Agilent Technologies Turbo-V 81-M Series User manual

T
urbo-V 81-M
Models: 969-8901, 969-8902, 969-8903,
969-8904
Manuale di istruzioni Instruksjon manual
Bedienungshandbuch Ohjekäsikirja
Notice de mode d’emploi Felhasználói kézikönyv
Manual de istrucciones Podrecznik instrukcji
Manual de istruções Návod k použití
Bedrijfshandleiding Návod na obsluhu
Istrukstionsbog Priročnik za navodila
Bruksanvisning User Manual
87-900-983-01 (E)
04/2011

Notices
© Agilent Technologies, Inc. 2011
No part of this manual may be
reproduced in any form or by any
means (including electronic storage
and retrieval or translation into a
foreign language) without prior
agreement and written consent from
Agilent Technologies, Inc. as governed
by United States and international
copyright laws.
Manual Part Number
Publication Number: 87-900-983-01 (E)
Edition
Edition 04/2011
Printed in ITALY
Agilent Technologies Italia S.p.A.
Vacuum Products Division
Via F.lli Varian, 54
10040 Leinì (TO)
ITALY
Warranty
The material contained in this
document is provided “as is,” and is
subject to being changed, without
notice, in future editions. Further, to
the maximum extent permitted by
applicable law, Agilent disclaims all
warranties, either express or implied,
with regard to this manual and any
information contained herein,
including but not limited to the
implied warranties of merchantability
and fitness for a particular purpose.
Agilent shall not be liable for errors
or for incidental or consequential
damages in connection with the
furnishing, use, or performance of
this document or of any information
contained herein. Should Agilent and
the user have a separate written
agreement with warranty terms
covering the material in this
document that conflict with these
terms, the warranty terms in the
separate agreement shall control.
Technology Licenses
The hardware and/or software
described in this document are
furnished under a license and may be
used or copied only in accordance
with the terms of such license.
Restricted Rights Legend
If software is for use in the
performance of a U.S. Government
prime contract or subcontract,
Software is delivered and licensed as
“Commercial computer software” as
defined in DFAR 252.227-7014 (June
1995), or as a “commercial item” as
defined in FAR 2.101(a) or as
“Restricted computer software” as
defined in FAR 52.227-19 (June 1987)
or any equivalent agency regulation or
contract clause. Use, duplication or
disclosure of Software is subject to
Agilent Technologies’ standard
commercial license terms, and non-
DOD Departments and Agencies of the
U.S. Government will receive no
greater than Restricted Rights as
defined in FAR 52.227-19(c)(1-2) (June
1987). U.S. Government users will
receive no greater than Limited Rights
as defined in FAR 52.227-14 (June
1987) or DFAR 252.227-7015 (b)(2)
(November 1995), as applicable in any
technical data.
Trademarks
Windows and MS Windows are U.S.
registered trademarks of Microsoft
Corporation.
Safety Notices
CAUTION
A CAUTION notice denotes a hazard.
It calls attention to an operating
procedure, practice, or the like that, if
not correctly performed or adhered to,
could result in damage to the product
or loss of important data. Do not
proceed beyond a CAUTION notice
until the indicated conditions are fully
understood and met.
WARNING
A WARNING notice denotes a
hazard. It calls attention to an
operating procedure, practice, or the
like that, if not correctly performed
or adhered to, could result in
personal injury or death. Do not
proceed beyond a WARNING notice
until the indicated conditions are
fully understood and met.
Turbo-V 81-M User Manual / 87-900-983-01 (E)

Turbo-V 81-M
Turbo-V 81-M
Turbo-V 81-M User Manual / 87-900-983-01 (E) 3/228

Turbo-V 81-M
4/228 Turbo-V 81-M User Manual / 87-900-983-01 (E)

Contents
Contents
1Istruzioni per l’uso 13
Indicazioni di Sicurezza per Pompe Turbomolecolari 14
Informazioni Generali 15
Immagazzinamento 17
Preparazione per l’installazione 18
Installazione 19
Uso 22
Manutenzione 23
Smaltimento 24
2Gebrauchsanleitung25
Sicherheitshinweise für Turbomolekularpumpen 26
Allgemeine Informationen 27
Lagerung 29
Vor der Installation 30
Installation 31
Gebrauch 34
Wartung 35
Entsorgung 36
Turbo-V 81-M User Manual / 87-900-983-01 (E) 5/228

Contents
3Mode d’emploi 37
Normes de sécurité pour Pompe Turbomoléculaires 38
Indications générales 39
Stockage 41
Preparation pour l’installation 42
Installation 43
Utilisation 46
Entretien 47
Mise au rebut 48
4Manual de istrucciones 49
Indicaciones de Seguridad para Bombas Turbomoleculares 50
Información general 51
Almacenamiento 53
Preparación para la instalación 54
Instalación 55
Uso 58
Mantenimiento 59
Eliminación 60
5Manual de Istruções 61
Indicações de Segurança para Bombas Turbomoleculares 62
Informações gerais 63
Armazenagem 65
6/228 Turbo-V 81-M User Manual / 87-900-983-01 (E)

Contents
Preparação para a instalação66
Instalação 67
Utilização 70
Manutenção 71
Eliminação 72
6Bedrijfshandleiding 73
Veiligheidsinstructies voor Turbomoleculaire pompen 74
Algemene informatie 75
Opslag 77
Uitpakken 78
Installatie 79
Gebruik 82
Onderhoud 83
Afvalverwerking 84
7Istruktionsbog 85
Sikkerhedsanvisninger for Molekylære turbopumper 86
Generel information 87
Opbevaring 89
Forberedelser før installation 90
Installation 91
Anvendelse 93
Vedligeholdelse 94
Turbo-V 81-M User Manual / 87-900-983-01 (E) 7/228

Contents
Bortskaffelse 95
8Bruksanvisning 97
Säkerhetsanvisningar för Molekylära turbopumpar98
Allmän information 99
Förvaring 100
Förberedelser för installation 101
Installation 102
Användning 104
Underhåll 105
Bortskaffning 106
9Instruksjon Manual 107
Sikkerhetsanvisninger for Turbomolekylære pumper 108
Generell informasjon109
Lagring 110
Klargjøre til installasjon 111
Installasjon 112
Bruk 114
Vedlikehold 115
Eliminering 116
10 Ohjekäsikirja 117
Turbomolekyylipumppujen Turvaohjeet 118
Yleisiä tietoja 119
8/228 Turbo-V 81-M User Manual / 87-900-983-01 (E)

Contents
Varastointi 120
Valmistelut asennusta varten121
Asennus 122
Käyttö 124
Huolto 125
Hävittäminen 126
11 Felhasználói Kézikönyv 127
Biztonsági útmutató Turbómolekuláris szivattyúkhoz 128
Általános informáicó129
Tárolás 130
Előkészítés telepítésre 131
Telepítés 132
Használat 135
Karbantartás 136
Megsemmisítés 137
12 Podrecznik Instrukcji 139
Wskazówki dotyczące bezpieczeństwa dla Pomp Turbomolekularnych
140
Ogólne Informacje 141
Magazynowanie 142
Przygotowanie do instalacji 144
Instalacja 145
Użytkowanie 148
Turbo-V 81-M User Manual / 87-900-983-01 (E) 9/228

Contents
Konserwacja 149
Przetworstwo odpadow 150
13 Návod k Použití 151
Bezpečnostní návod pro Turbomolekulární vývěvy 152
Všeobecné informace 153
Uskladnění 154
Příprava k instalaci 155
Instalace 156
Použití 158
Údržba 159
Likvidace 160
14 Návod na Obsluhu 161
Bezpečnostné návod pre Turbomolekulárne vývevy 162
Všeobecné informácie 163
Uchovávanie 164
Príprava na inštaláciu 166
Inštalácia 167
Použitie 170
Údržba 171
Likvidácia 172
15 Priročnik za Navodila 173
Varnostna navodila za Turbomolekularne črpalke 174
10/228 Turbo-V 81-M User Manual / 87-900-983-01 (E)