Agilent Technologies IDP 10 User manual

DRAFT 1/13/17
Vacuum Products Division
INSTRUCTION MANUAL
IDP-10
Dry Scroll
Vacuum Pump
Manual No. X3810-90000
Revision B
January 2017

DRAFT 1/13/17
Copyright 2017
Agilent, Inc.
IDP-10
Dry Scroll Vacuum Pump
Slo-Blo and Littelfuse are registered trademarks of Littelfuse, Inc.

iii
IDP-10 Dry Scroll Vacuum Pump
DRAFT 1/13/17
Warranty
Products manufactured by Seller are warranted against
defects in materials and workmanship for twelve (12)
months from date of shipment thereof to Customer, and
Seller's liability under valid warranty claims is limited, at
the option of Seller, to repair, to replace, or refund of an
equitable portion of the purchase price of the Product.
Items expendable in normal use are not covered by this
warranty. All warranty replacement or repair of parts shall
be limited to equipment malfunctions which, in the sole
opinion of Seller, are due or traceable to defects in origi-
nal materials or workmanship. All obligations of Seller
under this warranty shall cease in the event of abuse,
accident, alteration, misuse, or neglect of the equipment.
In-warranty repaired or replaced parts are warranted only
for the remaining unexpired portion of the original war-
ranty period applicable to the repaired or replaced parts.
After expiration of the applicable warranty period, Cus-
tomer shall be charged at the then current prices for parts,
labor, and transportation.
Reasonable care must be used to avoid hazards. Seller
expressly disclaims responsibility for loss or damage
caused by use of its Products other than in accordance
with proper operating procedures.
Except as stated herein, Seller makes no warranty,
expressed or implied (either in fact or by operation of
law), statutory or otherwise; and, except as stated herein,
Seller shall have no liability under any warranty,
expressed or implied (either in fact or by operation of
law), statutory or otherwise. Statements made by any per-
son, including representatives of Seller, which are incon-
sistent or in conflict with the terms of this warranty shall
not be binding upon Seller unless reduced to writing and
approved by an officer of Seller.
Warranty Replacement
and Adjustment
All claims under warranty must be made promptly after
occurrence of circumstances giving rise thereto, and must
be received within the applicable warranty period by
Seller or its authorized representative. Such claims should
include the Product serial number, the date of shipment,
and a full description of the circumstances giving rise to
the claim. Before any Products are returned for repair
and/or adjustment, written authorization from Seller or its
authorized representative for the return and instructions
as to how and where these Products should be returned
must be obtained. Any Product returned to Seller for
examination shall be prepaid via the means of transporta-
tion indicated as acceptable by Seller. Seller reserves the
right to reject any warranty claim not promptly reported
and any warranty claim on any item that has been altered
or has been returned by non-acceptable means of trans-
portation. When any Product is returned for examination
and inspection, or for any other reason, Customer shall be
responsible for all damage resulting from improper pack-
ing or handling, and for loss in transit, notwithstanding
any defect or non-conformity in the Product. In all cases,
Seller has the sole responsibility for determining the cause
and nature of failure, and Seller's determination with
regard thereto shall be final.
If it is found that Seller's Product has been returned with-
out cause and is still serviceable, Customer will be noti-
fied and the Product returned at the Customer's expense;
in addition, a charge for testing and examination may be
made on Products so returned.

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IDP-10 Dry Scroll Vacuum Pump
DRAFT 1/12/17
Contents
Warranty . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . iii
Warranty Replacement and Adjustment. . . . . . . . iii
Instructions for Use . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
General Information . . . . . . . . . . . . . . . . . . . . . . . 1
Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
EMC Warnings . . . . . . . . . . . . . . . . . . . . . . . . 2
Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
Use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
User Interface . . . . . . . . . . . . . . . . . . . . . . . . . 4
Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
Protection Features . . . . . . . . . . . . . . . . . . . . . . . . 5
Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
Environmental Conditions, Compliance and Utility
Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
Environmental Conditions . . . . . . . . . . . . . . . 7
Electromagnetic Compatibility . . . . . . . . . . . . 7
South Korean Class A EMC declaration . . . . . 7
ICES/NMB-001 . . . . . . . . . . . . . . . . . . . . . . . . 7
Instructions d'utilisation . . . . . . . . . . . . . . . . . . . . 8
Informations générales . . . . . . . . . . . . . . . . . . 8
Conditionnement . . . . . . . . . . . . . . . . . . . . . . 8
Avertissements CEM . . . . . . . . . . . . . . . . . . . . 9
Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
Utilisation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
Interface de l'utilisateur . . . . . . . . . . . . . . . . 10
Opération . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
Fonctions de protection . . . . . . . . . . . . . . . . . . . 12
Entretien . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
Mise au rebut . . . . . . . . . . . . . . . . . . . . . . . . 12
Technical Information . . . . . . . . . . . . . . . . . . . . . 13
Unpacking and Inspection . . . . . . . . . . . . . . . . . 15
Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
Startup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
Electrical Connections . . . . . . . . . . . . . . . . . 17
Start Current . . . . . . . . . . . . . . . . . . . . . . . . . 18
Mechanical Connections . . . . . . . . . . . . . . . 19
Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
Cleaning the Pump . . . . . . . . . . . . . . . . . . . . 20
Startup Procedure . . . . . . . . . . . . . . . . . . . . . 20
Shutdown Procedure . . . . . . . . . . . . . . . . . . 20
Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . 21
Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
Kits and Service Options . . . . . . . . . . . . . . . 22
Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
Tip Seal Replacement . . . . . . . . . . . . . . . . . . 22
Request for Return Health and Safety Certification
List of Figures
Figure Caption Page
1 DSUB9 Pin Connections . . . . . . . . . . . . . . . . 4
2 RPM. vs. 0-10 V Speed Control Signal. . . . . . 4
3 Raccordements des broches DSUB9 . . . . . . 10
4 Outline Drawing with Dimensions . . . . . . . 14
5 Pumping Speed Curves . . . . . . . . . . . . . . . . 14
6 Outline Drawing and Principal Items . . . . . 15
7 Feet Label . . . . . . . . . . . . . . . . . . . . . . . . . . 15
8 Gas Ballast . . . . . . . . . . . . . . . . . . . . . . . . . 19
9 ON/OFF Power Switch . . . . . . . . . . . . . . . . 20
10 Exploded View of Pump Body . . . . . . . . . . 23
List of Tables
Table Title Page
1 Impedance Characteristic . . . . . . . . . . . . . . . 2
2 DSUB9 Pin Connections . . . . . . . . . . . . . . . . 4
3 Caractéristique de l'impédance . . . . . . . . . . . 8
4 Raccordements des broches DSUB9 . . . . . . 10
5 Specifications . . . . . . . . . . . . . . . . . . . . . . . 13
6 IDP-10 Power Cord Selection . . . . . . . . . . . 18
7 Typical IDP-10 Maximum Starting
Current (A) . . . . . . . . . . . . . . . . . . . . . . . . . 18
8 Troubleshooting Chart. . . . . . . . . . . . . . . . . 21
9 Accessories and Replacement Kits. . . . . . . . 22
10 Service Options. . . . . . . . . . . . . . . . . . . . . . 22

IDP-10 Dry Scroll Vacuum Pump
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1
IDP-10 Dry Scroll Vacuum Pump
DRAFT 1/13/17
Instructions for Use
General Information
This equipment is designed for use by trained personnel.
The user should read this instruction manual and any
other additional information supplied by Agilent before
operating the equipment. Agilent will not be held respon-
sible for any events that occur due to non-compliance
with these instructions, improper use by untrained per-
sons, non-authorized interference with the equipment, or
any action contrary to that provided for by specific
national standards.
The IDP-10 is a hermetic, dry scroll vacuum pump. This
pump is suitable for pumping air or inert gases. The pump
is not intended to pump corrosive, explosive, or particu-
late-forming gases.
The following paragraphs contain all the information nec-
essary to guarantee the safety of the operator when using
the equipment. Detailed information is supplied in
“Technical Information” on page 13.
This manual uses the following standard safety protocol:
Storage
When transporting and storing the pump, the following
environmental requirements should not be exceeded:
Preparation for Installation
The pump is supplied in a special protective packing. If
this shows signs of damage, which may have occurred
during transport, contact your local sales office.
Total weight of the packing, IDP-10 pump included, is
approximately 28.1 kg (62 lbs).
WARNING The warning messages are for attracting
the attention of the operator to a partic-
ular procedure or practice which, if not
followed correctly, could lead to serious
injury.
CAUTION The caution messages are displayed
before procedures, which if not fol-
lowed, could cause damage to the
equipment.
NOTE The notes contain important informa-
tion taken from the text.
Temperature: 20 °C to +60 °C (4 °F to 140 °F)
Relative humidity: 0 to 95% (non-condensing)
WARNING The IDP-10 pump itself weighs 24.7 kg
(55 lbs). To avoid injury, use lifting aids
and proper lifting techniques when
moving the pump.
WARNING When unpacking the pump, be sure not
to drop it and avoid any kind of sudden
impact or shock vibration to it.
NOTE Normal exposure to the environment
cannot damage the pump. Neverthe-
less, it is advisable to keep the pump
inlet closed until the pump is installed
in the system.

IDP-10 Dry Scroll Vacuum Pump
2
DRAFT 1/13/17
EMC Warnings
EN 55011 Class A Warning
This is a Class A product. In a domestic environment this
product may cause radio interference in which case the
user may be required to take adequate measures.
The IDP-10 was tested with an I/O cable (for remote con-
trol) employing a clamp-on ferrite bead combined
foil-braid shields and metal shell connectors with the
shields connected to the IDP-10 chassis. Compliance
with FCC Part 15 rules and the European Union's EMI
requirements cannot be assured unless this type of I/O
cable and ferrite bead is used.
Failure to install the unit in this way may result in the fail-
ure to meet the requirements for radiated emissions and
susceptibility.
The ferrite bead must have the following characteristics:
❑Ferrite type: Broadband
❑Impedance characteristic (Table 1).
❑Large enough to fit over the cable being used.
FCC
This device complies with Part 15 of the FCC rules. Oper-
ation is subject to the following two conditions: (1) This
device may not cause harmful interference, and (2) this
device must accept any interference received, including
interference that may cause undesirable operation.
Table 1 Impedance Characteristic
Frequency (Mhz) Nominal Impedance (Z)
25 25
100 250
300 420
NOTE The equipment has been tested and
found to comply with the limits for a
Class A digital device, pursuant to Part
15 of the FCC rules. These limits are
designed to provide reasonable protec-
tion against harmful interference when
the equipment is operated in a commer-
cial environment. This equipment gen-
erated, uses, and can radiate radio
frequency energy and, if not installed
and used in accordance with the
instruction manual, may cause harmful
interference to radio communications.
Operation of this equipment in a resi-
dential area is also likely to cause harm-
ful radio communications interference
in which case the user will be required
to correct the interference at his own
expense.

3
IDP-10 Dry Scroll Vacuum Pump
DRAFT 1/13/17
Installation
The IDP-10 is designed and certified for operation
indoors (installation category II) in relatively clean, dry
environments (pollution degree 2). Refer to Table 5 for
specifications. It is not designed nor certified for opera-
tion outdoors. The IDP-10 is NOT intrinsically safe and
should never be used in dusty environments or with cor-
rosive or flammable gases.
Connect the pump to the power supply using an IEC-320
style power cord.
Use
The IDP-10 employs an inverter driven 3-phase motor so
that pump speed is independent of AC mains frequency.
The pump has the following features:
❑Local On/Off control via a user accessible slide switch
❑Remote On/Off control via switch closure to ground
though the Dsub9 I/O connector.
❑LED hour meter which displays run time in hours
❑Remote user control of pump speed through an analog
input via the Dsub9 I/O connector.
❑Automatic AC mains voltage sensing and selection for
worldwide application.
❑Automatic thermal sensing and shutdown for excessive
temperature.
❑Automatic power control under high pump loads.
❑An optional inlet valve to protect vacuum systems from
accidental venting should the pump shutdown unex-
pectedly.
CAUTION During operation the following environ-
mental conditions must be respected:
❑Temperature:+5 °C to +40 °C (41 °F
to 104°F)
❑Relative humidity:0 to 95%
(non-condensing)
Connect the pump to the power supply
using an IEC-320 style power cord of at
least 10 A capacity (See Table 6 on
page 17).
CAUTION When installing the vacuum pump it is
recommended that the pump be posi-
tioned in a way that the power switch
and power cord connection remain eas-
ily accessible to the user in order to be
available as an option to disconnect
power to the pump quickly if needed.

IDP-10 Dry Scroll Vacuum Pump
4
DRAFT 1/13/17
User Interface
There is a slide switch, used for local manual operation of
the pump, and a DSUB9 type connector with male pin
contacts for both remote control and to allow you to vary
the speed of the pump. The mating DSUB9 connector
may be purchased from an external vendor. The specifi-
cations of the connector are as follows: Metal shell 9
Position D-Sub Receptacle with Female Socket contacts.
See “EMC Warnings” on page 2 for information about
required back-shells, cable, and ferrite bead.
The slide switch has two positions labeled as:
❑0: This is the OFF position, the pump and fan. When in
this position, the pump and fan are off and the optional
inlet valve will be closed. The switch MUST be in this
position to allow remote ON/OFF operation
❑I: This is the ON position, the pump and the fan oper-
ates when in this position.
The DSUB9 connector (Figure 1) has pins for both remote
ON/OFF control and to vary the pump speed. The pin
assignments are inTable 2.
Figure 1 DSUB9 Pin Connections
Description of Pin Functions
❑Pin#1: This pin can be used to control the speed of the
pump by applying an analog voltage between 1 and
either of the signal ground pins. The speed varies con-
tinuously from full speed of 1900 RPM at 10 VDC to
1350 RPM at 6.9 VDC. The pump runs at 1350 RPM
for all voltages between 1.0 and 6.9 V. For voltages
below 1 V or without an input the pump runs at full
speed. Over speed is not provided. This pin has an
input impedance of 10 Kohms.
❑Pin#2: This is a TTL compatible logic input. Either a
switch closure to signal ground, or a logic LO (refer-
enced to signal ground) on this pin allows the pump to
run. An open or logic HI turns the pump OFF. An inter-
nal pull-up resistor to +5 V is provided. Note: that the
slide switch MUST be in the 0position when using this
input.
❑Pin#5 and Pin#9: These two pins are connected to sig-
nal ground.
❑Pin#7: This pin outputs a 10 VDC signal used when
using a potentiometer for the speed control. When
connecting the top of a potentiometer to this pin, the
wiper to pin#1, and the other side of the potentiometer
to one of the ground pins, you can easily vary the
speed of the pump. A 5 Kohm potentiometer is recom-
mended.
❑Pin#8: Do not make any connection to this pin.
❑Pin#9: Shell: Chassis ground. (The shell is NOT con-
nected to the signal ground pins).
Figure 2 RPM. vs. 0-10 V Speed Control Signal
Table 2 DSUB9 Pin Connections
Pin # Function
1 Analog speed control input voltage 0-10 VDC
2 External pump On/Off input, active LO
3NC
4NC
5 Ground
6NC
7 +10VDC output
8 Reserved for Factory use
9 Ground