Omron ZS User manual

Advanced Industrial Automation
» Sub-micron laser measurement
» Easy to use, integrate and operate
» Superb scalability
ZS FAMILY SERIES
The scalable measurement sensor for all surfaces

Key features
• Accurate and fast – 0.25 μm at less
than 110 μs sampling time
• One sensor fits all – stable
measurement of virtually any
material structure such as glass,
foil or rubber
• Powerful – can accurately measure
thickness, warpage and evenness
thanks to its multi-unit controller
• Smart – data storage unit for
traceability and data logging
• Easy to use – built-in user interface
and powerful, user-friendly PC
configuration tool
ZS laser displacement sensors comprise a smart,
modular and scalable family that offers a platform
approach to solve the most challenging measurement
tasks. Based on Omron CMOS technology, the ZS-L
measures at sub-micron accuracy in a fraction of a
millisecond – and virtually any texture. The ZS-L series
comes with a sensor controller, a data storage unit and
a multi-controller that coordinates up to 9 units.
It enables accurate measurement of material
thickness, evenness and warpage.
Enhanced flexibility
through smart scalability
Sensor heads ZS-LD
CMOS technology packed into an
ultra-compact sensor head.
• Wide choice of sensor head
from 20 mm to 350 mm
sensing distance
• Digital technology leads
to high immunity to noise
disturbance, allowing long
cable extension up to 22 m
• Up to IP67 protection class
• Laser class 2
Sensor
Head
20
50
80
350
40
200
130
ZS-LD350S
(long range)
ZS-LD200
ZS-LD130
ZS-LD80
ZS-LD50
ZS-LD40T
ZS-LD20T
900 x 25 µm Laser spot/beam size
2000 x 35 µm
900 x 60 µm
900 x 60 µm
900 x 100 µm
600 x 70 µm
240 µm dia.
CMOS based sensor head
Regular-reflective
models
Diffuse-reflective
models
Measuring centre
distance

Advanced Industrial Automation
SmartMonitor tool
Professional tool for
configuration, set up and
monitoring.
• Provides high-speed
simultaneous multi-channel
graphs
• Includes Excel macro for
simple analysis
• Supports documentation and
quality assurance tasks
ZS-DSU data storage unit
Fast data storage allowing easy
debugging and system set up.
• High-speed sampling rate:
150 μs
• Powerful support for logging
data using various trigger
functions
• Supports compact flash card
for extended memory
ZS-MDC multi-sensing
controller unit
Coordinates data transfer between
sensor controllers and performs
high-speed calculation for
complex measurements tasks.
• Coordinates data between
up to nine controllers
• Fast calculation of
measurements such as:
- Thickness
- Evenness
- Warpage
- 4 different tasks
- Free math
ZS-LDC sensor controller
Ensures you always have the best
measurement performance.
• Supports a wide range of
sensor heads from short range
(20 mm) to long range
(350 mm)
• High accuracy – 0.4 μm
• Fast response time – 110 μs
• USB and RS-232 port
• Intuitive set up through
built-in keypad and digital
operator
Control Operate
Measures various types of different targets, offering high accuracy on all surfaces
CMOS technology enables unique, surface-independent detection
Business Card size
Monitor Record
Up to 9 sensor controllers
Type profile inspection Wafer thickness and warping inspection Glass evenness inspection PC board height inspection
High-speed bus

Smart setting software for advanced functionality
The SmartMonitor Zero Professional software provides
a function that changes measurement levels (edge thresholds)
to reduce error caused by light penetration, enabling many
types of PCBs to be handled. The measurement level can be
increased to adjust the measurement position for peak light
reception. This function enables stable detection of PCB
surfaces. If there is insufficient light in high-speed mode,
gain settings (0 to 5) can be used to compensate.
To achieve stable sensing of PCBs, resins, black rubber, and
other light-penetrating objects, all you need to do is select the
surface type.
ZS-LD50/LD80
Stable measurements for PCBs, black resin and metal
Smart set up for
different surfaces
Direct measurement of PCB surface profile structure
Reflection signal quality is traced
during measurement. Reliable and
safe operation is ensured through
easy set up and control
Simply select your surface
type and the ZS smart
sensor concept sets all
specific parameters for
your application
Direct setting with
function keys

Advanced Industrial Automation
A New Glass Mode
Different reflections can be measured on the CMOS
Detecting transparent objects
When a light beam hits the surface of an object, a certain
amount of the light is reflected, some is transmitted through
the object and the rest is absorbed. In the case of transparent
materials such as glass, the ZS-L can obtain reflected light from
the top surface, from the middle and from the bottom section
of glass.
• Superior features for semiconductor wafer, glass and other
measurements requiring precision.
• An unprecedented stationary measurement precision
of 0.01 μm; the highest in this product class.
• Enables stable measurement of height and undulations
in transparent, coated glass on worktables. Menus let you
easily set the measurement conditions for a wide range
of glass to achieve stable measurements.
• Outstanding measurement stability and high-speed
response at submicron resolution enables measurement
of flat glass thickness during the production process.
ZS-LD20T/ZS-LD40T
The smart way to measure glass and mirror surfaces
Glass
Glass thickness
Glass gap
Set sensing directly
FUN (setting mode)
Direct setting with
function keys

Small and compact
The ZS-LDC controller is the size of a business card and is
packed with Omron’s leading-edge digital technology.
See what the sensor is doing
In RUN (measurement) mode, measured values and information
are displayed using 2 rows of 8-segment LEDs. The large LED
display improves visibility. Measurement information includes
the threshold, current, resolution, and received light amount
and is available with simple key operations. LCD screens can
be customized to change the display of desired information
to terminology that is easier to understand.
Easy to use (no programming)
In FUN (setting) mode, setting menus are displayed on the
2 rows of the LCD. The LCD’s many display capabilities provide
clear guidance for making settings. Function keys correspond
to displayed menu items and measurement conditions, and
other settings can be made intuitively. You can also easily
switch the display language. Communication with the operator
is better than ever before.
Connect directly to a PC
A USB 2.0 and RS-232C connection are provided as standard.
LVDS, a new-generation high-speed communications interface,
is used between the sensor head and controller, which is an
industry first. If the USB is used to connect to the computer,
high-speed all-digital measurement data transfer is possible.
ZS-LDC – The most compact fully digital controller
for the highest control functionality
Set sensing directly
FUN (setting mode)
Function keys and menu-
driven operation for easy
set-up. Teach-to-measure
function is also available
Connect directly
to a computer
using USB
Small and compact
controller, as small as
a business card
90 mm
60 mm
Clear 6-digit 2-line data
display measures value
against calculated one

Advanced Industrial Automation
ZS-MDC – Connect & Calculate:
Affordable multi-point sensing has never been easier
For complex applications such as measurement and inspection
of flatness, thickness, steps etc., the ZS-MDC is the ideal
answer. It can coordinate up to nine sensor controllers
in split milliseconds.
Measurement Tools
• Height measurement
• Step and gap measurement X-Y
• Thickness measurement K-(A+B)
• Flatness measurement Max-Min
• Average measurement
• Eccentricity measurement Peak to Peak
• Warpage/Evenness K+mX+nY
Multi-point measurement
(flatness of resins or metals)
ZS-MDC The support software makes
settings easy
Sensor Heads Multi-controller SmartMonitor
PC-based user software
for easy system setup,
monitoring and data logging
Processing results
USB

For optimum quality of produced goods and zero defect
production, you need highest precision and smart
measurement tools. The ZS-HL expansion of the ZS series
enables you to solve the most powerful measurement
inspection tasks.
ZS-H – The highest precision
combined with multitasking capabilities
90 mm
60 mm
• Long range sensor heads
Unique 1500 mm sensing distance
• Highest precision and linearity
0.25μm with 0.05% linearity
• Head range includes nozzle gap sensor
for leading edge inspection of moving targets
• Powerful multitasking function
4 measurement tools in one controller
When simultaneous
measurement of distance
to glass, glass thickness, gap
etc., is required in glass
measurement applications.
Setting example
Task 1: Average
Task 2: Thickness
For simultaneous
measurement of HDD surface
deflection and distance to
HDD surface.
Setting example
Task 1: Average, Average hold
Task 2: Average, Point-to-point hold
For detection of small
recesses and protrusions in
measurement location.
Setting example
Task 1: Step
For measurement of steps
in different locations with
moving sensor or
workpiece.
Setting example
Task 1: Average
Self-down trigger
Average hold
With delay
Task 2: Average
Average hold
With delay
Task 3: Calculation
(Task 2 – Task 1)
Trigger level
Delay time 1
Delay time 2
Enlarged
Simultaneous measurement and output of up to 4 features

Advanced Industrial Automation
Smart scalability ensures the optimum solution
Take advantage of the excellent scalability of the ZS family and
set up your application by choosing the ZS controller and head
that best fit your application. ZS-L and ZS-H are fully compatible
and can be mixed within a system.
Sensors Controllers Peripheral Devices
ZS-HLD Series Sensor Controllers
Multi-Controllers Data Storage
Units
Expansion I/O Units
ZS-RPDZS-HLDC
ZS-LDC
ZS-MDC ZS-DSU
High-speed Input Boards (PC)
SmartMonitor (PC)
ZS-SW_ _E V3
Parallel I/O
USB
RS-232C
Analog
NS SmartMonitor
ZS-PSW_ _E
Digital Panel Meter
Connection Cable
ZS-XC02D
Controller
ZS-HLDC
Digital Equalizer
ZS-XEQ
Flexible Long-distance Extension Cable
ZS-XC15CR/XC25CR
Digital Equalizer
ZS-XEQ
SENSOR HEAD
ZS-HLDS
1 The ZX-HLDC can be connected to a ZS-HLD/LD-series Sensor 2 Head.
2 The ZX-LDC can be connected to a ZS-LD-series Sensor Head.
ZS-series Long-distance Extension Cable
ZS-LD Series
ZS-HLDC ZS-LDC
1
2
… to the most powerful sensing application using ZS family heads, controllers, multi-controllers and data storage units.
The ZS family: The most powerful smart measurement sensor system in the industry.
From the easiest
to set up single
sensor application…
Multitask Mode
Sensing TASK1 TASK2 TASK3 TASK4
I/O Settings
Measurement
point
Filter Output
Top Operation Menu
Single Task Mode (Standard Mode)
TASK1 I/O Settings
Sensing
Filter Output
PLCs etc.

The ultimate tool for easy system set up, parameter
configuration and data logging, the SmartMonitor offers:
• Up to 9-channel data logging and display simultaneously
• Data logging intervals as short as 2 ms for precise
monitoring at critical transients
• Export to Excel files
• Comprehensive macros using filters, slope compensation,
filter median transitions, differentiation, integration, math
functions and more
ZS-SW11E
The SmartMonitor PC tool that puts you in full control
Connect directly
to a computer
using USB

Advanced Industrial Automation
Recommended Operating Environment
• SmartMonitor Zero Professional
OS: Windows 2000 or XP
CPU: Pentium III, 850 MHz or higher
(recommended: 2 GHz or higher)
Memory: 128 MB or higher
(recommended: 256 MB or higher)
Available hard disk space: 50 MB or more
Display: 800 x 600, high colour (16-bit) or higher
(recommended: 1024 x 768, true colour (32-bit) or higher)
If the recommended specifications are not used, data may
be broken in the middle or waveforms may not be displayed
properly for logging, high-speed graphs, and multi-channel
waveforms.
• SmartAnalyzer Macro Edition
This is a Microsoft Excel macro program;
Microsoft Excel 2000 or higher is required.
AnalysisLogging
Multi-channel Waveform DisplaysSensing (Light Brightness)

For full specifications and additional models please refer to the (attached) CD or www.europe.omron.com
Displacement / measurement sensors - Cat.-No. Q18E-EN-01
1
ZS family series Displacement / measurement sensors
The scalable measurement sensor
for all surfaces
Smart ZS family series offers superb dynamic sensing range for all
surfaces from black rubber to glass and mirror surfaces by simply
scaling it to your needs.
• High dynamic sensing range for all surfaces
• High resolution of 0.25 µm
• Modular and scalable platform concept for up to 9 sensors
• Easy to use, install and maintain for all user levels
• Fast response time of 110 µs
Features
The scalable platform for more flexibility
• Connect and expand up to 9 controllers
• Connect multi-calculation controller for advanced calculations like
evenness or flatness
• Connect data storage module for process-data logging
• Connect PC software for easy system set up and signal monitoring
• Sensor head with 2D-CMOS technology with high dynamic sensing
range for measuring black rubber, plastic, shiny, glass and mirror
surfaces
• Advanced application settings
• Easy reconfiguration and teaching
Measurement tools:
• Hight measurement
• Step measurement
• Thickness measurement
• Flatness measurement
• Average measurement
• Excentricity
• Warpage / Evenness
ZSH:
• Multitasking capability manages up to 4 measurement tools
in one controller
Ordering information
Sensor heads
ZS-L-series Sensor Heads
ZS-HL-series Sensor Heads
ZS-HL-series Sensor Heads (For Nozzle Gaps) also compatible with ZS-L controller
Optical system Sensing distance Beam shape Beam diameter Resolution *1
*1 No. of samples to average: 128 when set to High-precision Mode.
Model
Regular Reflective Models 20±1 mm Line beam 900 x 25 µm 0.25 µm ZS-LD20T
Spot beam 25 µm dia. ZS-LD20ST
40±2.5 mm Line beam 2000 x 35 µm ZS-LD40T
Diffuse Reflective Models 50±5 mm Line beam 900 x 60 µm 0.8 µm ZS-LD50
Spot beam 50 µm dia. ZS-LD50S
80±15 mm Line beam 900 x 60 µm 2 µm ZS-LD80
130±15 mm Line beam 600 x 70 µm 3 µm ZS-LD130
200 ±50 mm Line beam 900 x 100 µm 5 µm ZS-LD200
350 ±135 mm Spot beam 240 µm dia. 20 µm ZS-LD350S
Optical system Sensing distance Beam shape Beam diameter Resolution *1 Model
Regular Reflective Models 20 ±1 mm Line beam 1.0 mm x 20 µm 0.25 µm ZS-HLDS2T
Diffuse Reflective Models 50±5 mm 1.0 mm x 30 µm 0.25 µm ZS-HLDS5T
100±20 mm 3.5 mm x 60 µm 1 µm ZS-HLDS10
600±350 mm 16 mm x 0.3 mm 8 µm ZS-HLDS60
1500±500 mm 40 mm x 1.5 mm 500 µm ZS-HLDS150
Optical system Sensing distance Beam shape Beam diameter Resolution *1
*1 Refer to the table of ratings and specifications for details.
Model
Regular Reflective Models 10±0.5 mm Line beam 900 x 25 µm 0.25 µm ZS-LD10GT
15±0.75 mm ZS-LD15GT
ZS family series12

For full specifications and additional models please refer to the (attached) CD or www.europe.omron.com
Displacement / measurement sensors - Cat.-No. Q18E-EN-01
1
ZS family series Displacement / measurement sensors
The scalable measurement sensor
for all surfaces
Smart ZS family series offers superb dynamic sensing range for all
surfaces from black rubber to glass and mirror surfaces by simply
scaling it to your needs.
• High dynamic sensing range for all surfaces
• High resolution of 0.25 µm
• Modular and scalable platform concept for up to 9 sensors
• Easy to use, install and maintain for all user levels
• Fast response time of 110 µs
Features
The scalable platform for more flexibility
• Connect and expand up to 9 controllers
• Connect multi-calculation controller for advanced calculations like
evenness or flatness
• Connect data storage module for process-data logging
• Connect PC software for easy system set up and signal monitoring
• Sensor head with 2D-CMOS technology with high dynamic sensing
range for measuring black rubber, plastic, shiny, glass and mirror
surfaces
• Advanced application settings
• Easy reconfiguration and teaching
Measurement tools:
• Hight measurement
• Step measurement
• Thickness measurement
• Flatness measurement
• Average measurement
• Excentricity
• Warpage / Evenness
ZSH:
• Multitasking capability manages up to 4 measurement tools
in one controller
Ordering information
Sensor heads
ZS-L-series Sensor Heads
ZS-HL-series Sensor Heads
ZS-HL-series Sensor Heads (For Nozzle Gaps) also compatible with ZS-L controller
Optical system Sensing distance Beam shape Beam diameter Resolution *1
*1 No. of samples to average: 128 when set to High-precision Mode.
Model
Regular Reflective Models 20±1 mm Line beam 900 x 25 µm 0.25 µm ZS-LD20T
Spot beam 25 µm dia. ZS-LD20ST
40±2.5 mm Line beam 2000 x 35 µm ZS-LD40T
Diffuse Reflective Models 50±5 mm Line beam 900 x 60 µm 0.8 µm ZS-LD50
Spot beam 50 µm dia. ZS-LD50S
80±15 mm Line beam 900 x 60 µm 2 µm ZS-LD80
130±15 mm Line beam 600 x 70 µm 3 µm ZS-LD130
200 ±50 mm Line beam 900 x 100 µm 5 µm ZS-LD200
350 ±135 mm Spot beam 240 µm dia. 20 µm ZS-LD350S
Optical system Sensing distance Beam shape Beam diameter Resolution *1 Model
Regular Reflective Models 20 ±1 mm Line beam 1.0 mm x 20 µm 0.25 µm ZS-HLDS2T
Diffuse Reflective Models 50±5 mm 1.0 mm x 30 µm 0.25 µm ZS-HLDS5T
100±20 mm 3.5 mm x 60 µm 1 µm ZS-HLDS10
600±350 mm 16 mm x 0.3 mm 8 µm ZS-HLDS60
1500±500 mm 40 mm x 1.5 mm 500 µm ZS-HLDS150
Optical system Sensing distance Beam shape Beam diameter Resolution *1
*1 Refer to the table of ratings and specifications for details.
Model
Regular Reflective Models 10±0.5 mm Line beam 900 x 25 µm 0.25 µm ZS-LD10GT
15±0.75 mm ZS-LD15GT
ZS family series Displacement / measurement sensors
2
ZS-HL-series Sensor Controllers
ZS-L-series Sensor Controllers
Multi-Controllers
Data Storage Units
Specifications
ZS-L-series Sensor Heads
Shape Supply voltage Control outputs Model
24 VDC NPN outputs ZS-HLDC11
PNP outputs ZS-HLDC41
Shape Supply voltage Control outputs Model
24 VDC NPN outputs ZS-LDC11
PNP outputs ZS-LDC41
Shape Supply voltage Control outputs Model
24 VDC NPN outputs ZS-MDC11
PNP outputs ZS-MDC41
Shape Supply voltage Control outputs Model
24 VDC NPN outputs ZS-DSU11
PNP outputs ZS-DSU41
Item Model ZS-LD20T ZS-LD20ST ZS-LD40T ZS-LD10GT ZS-LD15GT
Applicable Controllers ZS-HLDC/LDC series
Optical system Regular
reflection
Diffuse
reflection
Regular
reflection
Diffuse
reflection
Regular
reflection
Diffuse
reflection
Regular reflection
Measuring center distance 20 mm 6.3 mm 20 mm 6.3 mm 40 mm 30 mm 10 mm 15 mm
Measuring range ±1 mm ±1 mm ±1 mm ±1 mm ±2.5 mm ±2 mm ±0.5mm ±0.75 mm
Light source Visible semiconductor laser (wavelength: 650 nm, 1 mW max., JIS Class 2)
Beam shape Line beam Spot beam Line beam
Beam diameter *1
*1 Defined as 1/e2(13.5%) of the center optical intensity at the actual measuring center distance (effective value). The beam diameter is sometimes influenced by
the ambient conditions of the workpiece, such as leaked light from the main beam.
900 x 25 µm 25 µm dia. 2,000 x 35 µm Approx. 25 x 900 µm
Linearity *2
*2 This is the error in the measured value with respect to an ideal straight line. The standard workpiece is white aluminum ceramics and glass in the regular reflection
mode. Linearity may change according to the workpiece.
±0.1%F.S.
Resolution *3
*3 This is the peak-to-peak displacement conversion value in the displacement output at the measuring center distance in high-precision mode when the number of
samples to average is set to 128 and the measuring mode is set to the high-resolution mode. The standard workpiece is white aluminum ceramics and glass in the
regular reflection mode.
0.25 µm 0.25 µm 0.4 µm 0.25 µm 0.25 µm
Temperature characteristic *4
*4 This is the value obtained at the measuring center distance when the Sensor and workpiece are fixed by an aluminum jig.
0.04% FS/°C 0.04% FS/°C 0.02% FS/°C 0.04% FS/°C
Sampling cycle 110 µs (High-speed Mode), 500 µs (Standard Mode), 2.2 ms (High-precision Mode), 4.4 ms (High-sensitivity Mode)
LED
Indicators
NEAR indica Lights near the measuring center distance, and closer than the measuring center distance inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
FAR indicator Lights near the measuring center distance, and farther than the measuring center distance inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
Operating ambient
illumination
Illumination on received light surface: 3000 lx or less (incandescent light)
Ambient temperature Operating: 0 to 50°C, Storage: -15 to 60°C (with no icing or condensation)
Ambient humidity Operating and storage: 35% to 85% (with no condensation)
Degree of protection Cable length 0.5 m: IP66, cable length 2 m: IP67 IP40
Materials Case: Aluminum die-cast, Front cover: Glass
Cable length 0.5 m, 2 m
Weight Approx. 350 g Approx. 400 g
Accessories Laser labels (1 each for JIS/EN, 3 for FDA), ferrite cores (2),
insure locks (2), instruction sheet
Laser safety labels (1 each for JIS/EN),
ferrite cores (2), insure locks (2)
Displacement / measurement sensors 13

ZS family series Displacement / measurement sensors
3
ZS-L-series Sensor Heads
ZS-HL-series Sensor Heads
Item Model ZS-LD50 ZS-LD50S ZS-LD80 ZS-LD130 ZS-LD200 ZS-LD350S
Applicable Controllers ZS-HLDC/LDC series
Optical system Diffuse
reflection
Regular
reflection
Diffuse
reflection
Regular
reflection
Diffuse
reflection
Regular
reflection
Diffuse
reflection
Regular
reflection
Diffuse
reflection
Regular
reflection
Diffuse
reflection
Measuring center distance 50 mm 47 mm 50 mm 47 mm 80 mm 78 mm 130 mm 130 mm 200 mm 200 mm 350 mm
Measuring range ±5 mm ±4 mm ±5 mm ±4 mm ±15 mm ±14 mm ±15 mm ±12 mm ±50 mm ±48 mm ±135 mm
Light source Visible semiconductor laser (wavelength: 650 nm, 1 mW max., JIS Class 2)
Beam shape Line beam Spot beam Line beam Line beam Line beam Spot beam
Beam diameter *1
*1 Defined as 1/e2 (13.5%) of the center optical intensity at the actual measuring center distance (effective value). The beam diameter is sometimes influenced by
the ambient conditions of the workpiece, such as leaked light from the main beam.
900 x 60 µm 50 µm dia. 900 x 60 µm 600 x 70 µm 900 x 100 µm 240 µm dia.
Linearity *2 ±0.1%F.S.
*2 This is the error in the measured value with respect to an ideal straight line. The standard workpiece is white aluminum ceramics and glass in the ZS-LD50/LD50S
regular reflection mode. Linearity may change according to the workpiece.
±0.1%F.S. ±0.25%
F.S.
±0.1%
F.S.
±0.25%
F.S.
±0.1%F.S.
Resolution *3
*3 This is the peak-to-peak displacement conversion value in the displacement output at the measuring center distance in high-precision mode when the number of
samples to average is set to 128 and the measuring mode is set to the high-resolution mode. The standard workpiece is white aluminum ceramics and glass in the
ZS-LD50/LD50S regular reflection mode.
0.8 µm 0.8 µm 2 µm 3 µm 5 µm 20 µm
Temperature characteristic *4
*4 This is the value obtained at the measuring center distance when the Sensor and workpiece are fixed by an aluminum jig.
0.02% FS/°C 0.02% FS/°C 0.01% FS/°C 0.02% FS/°C 0.02% FS/°C 0.04% FS/°C
Sampling cycle *5
*5 This value is obtained when the measuring mode is set to the high-speed mode.
110 µs (High-speed Mode), 500 µs (Standard Mode), 2.2 ms (High-precision Mode), 4.4 ms (High-sensitivity Mode)
LED
Indicators
NEAR indica Lights near the measuring center distance, and closer than the measuring center distance inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
FAR indicator Lights near the measuring center distance, and farther than the measuring center distance inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
Operating ambient
illumination
Illumination on received light surface: 3000 lx or less
(incandescent light)
Illumination on re-
ceived light surface:
2000 lx or less
(incandescent light)
Illumination on received light surface:
3000 lx or less (incandescent light)
Ambient temperature Operating: 0 to 50°C, Storage: -15 to 60°C (with no icing or condensation)
Ambient humidity Operating and storage: 35% to 85% (with no condensation)
Degree of protection Cable length 0.5 m: IP66, cable length 2 m: IP67
Materials Case: Aluminum die-cast, Front cover: Glass
Cable length 0.5 m, 2 m
Weight Approx. 350g
Accessories Laser labels (1 each for JIS/EN, 3 for FDA), ferrite cores (2), insure locks (2), instruction sheet
Item Model ZS-HLDS2T ZS-HLDS5T ZS-HLDS10
Applicable Controllers ZS-HLDC series
Optical system Regular
reflection
Diffuse
reflection
Regular
reflection
Diffuse
reflection
Regular
reflection
Diffuse
reflection
Measuring center distance 20 mm 5.2 mm 44 mm 50 mm 94 mm 100 mm
Measuring range ±1 mm ±1 mm ±4 mm ±5 mm ±16 mm ±20 mm
Light source Visible semiconductor laser
(wavelength: 650 nm, 1 mW max., JIS Class 2)
Beam shape Line beam
Beam diameter *1
*1 Defined as 1/e2(13.5%) of the center optical intensity at the actual measuring center distance (effective value). The beam diameter is sometimes influenced by
the ambient conditions of the workpiece, such as leaked light from the main beam.
1.0 mm x 20 µm 1.0 mm x 30 µm 3.5 mm x 60 µm
Linearity *2
*2 This is the error in the measured value with respect to an ideal straight line. Linearity may change according to the workpiece. The following options are available.
±0.05%F.S. ±0.1%F.S.
Resolution *3 0.25 µm (No. of samples to average: 256) 0.25 µm (No. of samples to average: 512) 1 µm (No. of samples to average: 64)
Temperature characteristic *4 0.01%F.S./°C
Sampling cycle 110 µs (High-speed Mode), 500 µs (Standard Mode), 2.2 µs (High-precision Mode), 4.4 µs (High-sensitivity Mode)
LED
Indicators
NEAR indica Lights near the measuring center distance, and closer than the measuring center distance inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
FAR indicator Lights near the measuring center distance, and farther than the measuring center distance inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
Operating ambient
illumination
Illumination on received light surface: 3000 lx or less (incandescent light)
Ambient temperature Operating: 0 to 50°C, Storage: -15 to 60°C (with no icing or condensation)
Ambient humidity Operating and storage: 35% to 85% (with no condensation)
Degree of protection IP64 Cable length 0.5 m: IP66, cable length 2 m: IP67
Materials Case: Aluminum die-cast, Front cover: Glass
Cable length 0.5 m, 2 m
Weight Approx. 350 g Approx. 600 g
Accessories Laser labels (1 each for JIS/EN), ferrite cores (2), insure locks (2), instruction sheet
Model Diffuse reflection Regular reflection
ZS-HLDS2T SUS block Glass
ZS-HLDS5T/HLDS10 White aluminum ceramic Glass
ZS-HLDS60/HLDS150 White aluminum ceramic ---
ZS family series Displacement / measurement sensors
4
ZS-HL/L-series Sensor Controllers
*3 This is the peak-to-peak displacement conversion value in the displacement output at the measuring center distance in high-precision mode when the number of
samples to average is set to within the graph. The maximum resolution at 250 mm is also shown for the ZS-HLDS60. The following options are available.
*4 This is the value obtained at the measuring center distance when the Sensor and workpiece are fixed by an aluminum jig.
ItemModel ZS-HLDC11/LDC11 ZS-HLDC41/LDC41
No. of samples to average 1, 2, 4, 8, 16, 32, 64, 128, 256, 512, 1,024, 2,048, or 4,096
Number of mounted Sensors 1 per Sensor Controller
External interface Connection method Serial I/O: connector, Other: pre-wired (Standard cable length: 2 m)
Serial I/O USB 2.0 1 port, Full Speed (12 Mbps max.), MINI-B
RS-232C 1 port, 115,200 bps max.
Output Judgment output HIGH/PASS/LOW 3 outputs
NPN open collector, 30 VDC, 50 mA max., residual
voltage 1.2 V max.
HIGH/PASS/LOW: 3 outputs
PNP open collector, 50 mA max., residual voltage
1.2 V max.
Linear output Selectable from 2 types of output, voltage or current (selected by slide switch on bottom).
• Voltage output: .10 to 10 V, output impedance: 40 Ω
• Current output: 4 to 20 mA, maximum load resistance: 300 Ω
Inputs Laser OFF, ZERO
reset timing, RESET
ON: Short-circuited with 0 V terminal or 1.5 V or less
OFF: Open (leakage current: 0.1 mA max.)
ON: Short-circuited to supply voltage or within 1.5 V
of supply voltage.
OFF: Open (leakage current: 0.1 mA max.)
Functions Display: Measured value, threshold value, voltage/current, received light amount,
and resolution/terminal block output *1
Sensing: Mode, gain, measurement object, head installation
Measurement point *2: Average, peak, bottom, thickness, step, and calculations
Filter: Smooth, average, and differentiation
Outputs: Scaling, various hold values, and zero reset
I/O settings: Linear (focus/correction), judgments (hysteresis and timer),
non-measurement, and bank (switching and clear) *2
System: Save, initialization, measurement information display, communications
settings, key lock, language, and data load
Task: ZS-HLDC@1: Single task or multitask (up to 4)
ZS-LDC@1: Single task
*1 Terminal block output is a function of the ZS-HLDC@1.
*2 Can be used with ZS-HLDC@1 when Multitask Mode selected.
Status indicators HIGH (orange), PASS (green), LOW (orange), LDON (green), ZERO (green), and ENABLE (green)
Segment display Main digital 8-segment red LED, 6 digits
Sub-digital 8-segment green LEDs, 6 digits
LCD 16 digits x 2 rows, Color of characters: green, Resolution per character: 5 x 8 pixel matrix
Setting inputs Setting keys Direction keys (UP, DOWN, LEFT, and RIGHT), SET key, ESC key, MENU key, and function keys (1 to 4)
Slide switch Threshold switch (2 states: High/Low), mode switch (3 states: FUN, TEACH, and RUN)
Power supply voltage 21.6 V to 26.4 VDC (including ripple)
Current consumption 0.5 A max. (when Sensor Head is connected)
Ambient temperature Operating: 0 to 50°C, Storage: -15 to +60°C (with no icing or condensation)
Ambient humidity Operating and storage: 35% to 85% (with no condensation)
Degree of protection IP 20
Weight Approx. 280 g (excluding packing materials and accessories)
Accessories Ferrite core (1), instruction sheet
Model Diffuse reflection Regular reflection
ZS-HLDS2T SUS block Glass
ZS-HLDS5T White aluminum ceramic
ZS-HLDS10/HLDS60/
HLDS150
White aluminum ceramic
ZS family series14

ZS family series Displacement / measurement sensors
3
ZS-L-series Sensor Heads
ZS-HL-series Sensor Heads
Item Model ZS-LD50 ZS-LD50S ZS-LD80 ZS-LD130 ZS-LD200 ZS-LD350S
Applicable Controllers ZS-HLDC/LDC series
Optical system Diffuse
reflection
Regular
reflection
Diffuse
reflection
Regular
reflection
Diffuse
reflection
Regular
reflection
Diffuse
reflection
Regular
reflection
Diffuse
reflection
Regular
reflection
Diffuse
reflection
Measuring center distance 50 mm 47 mm 50 mm 47 mm 80 mm 78 mm 130 mm 130 mm 200 mm 200 mm 350 mm
Measuring range ±5 mm ±4 mm ±5 mm ±4 mm ±15 mm ±14 mm ±15 mm ±12 mm ±50 mm ±48 mm ±135 mm
Light source Visible semiconductor laser (wavelength: 650 nm, 1 mW max., JIS Class 2)
Beam shape Line beam Spot beam Line beam Line beam Line beam Spot beam
Beam diameter *1
*1 Defined as 1/e2 (13.5%) of the center optical intensity at the actual measuring center distance (effective value). The beam diameter is sometimes influenced by
the ambient conditions of the workpiece, such as leaked light from the main beam.
900 x 60 µm 50 µm dia. 900 x 60 µm 600 x 70 µm 900 x 100 µm 240 µm dia.
Linearity *2 ±0.1%F.S.
*2 This is the error in the measured value with respect to an ideal straight line. The standard workpiece is white aluminum ceramics and glass in the ZS-LD50/LD50S
regular reflection mode. Linearity may change according to the workpiece.
±0.1%F.S. ±0.25%
F.S.
±0.1%
F.S.
±0.25%
F.S.
±0.1%F.S.
Resolution *3
*3 This is the peak-to-peak displacement conversion value in the displacement output at the measuring center distance in high-precision mode when the number of
samples to average is set to 128 and the measuring mode is set to the high-resolution mode. The standard workpiece is white aluminum ceramics and glass in the
ZS-LD50/LD50S regular reflection mode.
0.8 µm 0.8 µm 2 µm 3 µm 5 µm 20 µm
Temperature characteristic *4
*4 This is the value obtained at the measuring center distance when the Sensor and workpiece are fixed by an aluminum jig.
0.02% FS/°C 0.02% FS/°C 0.01% FS/°C 0.02% FS/°C 0.02% FS/°C 0.04% FS/°C
Sampling cycle *5
*5 This value is obtained when the measuring mode is set to the high-speed mode.
110 µs (High-speed Mode), 500 µs (Standard Mode), 2.2 ms (High-precision Mode), 4.4 ms (High-sensitivity Mode)
LED
Indicators
NEAR indica Lights near the measuring center distance, and closer than the measuring center distance inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
FAR indicator Lights near the measuring center distance, and farther than the measuring center distance inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
Operating ambient
illumination
Illumination on received light surface: 3000 lx or less
(incandescent light)
Illumination on re-
ceived light surface:
2000 lx or less
(incandescent light)
Illumination on received light surface:
3000 lx or less (incandescent light)
Ambient temperature Operating: 0 to 50°C, Storage: -15 to 60°C (with no icing or condensation)
Ambient humidity Operating and storage: 35% to 85% (with no condensation)
Degree of protection Cable length 0.5 m: IP66, cable length 2 m: IP67
Materials Case: Aluminum die-cast, Front cover: Glass
Cable length 0.5 m, 2 m
Weight Approx. 350g
Accessories Laser labels (1 each for JIS/EN, 3 for FDA), ferrite cores (2), insure locks (2), instruction sheet
Item Model ZS-HLDS2T ZS-HLDS5T ZS-HLDS10
Applicable Controllers ZS-HLDC series
Optical system Regular
reflection
Diffuse
reflection
Regular
reflection
Diffuse
reflection
Regular
reflection
Diffuse
reflection
Measuring center distance 20 mm 5.2 mm 44 mm 50 mm 94 mm 100 mm
Measuring range ±1 mm ±1 mm ±4 mm ±5 mm ±16 mm ±20 mm
Light source Visible semiconductor laser
(wavelength: 650 nm, 1 mW max., JIS Class 2)
Beam shape Line beam
Beam diameter *1
*1 Defined as 1/e2(13.5%) of the center optical intensity at the actual measuring center distance (effective value). The beam diameter is sometimes influenced by
the ambient conditions of the workpiece, such as leaked light from the main beam.
1.0 mm x 20 µm 1.0 mm x 30 µm 3.5 mm x 60 µm
Linearity *2
*2 This is the error in the measured value with respect to an ideal straight line. Linearity may change according to the workpiece. The following options are available.
±0.05%F.S. ±0.1%F.S.
Resolution *3 0.25 µm (No. of samples to average: 256) 0.25 µm (No. of samples to average: 512) 1 µm (No. of samples to average: 64)
Temperature characteristic *4 0.01%F.S./°C
Sampling cycle 110 µs (High-speed Mode), 500 µs (Standard Mode), 2.2 µs (High-precision Mode), 4.4 µs (High-sensitivity Mode)
LED
Indicators
NEAR indica Lights near the measuring center distance, and closer than the measuring center distance inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
FAR indicator Lights near the measuring center distance, and farther than the measuring center distance inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
Operating ambient
illumination
Illumination on received light surface: 3000 lx or less (incandescent light)
Ambient temperature Operating: 0 to 50°C, Storage: -15 to 60°C (with no icing or condensation)
Ambient humidity Operating and storage: 35% to 85% (with no condensation)
Degree of protection IP64 Cable length 0.5 m: IP66, cable length 2 m: IP67
Materials Case: Aluminum die-cast, Front cover: Glass
Cable length 0.5 m, 2 m
Weight Approx. 350 g Approx. 600 g
Accessories Laser labels (1 each for JIS/EN), ferrite cores (2), insure locks (2), instruction sheet
Model Diffuse reflection Regular reflection
ZS-HLDS2T SUS block Glass
ZS-HLDS5T/HLDS10 White aluminum ceramic Glass
ZS-HLDS60/HLDS150 White aluminum ceramic ---
ZS family series Displacement / measurement sensors
4
ZS-HL/L-series Sensor Controllers
*3 This is the peak-to-peak displacement conversion value in the displacement output at the measuring center distance in high-precision mode when the number of
samples to average is set to within the graph. The maximum resolution at 250 mm is also shown for the ZS-HLDS60. The following options are available.
*4 This is the value obtained at the measuring center distance when the Sensor and workpiece are fixed by an aluminum jig.
ItemModel ZS-HLDC11/LDC11 ZS-HLDC41/LDC41
No. of samples to average 1, 2, 4, 8, 16, 32, 64, 128, 256, 512, 1,024, 2,048, or 4,096
Number of mounted Sensors 1 per Sensor Controller
External interface Connection method Serial I/O: connector, Other: pre-wired (Standard cable length: 2 m)
Serial I/O USB 2.0 1 port, Full Speed (12 Mbps max.), MINI-B
RS-232C 1 port, 115,200 bps max.
Output Judgment output HIGH/PASS/LOW 3 outputs
NPN open collector, 30 VDC, 50 mA max., residual
voltage 1.2 V max.
HIGH/PASS/LOW: 3 outputs
PNP open collector, 50 mA max., residual voltage
1.2 V max.
Linear output Selectable from 2 types of output, voltage or current (selected by slide switch on bottom).
• Voltage output: .10 to 10 V, output impedance: 40 Ω
• Current output: 4 to 20 mA, maximum load resistance: 300 Ω
Inputs Laser OFF, ZERO
reset timing, RESET
ON: Short-circuited with 0 V terminal or 1.5 V or less
OFF: Open (leakage current: 0.1 mA max.)
ON: Short-circuited to supply voltage or within 1.5 V
of supply voltage.
OFF: Open (leakage current: 0.1 mA max.)
Functions Display: Measured value, threshold value, voltage/current, received light amount,
and resolution/terminal block output *1
Sensing: Mode, gain, measurement object, head installation
Measurement point *2: Average, peak, bottom, thickness, step, and calculations
Filter: Smooth, average, and differentiation
Outputs: Scaling, various hold values, and zero reset
I/O settings: Linear (focus/correction), judgments (hysteresis and timer),
non-measurement, and bank (switching and clear) *2
System: Save, initialization, measurement information display, communications
settings, key lock, language, and data load
Task: ZS-HLDC@1: Single task or multitask (up to 4)
ZS-LDC@1: Single task
*1 Terminal block output is a function of the ZS-HLDC@1.
*2 Can be used with ZS-HLDC@1 when Multitask Mode selected.
Status indicators HIGH (orange), PASS (green), LOW (orange), LDON (green), ZERO (green), and ENABLE (green)
Segment display Main digital 8-segment red LED, 6 digits
Sub-digital 8-segment green LEDs, 6 digits
LCD 16 digits x 2 rows, Color of characters: green, Resolution per character: 5 x 8 pixel matrix
Setting inputs Setting keys Direction keys (UP, DOWN, LEFT, and RIGHT), SET key, ESC key, MENU key, and function keys (1 to 4)
Slide switch Threshold switch (2 states: High/Low), mode switch (3 states: FUN, TEACH, and RUN)
Power supply voltage 21.6 V to 26.4 VDC (including ripple)
Current consumption 0.5 A max. (when Sensor Head is connected)
Ambient temperature Operating: 0 to 50°C, Storage: -15 to +60°C (with no icing or condensation)
Ambient humidity Operating and storage: 35% to 85% (with no condensation)
Degree of protection IP 20
Weight Approx. 280 g (excluding packing materials and accessories)
Accessories Ferrite core (1), instruction sheet
Model Diffuse reflection Regular reflection
ZS-HLDS2T SUS block Glass
ZS-HLDS5T White aluminum ceramic
ZS-HLDS10/HLDS60/
HLDS150
White aluminum ceramic
Displacement / measurement sensors 15
Displacement/measurement sensors - Cat.-No. Q18E-EN-01

KPP_ZS_01_EN_INT
Austria
Tel: [phone]
www.omron.at
Belgium
Tel: [phone]
www.omron.be
Czech Republic
Tel: [phone]
www.omron.cz
Denmark
Tel: [phone]
www.omron.dk
Finland
Tel: [phone]
www.omron.fi
France
Tel: [phone]
www.omron.fr
Germany
Tel: [phone]
www.omron.de
Hungary
Tel: [phone]
www.omron.hu
Italy
Tel: [phone]
www.omron.it
Middle East & Africa
Tel: [phone]
www.omron-industrial.com
Netherlands
Tel: [phone]
www.omron.nl
Norway
Tel: [phone]
www.omron.no
Poland
Tel: [phone]
www.omron.pl
Portugal
Tel: [phone]
www.omron.pt
Russia
Tel: [phone]
www.omron.ru
Control Systems
• Programmable logic controllers • Human-machine interfaces • Remote I/O
Motion & Drives
• Motion controllers • Servo systems • Inverters
Control Components
• Temperature controllers • Power supplies • Timers • Counters • Programmable relays
• Digital panel indicators • Electromechanical relays • Monitoring products • Solid-state relays
• Limit switches • Pushbutton switches • Low voltage switch gear
Sensing & Safety
• Photoelectric sensors • Inductive sensors • Capacitive & pressure sensors • Cable connectors
• Displacement & width-measuring sensors • Vision systems • Safety networks • Safety sensors
• Safety units/relay units • Safety door/guard lock switches
Authorised Distributor:
Although we strive for perfection, Omron Europe BV and/or its subsidiary and affiliated companies do not warrant
or make any representations regarding the correctness or completeness of the information described in this document.
We reserve the right to make any changes at any time without prior notice.
OMRON EUROPE B.V. Wegalaan 67-69, NL-2132 JD, Hoofddorp, The Netherlands. Tel: [phone] Fax: [phone] www.omron-industrial.com
Spain
Tel: [phone]
www.omron.es
Sweden
Tel: [phone]
www.omron.se
Switzerland
Tel: [phone]
www.omron.ch
Turkey
Tel: [phone]
www.omron.com.tr
United Kingdom
Tel: [phone]
www.omron.co.uk
More Omron representatives
www.omron-industrial.com