Agilent Technologies R1330-529 HS-16 Configuration guide

INSTRUCTION MANUAL
SUPPLEMENT
R1330-529 HS-16
R1797-301 HS-20
R1333-539 NHS-35
R1333-543 NHS-35
vacuum technologies
Diffusion Pumps
for Applied
Film Coating
Systems
Manual Number 699950040
Revision A
March 2003
NOTICE: This document contains references to Varian.
Please note that Varian, Inc. is now part of Agilent
Technologies. For more information, go to
www.agilent.com/chem.

Copyright 2003
Varian Vacuum Technologies
Diffusion Pumps for Applied
Film Coating Systems
VacuSolv is a trademarks of Varian Vacuum Technologies.
Apiezon is a registered trademark of M&I Materials Ltd.
Alconox is a registered trademark of Alconox, Inc.

Diffusion Pumps for Applied Film Coating Systems
iii
Warranty
Products manufactured by Seller are warranted against defects in materials and workmanship for twelve
(12) months from date of shipment thereof to Customer, and Seller’s liability under valid warranty
claims is limited, at the option of Seller, to repair, to replace, or refund of an equitable portion of the
purchase price of the Product. Items expendable in normal use are not covered by this warranty. All
warranty replacement or repair of parts shall be limited to equipment malfunctions which, in the sole
opinion of Seller, are due or traceable to defects in original materials or workmanship. All obligations
of Seller under this warranty shall cease in the event of abuse, accident, alteration, misuse, or neglect of
the equipment. In-warranty repaired or replaced parts are warranted only for the remaining unexpired
portion of the original warranty period applicable to the repaired or replaced parts. After expiration of
the applicable warranty period, Customer shall be charged at the then current prices for parts, labor,
and transportation.
Reasonable care must be used to avoid hazards. Seller expressly disclaims responsibility for loss or
damage caused by use of its Products other than in accordance with proper operating procedures.
Except as stated herein, Seller makes no warranty, express or implied (either in fact or by operation of
law), statutory or otherwise; and, except as stated herein, Seller shall have no liability under any war-
ranty, express or implied (either in fact or by operation of law), statutory or otherwise. Statements made
by any person, including representatives of Seller, which are inconsistent or in conflict with the terms of
this warranty shall not be binding upon Seller unless reduced to writing and approved by an officer of
Seller.
Warranty Replacement and Adjustment
All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto,
and must be received within the applicable warranty period by Seller or its authorized representative.
Such claims should include the Product serial number, the date of shipment, and a full description of
the circumstances giving rise to the claim. Before any Products are returned for repair and/or adjust-
ment, written authorization from Seller or its authorized representative for the return and instructions as
to how and where these Products should be returned must be obtained. Any Product returned to Seller
for examination shall be prepaid via the means of transportation indicated as acceptable by Seller.
Seller reserves the right to reject any warranty claim not promptly reported and any warranty claim on
any item that has been altered or has been returned by non-acceptable means of transportation. When
any Product is returned for examination and inspection, or for any other reason, Customer shall be
responsible for all damage resulting from improper packing or handling, and for loss in transit, notwith-
standing any defect or non-conformity in the Product. In all cases, Seller has the sole responsibility for
determining the cause and nature of failure, and Seller’s determination with regard thereto shall be
final.
If it is found that Seller’s Product has been returned without cause and is still serviceable, Customer will
be notified and the Product returned at its expense; in addition, a charge for testing and examination
may be made on Products so returned.
3/1/00

Diffusion Pumps for Applied Film Coating Systems
iv
Hazard and Safety Information
This manual uses the following standard safety protocols:
WARNING The warning messages are for attracting the attention of the
operator to a particular procedure or practice which, if not
followed correctly, could lead to serious injury.
CAUTION The caution messages are displayed before procedures, which
if not followed, could cause damage to the equipment.
NOTE The notes contain important information.
Operators and service personnel must be aware of all hazards associated with this equip-
ment. They must know how to recognize hazardous and potentially hazardous conditions,
and know how to avoid them. The consequences of unskilled, improper, or careless opera-
tion of the equipment can be serious. This product must only be operated and maintained
by trained personnel. Every operator or service person must read and thoroughly understand
operation/maintenance manuals and any additional information provided by Varian
Vacuum Technologies. All warning and cautions should be read carefully and strictly
observed. Consult local, state, and national agencies regarding specific requirements and
regulations. Address any safety, operation, and/or maintenance questions to your nearest
Varian Vacuum Technologies office.
Vacuum Equipment and Cleanliness
Cleanliness is vital when servicing any vacuum equipment.
CAUTION Do not use silicone oil or silicone grease.
Use powder-free butyl or polycarbonate gloves to prevent
skin oils from getting on vacuum surfaces.
Do not clean any aluminum parts with Alconox®. Alconox
is not compatible with aluminum and will cause damage.
NOTE Normally, it is unnecessary to use vacuum grease.
However, if it must be used, avoid silicone types, and
use it sparingly. Apiezon®L grease is recommended
(Varian Part Number 695400004).

Diffusion Pumps for Applied Film Coating Systems
v
O-ring Care
When removing, checking, or replacing O-rings, keep in mind the following:
NOTE Varian Vacuum Technologies recommends replacing all
O-rings during routine maintenance or during any maintenance
procedure requiring that O-rings be removed.
CAUTION Remove O-rings carefully with your fingers. Do not use metal
tools for this task. Follow these guidelines to prevent scratching
of any sealing surfaces:
❑Wipe all O-rings clean with a lint-free cloth before
installation to ensure that no foreign matter is present to
impair the seal.
❑Do not use grease or use other substances on O-rings that
will come in contact with the spectrometer tube.
❑Do not use alcohol, methanol, or other solvents on O-rings.
To do so causes deterioration and reduces the O-ring’s
ability to hold a vacuum.
❑In allowable situations, apply a small amount of Apiezon®L
grease and wipe the O-rings “shiny” dry.
NOTE Included in the Varian Vacuum Technologies’ Component and
Spectrometer Tube Cleaning Kit (p/n 670029096), VacuSolv is
recommended for cleaning the spectrometer tube components.
VacuSolv can also be used for fine cleaning of other parts in the
leak detector’s vacuum system, such as valves and fittings. No
rinsing steps or high-temperature drying is required following
cleaning with VacuSolv. Although appropriate precautions are
advised, VacuSolv is compatible with most materials and does
not contain toxic chemicals or CFCs (chlorofluorocarbons).

Diffusion Pumps for Applied Film Coating Systems
vi
Contacting Varian Vacuum Technologies
In the United States, you can contact Varian Vacuum Technologies Customer Service at
1-800-8VARIAN.
Internet users:
❑Send email to Customer Service & Technical Support at
[e-mail]
❑Visit our web site at www.varianinc.com/vacuum
❑Order on line at www.evarian.com
See the back cover of this manual for a listing of our sales and service offices.

Diffusion Pumps for Applied Film Coating Systems
1
General
This document supplements the standard instruction manuals for the HS-16, HS-20, and
NHS-35 diffusion pumps, which are customized for Applied Films coating systems. Please
refer to the standard instruction manuals for general information regarding safety
considerations, installation, operation and maintenance. This supplement contains
information regarding special spare parts and electrical wiring schematics that are unique to
these pumps. The standard instruction manual can be purchased through Varian Vacuum
Technologies Inc. if needed. Please use the following part numbers when ordering:
Replacement Parts
Table 2 on page 2 lists the replacement parts that are not covered by the standard
instruction manual. Please refer to the standard instruction manual for any part that is not
shown on this list, or contact the factory for technical assistance. Figure 1 on page 3 shows
the location of the replacement parts on the diffusion pump.
Electrical Wiring
Electrical power is supplied to the pump through a power module mounted on the side
panel of the electrical box. The connector manufacturer and part number is:
Wieland Electric Inc.
Housing P/N 70.320.1628.0
Plug Insert P/N 72.210.0653.0
Output from the PT-100 oil temperature measurement device and the thermal switch
(mounted above the electrical box) is fed through connectors mounted on the side panel of
the electrical box. The thermostat switch leads are also run through a connector. The
connector manufacturer and part number is:
Schaltbau GMBH
Receptacle with Flange P/N 1-1401-594-050
6 Pole + PE Pin Insert P/N 1-1401-119-648
Table 1 Diffusion Pump Instruction Manual Part Number
Diffusion Pump Instruction Manual
Part Number
HS-16 (R1330-529) 699901116
HS-20 (R1797-301) 699901120
NHS-35 (R1333-539 & -543) 699901135

Diffusion Pumps for Applied Film Coating Systems
2
Figure 2 on page 4, Figure 3 on page 5, and Figure 4 on page 6 show the electrical
wiring schematics of the various diffusion pumps within the electrical box. For the wiring
schematic of the heaters to the terminal strip, please refer to the standard instruction manual
or the wiring label on the inside cover of the electrical box. Figure 5 on page 7, Figure 6 on
page 7 and Figure 7 on page 7 show the pin assignments for each of the wiring harnesses
called out in the wiring schematics.
Table 2 Supplemental Replacement Parts List

Diffusion Pumps for Applied Film Coating Systems
3
Figure 1 Supplemental Replacement Part Location

Diffusion Pumps for Applied Film Coating Systems
4
Figure 2 HS-16 Wire Schematic

Diffusion Pumps for Applied Film Coating Systems
5
Figure 3 HS-20 Wire Schematic

Diffusion Pumps for Applied Film Coating Systems
6
Figure 4 NHS-35 Wire Schematic, 480V & 400V

Diffusion Pumps for Applied Film Coating Systems
7
Figure 5 Power Module Pin Assignments
Figure 6 ATHf-20 Switch and Thermostat Wire Harness Pin Assignments
Figure 7 PT-100 Wire Harness Pin Assignments
1
2
3
4
5
6
“L2”
“N”
“L1”
“L3”
“PE”

Diffusion Pumps for Applied Film Coating Systems
This page intentionally left blank.

9
Diffusion Pumps for Applied Film Coating Systems
DRAFT 3/17/03
Request
f
or Return Health and
S
a
f
et
y
Certification
RequestForReturnRevM.doc 22 March 2001 Pg. 1 of 2
Request for Return
Health and Safety Certification
1. Return authorization numbers (RA#) will not be issued for any product until this Certificate is completed and returned to
a Varian Customer Service Representative.
. Pack goods appropriately and drain all oil from rotary vane and diffusion pumps (for exchanges please use the packing
material from the replacement unit), making sure shipment documentation and package label clearly shows assigned
Return Authorization Number (RA#). VVT cannot accept any return without such reference.
3. Return product(s) to the nearest location:
North and South America
Varian Vacuum Technologies
1 1 Hartwell Ave.
Lexington, MA 0 4 1
Fax: [phone]
Europe and Middle East
Varian S.p.A.
Via F.lli Varian, 54
10040 Leini (TO) – ITALY
Fax: [phone]
Asia and ROW
Varian Vacuum Technologies
Local Office
For a complete list of phone/fax numbers see www.varianinc.com/vacuum
4. If a product is received at Varian in a contaminated condition, the customer is held responsible for all costs incurred to
ensure the safe handling of the product, and is liable for any harm or injury to Varian employees occurring as a result of
exposure to toxic or hazardous materials present in the product.
CUSTOMER INFORMATION
Company name: ..………………….……..……………….………………………………..……………………...…………..….
Contact person: Name: ……………………………………..… Tel: ……………………….…...…………….….…...
Fax: …………………………….…...…..…… E-mail: ..……………………..…………..…..…..….
Ship Method: …………….……....…… Shipping Collect #: ………….…..………… P.O.#:………………….…......……….
Euro e only: VAT Reg. Number: ………………..……………... USA only: ❐ Taxable ❐ Non-taxable
Customer Ship To: ………………………….……… Customer Bill To: …………………..……………...
……………..…………………... ..………………………………...
………………..………………... ..………………………………...
PRODUCT IDENTIFICATION
Product Description Varian P/N Varian S/N
TYPE OF RETURN (check a ro riate box)
❐ Paid Exchange ❐ Paid Repair ❐ Warranty Exchange ❐ Warranty Repair ❐ Loaner Return
❐ Credit ❐ Shipping Error ❐ Evaluation Return ❐ Calibration ❐ Other ………………..
HEALTH and SAFETY CERTIFICATION
VARIAN VACUUM TEC NOLOGIES CANNOT ACCEPT ANY BIOLOGICAL AZARDS, RADIOACTIVE
MATERIAL, ORGANIC METALS, OR MERCURY AT ITS FACILITY. C ECK ONE OF T E FOLLOWING:
❐I confirm that the above product(s) has (have) NOT pumped or been exposed to any toxic or dangerous materials in a
quantity harmful for human contact.
❐I declare that the above product(s) has (have) pumped or been exposed to the following toxic or dangerous materials in a
quantity harmful for human contact (Must be filled in):
.………………………………………………………………………………………………………………………………
Print Name: …………………………………. Signature: ……………...……………………. Date: ..…../..…../……
PLEASE FILL IN THE FAILURE REPORT SECTION ON T E NEXT PAGE
Do not write below this line
Notification (RA)#: ……………………….……….. Customer ID#: ……….…………. Equipment #: ……………………..

10
Diffusion Pumps for Applied Film Coating Systems
DRAFT 3/17/03
RequestForReturnRevM.doc 22 March 2001 Pg. 2 of 2
Request for Return
Health and Safety Certification
FAILURE REPORT (Please describe in detail the nature of the malfunction to assist us in performing failure analysis):
TURBO PUMPS and TURBOCONTROLLERS
CLAIMED DEFECT POSITION PARAMETERS
❐ Does not start ❐ Noise ❐ Vertical Power: Rotational Speed:
❐ Does not s
p
in freel
y
❐ Vibrations ❐ Horizontal Current: Inlet Pressure:
❐ Does not reach full s
p
eed ❐ Leak ❐ U
p
side-down Temp 1: Foreline Pressure:
❐ Mechanical Contact ❐ Overtem
p
erature ❐ Other: Temp : Purge flow:
❐ Cooling defective ❐ Clogging …………………. OPERATION TIME:
Describe Failure :
TURBOCONTROLLER ERROR MESSAGE:
ION PUMPS/CONTROLLERS VALVES/COMPONENTS
❐ Bad feedthrou
g
h❐ Poor vacuum ❐ Main seal leak ❐ Bellows leak
❐ Vacuum leak ❐ Hi
g
h volta
g
e
p
roblem ❐ Solenoid failure ❐ Dama
g
ed flan
g
e
❐ Error code on dis
p
la
y
❐ Other ❐ Dama
g
ed sealin
g
area ❐ Other
Describe failure: Describe failure:
Customer application: Customer application:
LEAK DETECTORS INSTRUMENTS
❐ Cannot calibrate ❐ No zero/hi
g
h back
g
round ❐ Gau
g
e tube not workin
g
❐ Dis
p
la
y
p
roblem
❐ Vacuum s
y
stem unstable ❐ Cannot reach test mode ❐ Communication failure ❐ De
g
as not workin
g
❐ Failed to start ❐ Other ❐ Error code on dis
p
la
y
❐ Other
Describe failure: Describe failure:
Customer application: Customer application:
ALL OT ER VARIAN PUMPS DIFFUSION PUMPS
❐ Pum
p
doesn’t start ❐ Nois
y
p
um
p
(
describe
)
❐ Heater failure ❐ Electrical
p
roblem
❐ Doesn’t reach vacuum ❐ Overtem
p
erature ❐ Doesn’t reach vacuum ❐ Coolin
g
coil dama
g
e
❐ Pum
p
seized ❐ Other ❐ Vacuum leak ❐ Other
Describe failure: Describe failure:
Customer application: Customer application:

Returned Materials
Report

Varian Vacuum Technologies
Sales and Service Offices
01/03
Argentina
Varian Argentina Ltd.
Sucursal Argentina
Av. Ricardo Balbin 2316
1428 Buenos Aires
Argentina
Tel:[phone]
Fax:[phone]
Benelux
Varian Vacuum Technologies
Rijksstraatweg 269 H,
3956 CP Leersum
The Netherlands
Tel:[phone]
Fax:[phone]
Brazil
Varian Industria e Comercio Ltda.
Avenida Dr. Cardoso de Mello 1644
Vila Olimpia
Sao Paulo 04548 005
Brazil
Tel:[phone]
Fax:[phone]
Canada
Central coordination through:
Varian Vacuum Technologies
121 Hartwell Avenue
Lexington, MA 02421
USA
Tel:[phone]
Fax:[phone]
Toll Free: [phone]
China
Varian Technologies - Beijing
Room 1201, Jinyu Mansion
No. 129A, Xuanwumen Xidajie
Xicheng District
Beijing 1000031 P.R. China
Tel:[phone]
Fax:[phone]
France and Wallonie
Varian s.a.
7 avenue des Tropiques
Z.A. de Courtaboeuf – B.P. 12
Les Ulis cedex (Orsay) 91941
France
Tel:[phone]
Fax:[phone]
Germany and Austria
Varian Deutschland GmbH
Alsfelder Strasse 6
Postfach 11 14 35
64289 Darmstadt
Germany
Tel:[phone]
Fax:[phone]
India
Varian India PVT LTD
101-108, 1st Floor
1010 Competent House
7, Nangal Raya Business Centre
New Delhi 110 046
India
Tel:[phone]
Fax:[phone]
Italy
Varian Vacuum Technologies
Via F.lli Varian, 54
10040 Leini, (Torino)
Italy
Tel[phone]
Fax[phone]
Japan
Varian Vacuum Technologies
Sumitomo Shibaura Building, 8th Floor
4-16-36 Shibaura
Minato-ku, Tokyo 108
Japan
Tel:[phone]
Fax:[phone]
Korea
Varian Technologies Korea, Ltd.
Shinsa 2nd Building 2F
966-5 Daechi-dong
Kangnam-gu, Seoul
Korea 135-280
Tel:[phone]
Fax:[phone]
Mexico
Varian S.A.
Concepcion Beistegui No 109
Col Del Valle
C.P. 03100
Mexico, D.F.
Tel:[phone]
Fax:[phone]
Ta i w a n
Varian Technologies Asia Ltd.
14F-16 No.77, Hsin Tai Wu Road Sec. 1,
Hsi Chih, Taipei Hsien
Taiwan, R.O.C.
Tel:[phone]
Fax:[phone]
UK and Ireland
Varian Ltd.
28 Manor Road
Walton-On-Thames
Surrey KT 12 2QF
England
Tel:[phone]
Fax:[phone]
United States
Varian Vacuum Technologies
121 Hartwell Avenue
Lexington, MA 02421
USA
Tel:[phone]
Fax:[phone]
Toll Free: [phone]
Other Countries
Varian Vacuum Technologies
Via F.lli Varian, 54
10040 Leini, (Torino)
Italy
Tel:[phone]
Fax:[phone]
Internet Users:
Customer Service and Technical Support:
[e-mail]
Worldwide Web Site:
www.varianinc.com/vacuum
Order On-line:
www.evarian.com
Representatives in most countries