SM148E Software Manual
1.6 Downloading Manuals
INFORMATION
If a manual is missing or problems occur with downloading:
Contact our customer service department (p. 45).
INFORMATION
For some products (e.g. Hexapod systems and electronics that are delivered with a
CD), access to the manuals is password-protected. The password is stored on the
CD. Availability of the manuals:
Password-protected manuals: FTP download directory
Freely available manuals: PI website
Follow the corresponding instructions for downloading.

1 About this Document
4 Version: 1.0.1 MP134E Q-522 Miniature Stage
Download freely accessible manuals
1. Open the website http://www.pi-portal.ws.
2. Click Downloads.
3. Click the corresponding product category.
4. Go to the corresponding product code.
The available manuals are displayed.
5. Click the desired manual and save it on the hard disk of your PC or on a data
storage medium.
Download password-protected manuals
1. Insert the product CD in the PC drive.
2. Switch to the Manuals directory on the CD.
3. In the Manuals directory, open the Release News (file including releasenews
in the file name).
4. Find the user name and the password in the section "User login for software
download" in the Release News.
5. Open the FTP download directory (ftp://pi-ftp.ws).
−Windows operating systems: Open the FTP download directory in
Windows Explorer.
6. Log in with the user name and the password from the Release News.
7. In the directory of the corresponding product, go to the Manuals sub-directory.
8. Copy the desired manual to the hard disk of your PC or to a data storage
medium.

2 Safety
Q-522 Miniature Stage MP134E Version: 1.0.1 5
In this Chapter
Intended Use ................................................................................................................. 5
General Safety Instructions........................................................................................... 5
Organizational Measures............................................................................................... 6
Measures for Handling Vacuum-Compatible Products ................................................. 6
2.1 Intended Use
The Q-522 is a laboratory device as defined by DIN EN 61010-1. It is intended to be
used in interior spaces and in an environment which is free of dirt, oil, and lubricants.
In accordance with its design and realization, the Q-522 is intended for single-axis
positioning, adjusting and shifting of loads at different velocities in interval operation.
The Q-522 uses a PIShift piezomotor as a drive. When at rest, the drive is self-locking,
requires no current, generates no heat, and maintains its position.
The Q-522 can be mounted in any orientation. The specifications of the Q-522 apply
to horizontal mounting (p. 47).
The Q-522 is not intended for applications in areas in which a failure would present
severe risks to human beings or the environment. For further information on the
operating conditions of the Q-522, see "Technical Data" (p. 47).
Some models of the Q-522 are equipped with a linear encoder for direct position
measurement.
The intended use of the Q-522 is only possible when completely mounted and
connected. The Q-522 must be operated with suitable electronics (p. 14). The
electronics is not included in the scope of delivery of the Q-522.
2.2 General Safety Instructions
The Q-522 is built according to state-of-the-art technology and recognized safety
standards. Improper use can result in personal injury and/or damage to the Q-522.
Only use the Q-522 for its intended purpose, and only use it if it is in a good
working order.
Read the user manual.
2
Safety

2 Safety
6 Version: 1.0.1 MP134E Q-522 Miniature Stage
Immediately eliminate any faults and malfunctions that are likely to affect
safety.
The operator is responsible for the correct installation and operation of the Q-522.
2.3 Organizational Measures
User manual
Always keep this user manual available by the Q-522.
The latest versions of the user manuals are available for download (p. 3) on
our website.
Add all information given by the manufacturer to the user manual, for example
supplements or Technical Notes.
If you pass the Q-522 on to other users, also turn over this user manual as
well as other relevant information provided by the manufacturer.
Only use the device on the basis of the complete user manual. Missing
information due to an incomplete user manual can result in minor injury and
property damage.
Only install and operate the Q-522 after having read and understood this user
manual.
Personnel qualification
The Q-522 may only be installed, started up, operated, maintained and cleaned by
authorized and appropriately qualified personnel.
2.4 Measures for Handling Vacuum-Compatible Products
When handling the vacuum version of the stage, attention must be paid to appropriate
cleanliness. At PI, all parts are cleaned before assembly. During assembly and
measurement, powder-free gloves are worn. Afterwards, the stage is cleaned once
again by wiping and shrink-wrapped twice in vacuum-compatible film.
Only touch the stage with powder-free gloves.
If necessary, wipe the stage clean after unpacking.

3 Product Description
Q-522 Miniature Stage MP134E Version: 1.0.1 7
In this Chapter
Model Overview............................................................................................................. 7
Product View ............................................................................................................... 10
Product Labeling.......................................................................................................... 12
Scope of Delivery ........................................................................................................ 13
Accessories ................................................................................................................. 13
Suitable Electronics..................................................................................................... 14
Technical Features...................................................................................................... 15
3.1 Model Overview
Classification of the Q-522 models
Fifteen standard versions of the Q-522 stage are available. They differ in terms of the
following features:
Travel range
Dimensions
Equipment with a linear encoder:
sensor resolution 1 nm or sensor resolution 4 nm
Suitability for operation in vacuum
Model Travel
range Dimensions Linear encoder present
Vacuum
suitability (to
10-9 hPa)
Q-522.000 6.5 mm 22 mm × 22 mm × 10 mm No No
Q-522.030 6.5 mm 32 mm × 22 mm × 10 mm Yes (4 nm) No
Q-522.040 6.5 mm 32 mm × 22 mm × 10 mm Yes (1 nm) No
Q-522.100 13 mm 22 mm × 32 mm × 10 mm No No
Q-522.130 13 mm 32 mm × 32 mm × 10 mm Yes (4 nm) No
Q-522.140 13 mm 32 mm × 32 mm × 10 mm Yes (1 nm) No
Q-522.200 26 mm 22 mm × 42 mm × 10 mm No No
Q-522.230 26 mm 32 mm × 42 mm × 10 mm Yes (4 nm) No
3
Product Description

3 Product Description
8 Version: 1.0.1 MP134E Q-522 Miniature Stage
Model Travel
range Dimensions Linear encoder present
Vacuum
suitability (to
10-9 hPa)
Q-522.240 26 mm 32 mm × 42 mm × 10 mm Yes (1 nm) No
Q-522.00U 6.5 mm 22 mm × 22 mm × 10 mm No Yes
Q-522.04U 6.5 mm 32 mm × 22 mm × 10 mm Yes Yes
Q-522.10U 13 mm 22 mm × 32 mm × 10 mm No Yes
Q-522.14U 13 mm 32 mm × 32 mm × 10 mm Yes Yes
Q-522.20U 26 mm 22 mm × 42 mm × 10 mm No Yes
Q-522.24U 26 mm 32 mm × 42 mm × 10 mm Yes Yes
Detailed model names
Order
number Product name
Q-522.000 Q-Motion Miniature Linear Stage, 6.5 mm Travel Range, without Position Sensor, for
Open-Loop Operation, 0.6 N Drive Force, Dimensions 22 × 33 × 10 mm (W × L × H),
Piezoelectric Inertia Drive
Q-522.030 Q-Motion Miniature Linear Stage, 6.5 mm Travel Range, Linear Encoder, 4 nm
Resolution, 0.6 N Drive Force, Dimensions 22 × 33 × 10 mm (W × L × H), Piezoelectric
Inertia Drive
Q-522.040 Q-Motion Miniature Linear Stage, 6.5 mm Travel Range, Linear Encoder, 1 nm
Resolution, 0.6 N Drive Force, Dimensions 22 × 33 × 10 mm (W × L × H), Piezoelectric
Inertia Drive
Q-522.100 Q-Motion Miniature Linear Stage, 13 mm Travel Range, without Position Sensor, for
Open-Loop Operation, 0.6 N Drive Force, Dimensions 22 × 33 × 10 mm (W × L × H),
Piezoelectric Inertia Drive
Q-522.130 Q-Motion Miniature Linear Stage, 13 mm Travel Range, Linear Encoder, 4 nm
Resolution, 0.6 N Drive Force, Dimensions 22 × 33 × 10 mm (W × L × H), Piezoelectric
Inertia Drive
Q-522.140 Q-Motion Miniature Linear Stage, 13 mm Travel Range, Linear Encoder, 1 nm
Resolution, 0.6 N Drive Force, Dimensions 22 × 33 × 10 mm (W × L × H), Piezoelectric
Inertia Drive
Q-522.200 Q-Motion Miniature Linear Stage, 26 mm Travel Range, without Position Sensor, for
Open-Loop Operation, 0.6 N Drive Force, Dimensions 22 × 33 × 10 mm (W × L × H),
Piezoelectric Inertia Drive

3 Product Description
Q-522 Miniature Stage MP134E Version: 1.0.1 9
Order
number Product name
Q-522.230 Q-Motion Miniature Linear Stage, 26 mm Travel Range, Linear Encoder, 4 nm
Resolution, 0.6 N Drive Force, Dimensions 22 × 33 × 10 mm (W × L × H), Piezoelectric
Inertia Drive
Q-522.240 Q-Motion Miniature Linear Stage, 26 mm Travel Range, Linear Encoder, 1 nm
Resolution, 0.6 N Drive Force, Dimensions 22 × 33 × 10 mm (W × L × H), Piezoelectric
Inertia Drive
Q-522.00U Q-Motion Miniature Linear Stage, 6.5 mm Travel Range, without Position Sensor, for
Open-Loop Operation, 0.6 N Drive Force, Dimensions 22 × 33 × 10 mm (W × L × H),
Piezoelectric Inertia Drive, Vacuum-Compatible to 10-9 hPa
Q-522.04U Q-Motion Miniature Linear Stage, 6.5 mm Travel Range, Linear Encoder, 1 nm
Resolution, 0.6 N Drive Force, Dimensions 22 × 33 × 10 mm (W × L × H), Piezoelectric
Inertia Drive, Vacuum-Compatible to 10-9 hPa
Q-522.10U Q-Motion Miniature Linear Stage, 13 mm Travel Range, without Position Sensor, for
Open-Loop Operation, 0.6 N Drive Force, Dimensions 22 × 33 × 10 mm (W × L × H),
Piezoelectric Inertia Drive, Vacuum-Compatible to 10-9 hPa
Q-522.14U Q-Motion Miniature Linear Stage, 13 mm Travel Range, Linear Encoder, 1 nm
Resolution, 0.6 N Drive Force, Dimensions 22 × 33 × 10 mm (W × L × H), Piezoelectric
Inertia Drive, Vacuum-Compatible to 10-9 hPa
Q-522.20U Q-Motion Miniature Linear Stage, 26 mm Travel Range, without Position Sensor, for
Open-Loop Operation, 0.6 N Drive Force, Dimensions 22 × 33 × 10 mm (W × L × H),
Piezoelectric Inertia Drive, Vacuum-Compatible to 10-9 hPa
Q-522.24U Q-Motion Miniature Linear Stage, 26 mm Travel Range, Linear Encoder, 1 nm
Resolution, 0.6 N Drive Force, Dimensions 22 × 33 × 10 mm (W × L × H), Piezoelectric
Inertia Drive, Vacuum-Compatible to 10-9 hPa

3 Product Description
10 Version: 1.0.1 MP134E Q-522 Miniature Stage
3.2 Product View
Figure 1: Example of model without linear encoder: Q-522.100 stage
1 Moving platform
2 Ceramic rail of the drive
3 Base body
4 Linear guiding
5 Cable exit for drive connection
Figure 2: Example of model with linear encoder: Q-522.140 stage
1 Case of the linear encoder
2 Ruler of the linear encoder
3 Moving platform
4 Ceramic rail of the drive
5 Base body
6 Linear guiding
7 Cable exit for drive connection
8 Cable exit for sensor connection

3 Product Description
Q-522 Miniature Stage MP134E Version: 1.0.1 11
Figure 3: Example: Stage which is not suitable for operation in a vacuum, equipped with sensor
1 Only with vacuum-incompatible models with sensor: ESD protective cap
2 Connection for drive and sensor; with vacuum-incompatible models:
Sub-D 15 (m) connector, with vacuum-compatible models: Sub-D 15 (f)
connector
3 With vacuum-incompatible models with sensor: Warning sign "Electrostatic
sensitive devices"
4 Type plate p. 12
5 Stage
Figure 4: Direction of motion of the Q-522, shown using the Q-522.100 (left) and Q-522.140 with linear
encoder (right) for examples
The arrow in the figure above shows the positive direction of motion.

3 Product Description
12 Version: 1.0.1 MP134E Q-522 Miniature Stage
3.3 Product Labeling
Figure 5: Type plate of the Q-522: Position of the product labeling (example view)
Figure 6: Q-522: Position of the product labeling (example view)
Position Labeling Description
A 113064246 Serial number (example), individual for
each Q-522
Meaning of the places (counting from left):
1 = internal information,
2 and 3 = manufacturing year,
4 to 9 = consecutive numbers
A Q-522.140 Product name (example), the places after
the point refer to the model
A, B Warning sign "Observe manual!"
A Old equipment disposal (p. 59)

3 Product Description
Q-522 Miniature Stage MP134E Version: 1.0.1 13
Position Labeling Description
A, B CE conformity mark
A WWW.PIMICOS.COM Manufacturer's address (website)
A, C Manufacturer's logo
B Symbol for the protective earth conductor,
marks the protective earth connection of
the Q-522
3.4 Scope of Delivery
The Q-522 is delivered with the following components:
Item ID Components
Q-522 Linear positioning stage as specified in the order (p. 7)
LPS-22.5006
Screw set for mounting the Q-522, consisting of:
2 1.5 m6 x 3 A2 dowel pins ISO 8734
2 M2x6 A2 socket head cap screws ISO 4762
MP134E Manual for Q-522 linear positioning stage
Only with models without sensor which are not suitable for operation in a vacuum:
7202500042-
0015 Adapter cable for connection to the E-870 drive electronics, Sub-D 15 (f) to Mini DIN 4 (m), 0.3 m
Only with models with sensor which are not suitable for operation in a vacuum:
7202500043-
0015 Y-adapter cable for connection to the E-871 controller, Sub-D 15 (f) to HD Sub-D 15 (m) and HD Sub-D 15 (f), 0.3 m
3.5 Accessories
If you need accessories (e.g. vacuum feedthroughs), contact the customer
service department (p. 45).

3 Product Description
14 Version: 1.0.1 MP134E Q-522 Miniature Stage
3.6 Suitable Electronics
Electronics Suitable for
Order number Description Stage without
sensor
Q-522.x00
Q-522.x0U
Stage with
sensor
Q-522.x40
Q-522.x4U
E-870.10 PIShift Piezomotor / PiezoMike
Drive Electronics, 1 Channel,
OEM Board

E-870.11 PIShift Piezomotor / PiezoMike
Drive Electronics, 1 Channel,
OEM Board with Connector
Strip

E-870.1G PIShift Piezomotor / PiezoMike
Drive Electronics, 1 Channel,
Bench-Top Device

E-870.21 PIShift Piezomotor / PiezoMike
Drive Electronics, 2 Channels,
OEM Board with Connector
Strip

E-870.2G PIShift Piezomotor / PiezoMike
Drive Electronics, 2 Channels,
Bench-Top Device

E-870.41 PIShift Piezomotor / PiezoMike
Drive Electronics, 4 Channels,
OEM Board with Connector
Strip

E-870.4G PIShift Piezomotor / PiezoMike
Drive Electronics, 2 Channels,
Bench-Top Device

E-871.1A1 PIShift Controller, 1 Channel,
Linear Encoder 
To order, contact our customer service department (p. 45).

3 Product Description
Q-522 Miniature Stage MP134E Version: 1.0.1 15
3.7 Technical Features
3.7.1 Linear Encoder (Sensor)
Some models of the Q-522 are equipped with an optical linear encoder. For the
encoder resolution, refer to the table in the "Specifications" section (p. 47).
Optical linear encoders measure the actual position directly (direct metrology).
Therefore, errors occurring in the drivetrain, such as nonlinearity, backlash or elastic
deformation, cannot influence the measurement of the position.
3.7.2 Reference Point Switch
The Q-522 models equipped with a sensor have an optical reference point switch.
The commands that use the reference signal are described in the user manual of the
controller and/or in the corresponding software manuals.
3.7.3 ID Chip
Q-522 models with sensor contain an ID chip in the connector.
The following data are stored as parameters on the ID chip:
Information on the stage: Type, serial number, date of manufacture, version of
the hardware
Settings for the sensor: Interpolation rate, corrections of hysteresis as well as
of phase and offset, gain values
When switched on or rebooted, controllers from PI read the data from the ID chip.
For more information on the ID chip recognition, see the manual of the controller used.