Table of Contents
1. About this Document ____________________________________________________________________5
1.1. Objective and Target Audience of this User Manual ________________________________________5
1.2. Symbols and Typographic Conventions __________________________________________________5
1.3. Other Applicable Documents __________________________________________________________5
2. Safety ________________________________________________________________________________6
2.1. Intended Use ______________________________________________________________________6
2.2. General Safety Instructions ___________________________________________________________6
2.3. Warnings and Safety Notices __________________________________________________________6
2.4. Organizational Measures _____________________________________________________________8
3. Product Description _____________________________________________________________________8
3.1. Model Overview and Part Numbering ___________________________________________________8
3.2. Product Features ___________________________________________________________________9
3.3. Product Labeling__________________________________________________________________ 10
3.4. Scope of Delivery _________________________________________________________________ 10
3.5. Accessories & Cables ______________________________________________________________ 10
3.6. Compatible Controllers ____________________________________________________________ 11
4. Technical Features ____________________________________________________________________ 11
4.1. Air Bearing ______________________________________________________________________ 11
4.2. Linear Motor_____________________________________________________________________ 11
4.3. Linear Encoder ___________________________________________________________________ 11
4.4. Stage Lockdown Control (Optional) ___________________________________________________ 11
5. Unpacking and Handling________________________________________________________________ 12
6. Installation __________________________________________________________________________ 13
6.1. Mounting Surface Quality and Preparation _____________________________________________ 13
6.2. Mounting Procedure ______________________________________________________________ 14
6.3. Removing the shipping lock(s) _______________________________________________________ 14
6.4. Air & Vacuum Supply ______________________________________________________________ 15
6.5. Affixing the Payload to the Stage _____________________________________________________ 15
6.6. Connecting the Stage to Protective Earth ______________________________________________ 16