Agilent Technologies TwisTorr 305-IC X3513-64000 User manual

TwisTorr 305-IC
Pump models: X3513-64000, X3513-64001, X3513-64002,
X3513-64003, X3513-64004, X3513-64005, X3513-64006,
X3513-64007, X3513-64016, X3513-64017, X3513-64018,
X3513-64019, X3513-64020, X3513-64021, X3513-64022,
X3513-64023, X3513-64024, X3513-64025, X3513-64026,
X3513-64027, X3513-64028, X3513-64029, X3513-64030,
X3513-64031
Manuale di istruzioni
Bedienungshandbuch
Notice de mode d’emploi
Manual de istrucciones
用户手册
ユーザーマニュアル
User Manual
87-901-058-01
12/2019

TwisTorr 305-IC User Manual/ 87-901-058-01
Notices
© Agilent Technologies, Inc. 2019
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Manual Part Number
Publication Number: 87-901-058-01
Edition
Edition 12/2019
Printed in ITALY
Agilent Technologies Italia S.p.A.
Vacuum Products Division
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ITALY
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WARNING
CAUTION

TwisTorr 305-IC
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TwisTorr 305-IC

TwisTorr 305-IC
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Contents
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Contents
1Istruzioni per l’uso 15
Informazioni su questo manuale 17
Validità 17
Definizioni e terminologia 18
Definizione di Attenzione, Avvertenza e Nota 18
Simboli di Avvertenza 19
Sicurezza 21
Uso corretto 21
Uso improprio 22
Attrezzatura di protezione 23
Linee guida di sicurezza per pompe turbomolecolari 25
Transporto & Immagazzinamento 26
Descrizione del prodotto 27
Installazione 28
Preparazione per l’installazione 28
Apertura 30
Riparazione di TwisTorr 305-IC 32
Collegamento della flangia per alto vuoto 33
Installazione della flangia ISO-K 34
Installazione della flangia ConFlat 35
Collegamento della pompa del vuoto anteriore 36
Avvio e funzionamento di TwisTorr 305-IC 37
Arresto di TwisTorr 305-IC 40
Arresto di emergenza 40
Manutenzione 41
Vita del rotore 41

Contents
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Soft Start 42
Pulizia 42
Smaltimento 43
Servizio Post Vendita 44
2Gebrauchsanleitung 45
Über dieses Handbuch 47
Gültigkeit 47
Begriffsbestimmungen und Terminologie 48
Definition von Vorsicht, Warnung und Hinweis 48
Warnsymbole 49
Sicherheit 51
Sachgemäße Verwendung 51
Unsachgemäße Verwendung 52
Schutzausrüstung 53
Sicherheitsrichtlinie für Turbomolekularpumpen 55
Transport und Lagerung 56
Produktbeschreibung 57
Installation 58
Vorbereitung zum Einbau 58
Einrichten 60
Montage von TwisTorr 305-IC 62
Anschluss des Hochvakuumflansches 63
Installation des ISO-K-Flansches 64
Installation des ConFlat-Flansches 65
Anschluss der Vorvakuumpumpe 66
Inbetriebnahme und Betrieb vom TwisTorr 305-IC 67
TwisTorr 305-IC stoppen 70
Notausschaltung 70
Wartung 71
Rotordauer 71

Contents
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Sanftanlauf 72
Reinigung 72
Entsorgung 73
Service 74
3Mode d’emploi 75
À propos de ce manuel 77
Validité 77
Définitions et terminologie 78
Symboles d’avertissement 79
Sécurité 81
Utilisation appropriée 81
Utilisation inappropriée 82
Équipement de protection 83
Directive de sécurité pour les pompes turbomoléculaires 85
Transport et entreposage 86
Description du produit 87
Installation 88
Préparation pour l’installation 88
Configuration 90
Montage du TwisTorr 305-IC 92
Raccordement de la bride à vide élevé 93
Installation de la bride ISO-K 94
Installation de la bride ConFlat 95
Raccordement de la bride à vide préliminaire 96
Démarrage et utilisation du TwisTorr 305-IC 97
Arrêt du TwisTorr 305-IC 100
Arrêt d’urgence 100
Entretien 101
Durée de vie du rotor 101
Démarrage progressif 102

Contents
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Nettoyage 102
Mise au rebut 103
Service 104
4Instrucciones de Uso 105
Acerca del manual 107
Validez 107
Definiciones y terminología 108
Definición de Precaución, Advertencia y Nota 108
Símbolos de advertencia 109
Seguridad 111
Uso correcto 111
Uso incorrecto 112
Equipo de protección 113
Pautas de seguridad para bombas turbomoleculares 115
Transporte y almacenamiento 116
Descripción del producto 117
Instalación 118
Preparación para instalación 118
Puesta en marcha 120
Montaje de la TwisTorr 305-IC 122
Conexión de la brida de alto vaciado 123
Instalación de la brida ISO-K 124
Instalación de la brida ConFlat 125
Conexión de la bomba pre-vaciado 126
Puesta en marcha y funcionamiento de TwisTorr 305-IC 127
Parada de la TwisTorr 305-IC 130
Parada de emergencia 130
Mantenimiento 131
Vida del rotor 131
Arranque suave 132

Contents
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Limpieza 132
Eliminación 133
Servicio 134
5使用说明 135
关于这本手册 137
有效性 137
定义和术语 138
警告、警告和注释的定义 138
警告符号 139
安全 141
正确使用 141
使用不当 142
防护设备 143
涡轮分子泵安全指南 145
运输及存储 146
产品描述 147
安装 148
安装准备 148
设置 150
TwisTor 305-IC 的安装 152
高真空法兰的连接 153
ISO-K 法兰的安装 154
ConFlat 法兰的安装 155
前真空泵的连接 156
TwisTorr 305-IC 的启动和运行 157
停止 TwisTorr 305-IC 160
紧急停止 160
维护 161

Contents
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转子寿命 161
慢启动 162
清洗 162
处置方式 163
服务 164
6使用方法 165
このマニュアルについて 167
有効性 167
定義と用語 168
警告・注意・注の定義 168
警告の記号 169
安全性 171
適切な使用 171
不適切な使用 172
保護用装備 173
ターボ分子ポンプ用安全ガイドライン 175
移送＆保管 176
製品説明 177
取り付け 178
取り付けの準備 178
セットアップ 180
TwisTorr 305-IC 実装 182
高真空フランジの接続 183
ISO-K フランジの取り付け 184
ConFlat フランジの取り付け 185
フォア真空ポンプの接続 186
TwisTorr 305-IC の起動開始と操作 187
TwisTorr 305-IC を停止する 190