Azbil F4Q User manual

Thank you for purchasing your Azbil
Corporation product.
This manual contains information for
ensuring the safe and correct use of
the product.
Those designing or maintaining
equipment that uses this product
should first read and understand
this manual. This manual contains
information not only for installation,
but also for maintenance,
troubleshooting, etc. Be sure to keep it
nearby for handy reference.
(Not for use in Japan)
Digital Mass Flow Controller
Model F4Q
User’s Manual for RS-485
Communication Functions
No. CP-SP-1458E

NOTICE
Please make sure that this manual is available to the user of the product.
Unauthorized duplication of this user’s manual in part or in whole is
forbidden. The information and specifications in this manual are subject to
change without notice.
Considerable effort has been made to ensure that this manual is complete
and accurate, but if you should find an omission or error, please contact us.
In no event is Azbil Corporation liable to anyone for any indirect, special, or
consequential damages as a result of using this product.
© 2021 Azbil Corporation. All Rights Reserved.
Modbus is a trademark and the property of Schneider Electric SE, its subsidiaries and
affiliated companies.

i
Conventions Used in This Manual
The safety precautions explained below aim to prevent injury to you and others, and to prevent property damage.
WARNING Warnings are indicated when mishandling this product may
result in death or serious injury.
CAUTION Cautions are indicated when mishandling this product may
result in minor injury or property damage only.
In describing the product, this manual uses the icons and notations listed below.
Indicates that caution is required in handling.
The indicated action is prohibited.
Be sure to follow the indicated instructions.
Handling Precautions:
Information to be aware of when handling.
Note: Indicates information that may be useful.
: Indicates an item or page to which the user may refer.
(1) (2) (3): Steps in a sequence or parts of a figure, etc.

ii
Safety Precautions
CAUTION
Use this product within the operating conditions (for temperature, humidity, voltage,
vibration, shock, mounting orientation, atmosphere, etc.) given in the specifications in Digital
Mass Flow Controller Model F4Q User’s Manual (CP-UM-5978JECK).
Otherwise there is a danger of device failure.
Before wiring the device, turn the power off. Otherwise there is a danger of device failure.
Wire this device correctly by using the wiring method, power, and installation method
specified in this user’s manual. Otherwise there is a danger of device failure.
Do not allow wire clippings, metal shavings, water, etc., to enter the device. There is a danger
of device failure.
If there is a risk of a power surge caused by lightning, use a surge absorber (surge protector).
Otherwise there is a danger of fire or device failure.
Make sure that the wiring is correct before turning the power on. Incorrect wiring may result
in damage or malfunction.
Do not disassemble this device. There is a danger of device failure.
Do not apply excessive force to cables or connectors when connector cables or the AC adapter
is attached.
Doing so may damage the connector or circuit board.

iii
There are four different manuals related to model F4Q. Read them as necessary for your specific requirements.
If you do not have a manual you require, please contact us or one of our dealers.
Digital Mass Flow Controller Model F4Q User’s Manual for RS-485 Communication
Functions Document No. CP-SP-1458E
This manual.
Personnel who use this device's communications functions should read this manual. The
manual gives an overview of communications, describes wiring, transmission protocols,
communications data, and communication troubleshooting, and gives communications
specifications.
Digital Mass Flow Controller Model F4Q User’s Manual
Document No. CP-SP-1461E
Personnel who are using the F4Q for the first time or who are in charge of
hardware design and/or maintenance of a control panel containing the F4Q
should read this manual thoroughly.
This manual gives an overview of the product, describes installation, wiring,
operation, functions, maintenance, and troubleshooting, and gives hardware
specifications.
User’s Manual for Smart Loader Package Model MLP-F4Q for Digital Mass
Flow Controller Model F4Q Document No. CP-SP-1457E
The user can specify and check parameters of the F4Q on a PC using the MLP-F4Q
loader. Personnel who configure the F4Q or check the settings using the loader
should read this manual.
This manual also describes the installation of the software on a PC and its
functions and operation.
Digital Mass Flow Controller Model F4Q User’s Manual
Document No. CP-UM-5978JECK
This manual is supplied with the product.
Personnel in charge of the design or manufacture of equipment that
incorporates the F4Q and personnel in charge of installation of this device should
read this manual thoroughly.
The manual covers safety precautions, installation, wiring, and main
specifications.
The Role of This Manual

iv
· Modbus is a trademark and the property of Schneider Electric SE, its subsidiaries and affiliated companies.
Copyright, licenses, and registered trademarks

v
Conventions Used in This Manual
Safety Precautions
The Role of This Manual
Copyright, licenses, and registered trademarks
Chapter 1. Overview 1-1
1 - 1 Overview 1-1
 Features 1-1
 System configuration 1-1
Chapter 2. Wiring 2-1
2 - 1 RS-485 Connection 2-1
2 - 2 Terminal Layout of This Device 2-2
Chapter 3. Settings 3-1
3 - 1 Communication Function Settings 3-1
3 - 2 Setup Method 3-2
Chapter 4. CPL Communication 4-1
4 - 1 Communication Procedure 4-1
4 - 2 Message Structure 4-2
 Overview of a CPL Frame 4-2
 Data link layer 4-3
 Application layer 4-6
4 - 3 Description of Commands 4-7
 RS command (decimal format consecutive data read) 4-7
 RD command (hexadecimal format consecutive data read) 4-9
 WS command (decimal format consecutive data write) 4-12
 WD command (hexadecimal format consecutive data write) 4-14
4 - 4 Termination Code 4-16
4 - 5 Timing Specifications 4-17
 Timing for response messages 4-17
 RS-485 driver control timing 4-17
4 - 6 Character Code Table 4-18
Contents

vi
Chapter 5. Modbus Communication (RTU Mode) 5-1
5 - 1 Communication Procedure 5-1
5 - 2 Message Structure 5-2
 Overview of Modbus-RTU Frame 5-2
 Silent interval 5-2
 Function code 5-2
 Check code 5-3
 Error termination code 5-4
 Conditions under which no response message is returned (no-response
conditions) 5-5
5 - 3 Description of Commands 5-6
 Function 03 (multiple data read command) 5-6
 Function 06 (one data write command) 5-8
 Function 16 (multiple data write command) 5-9
5 - 4 Timing Specifications 5-11
Chapter 6. Communication Data 6-1
6 - 1 Basic Information for Handling Communication Data 6-1
 Communication data types and formats 6-1
 Communication data storage memory 6-1
6 - 2 Communication Data Table 6-3
 Meaning of the symbols in columns R and W 6-3
 Data related to the device 6-3
 Data related to operating status 6-4
 Data related to the instantaneous flow rate setpoint 6-7
 Data related to total flow volume 6-8
 Data related to function settings 6-9
 Data related to parameter settings 6-16
Chapter 7. Device Operation by Communication Commands 7-1
Chapter 8. Troubleshooting 8-1
 Communication failure 8-1
Chapter 9. Specifications 9-1
 RS-485 specifications 9-1

1-1
Chapter 1. Overview
1 - 1 Overview
Model F4Q (hereafter also “this device” or “the slave station”) can exchange data with host devices (master stations)
such as a PC or a PLC via RS-485 communication.
 Features
• The master station transmits read and write commands to slave stations.
• Through the reading and writing of data, the user can control this device, collect
process data, and configure device settings.
• Using RS-485 communication, up to 31 slave stations (devices like this device
that are compatible with RS-485) can be connected to a master station. Station
addresses are used to communicate with specific slave stations.
• The communication program is to be developed by the user.
• The data to be read/written can be freely selected by the data address.
• CPL (Azbil Corporation’s protocol) and Modbus RTU communication protocols
are supported. The user can select either one of the protocols.
 System configuration
Slave station
(models F4Q, F4H, etc.)
Up to 31 units
*Azbil’s model NX-SVG Smart Device Gateway, etc.
RS-485 (3-wire system)
Master station (PLC, etc.)
Converter*
LAN cable
PWR
NX-SVGN
USB
DA(+)
SG
DB(−) RS-485 CH1
RS-485
BATTERY
LINK/ACT
LAN1
FUNCTION ERROR
ID
F1 F2
RUN MOD COM NST FAIL
Handling Precautions
• Do not write data by RS-485 and by the loader at the same time.

2-1
Chapter 2. Wiring
2 - 1 RS-485 Connection
A sample connection is shown below.
Master station
DA
FG
FG
Terminating resistor
Terminating resistor Relay terminal block
Slave station
(this device, etc.)
Slave station
(this device, etc.)
Slave station
(this device, etc.)
Slave station
(this device, etc.)
Relay terminal block
Shielding
Shielding
DB
SG
DA
DB
SG
DA
DB
SG
DA
DB
SG
DA
DB
SG
FG
• Attach terminating resistors (150 Ω ±5 %, ½ W min.) to both ends of the
transmission line.
• A relay terminal block is required because this device uses a connector.
• The cable to the relay terminal block from this device must be as short as
possible.
• The frame ground must be connected to only one end of the shielded cable, not
to both ends.
Handling Precautions
• Be sure to connect the signal ground (SG) terminals to each other. Otherwise,
communication may be unreliable.

2-2
Chapter 2. Wiring
2 - 2 Terminal Layout of This Device
The terminal layout of this device is shown below.
Terminal
No. 20
Terminal
No. 11
Terminal
No. 10
Terminal
No. 1
z Connector signal table
Terminal
No.
Signal Description Notes
1DA RS-485 comm., DA
2 DB RS-485 comm., DB
3 S.GND RS-485 comm. (−)
4 AI Analog input (+) Flow rate set point (SP) input
5AO Analog output (+) Controlled flow rate (PV) or flow rate set point (SP)
output
6 A.GND Analog signal (−) Common ground for analog signals
7 P.GND 24 V DC (−) power
8 P.GND 24 V DC (−) power
9POWER (24 V) 24 V DC (+) power
10 POWER (24 V) 24 V DC (+) power
11 DO1 Digital output 1 (+) Open drain non-isolated output
12 DO2 Digital output 2 (+)
13 DO3 Digital output 3 (+)
14 D.GND Digital signal (−) Common ground for digital signals
15 DI1 Digital input 1 (+) 2-way (OPEN/GND) switching input
16 DI2 Digital input 2 (+)
17 DI3 Digital input 3 (+)
18 D.GND Digital signal (−) Common ground for digital signals
19 - Not connected
20 - Not connected
Note
• For wiring not related to the RS-485 communication line:
Digital Mass Flow Controller Model F4Q User’s Manual, CP-SP-1461E.

2-3
Chapter 2. Wiring
z Compatible connectors (all made by Japan Aviation Electronics Industry, Limited)
z Solder type
Compatible
wire
Plug Hood Clamp plate Appropriate
outer diameter
(reference)
22–30 AWG DF02P020F22A1 Hood
for EMI
shielding
Lock spring Straight
long
DF02D020A11 DF02HCLP05A φ6.5–7.0
DF02HCLP02A φ7.0–7.5
DF02HCLP01A φ7.5–8.0
DF02HCLP10A φ8.5–9.0
Hood
without
resin
coating
Lock spring Straight
long
DF02D020A22 φ11.0–12.0
Screw lock Straight
long
DF02D020A22
z Crimp type
Compatible
wire
Plug Hood Clamp plate Appropriate
outer diameter
(reference)
28 AWG DF02P020G28A1 Hood
for EMI
shielding
Lock spring Straight
long
DF02D020A11 DF02HCLP05A φ6.5–7.0
DF02HCLP02A φ7.0–7.5
DF02HCLP01A φ7.5–8.0
DF02HCLP10A φ8.5–9.0
Hood
without
resin
coating
Lock spring Straight
long
DF02D020A22 φ11.0–12.0
Screw lock Straight
long
DF02D020A22

3-1
Chapter 3. Settings
3 - 1 Communication Function Settings
Specify the following to use the communication function of this device.
Display Parameter name Settings and description Initial value Notes
C-30 Communication address setting 0: Communication function
disabled
1 to 127
0
C-31 Transfer speed selection 0: 38400 bps
1: 19200 bps
2: 9600 bps
3: 4800 bps
1
C-32 Data format selection 0:Even parity, 1 stop bit
1: No parity, 2 stop bits
0 Data bits: 8
C-33 Communication protocol 0: Modbus-RTU
1: CPL
1
C-47 Totalized flow rate
communication data format
0: First 4 digits + last 4 digits
1: Upper 16 bits + lower 16
bits
0 Total flow–related
data is read/written by
combining/separating
the upper and lower
values.
C-48 Flow rate unit (communication) 0: mL/min
1: L/min
2: m3/h
- Specifies the unit and
the number of decimal
places of fixed-point
data.
The initial value differs
according to the
model.
The unit and the
number of decimal
places set here do
not apply to the data
displayed on the panel.
C-49 Flow rate digits after the decimal
point (communication)
0 to 3 -
C-50 Totalized flow rate unit
(communication)
0: mL
1: L
2: m3
-
C-51 Totalized flow rate digits after the
decimal point (communication)
0 to 3 -

3-2
Chapter 3. Settings
3 - 2 Setup Method
The following is the procedure for specifying communication settings using the keys on the top panel of this device.
Main screen
(1)
Menu screen Function setting screen Settings editing screen
(2) (4)
(6)
(8)
(3)
(5)
(1) Press the []key several times to display the main screen.
(If the main screen is already displayed, skip this step.)
(2) Press the []key.
>> The menu screen is displayed.
(3) Press the []or []key to select [2. FUNCTION], and then press the []key.
>> The function setting screen is displayed.
(4) Press the []or []key to select the desired item and then press the []key.
>> The settings editing screen is displayed.
(5) Use the []key to select the digit to edit, and press the []or []key to
select the desired value.
(6) Press and hold the []key to finalize the setting.
>> The setting is saved at this time. Afterward, the function setting screen is
shown again.
(7) If there is another setting to change, return to step 4. If not, proceed to step 8.
(8) Press the []key twice.
>> The display returns to the main screen.
Handling Precautions
• If no key is pressed for 5 minutes, the display automatically returns to the
main screen.
• After step 5, if the [] key is pressed without pressing and holding the
[] key, the setting will not be saved and the previous setting will remain
in effect.
• If the setting of C-33 (communication protocol) is changed, this device
must be restarted in order to apply the new setting.
Note
• Settings can also be specified using the MLP-F4Q Smart Loader Package for the
F4Q digital mass flow controller.
User’s Manual for Smart Loader Package Model MLP-F4Q for Digital Mass
Flow Controller Model F4Q (CP-SP-1457E) (for details on MLP-F4Q operation)

4-1
Chapter 4. CPL Communication
4 - 1 Communication Procedure
The following is the communication procedure in its simple form:
(1) The master station sends an instruction message to slave stations specifying
the station it wishes to communicate with.
(2) The slave station receives the instruction message, and performs read or write
processing according to the content of the message.
(3) The slave station sends a message corresponding to the processing content as a
response message.
(4) The master station receives the response message.

4-2
 Overview of a CPL Frame
A message consists of the following two layers. Both the instruction message from
the master station and the response message from the slave station take this form.
• Data link layer:
This layer contains the basic information required for communication. For
example, it tells the destination of the message and the checksum information.
• Application Layer:
Data is read and written in this layer. The content of the layer varies according to
the purpose of the message.
Many slave stations
(up to 31 units)
Master station Slave station
Instruction message from
master station
Response message from
slave station
Application layer
Data link layer
Application layer
Data link layer
The driver in the data link layer has the following
information:
• The destination (the device address).
• The check sheet for the shipment (the checksum).
The application layer cargo (data)
changes every time according to
the purpose of the operation.
Details on each layer are given in the next section.
4 - 2 Message Structure

4-3
Chapter 4. CPL Communication
 Data link layer
The data link layer contains eight items of basic information necessary for
transmitting a message. The instruction message and response message have the
same structure in the data link layer.
The data link layer has a fixed length. The position of each item of data and its
length are prescribed. The position of data in the data link layer from ETX onwards
shifts according to the number of characters in the application layer, but the
number of characters does not change.
STX
Device address
Sub-address
Device code
ETX
Checksum
CR LF
02H 30H 41H 30H 30H 58H 52H 53H 2CH 31H 30H 30H 31H 57H 2CH 32H 03H 38H 41H 0DH 0AH
STX
0 A 0 0 X R S , 1 0 0 1 W , 2 ETX 8 A CR LF
Data link layer Application layer Data link layer
z STX (Start of Text)
Role : Indicates the beginning of a message.
Description: Always 02H. If this device receives “STX,” it interprets STX to be
the first character of a new instruction message, even if it occurs
in the middle of a message.
z Device address
Role : This specifies the destination station. This makes it possible to
communicate with a specific device.
Description: The hexadecimal codes for two characters. For details, see the
example below.
Example: The destination device address is “10”
(1) 10 (decimal) = 0AH (0A hexadecimal)
(2) Replacement of characters by their hexadecimal character codes
0 = 30H
A = 41H
(3) The characters “0A” (30H, 41H) obtained in step 2 are used as the
device address.
Note
• It is necessary to set the device address in advance for the slave station.
Chapter 3. Settings (p.3-1) (for details on settings)
Handling Precautions
• Note that the function of the device address differs entirely from that of the
data address in the application layer. Be sure to note the difference.
• Set a unique device address for each multi-dropped device.

4-4
Chapter 4. CPL Communication
• If “0” is set on a slave station, its RS-485 communication function will be
disabled. To enable a station to communicate, be sure to set its address to“1”
or above.
• Do not send a command addressed to device address“0”from the master
station.
z Subaddress
Description: Always the same for this device. Be sure to set the subaddress
"00" (30H, 30H), the same format as the device address.
z Device type code
Description: Only the hex character codes for "X" (58H) or "x" (78H) can be
used on this device.
z ETX (End of Text)
Role : This indicates the end of the application layer.
Description: Always 03H.
z Checksum
Role : The checksum is used to check whether the message changed due
to some problem (e.g., electrical noise) during communication.
Description: The hexadecimal codes for two characters.
· How to create a checksum
(1) Add all the values of each byte of the message from STX to
ETX.
(2) Take the two's complement of the sum.
(3) Convert the result to character codes.
Example: The instruction message described above is used in the following
example:
(1) Add all the character codes from STX to ETX.
The lowest 1 byte of the calculation result is 76H.
(2) Take the two's complement of the addition result.
The result is 8AH.
(3) Replace the characters of the result with their hexadecimal character
codes. The result is used for the checksum.
"8A" becomes 38H and 41H.
Note
• Device address (p.4-3)(for the example of conversion to character
codes)