Zeiss 200-mm airlock User manual

200-mm airlock
Optional airlock for field emission
scanning electron microscopes
Instruction Manual
Carl Zeiss Microscopy - Electron and Ion Beam Microscopy
Enabling the Nano-Age World®

200-mm airlock
Optional airlock for eld emission scanning electron microscopes
Original instructions
Carl Zeiss Microscopy GmbH
Carl-Zeiss-Promenade 10
07745 Jena, Germany
[email protected]
www.zeiss.com/microscopy
Carl Zeiss Microscopy GmbH
Carl-Zeiss-Straße 22
73447 Oberkochen, Germany
© by Carl Zeiss Microscopy GmbH
Document name: Instruction Manual 200-mm airlock
Revision: en01
Effective from: June 2012
346054-8005-000
This document or any part of it must not be translated, reproduced or transmitted in any form or by any means,
electronic or mechanical, including photocopying, recording, or by any information or retrieval system. Violations will be
prosecuted.
The use of general descriptive names, registered names, trademarks, etc. in this document does not imply, even in the
absence of a specic statement, that such names are exempt from the relevant protective laws and regulations and
therefore free for general use.
Software programs will fully remain the property of Carl Zeiss Microscopy. No program, documentation or subsequent
upgrade thereof may be disclosed to any third party, unless prior written consent of Carl Zeiss Microscopy has been
procured to do so, nor may they be copied or otherwise duplicated, even for the customer’s internal needs apart from a
single back-up copy for safety purposes. Due to an ongoing process of improvement Carl Zeiss Microscopy reserves the
right to make modications of this document without notice.

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Table of contents
1. About this manual................................................................................. 4
2. Safety summary..................................................................................... 6
2.1. Intended use.............................................................................................. 6
2.2. Prevention of accidents and improper use ............................................ 6
2.3. Safety devices........................................................................................... 7
2.3.1. Interlocks .........................................................................................................7
2.3.2. Error LED ........................................................................................................7
3. Description............................................................................................. 8
3.1. Overview.................................................................................................... 8
3.2. Control panel............................................................................................. 9
3.3. Technical data......................................................................................... 10
3.4. Principle of operation............................................................................. 11
3.5. Customer service.................................................................................... 13
4. Installation ........................................................................................... 13
5. Operation ............................................................................................. 14
5.1. Easily changing the specimen by using airlock macros..................... 14
5.2. Changing the specimen without using airlock macros....................... 20
5.3. Storing specimens in the airlock........................................................... 23
5.4. Removing the airlock rod....................................................................... 24
5.5. Mounting the airlock rod........................................................................ 25
6. Maintenance and Repair..................................................................... 26
6.1. Troubleshooting...................................................................................... 26
6.2. Cleaning the airlock................................................................................ 28
6.3. Lubricating the airlock rod..................................................................... 28
6.4. Parts......................................................................................................... 29
7. De-installation and disposal............................................................... 29
8. Directives and standards.................................................................... 29
9. Index..................................................................................................... 30

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1. About this manual
This instruction manual is considered to be part of the optional 200-mm airlock.
Read the instructions carefully. Keep the instruction manual nearby the 200-mm airlock and hand
it over to future owners of the instrument.
This instruction manual is designed for users who have been trained by an authorised Carl Zeiss
Microscopy expert to operate the FESEM, the 200-mm airlock is built in.
Operators must not deviate from the instructions provided in this document.
For details on the FESEM refer to the instruction manual of the FESEM.
Safety
instructions The safety instructions in this manual are classified as follows:
CAUTION
This safety symbol and signal word indicates a potentially hazardous situation.
Disregarding this warning MAY result in minor or moderate injury.
CAUTION
This signal word used without a safety symbol indicates a potentially hazardous situation.
Disregarding this warning MAY result in property damage.
Moreover, you will find the following type of information:
IMPORTANT
This symbol and signal word draws your attention to important and useful
information.

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Typographical
conventions For the description of software, the following typographical conventions are used:
Definition of
terms The following terms are used in this instruction manual:
Typography Meaning
Push <ENTER>. Push the ENTER key on the keyboard.
Type <key1, key2> Type key 1 first, then type key 2 on the keyboard.
Type <Ctrl + Alt + Del>. Simultaneously type CTRL key, ALT key and DEL
key on the keyboard.
Click on the High voltage icon.
Select Aperture size from the drop-down list. Icons, buttons and drop-down menus are printed in bold.
Select Aperture size 30 µm.
Set FIB Fil V Target to zero.Values to be selected are printed in italics.
Text Meaning
Click... Press the left mouse button.
Right-click... Press the right mouse button.
Double-click.... Click on the left mouse button twice.
FESEM Field emission scanning electron microscope
SmartSEM®Operating software for ZEISS field emission scanning electron mico-
scopes
Carl Zeiss Microscopy serv-
ice engineer, NTS/S service
staff
Specially trained service expert, either Carl Zeiss Microscopy staff or
authorised service partner of Carl Zeiss Microscopy.
Operator A trained person, who is assigned to operate the FESEM.
Basic operator:
Person who has been trained to perform fundamental operation
sequences
Specially trained operator:
Electrically skilled person who has been trained to perform basic main-
tenance tasks
EHT Acceleration voltage (extra high tension)
LED Light emitting diode

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2. Safety summary
2.1 Intended use
The 200-mm airlock is an accessory option for the following ZEISS FESEM models:
•ULTRA plus, ULTRA 55
•SUPRA®, 40, 55, 55VP
•MERLIN® , MERLIN® compact, MERLIN® compact VP
•AURIGA®, AURIGA®60, AURIGA®compact
The 200-mm airlock allows you to quickly transfer the specimen into the specimen chamber with-
out breaking the system vacuum.
The use of the airlock minimises possible contamination of the specimen chamber and reduces
pumping times thus speeding up the specimen exchange procedure.
Using the 200-mm airlock for any other purpose is not allowed and could be hazardous.
2.2 Prevention of accidents and of improper use
CAUTION
Risk of injury or property damage due to improper operation of the option.
Read the user documentation carefully.
Do not operate the option until you have completely read and understood this instruction
manual.
CAUTION
Risk of property damage due to improper maintenance, service, or repair.
The warranty might be voided.
Follow the instructions given in this instruction manual.
IMPORTANT
All pursuing tasks of maintenance, service, and repair not described in this instruction
manual have to be performed by authorised Carl Zeiss Microscopy service staff only.

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2.3 Safety devices
In order to prevent any risk of hazard to human health or to property, the FESEM with 200-mm
airlock is equipped with several safety and protective devices.
2.3.1 Interlocks
In addition to the interlock system of the FESEM, a second interlock system is integrated in the
airlock to ensure that the gate valve cannot be moved if either the chamber door or the airlock
door is open.
The gate valve can be operated only
•when chamber door and airlock door are closed properly,
•when the airlock rod is retracted and
•when the specimen stage is in transfer position.
This is to prevent any risk of damaging the airlock rod or the gate valve.
Opening the gate valve is only possible, when the EHT is off and the column chamber valve is
closed.
2.3.2 Error LED
An error LED is included in the control panel on the front of the 200-mm airlock. The light of the
error LED indicates an error state, detected by the airlock interlock system.

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3. Description
3.1 Overview
1 Control panel 5 Viewing window
2 Push button with integrated LED 6 Airlock rod
3LED 7Knob
4 Airlock door 8 Airlock handle
1
2
3
45
6
7
8

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3.2 Control panel
Push buttons (left)
•Transfer
Evacuates the airlock and opens the gate
valve.
Precondition: Stage is in transfer position, air-
lock rod is retracted.
Stage Ready LED lights permanently.
Transfer mode is used to insert the specimen
from the airlock into the specimen chamber of
the FESEM.
•Store
Maintains the vacuum in the airlock while air-
lock door and gate valve remain closed.
The Store LED is flashing until the required
vacuum is achieved in the airlock.
Storemodeis used to keep a specimen that is
already located in the airlock under vacuum.
Moreover, this mode is selected to leave the
airlock when not in use.
•Vent
Closes the gate valve and ventilates the air-
lock.
Vent mode is used to load the specimen into
the airlock.
Each push button also contains a LED.
If the LED is flashing, the state, selected by press-
ing the push button, is not achieved yet.
If the LED lights permanently, the state selected
by pressing the push button, has been achieved.
LED (right)
•Stage Ready
Indicatesthatthestageis inthepositionready
to transfer the specimen.
•Rod Retracted
Indicates that the airlock rod is completely
withdrawn.
•Door Open
Indicates that chamber door or airlock door is
open.
•Error
Indicates an error.

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3.3 Technical data
•Gate valve
Separates airlock chamber from the specimen chamber.
Diameter: 50 mm x 213 mm
Driven pneumatically.
If the gate valve is open, the interior of airlock and specimen chamber is illuminated.
•Airlock rod
Consists of two rods (one rotatable, one stationary), which allows positioning the sample
holder equipped with specimens without visual control.
Airlock rod is removable. Blind plug for sealing the orifice in the airlock door and rack for stor-
age of the airlock rod and/or the blind plug delivered with the airlock.
•Control
Fully integrated in the SmartSEM®software. Alternatively, control via control panel is possi-
ble.
•Maximum pumping time: 45 seconds
Ventilated with gaseous nitrogen
•Suitable for all ZEISS standard sample holders except for wafer holders and mask holders.
The 200-mm airlock is labelled with a type plate.
The type plate is located at the bottom of the
airlock.
3.4 Principle of operation
The 200-mm airlock is an evacuatable chamber (1)
installed at the specimen chamber (6) of the FES-
EM. The gate valve (4) separates the airlock from
the specimen chamber, whereas the airlock door (2) separates it from the atmosphere.
Environmental requirements
Ambient Temperature approx. 21°C +/-4°C
Stability 0.5 °C/h
Relative humidity Less than 65%
Altitude Maximum 2000 m above sea level.
Pollution degree 2
Electrical supplies
Nominal DC voltage 24V DC
Current consumption max. 1 A

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Fig. 1.1: Schematics of the vacuum system with 200-mm airlock
The 200-mm airlock allows you to introduce a specimen (3) while the vacuum of the specimen
chamber is maintained. As soon as the airlock chamber is evacuated, the gate valve can be
opened. The specimen is transferred into the specimen chamber by using the airlock rod.
Since the volume to be evacuated during specimen exchange is significantly smaller than that of
the whole specimen chamber, the pumping time will be reduced noticeably. Moreover, the risk of
contaminating the specimen chamber is minimised.
The vacuum in the airlock is measured by a Pirani gauge.
1 Airlock chamber 5 Specimen stage
2 Airlock door 6 Specimen chamber
3 Specimen 7 Column chamber valve
4 Gate valve 8 Gun head area
1
5
2
3
4
7
6
8

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In general, you can distinguish the following operation sequences:
Operation Sequence Schematics
Locking in a specimen Loading the airlock chamber
Transferring the specimen
from the airlock chamber into
the specimen chamber
Locking out a specimen Transferring the specimen
from the specimen chamber
into the airlock chamber
Unloading the airlock cham-
ber

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3.5 Customer service
For customer service, contact your local Carl Zeiss Microscopy service engineer.
A list of Carl Zeiss Microscopy locations and authorised service partners can be found at:
http://www.zeiss.com/microscopy
4. Installation
The 200-mm airlock is either factory-installed or retrofitted by authorised Carl Zeiss Microscopy
service staff.
Storing specimens Inserting the specimen into
the airlock chamber
Changing to store mode
Operation Sequence Schematics

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5. Operation
5.1 Easily changing the specimen by using airlock macros
The following procedure uses pre-defined airlock macros to simplify the specimen exchange.
It is assumed that a specimen is located in the specimen chamber. It is to be exchanged for an-
other specimen.
Locking out
the specimen 1 Select Tools/Goto Panel from the menu.
2 Double-click on Airlock.
The Airlock panel opens.
3 Click on Specimen Change.
ClickingontheSpecimen Change button starts a
pre-defined macro that includes the following
steps:
- The EHT is switched off.
- The column chamber valve is closed in order to
separate gun head area and specimen chamber.
- The specimen stage is driven to the transfer
position.
- The airlock is evacuated.
- The gate valve opens.
- The illumination is turned on in the airlock cham-
ber.
IMPORTANT
The airlock macros can be modified according to your individual requirements.
Contact your local Carl Zeiss Microscopy service engineer for assistance.

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4 Transferthesampleholderfromthespecimen
chamber into the airlock by using the airlock
rod:
a Insert the airlock rod.
b Turn the knob clockwise in order to attach
the sample holder to the airlock rod.
c Retract the airlock rod.

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5 Change to Vent mode:
On the control panel, press Vent.
Alternatively:
On the Airlock panel, click on Vent.
The gate valve is closed.
The airlock chamber is ventilated with nitrogen.

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Unloading/
loading the
airlock 6 Take hold of the airlock handle (1) and open
the airlock door.
7 Exchange the specimen.
In case you wish to exchange the whole sample
holder:
a Detach the sample holder from the airlock
rodbyturningthe knob counter-clockwise.
b Remove the sample holder from the
dovetail.
c Mount the exchange sample holder onto
the dovetail.
Ensure that the airlock rod mount (2) is
facing the threaded rod.
d Attach the sample holder to the airlock
rod by turning the knob clockwise.
1
2

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Locking in the
specimen 8 Change to Transfer mode:
On the control panel, press Transfer.
Alternatively:
Click on Transfer on the Airlock panel.
The airlock is evacuated.
The gate valve opens.
The illumination is turned on in the airlock chamber.
9 Transfer the sample holder from the airlock
into the specimen chamber by using the air-
lock rod:
a Insert the airlock rod into the specimen
chamber.
The sample holder is introduced into the dovetail
at the specimen stage.
b Turn the knob counter-clockwise in
order to detach the sample holder from
the airlock rod.

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10 Retract the airlock rod.
11 Click on Resume Exchange.
Clicking on Resume Exchange starts a pre-de-
fined macro that includes the following steps:
- The gate valve is closed.
- The column chamber valve opens.
IMPORTANT
The airlock macros can be modified according to your indivdual requirements.
Contact your local Carl Zeiss Microscopy service engineer for assistance.
12 Switch on the EHT.
13 Continue working with the FESEM.
5.2 Changing the specimen without using airlock macros
The following proceduredescribes how to manually perform the steps that are included in the air-
lock macros.
It is assumed that a specimen is located in the specimen chamber. It is to be exchanged for an-
other specimen.
Locking in the
specimen 1 Switch off the EHT.
2SelectTools/Goto Panel from the menu.
3 Double-click on Airlock.

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The Airlock panel opens.
4 Click on Close Column Chamber Valve.
The column chamber valve is closed to separate
gun head area and specimen chamber.
CAUTION
Risk of damaging FESEM or specimen if specimen stage is at a short working distance.
Ensure there is enough space between objective lens and specimen before moving the
specimen stage.
5 Move the specimen stage to the transfer position ($Exchange):
a Select Stage Points List from the Panel Configuration Bar.
b Double-click on $Exchange.
The specimen stage is driven to the transfer position.