SMC Networks XGTP31 50336 Series User manual

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Doc. no. XG*-OMW0069
Thank you for purchasing SMC product. For appropriate operation of this
product, please read this operation manual thoroughly to understand. Also, refer
to the drawing, product information for structure and specification of this
product. Confirm operating environment is within operating specifications.
Parallel Seal Type Gate Valve
PRODUCT NAME
MODEL / SERIES / PRODUCT NUMBER
XGTP31*-50336-***
SMC Corporation
IN21764

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CONTENTS
Safety Instructions -------------------------- 3pg.
1. Specifications - - - - - - - - - - - - - - - - - - - - - - - - - - 5 pg.
2. How to Order - - - - - - - - - - - - - - - - - - - - - - - - - - 6 pg.
3. Construction / Operation - - - - - - - - - - - - - - - - - - - - - - - - - - 7 pg.
4. Precautions - - - - - - - - - - - - - - - - - - - - - - - - - - 9 pg.
5. Spare Parts - - - - - - - - - - - - - - - - - - - - - - - - - 11 pg.
6. Maintenance - - - - - - - - - - - - - - - - - - - - - - - - - - 11 pg.
7. Troubleshooting - - - - - - - - - - - - - - - - - -- - - - - - - - 12 pg.
Attachment: Maintenance Procedure

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Caution Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or
moderate injury.
Warning Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or
serious injury.
Danger Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious
injury.
Gate Valve
Safety Instructions
These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions
indicate the level of potential hazard with the labels of “Caution,” “Warning” or “Danger.” They are all important
notes for safety and must be followed in addition to International Standards (ISO/IEC)∗1), and other safety
regulations.
*1) ISO 4414: Pneumatic fluid power -- General rules relating to systems
ISO 4413: Hydraulic fluid power -- General rules relating to systems
IEC 60204-1: Safety of machinery-- Electrical equipment of machines (Part 1: General requirements)
ISO 10218-1992: Manipulating industrial robots-Safety
1. The compatibility of the product is the responsibility of the person who designs the equipment or decides its
specifications.
Since the product specified here is used under various operating conditions, its compatibility with specific equipment must be
decided by the person who designs the equipment or decides its specifications based on necessary analysis and test results.
The expected performance and safety assurance of the equipment will be the responsibility of the person who has determined
its compatibility with the product. This person should also continuously review all specifications of the product referring to its
latest catalog information, with a view to giving due consideration to any possibility of equipment failure when configuring the
equipment.
2. Only personnel with appropriate training should operate machinery and equipment.
The product specified here may become unsafe if handled incorrectly. The assembly, operation and maintenance of machines
or equipment including our products must be performed by an operator who is appropriately trained and experienced.
3. Do not service or attempt to remove product and machinery/equipment until safety is confirmed.
1. The inspection and maintenance of machinery/equipment should only be performed after measures to prevent falling or
runaway of the driven objects have been confirmed.
2. When the product is to be removed, confirm that the safety measures as mentioned above are implemented and the power
from any appropriate source is cut, and read and understand the specific product precautions of all relevant products carefully.
3. Before machinery/equipment is restarted, take measures to prevent unexpected operation and malfunction.
4. Contact SMC beforehand and take special consideration of safety measures if the product is to be
used in any of the following conditions.
1. Conditions and environments outside of the given specifications, or use outdoors or in a place exposed to direct sunlight.
2. Installation on equipment in conjunction with atomic energy, railways, air navigation, space, shipping, vehicles, military,
medical treatment, combustion and recreation, or equipment in contact with food and beverages, emergency stop circuits,
clutch and brake circuits in press applications, safety equipment or other applications unsuitable for the standard specifications
described in the product catalog.
3. An application which could have negative effects on people, property, or animals requiring special safety analysis.
4. Use in an interlock circuit, which requires the provision of double interlock for possible failure by using a mechanical
protective function, and periodical checks to confirm proper operation.
Warning

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1.The product is provided for use in manufacturing industries.
The product herein described is basically provided for peaceful use in manufacturing industries.
If considering using the product in other industries, consult SMC beforehand and exchange specifications or
a contract if necessary. If anything is unclear, contact your nearest sales branch.
Safety Instructions
1. The warranty period of the product is 1 year in service or 1.5 years after the product is delivered.
Also, may have specified durability, running distance or replacement parts. Please consult your nearest
sales product branch.
2. For any failure or damage reported within the warranty period which is clearly our responsibility, a
replacement product or necessary parts will be provided. This limited warranty applies only to our
product independently, and not to any other damage incurred due to the failure of the product.
3. Prior to using SMC products, please read and understand the warranty terms and disclaimers noted in
the specified catalog for the particular products.
1.The use of SMC products with production equipment for the manufacture of weapons of mass
destruction (WMD) or any other weapon is strictly prohibited.
2. The exports of SMC products or technology from one country to another are governed by the relevant
security laws and regulation of the countries involved in the transaction. Prior to the shipment of a SMC
product to another country, assure that all local rules governing that export are known and followed.
Caution
Limited warranty and Disclaimer/Compliance Requirements
The product used is subject to the following “Limited warranty and Disclaimer” and “Compliance
Requirements”. Read and accept them before using the product.
Limited warranty and Disclaimer
Compliance Requirements
Safety Instructions Be sure to read the “Handling precautions for SMC Products” (M-E03-3) and
“Operation Manual” before use.

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1. Specifications
Opening size
50mm
×336mm
Operating pressure
Atmospheric pressure
～10-6 Pa
Pilot pressure
0.45
～0.6 MPa
Internal leakage
*1
O
-Ring Material : FKM
6.5
×10-10 Pa m3/sec
O
-Ring Material : Kalrez Ⓡ
6.5
×10-9 Pa m3/sec
Internal leakage at Back
pressure
*1
〈
Back pressure
0.1MPa(abs) or less〉
O
-Ring Material : FKM
6.5
×10-8 Pa m3/sec
O
-Ring Material : Kalrez Ⓡ
6.5
×10-7 Pa m3/sec
External Leakage
*1
6.5
×10-11 Pa m3/sec
Operating temperature
Gate Part
：5～120℃(During bake-out：150℃)
Actuator part
：5～90℃（Except Auto switch）
Fluid
Inert gas
Operating Time
1 sec or less
*2
Auto Switch
D
-A93 （Operating temperature：20～60℃）
Main material of vacuum
part
Seal material
FKM
Mechanical
parts
Bellows :AM350
Gate :A6063
Body :A5052
Bonnet :A6061
Gate Bolt :SUS316
Others :SUS304
Piping size
Rc 1/8
Exhaust direction
Free
End
-Lock (End lock type)
With lock mechanism in opened or FULL seal postion
Cylinder Volume
.2 ℓ
Mounting Direction
Vertical
Mass
* Insert type : 10 kg
* Cassette type (Standard) : 14.5 kg
* Cassette type (Half MESC) :13.5 kg
*1: At normal temperature. Gas permeation is not included.(SMC's inspection conditions)
*2: The period of time from gate open state to clamp after signals comes to solenoid
valve and from gate clam
＜Conditions＞
・Pressure: 0.5MPa
・Pipe length:1m
・Gate Direction: Vertical Upper
・Without Speed Controller
・Solenoid Valve:SY5120-01
・Tube:TU0604

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Number of axes and seal type:
One axis bellows
Parallel seal type slit valve
2. How to order
Symbol Auto Switch Connector
Nil - -
A
D-A93
(2pcs)
Lead wire: 0.5m
C
Multiple connector (AMP)
•
C01630D00610012 made by AMP is recommended for the connector (female
type).
F
D
-sub connector
•
CDE-9SF05 made by HIROSE ELECTRIC CO., LTD
is recommended for the connector (female type).
XGTP 312-50336-1CN
Applicable water size:
For 300mm wafer
Valve type
1. Insert type (Without body)
2. Cassette type (Standard)
3. Cassette type (Half MESC
Opening window size:
50 X 336 mm
Gate seal material
1. FKM
2. Kalrez ® 4790
Kalrez ®is a registered trademark of
DuPont Performance elastomers
End lock
Nil: OPEN / CLOSE
N : None
Auto switch and the
connector (See Table 1)

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Figure 2A Figure 2B Figure 2C
3. Construction / Operation
Bonnet Assembly
Figure 1

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3-1 Operation
Figures 1 and 2B shows the valve in the CLOSED position
•As air pressure is applied to the ports, the gate will move towards the desired position. (OPEN / CLOSE)
•Figure 2A shows the valve in the OPEN position that would permit the transfer of product within the vacuum
environment.
•Figure 2B shows the valve moving upward prior to sealing the gate seal.
•Figure 2C shows the valve in the CLOSED position that would permit processing the product by customer within
vacuum environment.
3-2 Construction
Figures 1 illustrates the basic components that define the Gate valve.
•1. Gate mounts to the shaft and moves up and down to seal the Gate valve
•2. Bellows maintains vacuum in the Gate valve assembly while allowing for vertical motion of the shaft.
•3. O-ring gate is critical seal that contains process gas while sustain specific leak rate for vacuum.
•4. O-ring Body is critical seal that joins the Gate valve assembly to the customer system reactor/chamber.
•5. O-ring Bonnet assembly is critical seal that joins two Gate valve components while maintaining vacuum.
•6. Fixing bolts are specially deigned bolts that mount the gate to the shaft .
3-3 Gate OPEN to CLOSE (Fig2A⇒Fig2C)
•Pressurizing to “CLOSE" side port (exhausting “OPEN" side)
•Verify specified Mpa is maintained with operating range
•System design and peripheral components can impact precision Gate valve performance by altering target
operating pressures.
•Fully completing OPEN / CLOSE cycles are imperative to prevent damaging the valve components such as the End
Lock mechanism.
•Verify specified torques for proper assembly
•Verify fittings and tubing for kinks, twisting, damage, and long runs that might impact performance
•Handle precision Gate valve with care to prevent damage and scratches to prevent vacuum leaks
•Do not remove gate valve from reactor/chamber when the valve is in the closed position.
3-4 Gate CLOSE to OPEN (Fig.2C⇒Fig.2A)
•Pressurizing to "OPEN" port side (exhausting "CLOSE" side)
•Verify specified Mpa is maintained with operating range
•System design and peripheral components can impact precision Gate valve performance by altering target
operating pressures.
•Fully completing OPEN / CLOSE cycles are imperative to prevent damaging the valve components such as the End
Lock mechanism.
•Verify specified torques for proper assembly
•Verify fittings and tubing for kinks, twisting, damage, and long runs that might impact performance
•Handle precision Gate valve with care to prevent damage and scratches to prevent vacuum leaks
•Do not remove gate valve from reactor/chamber when the valve is in the closed position.
3-5 End lock (in case with End Lock)
When the air pressure is suddenly lost during opening and closing of Gate valve, The End lock mechanism will engage.
The valve maintains the location before the air is lost.

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4．Precautions
Caution
4-1. Air piping
Hold the speed controller on the piping port (Rc1/8) lightly and connect the tube. Do not to apply excessive external
force to the fittings. The end lock may not operate correctly without using the two position five port valve.
4-2．Installation
Tighten the bolts gradually and diagonally (star pattern when possible) by constant torque to avoid uneven force to
the bolts. When installing the bonnet assembly and gate, refer to the maintenance procedure for tightening of the
bolts.
•Utilize OPEN condition when Bonnet assembly is installed.
•Avoid scratching critical sealing surfaces during maintenance & installation
•The compression of the O-rings on the user's application should target 0.7 to 0.9mm.
Otherwise, improper compression could result in potential leak path.
•Always use proper torque for fasteners, fittings, bolts, etc.. Otherwise bolt and valve body thread engagement could
create valve damage.
4-3．Disinstallation
OPEN valve prior to removal of Bonnet assembly during maintenance procedures. If Bonnet assembly is removed at
CLOSE condition then Body's threads and critical sealing surfaces could be damaged.
4-4．End lock release
When unlocking the Gate valve that has previously lost air pressure during emergency shut off. First, apply pressure to
the air port that was last energized. The cycle should be finished that was in motion. This completion of cycle that
was not completed during pressure loss is critical to release end lock and switch the solenoid valve.
Example 1: The gate of the valve assembly is closed before shipment, so apply pressure to the closed position first.
Example 2: If the gate is opened, apply pressure to the "open" side of air piping, and switch the valve after
releasing the end lock.
The type of Gate valve design can vary gate configuration during shipment. This is done to protect precision vacuum
components throughout transport.
1. Insert type: Gate is OPEN so please supply the pressure to OPEN port first.
2. With Body type: Gate is CLOSED so supply the pressure to CLOSE port first.
Ignoring these concerns could lock the gate valve assembly, and potentially damaging components.

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4-5．Speed control
Be sure to control speed to open and close the gage in meter out condition. Otherwise, the Gate valve life will
be adversely affected. Improper use of speed controls can damage end-lock mechanism as well as shorten life
time of valve.
4-6．Exhaust piping
Avoid system designs that combine additional solenoid valves to the Gate valve. The added exhaust pressures from
other solenoid valves may cause improper operation of the end lock mechanism.
4-7．Operation of valve
1) Please confirm in regulated differential pressure of 4kPa and during the opening and shutting operation of the
valve. OPEN / CLOSE
2) Incase the Body (Chamber) and Gate are heated and cooling gradually from High Temperature to Room
temperature then please make OPEN condition. If it is cooling at CLOSE condition then Gate O -ring
could become stuck and when operated to OPEN condition. This condition will pull out the O-ring
Warning
3) Maintain and monitor specified operating pressure range of Gate valve. System design can change over time
providing Over/Under pressurization. The internal components could be damaged by improper pressure.
4) Do not put your hands near moving components or into the opening of the body without confirming safety. The
closing forces will cause injury and bodily harm if the valve is operated.
5) Do not remove the Cover on the actuating part. The cover shields internal components while the Gate valve is
operating prevent injury.
6) Remove the pneumatic tubing from valve operation and confirm cylinder has no pressure prior to maintenance.
Be aware of your system design and latent energy stored to prevent accidental actuation. These steps will ensure
that stored energy is removed. Additionally, pneumatic lines disconnected could create a potential hazard if
energized.
Caution
4-8．Replacement of O-ring
Use the parts shown on “4. Replacement parts list” when replacing bonnet assembly, Gate and O-rings for a gate.
Give sufficient cleaning to O-ring groove and mount O-ring in gland avoiding twisting. Use a plastic specific tool so as
not to damage sealing surface of the O-ring groove. Refer to the maintenance manual for details. After replacement,
confirm vacuum by leak inspection.
Warning
4-9．Return of Product
Vacuum products must be decontaminated prior to returning to SMC. The substances used in process application
must be identified with certified removal of contaminants. The return authorization number will only be provided
after the decontamination form has passed evaluation. The decontamination form is submitted by Product Return
Request Sheet or Detoxification/Decontamination certificate to SMC and await return contact from SMC before
returning the item to SMC. Please refer to International Chemical Safety Cards (ICSC) for a list of the harmful
substances. If you have any questions, please contact your SMC sales representative.

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5．
Spare Parts List
For XGTP312
-50336-***
Description
Orderable Part No.
Applicable Part No Note
Body Assembly
XGT300
-1-1AS XGTP312-50336-*** -
For XGTP313
-50336-***
Description
Orderable Part No.
Applicable Part No Note
Body Assembly
XGT300
-1-1-3AS XGTP313-50336-*** -
Common Spare Parts List
Description Orderable Part No. Applicable Part No Note
Bonnet Assembly
XGTP311-50336A1-1*
XGTP31* -50336-1**
or
XGTP31*-50336-2**
-
XGTP311
-50336A1-
1A*
XGTP31* -50336-* A* -
XGTP311
-50336A1-
1C*
XGTP31* -50336-* C* -
XGTP311-50336A1-1F* XGTP31* -50336-* F* -
Gate Assembly
XGTP300-2-1S XGTP31* -50336-*** -
Bellows Assembly
XGTP300-20AS XGTP31* -50336-*** -
O
-Ring (Body opening side) FKM XGT300-9-10S XGTP31* -50336-*** AS568-273
O
-ring (Gate)
FKM XGT300-9-9S XGTP31* -50336-1**
AS568-271
Kalrez Ⓡ
4079 XGT300-9-11S XGTP31* -50336-2**
O
-Ring (Bonnet Assembly) FKM XGT300-9-7S XGTP31* -50336-*** AS568-177
Gate Bolt
XGT300-2-5S XGTP31* -50336-*** -
How to order for Bonnet Assembly
XGTP311-50336A1- 1 * *
Connected connector of Auto switch (Female type)
Description Orderable Part No. Applicable Part No Note
Straight plug XGT0402-9-12S
For XGTP31*
-50336-
* C*
C016 30D006 100 12(AMP)
6. Maintenance
Without Gate
Auto switch and the connector
(See Table 1)
End Lock
Nil: OPEN/CLOSE end lock
N : None
Warning
Please refer to the attached “ Procedure for maintenance”

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7.
Troubleshooting
Status
Possible Cause
Countermeasure
Gate Internal
Leakage
Operating pressure is too low
Increase pressure to 0.45MPa or more
Foreign materials on Seal surface
Cleaning the Seal Surface
Scratches on the seal surface of Gate
Replace Gate
Scratches on the seal surface of Body
Replace Body
Deterioration of O
-ring by process exposure
Replace with new O
-ring whose material
compatible with process environment
Twist of O
-ring
Re
-install O-ring
Come off of O
-ring
Re
-install O-ring
Peeling off of O
-ring
Replace O
-ring
Concave/Convex of end of O
-ring
Place the convex part into the groove to
make O
-ring height the same
Deterioration of Bonnet assembly
Replace Bonnet assembly
External Leakage
Damage of Bellow assembly
Replace Bellows assembly
Deterioration of O
-ring by processing
Replace with new O
-ring whose material
compatible with process environment
Scratches on the seal surface
Polish of seal surface
Gate is not CLOSING
End lock operation lock
Please refer to 4
-4
Deterioration of Bonnet assembly
Increase pressure to 0.45MPa or more
Deterioration of Bonnet assembly
Replace Bonnet assembly
Gate is not OPENING
End lock operation lock
Please refer to 4
-4
Operating pressure is too low
Increase pressure to 0.45MPa or more
Deterioration of Bonnet assembly
Replace Bonnet assembly
Auto
-switch not
working
Displacement of Auto
-switch
Adjust the location to detect range
Failure of Auto
-switch
Replace Auto
-switch
Operating pressure is too low
Increase pressure to 0.45MPa or more
Bonnet assembly air
leakage
Loosening of connections
Replace Bonnet assembly
Wear on piston seal
Replace Bonnet assembly

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Step 1. Remove Body/Cassette
Appendix Procedure for maintenance
1) Pneumatically open gate valve 2) Loosen bolts at bonnet assembly (8pcs)3) Remove bonnet assembly from body
Step 2. Remove Gate
1) Remove gate bolts (2pcs) 2) Carefully remove gate from shaft
Shaft
Gate
Gate Bolts
Gate Open
Bolts (8pcs)

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Bellows replacement can only be performed after “1. Removal of body “ and “ Removal of gate”
1) Remove side plate assembly
Remove screws (8pcs) mounting the side plate
assembly.
•Perform Step 1 & Step 2 prior to removing side
plate assembly. (Body and gate)
•Remove all pneumatics lines prior to performing
work.
2) Remove lever assembly
Remove bellows clips (2pcs) and mounting bolts (2pcs)
and remove lever assembly.
•Use wrench to hold piston rod stable to prevent
rotation. (10mm)
•Maintain proper orientation of washer and thrust
washer during disassembly.
3) Remove bellows assembly
Remove bellows clamps (2pcs) on Lever assembly.
•The bellows should be handled carefully, and
cleaned with clean room grade wipes (Alpha
wiper: equivalent to Tex wipe) and alcohol.
(ethanol 1 grade)
Screws (8pcs.
both sides)
Step 3. Replace bellows assembly
Side plate assembly
Bellows clip
Bolts
Bellows clip
Mounting bolts
for Bellows clip
Mounting bolts
Piston rod
Flat width
(10mm)
Cross-section of piston rod
Washer
Thrust washer
Bellows assembly Shaft
Seal surface
Seal surface
Seal surface
Bellows clamp and bolts
Lever assembly
Bellows
assembly
O-ring
As568-129V
O-ring AS568-131V
Bellows clamp and bolts

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4) Install bellows assembly
Step 1) Wipe off the seal surface of bellows assembly
and o-ring with clean room grade cloth and alcohol.
(ethanol grade 1) Confirm no particulate
Step 2) Install bellows assembly and Lever assembly.
Step 3) Bellows clamps (2pcs) are installed to the
groove with mounting bolts.
- The bellows clamp should not protrude from Lever
- Tighten 4pcs bolts gradually alternating sequence
Tightening torque: 1.5+/- 0.1 Nm
Bellows replacement can only be performed after “1. Removal of body “ and “ Removal of gate”
5) Install Lever assembly
Step 1) Mounting Lever assembly
- Fit into Guide groove and Cam follower
- Ensure that Guide bushings are in place (4pcs)
- Piston rods must be extended to interface with counter bore
- Ensure orientation of washer and O-ring
Step 2) Install Bellows clips
- Attach Bellows clips to Bellows assembly by mounting bolts
- Bellows is located in Bonnet assembly by mounting bolts
- Ensure that Bellows assembly is secured at collar
Tightening torque: 3.0 +/- 0.3 Nm
Step 3) Attach Lever assembly to Piston rods
- Utilize wrench to secure width across Piston Rod (10mm) to not allow Piston rod rotation when tightened
- Tightening torque: 12.5+/- 1.2 Nm
Step 3. Replace bellows
The bellows clamps
should not protrude
from the Lever assembly
Bellows assembly
Shaft
Bellows clamps are installed
into bellows flange
Lever assembly
O-ring AS568-129V
O-ring AS568-131V
Bellows clamp and bolts (4 pcs)
Tightening torque: 1.5 +/- 0.1 Nm
O-ring –Ensure included
Guide bushings (4pcs)
Mounting bolts
Bonnet
Width across
bolt (10mm)
Piston Rod
Washer
Thrust washer
Rounded surface
Concave side
Groove for bellows clip
Bellows clip Mounting bolts
Thrust Washer –Ensure
proper orientation
Washer –Ensure proper
orientation
Washer –Ensure included
Cross-section of
Piston Rod

16
Install side plate assembly from the bottom side and tighten by screws. (8pcs)
Remove screws (8pcs) mounting the side plate assembly.
•Confirm that the counter bore on Shaft and Name place are facing the same
direction.
•Install side plate assembly to mounting surface of valve
•Tightening torque: 0.63Nm
Step 4. Install side plate assembly
Screws (8pcs)
Side plate assembly
Name plate side
Procedure for replacing Gate O-ring
1. Remove O-ring from Gate and wipe off the dust, dirt, etc.. Additionally clean
O-ring groove with clean room grade alcohol and wipes. (ethanol grade 1)
(Alpha wiper equivalent)
Careful handling is critical to prevent scratches and dents to seal surface of O-ring
groove. Note: When removing O-ring use resin O-ring pick or resin tweezers to
avoid scratching the seal surfaces.
2. Clean new O-ring with alcohol (ethanol grade 1) to remove particulate
3. Examine valve, sealing surface, and O-ring groove for scratches or damage.
Reference sequence below when installing new O-ring. It is critical to install
slowly with precision to avoid twisting and O-ring parting line interfering with
sealing surface.
Step 5. Replace Gate O-ring
Clean room Cloth
(Alpha wiper or equivalent
Clean room Alcohol
(ethanol grade 1)

17
1) Wipe off O-ring between Body and Bonnet assembly then install
Bonnet assembly to Body.
•Critical to verify that the o-ring has remained seated within the
o-ring groove.
2) Tighten Bolts (8pcs)
Tightening torque: 17.5 +/-2 Nm
Step 6. Install Gate
1) Mounting Gate to Shaft
•Confirm proper orientation of gate when installing on shaft.
•(Reference groove for Gate O-ring)
2) Attach Gate by Gate mounting bolts (2pcs)
Tightening torque: 3.6 +/- 0.3 Nm
Step 7. Install Body
Bonnet assembly
Bolts (8pcs)
O-ring
Body
Gate
Gate Bolts
Shaft
Gate
Groove